Flexible pressure sensor

Abstract

The utility model discloses a flexible pressure sensor. The flexible pressure sensor comprises a sensing part and a driving circuit. The sensing part comprises a base material, a sealing material, positive and negative sensing electrodes and an internal resistance element; the driving circuit is sequentially connected with an external power supply, an external resistor, an operational amplifier, an analog-digital converter and a micro-control unit. The flexible pressure sensor provided by the utility model can be connected to a circuit in sequence according to the stress condition, and the pressure value and the change trend are calculated through the micro-control unit, so that high-precision and multi-section pressure detection is realized, the limitation of a traditional pressure sensor in the aspects of flexibility, precision and multi-section pressure detection is solved, and the flexibility, the accuracy and the multi-section pressure detection are improved. The device has the advantages that the pressure detection precision and resolution are improved, multi-section pressure measurement is realized, and the bent surface pressure measurement requirement is met.

Description

TECHNICAL FIELD

[0001] The utility model relates to sensor technical field especially relates to a flexible pressure sensor. BACKGROUND

[0002] In the current sensor technology field, pressure sensors are widely used in various scenarios. However, traditional pressure sensors have significant limitations in flexibility, accuracy of pressure detection, and multi-section pressure detection. Many traditional pressure sensors use a single sensing element, which can only provide a single pressure threshold value, making it difficult to accurately distinguish and measure pressure in different size ranges. This design is particularly unsuitable for applications that require flexibility, such as wearable devices, where traditional rigid sensors may affect the comfort and effectiveness of wearing.

[0003] With the rapid development of flexible electronics technology, the market demand for sensors that can conform to different shaped surfaces, withstand a certain degree of deformation, and accurately measure pressure is growing. However, existing technologies still face many challenges in achieving high resolution and multi-section pressure measurement. This is particularly difficult in scenarios that require accurate pressure information, such as pressure monitoring in medical devices, tactile feedback in precision robots, and other applications.

[0004] In addition, existing sensors often need to be designed with corresponding structures and matching circuits for specific application scenarios. Some sensor structures are complex and bulky, while others have stability and precision issues. More problematic is that the performance of these sensors fluctuates significantly with changes in environmental temperature and humidity, affecting the reliability and consistency of measurements.

[0005] In complex pressure change environments, traditional sensors cannot accurately feedback the size and trend of pressure changes, which severely limits their application in dynamic pressure monitoring and precision control fields. In addition, the lack of flexibility in traditional pressure sensors makes it difficult to adapt to pressure measurement requirements on curved or irregular surfaces, creating application bottlenecks in emerging fields such as human-computer interaction and soft robots.

[0006] To address the above problems, existing technologies need to be improved. INVENTION CONTENTS

[0007] To solve at least one problem existing in the prior art described above, the present application provides a flexible pressure sensor, which comprises a sensing part and a driving circuit.

[0008] The sensing part comprises:

[0009] The base material and the sealing material serve as an attachment layer of semi-conductive material for isolating the outside world.

[0010] Positive and negative induction electrodes, composed of conductive material, can adjust their flexibility, size, spacing and shape according to application requirements;

[0011] Internal resistance elements, composed of semi-conductive material, are located between the positive and negative induction electrodes, and the upper and lower electrodes are in contact through the semi-conductive material to form a conduction path; wherein the internal resistance elements include long contact resistance, medium contact resistance and short contact resistance, the contact lengths of the long contact resistance, the medium contact resistance and the short contact resistance are different; and the plurality of internal resistance elements can be connected to the circuit in sequence according to the deformation of the flexible pressure sensor under pressure and in turn connected to the circuit in sequence, and the two ends of the sensing part are connected to the driving circuit to provide a voltage source;

[0012] The driving circuit is sequentially connected with:

[0013] An external power supply;

[0014] An external resistance, which together with the sensing part forms a voltage division circuit;

[0015] An operational amplifier for amplifying the analog voltage signal output by the sensing part;

[0016] An analog-to-digital converter for converting the amplified analog voltage signal into a digital voltage signal;

[0017] A micro control unit, the receiving end of which receives the digital voltage signal from the analog-to-digital converter, calculates the total resistance value of the internal resistance elements of the sensing part through the digital voltage signal and calculates the pressure value and change trend of the flexible pressure sensor according to the flexibility coefficient of the positive and negative induction electrodes; the output end of the micro control unit is in communication connection with an external device.

