Positioning device for semiconductor target material

Abstract

The utility model provides a semiconductor target material positioning device which is used for welding a target material and a back plate, the positioning device comprises two positioning clamps which are oppositely arranged, each positioning clamp comprises a limiting main body and at least three positioning assemblies, a first limiting groove and a second limiting groove which are communicated with each other are independently formed in the opposite side surfaces of the limiting main bodies of the two positioning clamps respectively, the first limiting groove is used for clamping a target material, and the second limiting groove is used for clamping a back plate; and the at least three positioning assemblies are arranged in the circumferential direction of the first limiting groove, each positioning assembly comprises a limiting rod, the limiting rods penetrate through the limiting main body, parts of the limiting rods are located in the first limiting groove, and the limiting rods are further movably connected with the limiting main body. According to the utility model, the problem of inconsistent concentricity after the target material and the back plate are welded is solved, and the product allowance is effectively reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor welding technical field relates to the welding of semiconductor target material and backplate, especially relates to a kind of positioning device of semiconductor target material. BACKGROUND

[0002] In the preparation process of target material, brazing of target material and backplate is indispensable key step.The existing target material brazing mode involves multiple process steps to ensure the firm connection between target material and backplate.First, the welding surface of backplate blank and target material welding surface are preprocessed;Then, preheat the preprocessed backplate and target material, and lay brazing filler metal on the welding surface;Then, by heating, the brazing filler metal infiltrates the welding surface of target material and backplate, the target material is buckled to the backplate, and at the same time, pressure is applied to the surface of target material, after cooling, target material and backplate combination is completed, and target material semi-finished product assembly is obtained;Finally, the target material semi-finished product assembly is finished machining, so that the size of target material meets the process requirements.

[0003] The existing target material brazing mainly adopts semi-finished product welding mode, and after the welding of target material and backplate is completed, subsequent processing is still needed to ensure the accuracy of concentricity, the welding process is complicated, the processing allowance is increased, and the production cost is also improved.In addition, in actual operation, due to the manual operation error of workers or equipment problems, the concentricity of target material and backplate when buckling is often difficult to keep consistent, which not only affects the welding quality, but also may cause the correction work in the welding process to have negative impact on the welding effect.

[0004] Therefore, it is particularly important to design a brazing positioning jig capable of keeping the concentricity of target material and backplate consistent. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the purpose of the utility model is to provide a positioning device for semiconductor target material, which solves the problem of inconsistent concentricity after welding of target material and backplate, simplifies the welding process, effectively reduces the product allowance, and improves the production efficiency.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model provides a kind of positioning device of semiconductor target material, for the welding of target material and backplate, the positioning device includes two oppositely arranged positioning clamps, the positioning clamp includes limiting main body and at least three positioning components, the limiting main body of two positioning clamps is respectively independently opened with the first limiting slot and the second limiting slot of intercommunication on its opposite side surface, the first limiting slot is used for clamping target material, and the second limiting slot is used for clamping backplate;At least three positioning components are circumferentially arranged along the first limiting slot, and the positioning component includes a limiting rod, the limiting rod penetrates the limiting main body, and part is located in the first limiting slot, and the limiting rod is also movably connected to the limiting main body.

[0008] In the utility model, two positioning clamps are respectively placed on the two sides of target material and backplate finished product, two ends of target material are clamped into the first limiting slot of two limiting main bodies respectively, and two ends of backplate are clamped into the second limiting slot of two limiting main bodies respectively, and target material is fine-tuned using positioning component, so that the concentricity of target material and backplate is consistent after buckling, without additional processing steps, the concentricity of target material and backplate after welding can be ensured, product allowance is effectively reduced, and production efficiency is improved.

[0009] It should be noted that the shape of the first limiting slot is matched with the target material, and the shape of the second limiting slot is matched with the backplate, and the number and position of the positioning component can be adjusted according to the specific shape and concentricity requirement of the target material by those skilled in the art.

[0010] It should be further noted that the two positioning clamps are respectively arranged at the two ends of the combined workpiece formed after the buckling of target material and backplate.

[0011] As a preferred technical scheme of the utility model, one end of the limiting rod extending into the interior of the first limiting slot is provided with a fixed stopper, and the limiting rod drives the fixed stopper to move towards the direction close to or away from the center of the first limiting slot.

