Double-workpiece-stage nano-imprinting equipment
By using the parallel operation mode and automatic template changing technology of the dual-stage nanoimprinting equipment, the problems of low capacity and complex template changing in the single-stage mode are solved, and efficient nanoimprinting production is achieved.
Patent Information
- Application Number
- CN202520636865.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-07
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2035-04-07
AI Technical Summary
Existing nanoimprinting equipment uses a single workpiece stage operation mode, resulting in low throughput and complex template replacement, which seriously affects equipment efficiency.
The dual workpiece stage design enables parallel operation of the workpiece stages, and the template can be automatically changed through the longitudinal and transverse transfer modules and human-machine interaction system, avoiding additional facilities and manual intervention.
This significantly increased equipment capacity, reduced template replacement time and costs, and increased equipment flexibility and efficiency.
Smart Images
Figure CN223883908U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of nanoimprint, in particular to a double workpiece table nanoimprint device. BACKGROUND
[0002] Nanoimprint technology is a high-precision and high-efficiency micro-nano manufacturing technology, which is widely used in semiconductor, optoelectronic, biological medicine and other fields. However, the existing nanoimprint device usually adopts single workpiece table operation mode, which has the following outstanding problems:
[0003] 1. Low productivity. In the single workpiece table mode, the working process of the device is as follows: the workpiece table first moves to the imprint module for imprinting operation, then moves to the glue spraying module for glue spraying operation, and finally returns to the imprint module to prepare for the next imprinting. This serial operation mode causes a lot of idle time between imprinting and glue spraying, which seriously limits the productivity of the device.
[0004] 2. Template replacement requires additional facilities: Since the single workpiece table device usually only has one imprinting module, when the imprinting template needs to be replaced, the production must be stopped and additional mechanical structure is needed to complete the replacement of the template. This not only increases the complexity of the device, but also causes production interruption, further reducing the overall efficiency of the device. CONTENT OF THE INVENTION
[0005] In order to make up for the above shortcomings, the present application provides a double workpiece table nanoimprint device, which aims to improve the problems mentioned in the above background technology.
[0006] The embodiment of the present application provides a double workpiece table nanoimprint device, which comprises a workbench, a longitudinal moving module is arranged on the workbench, a pressure imprinting station, a pre-alignment station and a glue spraying station are sequentially arranged on the workbench in a longitudinal direction, and two workpiece tables are arranged on the workbench in a transverse direction, and the two workpiece tables are arranged on the corresponding longitudinal moving modules.
[0007] In a specific embodiment, the workbench comprises a table top and a crossbeam, the crossbeam is provided with three stations corresponding to the three stations, and the crossbeam is fixedly connected with the table top.
[0008] In the above implementation process, the crossbeam is a door-shaped structure for lifting the equipment of the pressure imprinting station, the pre-alignment station and the glue spraying station.
[0009] In a specific embodiment, the pressure imprinting station comprises a pressure imprinting head module and a transverse moving module A, the transverse moving module A is arranged on the crossbeam, and the pressure imprinting head module is arranged on the sliding block of the transverse moving module A.
[0010] In the above implementation process, the pressure imprinting head module is provided with one, which is moved between the two workpiece tables by the transverse moving module A.
[0011] In a specific embodiment, the imprint head module comprises an imprint head, a UV Led curing light source, a Z axis, a template and a positioning system.
[0012] In the above implementation process, in the imprint head module of the nano-imprint device, the imprint head is driven and installed at the top of the module through the Z axis, the UV Led curing light source is integrated below the imprint head, the template is adsorbed at the bottom of the imprint head, the positioning system is arranged between the imprint head and the template through a visual sensor or a laser positioning device, and is used for real-time calibration of the position accuracy of the two, when the template is pressed on the glue, the glue curing is accelerated through the UV Led curing light source, and then the template is moved away. The mechanical linkage structure of the above imprint head and Z axis, the position layout of the UV light source and the template, and the positioning system based on visual feedback are all conventional technical means in the field of nano-imprint, and the specific implementation manners are well known to those skilled in the art, so it is not necessary to repeat them.
[0013] In a specific embodiment, the pre-positioning station comprises a camera, a light source and a sensor.