[0018] In the flexible pressure sensor as described above, optionally, the long contact resistance is first connected to the circuit when subjected to pressure, and provides initial pressure information through changes in its own resistance and changes in voltage division relationship.

[0019] In the flexible pressure sensor as described above, optionally, the medium contact resistance is connected to the circuit when the pressure reaches a preset threshold, and cooperates with the long contact resistance and the short contact resistance to improve the precision and resolution of pressure detection.

[0020] In the flexible pressure sensor as described above, optionally, the short contact resistance is connected to the circuit when the pressure exceeds the preset threshold, and cooperates with the long contact resistance and the medium contact resistance to cover different pressure ranges and ensure the integrity and accuracy of pressure detection.

[0021] In the flexible pressure sensor as described above, optionally, the long contact resistance, the medium contact resistance and the short contact resistance are uniformly distributed in the sensing part and are in parallel when multiple resistances are accessed.

[0022] In the flexible pressure sensor as described above, optionally, when the sensing part is subjected to pressure, the long contact resistance is first accessed to the circuit due to its longer contact, at which time the total voltage of the flexible pressure sensor is:

[0023]

[0024] wherein, Rlong is the total resistance of the long contact resistance in the sensing part, V is the voltage accessed to the driving circuit, Rext is the external resistance, Vtotal is the total voltage;

[0025] When the medium contact resistance is accessed to the circuit while the flexible pressure sensor is continuously subjected to force, the total voltage of the flexible pressure sensor is:

[0026]

[0027] wherein, Rmedium is the total resistance of the medium contact resistance in the sensing part;

[0028] When the short contact resistance is accessed to the circuit, the total voltage of the flexible pressure sensor is:

[0029]

[0030] wherein, Rshort is the total resistance of the short contact resistance in the sensing part.

[0031] In the flexible pressure sensor as described above, optionally, the positive and negative sensing electrode materials of the flexible pressure sensor are made of conductive silver paste and are made on the flexible substrate of the substrate by screen printing technology.

[0032] In the flexible pressure sensor as described above, optionally, the semiconductive material of the internal resistance element is made of a composite material of carbon nanotubes and polymers, and the resistance value of the semiconductive material is precisely controlled by adjusting the content of carbon nanotubes.

[0033] In the flexible pressure sensor as described above, optionally, for applications requiring measurement of pressure on curved surfaces, the sensing part is in a spiral or wave shape to improve flexibility and adhesion.

[0034] In the flexible pressure sensor as described above, optionally, the substrate uses medical grade silicone.

[0035] Compared with the prior art, the flexible pressure sensor provided by the application has the following beneficial effects:

[0036] 1. By internally arranging long contact resistance, medium contact resistance and short contact resistance with different contact lengths, the sensor can be sequentially connected to the circuit according to the size of the pressure, and the segmented detection of different pressure ranges can be realized. This multi-segment design can cover a wide pressure range and provide more information for different pressure stages, effectively improving the accuracy and resolution of pressure detection, so that different degrees of pressure can be more accurately perceived, and a more detailed pressure measurement solution is provided for various application scenarios that require accurate pressure information.

[0037] 2. The sensor structure design of the application has good flexibility, is suitable for application in environments that require bending, stretching or conforming to curved surfaces, such as wearable devices and flexible electronic skin, and will not affect the normal pressure measurement function due to the bending and deformation of the device, greatly expanding its use range, providing an ideal pressure sensing solution for the development of flexible electronic devices and smart wearable devices, and improving the user experience.

[0038] 3. Combined with the operational amplifier, analog-to-digital converter and micro control unit, the signal output by the sensor can be amplified, converted and accurately processed. The micro control unit can accurately determine the size and change trend of the pressure, not only realizing high-precision pressure measurement, but also deeply analyzing the measurement results to meet the needs of different application scenarios, and its communication function with external devices makes the measurement data convenient to transmit and utilize, facilitating system integration and remote monitoring.

[0039] In summary, the flexible pressure sensor provided by the application can sequentially connect to the circuit according to the stress condition, calculate the pressure value and change trend through the micro control unit, thereby realizing high-precision, multi-segment pressure detection, solving the limitations of traditional pressure sensors in flexibility, accuracy and multi-segment pressure detection, and having the advantages of improving pressure detection accuracy and resolution, realizing multi-segment pressure measurement, and adapting to the needs of curved surface pressure measurement.

