Lifting opening and closing type upper plasma treatment gas uniform supply box body structure

Abstract

The lifting opening and closing type upper plasma treatment gas uniform supply box body structure comprises a lower fixed box body fixedly arranged on a rack, wherein the lifting opening and closing type upper plasma treatment gas uniform supply box body is arranged corresponding to the lower fixed box body; the lifting opening and closing type upper plasma treatment gas uniform supply box body comprises an upper box body main body, a plasma treatment gas supply pipe is arranged on the upper box body main body, and a plasma treatment gas filter is arranged on the plasma treatment gas supply pipe; the upper vacuum treatment corresponding cavity of the upper box main body is provided with a plasma treatment gas access pipe communicated with the plasma treatment gas supply pipe, plasma treatment gas outlets are uniformly formed in the plasma treatment gas access pipe, and a plasma treatment gas uniform input type vacuum plasma treatment structure is formed.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum plasma processing technology and its using equipment, specifically, it is a kind of lifting open-close type upper plasma processing gas uniform supply box structure. BACKGROUND

[0002] Vacuum plasma processing is commonly used product surface treatment equipment, but the vacuum plasma equipment of present stage is mostly side opening equipment box door type, and the processing equipment of side opening equipment box door type generally needs to be configured to do personnel responsible for processing program, and personnel do by opening equipment box door, and the processing material of product material is loaded and the material after processing is taken out, and the manual taking and placing mode is high in cost and low in efficiency.

[0003] Therefore, it is necessary to provide a lifting open-close type upper plasma processing gas uniform supply box structure to solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a lifting open-close type upper plasma processing gas uniform supply box structure.

[0005] Technical scheme as follows:

[0006] A kind of lifting open-close type upper plasma processing gas uniform supply box structure, including the lower fixed box body of fixed setting in rack, lifting open-close type upper plasma processing gas uniform supply box body is provided with corresponding lower fixed box body;

[0007] Lifting open-close type upper plasma processing gas uniform supply box includes upper box body main part, upper box body main part is provided with plasma processing gas supply pipe, plasma processing gas supply pipe is provided with plasma processing gas filter, and the upper vacuum processing cavity of upper box body main part is provided with plasma processing gas access pipe connected with plasma processing gas supply pipe, plasma processing gas access pipe is evenly provided with plasma processing gas outlet, and forms plasma processing gas uniform input type vacuum plasma processing structure;

[0008] Plasma processing gas supply pipe is connected with external plasma processing gas supply equipment, and external plasma processing gas supply equipment is used as pump type pressure plasma processing gas supply piece, to transmit plasma processing gas to corresponding plasma processing gas supply pipe, to form stable pressure type plasma processing gas guarantee structure.

[0009] Further, the lifting open-close type upper plasma processing gas uniform supply box is provided with the fragment detection piece of material entry and exit detection on both sides, to detect whether collision damage is generated when material is loaded or taken out.

[0010] Further, the lifting opening and closing type upper plasma processing gas uniform supply box is provided with plasma material detection rods on both sides of the box, which detect whether the material is loaded or unloaded.

[0011] Further, the plasma processing gas supply pipe is further provided with a vacuum electromagnetic valve.

[0012] Further, the lifting opening and closing type upper plasma processing gas uniform supply box is further provided with an RF matcher.

[0013] Further, the rack is provided with an upper box lifting support connected with the lifting driving member, and the upper box lifting support comprises four lifting columns arranged in two groups on the two sides, and the top of the lifting columns on the two sides is respectively provided with an upper box connecting plate A and an upper box connecting plate B.

[0014] Further, one of the upper box connecting plate A and the upper box connecting plate B is connected with the lifting opening and closing type upper plasma processing gas uniform supply box through a fixed connecting rod, and the other is connected with the lifting opening and closing type upper plasma processing gas uniform supply box through a rotating table and a hinge block, so as to form a one-side movable adjustment type fool-proof opening and closing structure.

[0015] Further, the lifting opening and closing type upper plasma processing gas uniform supply box is provided with a process cavity observation window.

[0016] Compared with the prior art, the vacuum plasma processing structure of the utility model can automatically perform vacuum plasma processing on the material, reduce the occupation of human resources, and ensure the work efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 is one of the structure schematic diagrams of the utility model.

[0018] Fig. 2 is the second structure schematic diagram of the utility model.

[0019] Fig. 3 is the third structure schematic diagram of the utility model. DETAILED DESCRIPTION

[0020] Embodiment:

[0021] Please refer to Figs. 1-3The embodiment shows a lifting opening and closing type upper plasma processing gas uniform supply box structure, which comprises a rack 1, a vacuum plasma process box arranged on the rack 1, a lower fixed box 2 fixedly arranged on the rack, and a lifting opening and closing type upper plasma processing gas uniform supply box 3 corresponding to the lower fixed box 2.