[0014] In the above implementation process, the substrate on the workpiece table below is illuminated by the light source, the camera takes a photo of the substrate, and then visual analysis is performed to obtain the position information of the substrate. The sensor is a laser ranging sensor, which is installed at a side shaft position of the camera light path and is used for detecting the height information of the substrate surface. In this embodiment, each workpiece table is correspondingly provided with a set of positioning equipment, and the moving mode of one set of equipment left and right is not adopted.
[0015] In a specific embodiment, the glue spraying station comprises a glue spraying module and a horizontal movement module B, the horizontal movement module B is installed on the corresponding cross beam, and the glue spraying module is arranged on the sliding block of the horizontal movement module B.
[0016] In the above implementation process, the function of the glue spraying module is to spray glue, and the glue spraying module is a conventional device in the field of nano-imprint, which will not be repeated here. Only one glue spraying module is arranged, which moves between the two workpiece tables through the horizontal movement module B.
[0017] In a specific embodiment, the workpiece table comprises an XYθ platform and a vacuum chuck.
[0018] In the implementation process, the XY theta platform is a conventional device in the field of nano-imprinting and automation, used for correcting the attitude and position of the substrate, and a vacuum chuck is arranged on the platform and the imprinting head, the platform is used for adsorbing and fixing the substrate, and the imprinting head is used for adsorbing the template, and it should be noted that the longitudinal moving module, the horizontal moving module A and the horizontal moving module B all adopt a conventional structure of a sliding block screw and a motor, the module and the workpiece table are mounted on the corresponding sliding blocks, the sliding blocks slide along the sliding rails, the motor drives the screw to rotate, and the linear movement is driven through the threaded connection between the screw and the sliding block, so that the switching of the workstations is realized, the horizontal moving module is used for switching the two workpiece tables, and the longitudinal moving module is used for switching the workpiece table among the three workstations.
[0019] In a specific embodiment, a man-machine interaction system is further included, and the man-machine interaction system comprises an industrial computer, a display and a keyboard and mouse.
[0020] In the implementation process, the man-machine interaction system is used for the control of the overall device by the staff.
[0021] Compared with the prior art, the beneficial effects of the application are that the left and right workpiece tables are alternately imprinted, the time for alignment and glue spraying is saved, the working mode is changed from serial to parallel, the production capacity is greatly improved, and on the other hand, the automatic replacement of the template can be realized without increasing additional settings or manual work, the time and cost for replacing the template are greatly saved, and the flexibility of the device is increased. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the application, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor.
[0023] Figure 1 is a schematic diagram of the state of the left workpiece table imprinting and the right workpiece table pre-alignment of the double workpiece table nano-imprinting device provided by the embodiments of the application;
[0024] Figure 2 is a schematic diagram of the state of the left workpiece table glue spraying and the right workpiece table imprinting of the double workpiece table nano-imprinting device provided by the embodiments of the application;
[0025] Figure 3 is a schematic diagram of the state of the old template being released onto the right workpiece table and the new template being pre-aligned at the same time;
[0026] Figure 4 is a schematic diagram of the state of the old template being removed from the right workpiece table and the new template being prepared to be adsorbed onto the imprinting head at the same time.
[0027] In the figure: 10 - workbench; 11 - table top; 12 - crossbeam; 20 - longitudinal displacement module; 30 - embossing station; 31 - embossing head module; 32 - transverse displacement module A; 40 - pre-alignment station; 50 - glue spraying station; 51 - glue spraying module; 52 - transverse displacement module B; 60 - workpiece table. DETAILED DESCRIPTION
[0028] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.
[0029] Please refer to Figures 1-4 The present application provides a double workpiece table nano-imprint device, which comprises a workbench 10, a longitudinal displacement module 20 is arranged on the workbench 10, and an embossing station 30, a pre-alignment station 40 and a glue spraying station 50 are sequentially arranged on the workbench 10 in the longitudinal direction. The workbench 10 is transversely provided with two left and right workpiece tables 60, and the two workpiece tables 60 are arranged on the corresponding longitudinal displacement modules 20 respectively. Among them, the left and right workpiece tables 60 are alternately embossed, which saves the waiting time for alignment and glue spraying, changes the serial working mode into a parallel working mode, greatly improves the production capacity, and on the other hand, the automatic replacement of the template can be realized without increasing additional settings or manual work, which greatly saves the time and cost of replacing the template and increases the flexibility of the device.