[0040] The concept, specific structure and technical effects of the application will be further described below with reference to the accompanying drawings, so as to fully understand the purpose, features and effects of the application. BRIEF DESCRIPTION OF DRAWINGS

[0041] In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed in the embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0042] Figure 1 is a structural schematic diagram of one embodiment of a flexible pressure sensor of the present application;

[0043] Figure 2 is Figure 1 is a structural schematic diagram of one embodiment of a sensing portion of a flexible pressure sensor in the present application;

[0044] Figure 3 is a measured point example diagram of resistance and pressure of test data of a flexible pressure sensor of the present application.

[0045] Explanation of Reference Signs:

[0046] 1-sensing portion, 101-long contact resistance, 102-middle contact resistance, 103-short contact resistance;

[0047] 2-external resistance;

[0048] 3-operational amplifier;

[0049] 4-analog-digital converter;

[0050] 5-micro control unit. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts fall within the scope of protection of the present application.

[0052] In the description of the present application, if the term “a plurality of” appears, the meaning of “a plurality of” is at least two, for example, two, three, etc., unless there is an explicit specific limitation.

[0053] As Figure 1 shown, a flexible pressure sensor disclosed in the present application can include a sensing portion 1 and a driving circuit.

[0054] The sensing portion 1 can include a substrate and a sealing material, positive and negative sensing electrodes, and an internal resistance element.

[0055] Specifically, the substrate and sealing material are used to isolate the outside world and connect the pressure sensing area (i.e. the sensing part 1), the inner side of which needs to be kept highly flat and smooth. The positive and negative sensing electrodes, composed of conductive materials, can adjust their flexibility, size, spacing, and shape according to application requirements. The inner resistance element, composed of semi-conductive materials, is located between the positive and negative sensing electrodes and has a certain and stable conductivity. The upper and lower electrodes are in contact through the semi-conductive material, forming a conduction path.

[0056] In this embodiment, as shown in Figure 2 The inner resistance element can specifically include: long contact resistance 101, medium contact resistance 102, and short contact resistance 103, which have different contact lengths. Moreover, multiple inner resistance elements can use the force deformation of the flexible pressure sensor to conduct the circuit: according to the deformation of the flexible pressure sensor under pressure and in sequence, the two ends of the sensing part 1 can be connected to the driving circuit through the sensor interface to provide a voltage source.

[0057] Further, in the optional embodiment, the long contact resistance 101 plays a key role in solving the problem of providing initial pressure information. When the flexible pressure sensor is subjected to pressure, the long contact resistance 101 first accesses the circuit due to its longer contact. At this time, through the change of resistance and the change of voltage division relationship of the long contact resistance 101, the initial pressure information can be provided. This design enables the pressure sensor to immediately feedback the pressure information when it is initially subjected to pressure, which helps to improve the response speed and initial accuracy of pressure detection. In this embodiment, the contact length of the long contact resistance 101 can be adjusted according to actual needs to optimize its response ability to initial pressure.

[0058] The role of the medium contact resistance 102 is to access the circuit when the pressure reaches a certain threshold, which enables the sensor to provide more accurate detection in different pressure ranges. Similarly, the short contact resistance 103 accesses the circuit when the pressure exceeds the preset threshold, which, together with the long contact resistance 101 and the medium contact resistance 102, covers different pressure ranges, ensuring the integrity and accuracy of pressure detection.

[0059] As can be seen, the cooperative work of contact resistances of different lengths through the multi-section pressure detection method can distinguish and measure different sizes of pressure in detail, thereby improving the accuracy and resolution of pressure detection, enabling the sensor to achieve higher accuracy detection in different pressure ranges, cover a wider pressure range, and provide accurate measurement results in each pressure range.

[0060] The long contact resistance 101, the medium contact resistance 102, and the short contact resistance 103 can be uniformly distributed in the sensing part 1 and in parallel when multiple resistances are accessed.