[0022] The lifting opening and closing type upper plasma processing gas uniform supply box 3 is provided with a debris detection piece 35 for material in-out detection on both sides, which detects whether the material loading or unloading is damaged by collision.

[0023] The lifting opening and closing type upper plasma processing gas uniform supply box 3 is provided with a plasma material detection rod 36 on both sides, which detects whether the material loading or unloading is damaged by collision.

[0024] The plasma processing gas supply pipe 32 is connected with external plasma processing gas supply equipment, which is used as a pump type pressure plasma processing gas supply piece to transmit the plasma processing gas corresponding to the plasma processing gas supply pipe, thereby forming a stable pressure type plasma processing gas guarantee structure.

[0025] The plasma processing gas supply pipe 32 is further provided with a vacuum electromagnetic valve.

[0026] The lifting opening and closing type upper plasma processing gas uniform supply box 31 is further provided with an RF matcher 38.

[0027] The rack is provided with an upper box lifting support 5 connected with a lifting driving piece 4, which comprises four lifting columns 51 arranged in two groups on both sides, and the top of the lifting columns on both sides is respectively provided with an upper box connecting plate A 52 and an upper box connecting plate B 53.

[0028] One of the upper box connecting plate A 52 and the upper box connecting plate B 53 is connected with the lifting opening and closing type upper plasma processing gas uniform supply box through a fixed connecting plate 54, and the other is connected with the lifting opening and closing type upper plasma processing gas uniform supply box through a rotating table 55 and a hinge block 56, thereby forming a one-side movable adjustment type fool-proof opening and closing structure.

[0029] The process cavity observation window 37 is arranged on the box body 3 of the lifting opening and closing type upper plasma processing gas uniform supply.

[0030] Compared with the prior art, the utility model discloses a vacuum plasma processing structure of opening and closing bearing, can automatically carry out material vacuum plasma processing, reduces the occupation of human resources, and guarantees the industry efficiency.

[0031] For ordinary skilled person in the art, without departing from the creative concept of the utility model, a number of deformation and improvement can be made, and these all belong to the protection scope of the utility model.

Claims

1. A lift-up and lift-down type upper plasma processing gas uniform supply box structure, characterized by: The lower fixed box body is fixedly arranged on the rack, and the upper plasma processing gas uniform supply box body is arranged correspondingly to the lower fixed box body and is opened and closed in a lifting manner. The upper plasma processing gas uniform supply box body comprises an upper box body, an upper plasma processing gas supply pipe is arranged on the upper box body, a plasma processing gas filter is arranged on the upper plasma processing gas supply pipe, a plasma processing gas inlet pipe is arranged on the upper box body and is communicated with the upper plasma processing gas supply pipe, and a plurality of plasma processing gas outlets are uniformly arranged on the plasma processing gas inlet pipe, thereby forming a plasma processing gas uniform input type vacuum plasma processing structure. The upper plasma processing gas supply pipe is communicated with external plasma processing gas supply equipment, the external plasma processing gas supply equipment is used as a pump type pressure plasma processing gas supply device, plasma processing gas is transmitted through the plasma processing gas supply pipe, and a stable pressure type plasma processing gas guarantee structure is formed.

2. The lift-open type upper plasma processing gas uniform supply box structure according to claim 1, characterized in that: Fragment detection devices for material loading and unloading detection are arranged on both sides of the upper plasma processing gas uniform supply box body, and whether the material loading and unloading is damaged by collision is detected.

3. The lift-up and lift-off type upper plasma processing gas uniform supply box structure according to claim 1, characterized in that: Plasma material detection rods are arranged on both sides of the upper plasma processing gas uniform supply box body, and whether the material loading and unloading is detected.

4. The lift-open type upper plasma processing gas uniform supply box structure according to claim 1 or 3, characterized in that: A vacuum electromagnetic valve is further arranged on the upper plasma processing gas supply pipe.

5. The lift-open type upper plasma processing gas uniform supply box structure according to claim 4, characterized in that: An RF matcher is further arranged on the upper plasma processing gas uniform supply box body.

6. The lift-open type upper plasma processing gas uniform supply box structure according to claim 5, characterized in that: An upper box body lifting support connected with the lifting driving device is arranged on the rack, the upper box body lifting support comprises four lifting columns arranged in two groups on both sides, and upper box body connecting plates A and B are arranged on the top of the lifting columns on both sides.

7. The lift-open type upper plasma processing gas uniform supply box structure according to claim 6, characterized in that: One of the upper box body connecting plates A and B is connected with the upper plasma processing gas uniform supply box body through a fixed connecting rod, and the other is connected with the upper plasma processing gas uniform supply box body through a rotating table and a hinge block, thereby forming a one-side movable adjustment type fool-proof opening and closing structure.

8. The lift-open type upper plasma processing gas uniform supply box structure according to claim 7, characterized in that: A process cavity observation window is arranged on the upper plasma processing gas uniform supply box body.

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