Transportation mechanism and machining equipment

Abstract

The utility model provides a conveying mechanism and machining equipment, the conveying mechanism comprises a supporting piece, a bearing piece and a reinforcing piece, and the supporting piece is movably arranged in the first direction; the bearing part extends in the first direction, the bearing part is provided with a material carrying section and a connecting section in the first direction, and the connecting section of the bearing part is rotatably and adjustably connected with the supporting part so as to adjust the levelness of the bearing part; the reinforcing piece is connected with the connecting section of the bearing piece, and the projections of the reinforcing piece and the bearing piece in the first direction have overlapped parts. When the conveying mechanism is used for conveying the graphite boat into and out of the heating furnace, the first direction takes the horizontal direction as an example, when the supporting piece moves in the first direction, the bearing piece and the reinforcing piece can be synchronously driven to move, the connecting section of the bearing piece is used for being connected with the supporting piece and the reinforcing piece, and the material carrying section of the bearing piece is used for bearing the graphite boat; and feeding the graphite boat into the heating furnace or taking the graphite boat out of the heating furnace.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of heat treatment transportation, and more particularly relates to a transportation mechanism and a processing device. BACKGROUND

[0002] In the process of using a plasma enhanced chemical vapor deposition process device, a workpiece is placed in a graphite boat, and the graphite boat carries the workpiece in and out of a heating furnace under the carrying action of a transportation mechanism.

[0003] The related technology discloses a transportation mechanism with a cantilever structure, but the structure of the transportation mechanism in the related technology is unreasonable, which causes the transportation mechanism to be easily deformed in the process, thereby affecting the transportation precision of the graphite boat. CONTENT OF THE UTILITY MODEL

[0004] The application provides a transportation mechanism which can guarantee the transportation precision of the graphite boat.

[0005] The technical scheme adopted by the application is as follows: a transportation mechanism is provided, which comprises a supporting piece, a bearing piece and a reinforcing piece, the supporting piece is movably arranged along a first direction; the bearing piece is arranged along the first direction, the bearing piece has a load-carrying section and a connecting section along the first direction, the connecting section of the bearing piece is rotatably connected with the supporting piece to adjust the levelness of the bearing piece; the reinforcing piece is connected with the connecting section of the bearing piece, and the projections of the reinforcing piece and the connecting section of the bearing piece in the first direction have an overlapping part.

[0006] Further, the bearing piece comprises a plurality of bearing rods, the plurality of bearing rods are arranged side by side along the first direction, and the bearing rods have the load-carrying section and the connecting section along the first direction.

[0007] Further, the bearing rods are made of silicon carbide material, and the connecting parts of the bearing piece are made of metal material.

[0008] Further, the bearing piece further comprises a plurality of connecting parts, the connecting parts are connected and fixed with the plurality of bearing rods, the plurality of connecting parts are arranged at intervals along the first direction, the reinforcing piece is connected with the connecting parts arranged on the connecting section, and the supporting piece is rotatably and adjustably connected with one connecting part arranged on the connecting section.

[0009] Further, a second direction is defined, the second direction is parallel to a horizontal plane and perpendicular to the first direction, and the axial direction of the rotation of the supporting piece is along the second direction.

[0010] Further, the connecting section of the bearing piece is provided with at least two connecting parts, and the supporting piece is adjustably connected with the at least two connecting parts along the second direction.

[0011] Further, the support member comprises a frame body and a connecting seat, the connecting seat is arranged at one end of the frame body along the first direction, the connecting seat is adjustably connected to the frame body along the second direction, and the connecting seat is rotatably and adjustably connected to the corresponding connecting part.

[0012] Further, the connecting seat and the frame body are both provided with strip-shaped holes along the second direction, the connecting seat and the frame body are both connected to the corresponding connecting part by screwing through the corresponding strip-shaped holes, and the frame body is provided with a jackscrew at each end along the second direction, the jackscrew is movably screwed to the frame body along the second direction, and the end of the jackscrew can support the carrier.