[0061] Specifically, the contact of the long contact resistance 101 is longer than that of the middle contact resistance 102, and the contact of the middle contact resistance 102 is longer than that of the short contact resistance 103. When the sensing part 1 is pressed, the long contact resistance 101 is first connected to the circuit due to its longer contact, and at this time, the total voltage of the flexible pressure sensor is:

[0062]

[0063] wherein, Rlong is the total resistance of the long contact resistance in the sensing part, Vdrive is the voltage connected to the driving circuit, Rext is the external resistance, Vtotal is the total voltage.

[0064] When the flexible pressure sensor is continuously pressed, the sensing part 1 deforms to the contact of the middle contact resistance 102, and at this time, the total voltage of the flexible pressure sensor is:

[0065]

[0066] wherein, Rmiddle is the total resistance of the middle contact resistance in the sensing part.

[0067] When the force continues to increase, the sensing part 1 deforms to the contact of the short contact resistance 103, and at this time, the total voltage of the flexible pressure sensor is:

[0068]

[0069] wherein, Rshort is the total resistance of the short contact resistance in the sensing part.

[0070] The driving circuit can be connected in sequence with an external power supply, an external resistance 2, an operational amplifier 3, an analog-digital converter 4, and a micro control unit 5.

[0071] Specifically, the external power supply can be set according to specific use scenarios. The external resistor 2 and the sensing part 1 together constitute a voltage dividing circuit. Since the original signal output by the sensing part 1 can be relatively weak, the operational amplifier 3 can enhance the strength of the signal, making it easier to process and analyze subsequently, ensuring the stability and reliability of the signal during transmission, and reducing signal distortion and noise interference. The analog-to-digital converter 4 converts the amplified analog voltage signal into a digital voltage signal, which is convenient for the micro control unit 5 to process and analyze, realizing the connection of analog signals and digital systems, making the output of the sensing part 1 compatible with modern electronic control systems, and improving the accuracy and efficiency of data processing. The receiving end of the micro control unit 5 receives the digital voltage signal from the analog-to-digital converter 4, calculates the total resistance value of the internal resistance element of the sensing part 1 through the digital voltage signal, and calculates the pressure value and change trend of the flexible pressure sensor according to the flexibility coefficient of the positive and negative sensing electrodes. In this embodiment, the output end of the micro control unit 5 can be in communication connection with an external device. Optionally, the external device can be a personal terminal, a server, or a network device, etc.

[0072] In this embodiment, when different contact resistors in the sensing part 1 are accessed, they together determine the voltage distribution in the circuit, which in turn affects the size of the output voltage. This design is also an important part of calculating the voltage value corresponding to the pressure on the sensor.

[0073] For example, a 20mm rubber test head is selected for pressure testing of the flexible pressure sensor, and the experimental test data is shown in Table 1 below:

[0074]

[0075] Table 1

[0076] According to the above data, an example graph of resistance and pressure measurement points can be generated as shown in Figure 3 , which shows the curve relationship between pressure and resistance.

[0077] For another example, when the sensing part 1 is subjected to pressure , deformation occurs, and the deformation formula is: , where is the deformation coefficient of the sensing part 1 substrate. For example, when the deformation of the sensing part 1 causes eight long contact resistors 101, five middle contact resistors 102, and three short contact resistors 103 to contact, the total resistance r at this time is: . By changing the number and length of the contact resistors, the size and direction of the force acting on the sensor can be inferred.

[0078] Therefore, the amount of change in total resistance can be converted into the magnitude of external force. Different directions of force will cause different combinations of contact of contact resistances. By analyzing the distribution of contact resistances of the contacts, the direction of the force can be inferred. For example, if the long contact resistance contact is mainly contacted, it may indicate that the force direction is in a certain specific direction; if the medium contact resistance and the short contact resistance are contacted at the same time, it may indicate that the force direction is in another direction.

[0079] In an optional embodiment, the flexible pressure sensor can further include a connecting line for connecting a plurality of sensing units 1.

[0080] In an optional embodiment, the positive and negative sensing electrode materials of the flexible pressure sensor can be made on the flexible substrate of the base material using conductive silver paste through screen printing technology. The selection of such materials and manufacturing processes aims to improve the flexibility and adaptability of the sensor, ensuring that it can better conform to surfaces of various shapes and still maintain good performance in application scenarios with high flexibility requirements. Conductive silver paste as the sensing electrode material has good conductivity and flexibility, while screen printing technology provides an efficient and precise manufacturing method, allowing the electrodes to be firmly attached to the flexible substrate, thereby forming stable and reliable circuit connections. Through this technical means, the flexible pressure sensor can maintain high flexibility while still achieving accurate pressure detection, solving the limitations of traditional rigid sensors in flexible application scenarios.

