Quick-release roller of semiconductor wafer mixing equipment

Abstract

The utility model discloses a semiconductor wafer mixing equipment quick disassembly type roller, relates to the semiconductor wafer technology field, and comprises a pedestal and a mixing barrel, the mixing barrel is arranged in the pedestal, the mixing barrel and the pedestal are provided with a support assembly, one end of the mixing barrel is provided with a baffle disc, a stirring assembly is arranged between the baffle disc and the mixing barrel, and the stirring assembly is connected with the pedestal. Positioning rods are fixedly connected to the top and the bottom of the baffle disc, positioning frames are slidably connected to the outer sides of the two positioning rods, two rotating rods drive two second bevel gears to rotate at the same time, and the two second bevel gears are engaged with two first bevel gears correspondingly; the two first bevel gears drive the two abutting frames to rotate through the two rotating columns correspondingly, the two abutting frames are adjusted to be in the horizontal state, then the baffle disc is pulled to pull out the two positioning rods from the inner sides of the two positioning frames, and therefore the baffle disc can be rapidly disassembled.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer technology, specifically a quick-release roller for semiconductor wafer mixing equipment. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits, and its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon semiconductor wafer. Cleaning solutions or polishing solutions are usually used, and mixing equipment is typically used for processing cleaning solutions and polishing solutions.

[0003] The present disclosure, CN220125950U, discloses a drum-type mixing device, including a base with a placement groove on the top surface of the base, a sliding groove on one side of the inner wall of the placement groove, and stabilizing grooves on both sides of the inner wall of the sliding groove. A mixing tank is disposed inside the placement groove. A disassembly assembly is disposed on one side of the mixing tank for disassembling the mixing tank after mixing the solution. By setting up the disassembly assembly, the mixing tank can be disassembled and cleaned after use, which facilitates cleaning of the mixing tank and avoids residues adhering to the inner wall of the mixing tank, thus affecting the next use. By setting up a snap-fit ​​groove, the snap-fit ​​groove and snap-fit ​​ring facilitate the installation and disassembly of the baffle, and make subsequent cleaning faster and cleaner. By setting up a movable plate, the mixing tank can be more easily picked up, which is more conducive to the maintenance and repair of the mixing tank.

[0004] While the above solution offers many advantages, it also has the following drawbacks: removing the baffle from the mixing tank using bolts is cumbersome and does not achieve a quick disassembly. Additionally, while the movable plate makes it easier to pick up and place the mixing tank, thus facilitating its maintenance and repair, the moving plate and locking strip provide poor support for the tank due to its weight, which can lead to instability over time. Utility Model Content

[0005] The purpose of this utility model is to provide a quick-release roller for semiconductor wafer mixing equipment, in order to solve the problems of the existing technology that uses bolts to remove the baffle from the mixing drum, which is cumbersome and does not achieve the effect of quick disassembly, and the mixing drum has a certain weight, and the moving plate and locking strip have poor support effect on the mixing drum, which will lead to instability of the mixing drum over a long period of time.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a quick-release roller for semiconductor wafer mixing equipment, comprising a base and a mixing drum, wherein the mixing drum is disposed inside the base, and a support assembly is provided between the mixing drum and the base; a baffle is provided at one end of the mixing drum, and a stirring assembly is provided between the baffle and the mixing drum; positioning rods are fixedly connected to the top and bottom of the baffle; positioning frames are slidably connected to the outer sides of the two positioning rods; the two positioning frames are fixedly connected to the top and bottom of the mixing drum; an installation groove is provided at one end of the positioning rod, and a rotating column is provided inside the installation groove; both ends of the rotating column are rotatably connected to the positioning rod; and an abutment frame is fixedly connected to the outer side of the rotating column. The abutment frame contacts one side of the positioning frame. Each of the two positioning rods has a sprocket at one end, and the two sprockets are connected by a chain drive. A rotating rod is fixedly connected to the inner side of each of the two sprockets. One end of the rotating rod passes through the outside of the positioning rod and extends into the mounting groove. A second bevel gear is fixedly connected to one end of the rotating rod. A first bevel gear is meshed with the outer side of the second bevel gear. The first bevel gear is fixedly connected to the outer side of the rotating column. A second worm gear is fixedly connected to the other end of one of the rotating rods. A second worm is meshed with the outer side of the second worm gear. An L-shaped plate is rotatably connected to the outer side of the second worm. The L-shaped plate is fixedly connected to the outer side of the baffle. A handle is installed at the bottom end of the second worm.