[0030] Please refer to Figures 1-4 The workbench 10 comprises a table top 11 and a crossbeam 12, the crossbeam 12 is provided with three corresponding three stations, and the crossbeam 12 is fixedly connected with the table top 11. The crossbeam 12 is a door-shaped structure, which is used for hoisting the equipment of the embossing station 30, the pre-alignment station 40 and the glue spraying station 50.
[0031] Please refer to Figures 1-4 The embossing station 30 comprises an embossing head module 31 and a transverse displacement module A 32, the transverse displacement module A 32 is arranged on the crossbeam 12, and the embossing head module 31 is arranged on the slider of the transverse displacement module A 32. One embossing head module 31 is arranged, which moves between the two workpiece tables 60 through the transverse displacement module A 32.
[0032] Please refer to Figures 1-4The imprint head module 31 comprises an imprint head, a UV Led curing light source, a Z axis, a template and a positioning system. In the imprint head module 31 of the nanoimprint device, the imprint head is driven by the Z axis and installed at the top of the module, the UV Led curing light source is integrated below the imprint head, the template is adsorbed at the bottom of the imprint head, the positioning system is arranged between the imprint head and the template through a visual sensor or a laser positioning device, used for real-time calibration of the position accuracy of the two, when the template is pressed on the glue, the UV Led curing light source is used to accelerate the curing of the glue, and then the template is removed. The mechanical linkage structure of the above-mentioned imprint head and Z axis, the position layout of the UV light source and the template, and the positioning system based on visual feedback are all conventional technical means in the field of nanoimprinting, and their specific implementation manners are well known to those skilled in the art, so they will not be described here.
[0033] Please refer to Figures 1-4 The pre-positioning station 40 comprises a camera, a light source and a sensor. The substrate on the workpiece table 60 below is illuminated by the light source, the camera takes a photo of the substrate, and then the position information of the substrate is obtained through visual analysis. The sensor is a laser ranging sensor, which is installed at the side shaft position of the camera light path and used for detecting the height information of the substrate surface. In this embodiment, each workpiece table 60 is provided with a set of positioning equipment, and the left and right movement of a set of equipment is not used.
[0034] Please refer to Figures 1-4 The glue spraying station 50 comprises a glue spraying module 51 and a horizontal movement module B52. The horizontal movement module B52 is installed on the corresponding beam 12, and the glue spraying module 51 is arranged on the sliding block of the horizontal movement module B52. The function of the glue spraying module 51 is to spray glue. The glue spraying module 51 is a conventional device in the field of nanoimprinting, which will not be described here. Only one glue spraying module 51 is provided, which moves between the two workpiece tables 60 through the horizontal movement module B52.
[0035] Please refer to Figures 1-4 The workpiece table 60 comprises an XYθ platform and a vacuum chuck. The XYθ platform is a conventional device in the fields of nanoimprinting and automation, used for correcting the attitude and position of the substrate. The vacuum chucks are arranged on the platform and the imprint head. The platform is used for adsorbing and fixing the substrate, and the imprint head is used for adsorbing the template. It should be noted that the longitudinal movement module 20, the horizontal movement module A32 and the horizontal movement module B52 all adopt the conventional structure of a sliding block screw and a motor. The module and the workpiece table 60 are installed on the corresponding sliding block, the sliding block slides along the sliding rail, the motor drives the screw to rotate, the linear movement is driven through the thread connection between the screw and the sliding block, the switching of the station is realized, the horizontal movement module is used for switching the two workpiece tables 60, and the longitudinal movement module 20 is used for switching the three stations of the workpiece table 60.
[0036] Please refer to Figures 1-4Further comprising a man-machine interaction system, the man-machine interaction system comprises an industrial computer, a display and a keyboard and mouse. The man-machine interaction system is used for the control of the overall equipment by the staff.