[0012] In the utility model, the fixed stopper is arranged at one end of the limiting rod contacting the target material, which can effectively prevent the target material from sticking to the positioning device or deforming due to heating during welding, so as to ensure the welding quality.

[0013] As a preferred technical scheme of the utility model, the fixed stopper is detachably connected to the limiting rod.

[0014] The positioning component in the utility model is convenient to install and disassemble, and can be disassembled and replaced in time when the fixed stopper is damaged, stuck or deformed, so as to ensure production efficiency.

[0015] As an optimal technical scheme of the utility model, at least three storage grooves are arranged along the circumference of the first limiting groove, the storage grooves are communicated with the first limiting groove, the storage grooves are one-to-one corresponding with the fixed stoppers and are used for accommodating the fixed stoppers.

[0016] In the utility model, the size of the storage groove is greater than or equal to the size of the fixed stopper, when the target material needs to be welded with the back plate, the fixed stopper is pushed out of the storage groove by the limiting rod to be positioned in the target material, and after the welding work is finished, the fixed stopper is pulled into the storage groove by the limiting rod to be reset.

[0017] As an optimal technical scheme of the utility model, the limiting rod is a threaded rod.

[0018] As an optimal technical scheme of the utility model, the limiting rod is a threaded rod.

[0019] As an optimal technical scheme of the utility model, at least three threaded inner holes are formed in the limiting main body, the threaded inner holes are communicated with the first limiting groove, and the limiting rod is mutually engaged with the threaded inner hole.

[0020] The limiting rod and the threaded inner hole in the limiting main body are mutually engaged, axial movement is realized, the limiting rod can be inserted into or pulled out of the first limiting groove, different sizes of target materials can be matched, and the applicability of the positioning device is improved.

[0021] As an optimal technical scheme of the utility model, the first limiting groove and the second limiting groove form a stepped groove, and the width of the first limiting groove is less than the width of the second limiting groove.

[0022] As an optimal technical scheme of the utility model, the first limiting groove and the second limiting groove are concentrically arranged.

[0023] The utility model can ensure the accuracy of the concentricity of the target material and the back plate by keeping the first limiting groove and the second limiting groove concentrically arranged, and the quality of the finished product after welding is improved.

[0024] As an optimal technical scheme of the utility model, the cross section of the limiting main body is a C-shaped structure.

[0025] Compared with the prior art, the utility model has the beneficial effects that:

[0026] The positioning device for the semiconductor target material can realize positioning and welding of the target material finished product, ensure the concentricity of processing, does not need additional processing steps, can effectively reduce the product allowance, thereby significantly reducing the production cost and improving the production efficiency, can be applied to the welding of target materials and back plates of different sizes, and has strong applicability. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A structural schematic view of a positioning device of a semiconductor target provided by one embodiment of the present application is shown.

[0028] Figure 2 A structural schematic view of a limiting main body provided by one embodiment of the present application is shown.

[0029] In the figure, 100 is a positioning clamp, 200 is a target, 300 is a back plate, 1 is a limiting main body, 11 is a first limiting groove, 12 is a second limiting groove, 13 is a storage groove, 2 is a positioning assembly, 21 is a limiting rod, 22 is a fixed stop block, and 23 is a locking screw. DETAILED DESCRIPTION

[0030] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second", and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0031] It should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "provided", "connected", and "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0032] The technical solutions of the present application will be further described below in conjunction with the drawings and through specific embodiments.