[0007] Preferably, an inlet pipe is installed on the top of the mixing tank, a cover plate is installed on the top of the inlet pipe, and a drain pipe is installed at the other end of the mixing tank.

[0008] Preferably, the support assembly includes two support frames and two inserts. The two support frames are fixedly connected to the bottom of the base, and the two inserts are fixedly connected to the bottom of the mixing tank. The inserts are disposed inside the support frames. A connecting groove is provided on one side of the support frame, and the connecting groove communicates with the inside of the support frame. A fixing groove is provided on one side of the insert.

[0009] Preferably, the support assembly further includes a bidirectional screw and a limiting slide rod, both of which are disposed between the two support frames. The two ends of the bidirectional screw are rotatably connected to a first support block, and the two first support blocks are respectively fixedly connected to the front side of the two support frames. The two ends of the limiting slide rod are respectively fixedly connected to a second support block, and the two second support blocks are respectively fixedly connected to the rear side of the two support frames.

[0010] Preferably, both ends of the bidirectional screw are threaded with convex insert plates. One end of the convex insert plate passes through the connecting groove and extends into the fixed groove. The convex insert plate is slidably connected to the outside of the limiting slide rod. A first worm gear is fixedly connected at the middle position of the bidirectional screw. A first worm is meshed with the outside of the first worm gear. One end of the first worm passes through the inside of the base and is rotatably connected to the base. A handwheel is installed at one end of the first worm. The two convex insert plates are arranged to lock the two inserts, which can improve the stability of the mixing tank during operation.

[0011] Preferably, the stirring assembly includes a stirring rod disposed inside a mixing tank. One end of the stirring rod is provided with a connecting seat, which is rotatably connected to one side of the mixing tank. A connecting block is disposed inside the connecting seat and is fixedly connected to one end of the stirring rod. The other end of the stirring rod passes through a baffle plate and is connected to the baffle plate via a sealed bearing. A fixing frame is fixedly connected to the outside of the baffle plate, and a motor is fixedly connected inside the fixing frame. The output end of the motor is fixedly connected to the stirring rod. The connecting seat is provided to facilitate the insertion of the connecting block and can improve the stability of the stirring rod during rotation.

[0012] Preferably, a retaining ring is fixedly connected to one side of the baffle, a circular groove is opened at one end of the mixing tank, the retaining ring is disposed inside the circular groove, and a sealing gasket is sleeved on the outside of the retaining ring, the sealing gasket being in contact with the mixing tank.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This application uses two rotating rods to drive two second bevel gears to rotate simultaneously. The two second bevel gears mesh with two first bevel gears respectively. The two first bevel gears drive two abutment frames to rotate through two rotating columns. The two abutment frames are adjusted to a horizontal state. Then, the baffle is pulled to remove the two positioning rods from the inside of the two positioning frames. Therefore, the baffle can be quickly disassembled.

[0015] 2. In this application, the first worm gear meshes with the first worm wheel, the first worm wheel drives the bidirectional screw to rotate, the bidirectional screw is threadedly connected to two convex insert plates, the two convex insert plates slide on the limiting slide bar, and the two convex insert plates move in opposite directions and are inserted into the two fixed slots respectively, locking the two insert blocks. This structure achieves the support stability of the mixing tank.