[0081] Specifically, the use of conductive silver paste can ensure that the electrodes still maintain good conductivity performance under bending and deformation. Screen printing technology can precisely control the shape and thickness of the electrodes, allowing them to be evenly distributed on the flexible substrate. Further, the composition of conductive silver paste and the parameters of screen printing can be adjusted according to specific application requirements to optimize the performance of the sensor. For example, the deposition thickness of the silver paste can be controlled by adjusting the mesh size of the screen and the printing pressure, thereby affecting the resistance value and flexibility of the electrodes. As a preferred implementation, conductive silver paste can be used in combination with flexible substrate materials such as polyimide or thermoplastic polyurethane to improve the flexibility and durability of the overall structure.

[0082] In optional embodiments, the semiconductive material of the internal resistance element can be composed of a composite of carbon nanotubes and a polymer, with the resistance value of the semiconductive material precisely controlled by adjusting the content of carbon nanotubes. The composite of carbon nanotubes and a polymer can provide adjustable resistance characteristics while maintaining flexibility. The method of adjusting the content of carbon nanotubes allows the resistance value to be precisely controlled according to application requirements, thereby improving the detection accuracy and reliability of the sensor. This combination of materials not only addresses the shortcomings of traditional materials in terms of flexibility and resistance control, but also meets the demand for precise measurement of flexible pressure sensors in different pressure ranges through precise resistance value adjustment. For example, the overall resistance value of the composite material can be adjusted by changing the concentration or distribution of carbon nanotubes to meet the needs of different application scenarios. As a preferred implementation, a solution mixing method can be used to uniformly disperse carbon nanotubes in a polymer matrix, or an in-situ polymerization method can be used to embed carbon nanotubes in polymer chains to form a stable composite material. In addition, the length, diameter, and functionalization degree of carbon nanotubes can be adjusted to further optimize the resistance characteristics and flexibility of the composite material.

[0083] Further, in optional embodiments, for applications requiring measurement of curved surface pressure, the sensing part 1 can be spiral or wavy to improve flexibility and conformability. By designing the sensing part 1 to be spiral or wavy, the flexible pressure sensor can better conform to curved surfaces, improving its application effect on complex-shaped surfaces. This shape design allows the flexible pressure sensor to better adapt to the bending and deformation of the surface when subjected to external pressure, thereby achieving more accurate pressure measurement. The sensing part 1 can use medical-grade silicone as the base material, and during actual use, those skilled in the art can use mold forming technology to manufacture the medical-grade silicone into the required flexible base shape, ensuring its close fit with the sensing components. A thin layer of medical-grade silicone coating can also be formed on other flexible materials through coating or casting to enhance the flexibility and biocompatibility of the overall structure. In addition, medical-grade silicone can be used in combination with other functional materials, such as the conductive silver paste or carbon nanotube composite mentioned above, to further enhance the performance and stability of the sensor.

[0084] In summary, the present application uses internal resistance elements with different contact lengths to form a multi-segment pressure detection mechanism, thereby improving the accuracy and resolution of pressure detection. At the same time, the use of flexible substrates and sealing materials makes the sensor have good flexibility, allowing it to adapt to surfaces of different shapes and be suitable for application scenarios such as wearable devices. Through the design of the driving circuit, amplification and digital processing of the pressure signal are achieved, ensuring the stability and accuracy of the detection results.

[0085] The preferred embodiments of the present application are described above in detail with reference to the accompanying drawings, and are presented herein by way of example only, but not limitation. To the extent that the above description contains means-plus-function or step-plus-function limitations, it will be within the purview of the without the use of the word "means". The above embodiments are to be understood as a description of the present application's concepts rather than restrictive of the scope of the application. Various features and subcombinations of elements disclosed in the above description can be claimed in any combination. Each of the technical features recited above can be combined with each of the other technical features recited above, in any order, unless the combination of such technical features is known to be incompatible. The above description is presented to enable any person skilled in the art to make and use the application. Various modifications to the embodiments described above will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without the use of the inventive faculty. Thus, the present application is not intended to be limited to the embodiments described herein but is to be accorded the full scope consistent with the claims, wherein reference to an alternative set of claims can occur in the Claims section.