[0033] In one embodiment, the present application provides a positioning device for welding a semiconductor target, which is used for welding a target 200 and a back plate 300, as shown in Figure 1As shown, the positioning device comprises two positioning clamps 100 arranged oppositely and located at two ends of the target material 200 and the back plate 300 respectively. Figure 2 As shown, the positioning clamp 100 comprises a limiting body 1 and at least three positioning assemblies 2, the limiting body 1 is provided with a first limiting groove 11 and a second limiting groove 12 which are communicated with each other, the first limiting groove 11 is used for clamping the target material 200, and the second limiting groove 12 is used for clamping the back plate 300. The at least three positioning assemblies 2 are arranged along the circumference of the first limiting groove 11, the positioning assembly 2 comprises a limiting rod 21 which penetrates through the limiting body 1 and is movably connected with the limiting body 1, and the limiting rod 21 extends into or out of the first limiting groove 11 along the axial direction. In the application process, firstly, the two positioning clamps 100 are arranged at two sides of the combined product of the target material 200 and the back plate 300 respectively; secondly, the two ends of the target material 200 are clamped into the first limiting grooves 11 of the two limiting bodies 1 respectively, and the two ends of the back plate 300 are clamped into the second limiting grooves 12 of the two limiting bodies 1 respectively; finally, the limiting rod 21 is pushed to abut against the target material 200 for fine adjustment, so that the target material 200 and the back plate 300 are concentric and then welded; after the welding is completed, the limiting rod 21 is reset, and the target material 200 and the back plate 300 are taken out.

[0034] The limiting body 1 has good corrosion resistance and mechanical strength, and the material thereof is not limited in the utility model, and any material known by those skilled in the art can be used, for example, 304 stainless steel, so as to ensure the durability and stability of the positioning device.

[0035] The size and shape of the first limiting groove 11 and the second limiting groove 12 are not limited in the utility model, and those skilled in the art can adjust them according to the size and shape of the target material 200 and the back plate 300, so that the first limiting groove 11 matches the target material 200, the second limiting groove 12 matches the back plate 300, and different sizes of target materials 200 are matched, thereby improving the applicability of the positioning device. Meanwhile, those skilled in the art can also adjust the number and position of the positioning assembly 2 according to the specific shape and concentricity requirement of the target material 200.

[0036] In some embodiments, the first limiting groove 11 and the second limiting groove 12 form a stepped groove, and the width of the first limiting groove 11 is smaller than that of the second limiting groove 12. In the utility model, the target material 200 and the back plate 300 are processed, and the size of the back plate 300 is usually larger than that of the target material 200, so as to avoid the target material 200 from falling off and ensure the good connection between the target material 200 and the back plate 300.

[0037] Further, the first limiting groove 11 and the second limiting groove 12 are concentrically arranged, so that the concentricity accuracy of the target material 200 and the back plate 300 after buckling can be ensured, and the quality of the finished product after welding can be improved.

[0038] In some embodiments, one end of the limiting rod 21 extending into the first limiting groove 11 is provided with a fixed stop block 22, the limiting rod 21 drives the fixed stop block 22 to move towards or away from the center of the first limiting groove 11, and the fixed stop block 22 is used for fixing the target material 200. Specifically, the fixed stop block 22 is detachably connected to the limiting rod 21, so that when the fixed stop block 22 is damaged, adhered or deformed, it can be timely disassembled and replaced.

[0039] The fixed stop block 22 has good heat resistance and non-stickiness, and can effectively prevent the target material 200 from adhering or deforming due to heat during the welding process. The material of the fixed stop block 22 is not specifically limited in the utility model, and any material with heat resistance and non-stickiness known to those skilled in the art can be used, for example, polytetrafluoroethylene material can be used.

[0040] In some embodiments, at least three storage grooves 13 are further formed on the surface of the limiting body 1, the storage grooves 13 are communicated with the first limiting groove 11, the storage grooves 13 correspond to the fixed stop blocks 22 one by one, and are used for accommodating the fixed stop blocks 22. In the application process, before the target material 200 and the back plate 300 are welded, the fixed stop block 22 is pushed out of the storage groove 13 by the limiting rod 21 to fit the target material 200 for position adjustment, so that the concentricity of the target material 200 and the back plate 300 after buckling is consistent, and after the welding work is completed, the fixed stop block 22 is pulled into the storage groove 13 by the limiting rod 21 to realize resetting. In order to avoid damaging the target material 200 during positioning, the size of the fixed stop block 22 can be appropriately increased, so as to increase the contact area of the fixed stop block 22 and the target material 200.

[0041] In some embodiments, the limiting rod 21 is a threaded rod, the positioning assembly 2 further comprises a locking screw 23, and the locking screw 23 is engaged with the limiting rod 21, so as to fix the limiting rod 21 after the concentricity is found, and ensure the stability of the welding process.