[0016] 3. By setting the connecting seat, this application can make the stirring rod stable when rotating inside the mixing tank. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a quick-release roller for a semiconductor wafer mixing device according to this utility model;

[0018] Figure 2 This is a cross-sectional view of the base of a quick-release roller for a semiconductor wafer mixing device according to this utility model;

[0019] Figure 3 This utility model relates to a quick-release roller for a semiconductor wafer mixing device. Figure 2 Enlarged view of the A-section structure;

[0020] Figure 4 This is a cross-sectional view of the positioning rod of a quick-release roller in a semiconductor wafer mixing device according to this utility model;

[0021] Figure 5 This is a cross-sectional view of the mixing drum of a quick-release roller in a semiconductor wafer mixing device according to this utility model;

[0022] Figure 6 This is a schematic diagram of the connecting block and connecting seat structure of a quick-release roller in a semiconductor wafer mixing device according to this utility model.

[0023] The diagram shows the following components: 1. Base; 2. Mixing tank; 3. Support frame; 4. Insert block; 41. Fixing groove; 5. Bidirectional screw; 6. First support block; 7. Limiting slide bar; 8. Convex insert plate; 9. First worm gear; 10. First worm; 11. Baffle plate; 12. Circular groove; 13. Snap ring; 14. Stirring rod; 15. Connecting seat; 16. Connecting block; 17. Fixing frame; 18. Positioning rod; 19. Positioning frame; 20. Mounting groove; 21. Rotating column; 22. First bevel gear; 23. Second bevel gear; 24. Rotating rod; 25. Sprocket; 26. Second worm gear; 27. Second worm; 28. Abutment frame; 200. Liquid inlet pipe; 201. Liquid outlet pipe. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example: Figure 1 - Figure 6As shown, this utility model provides a technical solution for a quick-release roller in a semiconductor wafer mixing equipment, including a base 1 and a mixing tank 2. The mixing tank 2 is disposed inside the base 1. A liquid inlet pipe 200 is installed on the top of the mixing tank 2, and a cover plate is installed on the top of the liquid inlet pipe 200. A drain pipe 201 is installed at the other end of the mixing tank 2. The mixing tank 2 and the base 1 are provided with a support assembly. A baffle plate 11 is provided at one end of the mixing tank 2, and a retaining ring 13 is fixedly connected to one side of the baffle plate 11. A circular groove 12 is opened at one end of the mixing tank 2, and the retaining ring 13 is disposed inside the circular groove 12. A retaining ring 13 is sleeved on the outside of the retaining ring 13. A sealing gasket is provided, which is in contact with the mixing tank 2. A stirring assembly is provided between the baffle plate 11 and the mixing tank 2. Positioning rods 18 are fixedly connected to the top and bottom of the baffle plate 11. Positioning frames 19 are slidably connected to the outer sides of the two positioning rods 18. The two positioning frames 19 are fixedly connected to the top and bottom of the mixing tank 2. An installation groove 20 is provided at one end of the positioning rod 18. A rotating column 21 is provided inside the installation groove 20. Both ends of the rotating column 21 are rotatably connected to the positioning rod 18. An abutment frame 28 is fixedly connected to the outer side of the rotating column 21. The abutment frame 28 is in contact with one side of the positioning frame 19.

[0026] Each of the two positioning rods 18 has a sprocket 25 at one end, and the two sprockets 25 are connected by a chain drive. A rotating rod 24 is fixedly connected to the inner side of each of the two sprockets 25. One end of the rotating rod 24 passes through the outside of the positioning rod 18 and extends into the mounting groove 20. A second bevel gear 23 is fixedly connected to one end of the rotating rod 24. A first bevel gear 22 is meshed with the outside of the second bevel gear 23. The first bevel gear 22 is fixedly connected to the outside of the rotating column 21. A second worm gear 26 is fixedly connected to the other end of one of the rotating rods 24. A second worm 27 is meshed with the outside of the second worm gear 26. An L-shaped plate is rotatably connected to the outside of the second worm 27. The L-shaped plate is fixedly connected to the outside of the baffle 11. A handle is installed at the bottom end of the second worm 27.