[0037] The working principle of the double workpiece table nanoimprint equipment is as follows: when alternately imprinting, the transmission structure or the artificial places the substrate on the vacuum chuck of the left workpiece table 60; the left workpiece table 60 moves to the pre-alignment station 40 to perform pre-alignment, and the XYθ platform also adjusts the attitude and position of the substrate accordingly to obtain the position and attitude information of the substrate; the left workpiece table 60 moves to the glue spraying station 50, and the glue spraying module 51 sprays glue at the specified position according to the pre-alignment result; at the same time, the substrate is placed on the right workpiece table 60; the left workpiece table 60 moves to the imprint head to perform accurate alignment and imprinting; the right workpiece table 60 carries the substrate to perform pre-alignment and glue spraying, and the right workpiece table 60 is consistent with the left workpiece table 60; the right and left workpiece tables 60 are alternately executed until the substrate is imprinted, in the process, the horizontal movement module A 32 and the horizontal movement module B 52 carry the imprint head module 31 and the glue spraying module 51 to move to the left or right according to the position of the workpiece table 60, and the vertical movement module 20 carries the workpiece table 60 to switch among the three stations,
[0038] When the template needs to be replaced after being used for a certain number of times, the replacement instruction is issued by the man-machine interaction system; the imprint head places the old template on the right workpiece table 60, and at the same time, the transmission device or the artificial places the new template on the left workpiece table 60; the left workpiece table 60 carrying the new template moves to the pre-alignment station 40 to perform visual alignment, and at the same time, the XYθ platform also adjusts the attitude and position of the substrate accordingly to obtain the position and attitude information of the template; the left workpiece table 60 carrying the template moves to the imprint head, the imprint head slowly contacts and vacuum adsorbs the template; at the same time, the transmission device or the artificial takes away the old template, and the right and left workpiece tables 60 are alternately imprinted, which saves the time for alignment and glue spraying and changes the serial working mode into the parallel working mode, greatly improving the production capacity. On the other hand, the automatic replacement of the template can be realized without increasing additional settings or artificial conditions, which greatly saves the time and cost of replacing the template and increases the flexibility of the equipment.
[0039] It should be noted that the present application only increases the linear module on the corresponding module, changes the working mode, and does not improve the module itself, such as the imprinting station 30, the pre-alignment station 40 and the glue spraying station 50, and the workpiece table 60 still belongs to the conventional structure of the original nanoimprint equipment. In order to facilitate the description of the working process, a brief description is made, and therefore no detailed structure display and description are made.
[0040] The above merely provides examples of the present application, and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application can have various modifications and changes. Any modified, improved or equivalent replacement, etc. within the spirit and principle of the present application shall be included in the protection scope of the present application. It should be noted that similar reference numerals and letters represent similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.
Claims
1. A dual worktable nanoimprint apparatus, characterized by, The application relates to a workbench (10) provided with longitudinal displacement modules (20), wherein the workbench (10) is longitudinally provided with, in sequence, an embossing station (30), a pre-alignment station (40) and a glue spraying station (50), and the workbench (10) is transversely provided with two workpiece tables (60), and the two workpiece tables (60) are arranged on the corresponding longitudinal displacement modules (20) respectively.
2. The dual-stage nanoimprint apparatus according to claim 1, wherein The workbench (10) comprises a table top (11) and a crossbeam (12), the crossbeam (12) is provided with three corresponding work stations, and the crossbeam (12) is fixedly connected with the table top (11).
3. The dual-stage nanoimprint apparatus according to claim 2, wherein The embossing station (30) comprises an embossing head module (31) and a transverse displacement module A (32), the transverse displacement module A (32) is arranged on the crossbeam (12), and the embossing head module (31) is arranged on a sliding block of the transverse displacement module A (32).
4. The dual-stage nanoimprint apparatus according to claim 3, wherein The embossing head module (31) comprises an embossing head, a UV Led curing light source, a Z-axis, a template and an alignment system.
5. The dual-stage nanoimprint apparatus according to claim 4, wherein The pre-alignment station (40) comprises a camera, a light source and a sensor.
6. The dual-stage nanoimprint apparatus according to claim 5, wherein The glue spraying station (50) comprises a glue spraying module (51) and a transverse displacement module B (52), the transverse displacement module B (52) is mounted on the corresponding crossbeam (12), and the glue spraying module (51) is arranged on a sliding block of the transverse displacement module B (52).
7. The dual-stage nanoimprint apparatus according to claim 6, wherein The workpiece table (60) comprises an XY theta platform and a vacuum chuck.
8. The dual-stage nanoimprint apparatus according to claim 7, wherein, The application further comprises a man-machine interaction system, which comprises an industrial computer, a display and a keyboard and mouse.