[0013] Further, the reinforcing member is arranged along the first direction, and the connecting segment of the reinforcing member is parallel to the connecting segment of the carrier along the first direction.

[0014] The application also provides a processing equipment, which comprises a heating furnace, a driving mechanism and the conveying mechanism as described above, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected to the support member of the conveying mechanism, and the driving mechanism can drive the support member to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction.

[0015] In the working process of the conveying mechanism for conveying the graphite boat to enter or exit the heating furnace, the first direction is taken as the horizontal direction, the support member can synchronously drive the carrier and the reinforcing member to move when the support member moves along the first direction, the connecting segment of the carrier is used for connecting the support member and the reinforcing member, and the material carrying segment of the carrier is used for carrying the graphite boat, so that the graphite boat is sent into the heating furnace or taken out of the heating furnace.

[0016] The reinforcing member is connected to the carrier, and the projections of the reinforcing member and the carrier along the first direction have an overlapping part, so that the reinforcing member can reinforce the structure of the carrier during the process that the carrier carries the graphite boat, so as to improve the bending resistance of the carrier after the carrier is subjected to the gravity of the graphite boat.

[0017] Further, the carrier and the support member are rotatably and adjustably connected, so as to adjust the levelness of the carrier, the carrier can be adjusted to be in a horizontal state after the carrier is slightly bent when carrying the graphite boat, and the material carrying segment of the carrier can be adjusted to be precisely matched with the heating furnace, so as to ensure the conveying precision of the graphite boat. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0019] Figure 1 A front view of the transport mechanism provided by the embodiments of the present application is shown in the figure.

[0020] Figure 2 A top view of the transport mechanism provided by the embodiments of the present application is shown in the figure.

[0021] Figure 3 A Figure 2 A partial enlarged view at A.

[0022] Figure 4 A Figure 2 A partial enlarged view at B.

[0023] Figure 5 A perspective view of the transport mechanism provided by the embodiments of the present application is shown in the figure.

[0024] In the figure, various reference signs are as follows:

[0025] 10, transport mechanism; 11, support; 111, frame body; 112, connecting seat; 12, bearing member; 121, material carrying section; 122, connecting section; 123, bearing rod; 124, connecting part; 1241, connecting branch; 13, reinforcing member; 14, strip-shaped hole; 15, jackscrew; 20, graphite boat. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the following will further describe the present application in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0027] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate directions or positions based on the directions or positions shown in the drawings, and are used only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0029] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0030] Please refer to Figure 1 , Figure 2 and Figure 5 , the transport mechanism 10 provided by the embodiment of the present application will be described. The transport mechanism 10 provided by the embodiment of the present application comprises a support 11, a carrier 12 and a reinforcing member 13, the support 11 is movably arranged along a first direction, the first direction is denoted as X, taking the horizontal direction as an example; the carrier 12 is arranged along the first direction, the carrier 12 has a load section 121 and a connecting section 122 along the first direction, the connecting section 122 of the carrier 12 is rotatably connected with the support 11 to adjust the levelness of the carrier 12; the reinforcing member 13 is connected with the connecting section 122 of the carrier 12, and the projections of the two in the first direction have overlapping portions.

[0031] The transport mechanism 10 provided by the embodiment of the present application is used for transporting graphite boats to and from the heating furnace, when the support 11 moves along the first direction, it can synchronously drive the carrier 12 and the reinforcing member 13 to move, the connecting section 122 of the carrier 12 is used for connecting with the support 11 and the reinforcing member 13, and the load section 121 of the carrier 12 is used for carrying the graphite boat, so as to send the graphite boat into the heating furnace or take the graphite boat out of the heating furnace.

[0032] The reinforcing member 13 is connected with the carrier 12 and has structural overlap along the first direction, so that the reinforcing member 13 can play a reinforcing role on the structure of the carrier 12 during the process of carrying the graphite boat by the carrier 12, so as to improve the bending resistance of the carrier 12 after being subjected to the gravity of the graphite boat. Specifically, the embodiment of the present application takes the reinforcing member 13 as an example, which is arranged along the first direction and is parallel to the connecting section 122 of the carrier 12 along the first direction, so that the reinforcing member 13 can play the maximum reinforcing role on the carrier 12.