[0042] Further, at least three threaded holes are formed on the limiting body 1, the threaded holes are communicated with the first limiting groove 11, and the limiting rod 21 is engaged with the threaded holes. The surface of the limiting rod 21 is provided with external threads, the limiting rod 21 is screwed into the threaded hole, and is engaged with the threaded hole, so that the limiting rod 21 moves along the axial direction.

[0043] In some embodiments, the limiting body 1 has a cross-section in a "C" type structure. In order to help the skilled in the art better understand the overall technical scheme and working process of the present application, the present application exemplarily provides a specific setting mode of the positioning assembly on the limiting body in a "C" type structure: the first limiting groove of the limiting body has a first inner cavity wall, a second inner cavity wall and a third inner cavity wall connected in sequence, and the first inner cavity wall and the third inner cavity wall are arranged opposite to each other to form a "C" type. The first inner cavity wall is provided with a first positioning assembly, the second inner cavity wall is provided with a second positioning assembly, and the third inner cavity wall is provided with a third positioning assembly. The first positioning assembly and the third positioning assembly are symmetrically arranged, and the second positioning assembly is arranged at the center of the second inner cavity wall. The first inner cavity wall is provided with a first storage groove for accommodating the fixed stop block of the first positioning assembly; the second inner cavity wall is provided with a second storage groove for accommodating the fixed stop block of the second positioning assembly; and the third inner cavity wall is provided with a third storage groove for accommodating the fixed stop block of the third positioning assembly. In the use process, before the target material is welded with the back plate, the fixed stop block is pushed out of the storage groove by the limiting rod to fit the target material for position adjustment. And the first positioning assembly and the third positioning assembly are used for limiting the width direction of the target material, and the second positioning assembly is used for limiting the length direction of the target material, so that the concentricity of the target material and the back plate after buckling is consistent, and after the welding work is finished, the fixed stop block is pulled into the storage groove by the limiting rod to realize resetting.

[0044] The applicant declares that the above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto. It should be understood by those skilled in the art that any changes or replacements within the technical scope disclosed by the present application can be easily thought out by any person skilled in the art, and all fall within the protection scope and disclosure scope of the present application.

Claims

1. A positioning device for a semiconductor target for welding of the target to a backing plate, characterized in that The positioning device comprises two oppositely arranged positioning clamps, each of which comprises a limiting body and at least three positioning components; the limiting bodies of the two positioning clamps are respectively independently provided with a first limiting groove and a second limiting groove which are in communication with each other on the opposite side surfaces thereof; the first limiting groove is used for clamping a target material, and the second limiting groove is used for clamping a back plate; the at least three positioning components are arranged along the circumference of the first limiting groove; the positioning component comprises a limiting rod which penetrates through the limiting body and is partially located in the first limiting groove; and the limiting rod is movably connected to the limiting body.

2. The positioning device of a semiconductor target according to claim 1, wherein An end of the limiting rod which extends into the first limiting groove is provided with a fixed stopper; and the limiting rod drives the fixed stopper to move towards the center of the first limiting groove or away from the center of the first limiting groove.

3. The positioning device of a semiconductor target according to claim 2, wherein The fixed stopper is detachably connected to the limiting rod.

4. The positioning device of a semiconductor target according to claim 2, wherein At least three storage grooves are arranged along the circumference of the first limiting groove; the storage grooves are in communication with the first limiting groove; the storage grooves correspond to the fixed stoppers one by one, and are used for accommodating the fixed stoppers.

5. The positioning device of a semiconductor target according to claim 1, wherein The limiting rod is a threaded rod.

6. The positioning device of a semiconductor target according to claim 5, wherein The positioning component further comprises a locking screw which is in engagement with the limiting rod.

7. The positioning device of a semiconductor target according to claim 5, wherein At least three threaded inner holes are formed in the limiting body; the threaded inner holes are in communication with the first limiting groove; and the limiting rod is in engagement with the threaded inner holes.

8. The positioning device of a semiconductor target according to claim 1, wherein The first limiting groove and the second limiting groove form a stepped groove; the width of the first limiting groove is smaller than the width of the second limiting groove.

9. The positioning device of a semiconductor target according to claim 1, wherein The first limiting groove and the second limiting groove are concentrically arranged.

10. The positioning device of a semiconductor target according to claim 1, wherein The limiting body has a "C" shaped cross section.

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