Claims

1. A flexible pressure sensor, characterized by, The sensor part (1) and the driving circuit are included. The sensor part (1) includes: The base material and the sealing material are used as the attachment layer of the semi-conductive material to isolate the outside world. The positive and negative sensing electrodes are made of conductive material and can adjust their flexibility, size, spacing and shape according to application requirements. The internal resistance element is made of semi-conductive material, and the internal resistance element is located between the positive and negative sensing electrodes. The upper and lower electrodes are in contact through the semi-conductive material to form a conduction path. The internal resistance element includes a long contact resistance (101), a middle contact resistance (102) and a short contact resistance (103), and the contact lengths of the long contact resistance (101), the middle contact resistance (102) and the short contact resistance (103) are different. A plurality of internal resistance elements can be used to conduct the circuit by the stress deformation of the flexible pressure sensor: according to the deformation of the flexible pressure sensor under pressure and in sequence, the circuit is sequentially connected, and the two ends of the sensor part (1) are connected to the driving circuit to provide a voltage source. The driving circuit is sequentially connected with: An external power supply; An external resistance (2) which together with the sensor part (1) forms a voltage dividing circuit; An operational amplifier (3) for amplifying the analog voltage signal output by the sensor part (1); An analog-to-digital converter (4) for converting the amplified analog voltage signal into a digital voltage signal; A micro control unit (5) which receives the digital voltage signal from the analog-to-digital converter (4) and calculates the total resistance value of the internal resistance element of the sensor part (1) through the digital voltage signal and calculates the pressure value and change trend of the flexible pressure sensor according to the flexibility coefficient of the positive and negative sensing electrodes; the output end of the micro control unit (5) is in communication connection with an external device.

2. The flexible pressure sensor of claim 1, wherein, The long contact resistance (101) first connects the circuit when it is subjected to pressure, and provides initial pressure information by changing its own resistance and the division relationship.

3. The flexible pressure sensor of claim 1, wherein, The middle contact resistance (102) connects the circuit when the pressure reaches a preset threshold, and cooperates with the long contact resistance (101) and the short contact resistance (103) to improve the precision and resolution of pressure detection.

4. The flexible pressure sensor of claim 3, wherein, The short contact resistance (103) connects the circuit when the pressure exceeds the preset threshold, and cooperates with the long contact resistance (101) and the middle contact resistance (102) to cover different pressure ranges and ensure the integrity and accuracy of pressure detection.

5. The flexible pressure sensor of claim 1, wherein, The long contact resistance (101), the middle contact resistance (102) and the short contact resistance (103) are uniformly distributed in the sensor part (1) and are in parallel state when multiple resistances are connected.

6. The flexible pressure sensor of claim 5, wherein, When the sensor part (1) is subjected to pressure, the long contact resistance (101) first connects the circuit when it is subjected to pressure, and the total voltage of the flexible pressure sensor at this time is: wherein, Rtot is the total resistance of the long contact resistance in the sensing portion, Vdrive is the voltage to the access drive circuit, Rext is the external resistance, Vtot is the total voltage; When the flexible pressure sensor is continuously stressed, the middle contact resistance (102) connects the circuit, and the total voltage of the flexible pressure sensor is: wherein Rtot is the total resistance of the middle contact resistance in the sensor section; When the short contact resistance (103) connects the circuit, the total voltage of the flexible pressure sensor is: wherein is the total resistance of the short contact resistance in the sensor portion.

7. The flexible pressure sensor of claim 1, wherein, The positive and negative sensing electrode materials of the flexible pressure sensor use conductive silver paste, which is made on the flexible substrate of the base material by screen printing technology.

8. The flexible pressure sensor of claim 1, wherein, The semiconductive material of the internal resistance element uses a composite material of carbon nanotubes and polymer, and the resistance value of the semiconductive material is precisely controlled by adjusting the content of carbon nanotubes.

9. The flexible pressure sensor of claim 1, wherein, For applications requiring measurement of pressure on curved surfaces, the sensing part (1) is in a spiral or wave shape to improve flexibility and conformability.

10. The flexible pressure sensor of claim 1, wherein, The base material uses medical-grade silica gel.

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