[0027] Specifically, by turning the throttle, the second worm 27 meshes with the second worm wheel 26, and one of the rotating rods 24 drives one of the sprockets 25 to rotate. The two sprockets 25 are driven by a chain, so that the two rotating rods 24 drive the two second bevel gears 23 to rotate simultaneously. The two second bevel gears 23 mesh with the two first bevel gears 22, and the two first bevel gears 22 drive the two abutment frames 28 to rotate through the two rotating columns 21. The two abutment frames 28 are adjusted to a horizontal state. Then, the baffle 11 is pulled to remove the two positioning rods 18 from the inside of the two positioning frames 19, thus enabling quick disassembly of the baffle 11.

[0028] Example: Figure 2 , Figure 3 and Figure 5As shown, the support assembly includes two support frames 3 and two insert blocks 4. Both support frames 3 are fixedly connected to the bottom of the base 1, and both insert blocks 4 are fixedly connected to the bottom of the mixing tank 2. The insert blocks 4 are disposed inside the support frames 3. A connecting groove is provided on one side of each support frame 3, communicating with the interior of the support frame 3. A fixing groove 41 is provided on one side of each insert block 4. The support assembly also includes a bidirectional screw 5 and a limiting slide rod 7. Both the bidirectional screw 5 and the limiting slide rod 7 are disposed between the two support frames 3. First support blocks 6 are rotatably connected to both ends of the bidirectional screw 5, and the two first support blocks 6 are respectively fixedly connected to the two support frames 3. On the front side of each support frame 3, the two ends of the limiting slide rod 7 are fixedly connected to the second support block. The two second support blocks are fixedly connected to the rear side of the two support frames 3 respectively. The two ends of the bidirectional screw 5 are threadedly connected to the convex insert plate 8. One end of the convex insert plate 8 passes through the connecting groove and extends into the fixed groove 41. The convex insert plate 8 is slidably connected to the outside of the limiting slide rod 7. The middle position of the bidirectional screw 5 is fixedly connected to the first worm gear 9. The outside of the first worm gear 9 is meshed with the first worm 10. One end of the first worm 10 passes through the inside of the base 1 and is rotatably connected to the base 1. A handwheel is installed at one end of the first worm 10.

[0029] Specifically, the two inserts 4 are inserted into the two support frames 3 respectively. Then, the handwheel is rotated in the forward direction, the first worm 10 meshes with the first worm wheel 9, the first worm wheel 9 drives the bidirectional screw 5 to rotate, the bidirectional screw 5 is threadedly connected to the two convex inserts 8, the two convex inserts 8 slide on the limiting slide bar 7, and the two convex inserts 8 move in opposite directions and are inserted into the two fixing slots 41 respectively, locking the two inserts 4. This structure achieves the support stability of the mixing tank 2.

[0030] In addition, rotating the handwheel in the opposite direction allows the two convex inserts 8 to be pulled out from the two fixed slots 41 respectively, unlocking the insert block 4 so that the mixing tank 2 can be disassembled.

[0031] Example: Figure 5 and Figure 6 As shown, the stirring assembly includes a stirring rod 14, which is disposed inside the mixing tank 2. One end of the stirring rod 14 is provided with a connecting seat 15, which is rotatably connected to one side of the mixing tank 2. A connecting block 16 is provided inside the connecting seat 15, which is fixedly connected to one end of the stirring rod 14. The other end of the stirring rod 14 passes through the baffle 11 and is connected to the baffle 11 through a sealed bearing. A fixing frame 17 is fixedly connected to the outside of the baffle 11, and a motor is fixedly connected inside the fixing frame 17. The output end of the motor is fixedly connected to the stirring rod 14.

[0032] Specifically, when the baffle plate 11 is installed, the connecting block 16 on the stirring rod 14 is inserted into the connecting seat 15. The connecting seat 15 can make the stirring rod 14 stable when rotating inside the mixing tank 2.