[0033] Further, the bearing 12 and the support 11 are rotatably connected for adjusting the levelness of the bearing 12, so that after the bearing 12 is slightly bent when carrying the graphite boat, the bearing 12 can be adjusted to be horizontal, and the load section 121 of the bearing 12 can be adjusted to be precisely matched with the heating furnace, thereby ensuring the transportation precision of the graphite boat. The rotatable connection can be understood as adjusting the rotation of the bearing 12 relative to the support 11 as needed, and when the bearing 12 is adjusted to the required state, the bearing 12 can be fixed to maintain the state. In the embodiments of the present application, the rotatable connection is not limited, as long as it meets the requirements. For example, a telescopic member can be arranged between the support 11 and the bearing 12, and the telescopic member can be controlled to extend and shorten to control the rotation of the bearing 12 relative to the support 11 about the rotation axis.

[0034] It should be noted that in the working process of the transportation mechanism 10 for transporting the graphite boat in and out of the heating furnace, the load section 121 of the bearing 12 is in a suspended state when it is outside the heating furnace. When the graphite boat is carried, the bearing 12 is subjected to the gravity of the graphite boat and is slightly bent downward, which causes the graphite boat to deviate from the horizontal state and affects the smooth entry of the bearing 12 into the heating furnace. It can be understood that the bent bearing 12 may collide with the furnace opening when entering the heating furnace.

[0035] The embodiments of the present application can adjust the levelness by rotatably adjusting the bearing 12, which can improve the bending resistance of the bearing 12 and effectively solve the problems of transportation precision and matching precision with the heating furnace caused by bending.

[0036] In the embodiments of the present application, the bearing 12 is made of a high-temperature-resistant material to withstand the temperature in the heating furnace. For example, the bearing 12 is made of silicon carbide, which has high hardness to resist deformation under stress and can withstand high temperature to ensure that it does not deform at the temperature in the heating furnace. The reinforcing member 13 can be made of metal, silicon carbide, or other materials with certain high-temperature resistance and hardness.

[0037] Please refer to Figure 2 Further, the bearing 12 in the above embodiments includes a plurality of bearing rods 123 and a plurality of connecting portions 124. The plurality of bearing rods 123 are arranged side by side along the first direction, and the connecting portions 124 connect and fix the plurality of bearing rods 123. The plurality of connecting portions 124 are arranged at intervals along the first direction.

[0038] It can be understood that the carrier 12 is integrated by a plurality of carrier rods 123 connected side by side, specifically side by side along the horizontal plane, so as to horizontally carry the graphite boat. The carrier rod 123 is made of silicon carbide material. A plurality of connecting parts 124 are distributed along the first direction at intervals, so as to connect and fix the plurality of carrier rods 123 into a structure relatively fixed whole. Of course, the carrier 12 can also be made of a large-area silicon carbide plate structure, but the cost is relatively high compared with the integrated mode of the plurality of carrier rods 123, and it is also not conducive to the connection and setting of the reinforcing member 13 and the support member 11. For example, when the large-area silicon carbide carrier 12 is connected with the reinforcing member 13, it is generally necessary to punch holes in the carrier 12 and the like. However, due to the hard and brittle nature of silicon carbide material, especially in a high-temperature working environment, thermal stress concentration is easy to occur around the hole, thereby easily causing cracking. The structure of the carrier rod 123 can be conveniently assisted by a conventional connecting device to build a connection with the reinforcing member 13, without the need for punching processing of the carrier rod 123. Thus, the structure of the carrier 12 can be more stable.

[0039] In the above embodiment, the connecting part 124 is taken as an example of high-temperature-resistant metal material. Specifically, the connecting part 124 includes two connecting branches 1241. The two connecting branches 1241 are connected by screws. The plurality of carrier rods 123 are arranged between the two connecting branches 1241 and gradually connected and fastened by the screws, so as to generate sufficient clamping force on the plurality of carrier rods 123, thereby achieving the fixing effect of the plurality of carrier rods 123. Of course, the connecting part 124 can also adopt other ways to connect and fix the plurality of carrier rods 123, which can meet the fixing and connecting effect of the plurality of carrier rods 123.

[0040] Please refer to Figure 1 and Figure 2 Further, in the above embodiment, the reinforcing member 13 is connected with the connecting part 124 provided on the connecting section 122. The connecting part 124 is connected with the reinforcing member 13 and the support member 11, which is conducive to the optimization of the structure and saves additional connection settings. The connection can be direct connection or indirect connection by an intermediate member, which can meet the relative functional requirements of the carrier 12.

[0041] The connecting section 122 of the carrier 12 is provided with at least two connecting parts 124. Each connecting part 124 of the connecting section 122 corresponding to the reinforcing member 13 is connected and fixed, so as to ensure the fixing effect of the reinforcing member 13 and the carrier 12. Further, the support member 11 is rotatably connected with one connecting part 124 provided on the connecting section 122, so as to optimize the structure of the connection. Of course, the support member 11 can also be rotatably connected with the carrier 12.

[0042] Specifically, in the embodiment of the application, one end of the support member 11 in the first direction is rotatably connected with a connecting portion 124 of the connecting section 122, and the other end of the support member 11 in the first direction is adjustably arranged close to or away from another connecting portion 124 of the connecting section 122, so as to adjust the rotation of the bearing member 12 relative to the support member 11, wherein both ends of the support member 11 in the first direction are connected with the connecting portions 124, so as to help optimize the structure of the connection and reduce the connection cost.

[0043] Please refer to Figure 2 Further, a second direction, denoted as Y, is defined, which is parallel to the horizontal plane and perpendicular to the first direction, and the axial direction of the rotation of the support member 11 is along the second direction; and the at least two connecting portions 124 of the support member 11 corresponding to the bearing member 12 are adjustably connected along the second direction.

[0044] It can be understood that the position adjustment of the bearing member 12 in the first direction can be achieved by moving the support member 11, and the position adjustment of the bearing member 12 in the second direction can be achieved by adjusting the movement of the bearing member 12 relative to the support member 11 in the second direction, so as to adjust the bearing member 12 in the horizontal direction, so as to facilitate the accurate matching of the heating furnace.

[0045] Further, the support member 11 of the above embodiment can include a frame body 111 and a connecting seat 112, the connecting seat 112 is arranged at one end of the frame body 111 in the first direction, the connecting seat 112 is adjustably connected to the frame body 111 along the second direction, and the connecting seat 112 is rotatably adjustably connected with the corresponding connecting portion 124; the other end of the frame body 111 in the first direction is adjustably connected with another connecting portion 124 of the connecting section 122 corresponding to the bearing member 12 along the second direction.

[0046] It can be understood that the connecting seat 112 is used as an intermediate piece for indirect connection between the support member 11 and the corresponding rotatably connected connecting portion 124, that is, the connecting seat 112 is adjustably arranged at one end of the frame body 111 of the support member 11 in the first direction along the second direction, and the connecting seat 112 is rotatably connected with the corresponding connecting portion 124. In this way, the rotation of the bearing member 12 relative to the support member 11 can be realized, and the movement adjustment of the bearing member 12 relative to the support member 11 in the second direction can also be realized. The other end of the frame body 111 in the first direction is adjustably connected with another connecting portion 124 of the connecting section 122 corresponding to the bearing member 12 along the second direction, which is used to cooperate with the adjustably arranged connecting seat 112 on the frame body 111 of the support member 11 along the second direction, so that both ends of the support member 11 in the first direction can be connected with the bearing member 12, so as to balance the structure stress of the support member 11 and the bearing member 12 when the bearing member 12 moves in the second direction, and avoid the single-point stress being too large to cause jamming and bring large resistance to the adjustment.

[0047] Please refer to Figures 2 to 4Specifically, the connecting seat 112 and the frame body 111 are both provided with a strip-shaped hole 14 along the second direction, and the connecting seat 112 and the frame body 111 are both connected to the corresponding connecting part 124 by screwing through the corresponding strip-shaped hole 14; the frame body 111 is provided with a jackscrew 15 at both ends along the second direction, the jackscrew 15 is movably screwed to the frame body 111 along the second direction, and the end of the jackscrew 15 can top-hold the carrier 12.

[0048] The embodiment of the present application specifically takes the strip-shaped hole 14 cooperating with the screw as the connecting mode of the carrier 12 relative to the support 11 along the second direction, and after the corresponding screws are all loosened, the carrier 12 and the support 11 are in a relative movable state along the second direction, at this time, according to the adjustment requirement of the moving direction, the jackscrew 15 at one end side is fed for adjustment, and the jackscrew 15 at the other end side is retreated for adjustment, so as to adjust the moving carrier 12, and when the adjustment is in place, the screws are tightened, of course, at this time, the jackscrews 15 at both ends of the second direction can also be fixed to the carrier 12 by jacking the carrier 12.

[0049] The embodiment of the present application also provides a processing equipment (not shown in the figure), which comprises a heating furnace (not shown in the figure), a driving mechanism (not shown in the figure) and the conveying mechanism 10 in any of the above embodiments, the furnace opening of the heating furnace (not shown in the figure) is opened along the first direction, the driving mechanism (not shown in the figure) is drivingly connected with the support 11 of the conveying mechanism 10, and the driving mechanism (not shown in the figure) can drive the support 11 to move along the first direction, so as to synchronously drive the carrier 12 to enter and exit the heating furnace (not shown in the figure) from the furnace opening of the heating furnace (not shown in the figure) along the first direction.

[0050] The processing equipment (not shown in the figure) of the embodiment of the present application comprises the conveying mechanism 10 in any of the above embodiments, so has the beneficial effects brought by the conveying mechanism 10 in any of the above embodiments, which will not be repeated here.

[0051] The processing equipment (not shown in the figure) provided by the embodiment of the present application has the following working principle:

[0052] When the graphite boat is placed on the bearing 12, the driving mechanism (not shown in the figure) drives the support 11 to move in the first direction, so that the bearing 12 carrying the graphite boat enters the heating furnace (not shown in the figure) from the furnace opening of the heating furnace (not shown in the figure). The bearing 12 can be moved out after the graphite boat is placed in the furnace, and then the bearing 12 is moved in again to take out the graphite boat after the heating process is completed. Alternatively, the bearing 12 and the graphite boat can undergo heat treatment together, and then be moved out together after the heat treatment is completed. After the graphite boat is taken out, a new graphite boat to be heat treated is placed in the bearing 12, and the process is repeated. If the bearing 12 is bent due to the weight of the graphite boat, the bearing 12 can be adjusted to rotate relative to the support 11, so as to ensure accurate entry and exit of the heating furnace (not shown in the figure), and to ensure the levelness of the graphite boat.

[0053] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A transport mechanism, characterized by, The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction. The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction. The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction. The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction. The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction.

2. The transport mechanism of claim 1, wherein, The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction.

3. The transport mechanism of claim 2, wherein, The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction.

4. The transport mechanism of claim 2, wherein, The processing device comprises a heating furnace, a driving mechanism and the conveying mechanism as claimed in any one of claims 1-9, the furnace opening of the heating furnace is opened along the first direction, the driving mechanism is drivingly connected with the support of the conveying mechanism, and the driving mechanism can drive the support to move along the first direction, so as to synchronously drive the carrier to enter or exit the heating furnace from the furnace opening of the heating furnace along the first direction.

5. The transport mechanism of claim 4, wherein, ​ ​ 6. The transport mechanism of claim 5, wherein, ​ 7. The transport mechanism of claim 6, wherein, ​ ​ 8. The transport mechanism of claim 7, wherein, ​ ​ 9. The transport mechanism of any one of claims 1-8, wherein, ​ 10. A processing apparatus characterized by comprising: ​

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