[0033] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A quick-release roller for a semiconductor wafer mixing device, characterized in that: The device includes a base (1) and a mixing tank (2). The mixing tank (2) is located inside the base (1). The mixing tank (2) and the base (1) are provided with a support assembly. One end of the mixing tank (2) is provided with a baffle (11). A stirring assembly is provided between the baffle (11) and the mixing tank (2). Positioning rods (18) are fixedly connected to the top and bottom of the baffle (11). Positioning frames (19) are slidably connected to the outer sides of the two positioning rods (18). The two positioning frames (19) are fixedly connected to the top and bottom of the mixing tank (2). One end of the positioning rod (18) is provided with an installation groove (20). A rotating column (21) is provided inside the installation groove (20). Both ends of the rotating column (21) are rotatably connected to the positioning rod (18). An abutment frame (28) is fixedly connected to the outer side of the rotating column (21). The abutment frame (28) contacts one side of the positioning frame (19). Each of the two positioning rods (18) is provided with a sprocket (25) at one end. The two sprockets (25) are connected by a chain drive. A rotating rod (24) is fixedly connected to the inner side of each of the two sprockets (25). One end of the rotating rod (24) passes through the outside of the positioning rod (18) and extends into the mounting groove (20). A second bevel gear (23) is fixedly connected to one end of the rotating rod (24). A first bevel gear (22) is meshed with the outside of the second bevel gear (23). The first bevel gear (22) is fixedly connected to the outside of the rotating column (21). A second worm gear (26) is fixedly connected to the other end of one of the rotating rods (24). A second worm (27) is meshed with the outside of the second worm gear (26). An L-shaped plate is rotatably connected to the outside of the second worm (27). The L-shaped plate is fixedly connected to the outside of the baffle (11). A handle is installed at the bottom end of the second worm (27).

2. The quick-release roller of a semiconductor wafer mixing equipment according to claim 1, characterized in that: The mixing tank (2) is equipped with an inlet pipe (200) on top, and a cover plate is installed on the top of the inlet pipe (200). The other end of the mixing tank (2) is equipped with a drain pipe (201).

3. The quick-release roller of a semiconductor wafer mixing equipment according to claim 1, characterized in that: The support assembly includes two support frames (3) and two inserts (4). The two support frames (3) are fixedly connected to the bottom of the base (1), and the two inserts (4) are fixedly connected to the bottom of the mixing tank (2). The inserts (4) are located inside the support frames (3). A connecting groove is provided on one side of the support frame (3), and the connecting groove communicates with the inside of the support frame (3). A fixing groove (41) is provided on one side of the insert (4).

4. The quick-release roller of a semiconductor wafer mixing equipment according to claim 3, characterized in that: The support assembly also includes a bidirectional screw (5) and a limiting slide (7). The bidirectional screw (5) and the limiting slide (7) are both disposed between two support frames (3). The two ends of the bidirectional screw (5) are rotatably connected to a first support block (6). The two first support blocks (6) are respectively fixedly connected to the front side of the two support frames (3). The two ends of the limiting slide (7) are respectively fixedly connected to a second support block. The two second support blocks are respectively fixedly connected to the rear side of the two support frames (3).

5. The quick-release roller of a semiconductor wafer mixing equipment according to claim 4, characterized in that: Both ends of the bidirectional screw (5) are threaded with convex insert plates (8). One end of the convex insert plate (8) passes through the connecting groove and extends into the fixed groove (41). The convex insert plate (8) is slidably connected to the outside of the limiting slide rod (7). A first worm gear (9) is fixedly connected at the middle position of the bidirectional screw (5). A first worm (10) is meshed with the outside of the first worm gear (9). One end of the first worm (10) passes through the inside of the base (1) and is rotatably connected to the base (1). A handwheel is installed at one end of the first worm (10).

6. The quick-release roller of a semiconductor wafer mixing equipment according to claim 1, characterized in that: The stirring assembly includes a stirring rod (14), which is disposed inside the mixing tank (2). One end of the stirring rod (14) is provided with a connecting seat (15), which is rotatably connected to one side of the mixing tank (2). A connecting block (16) is disposed inside the connecting seat (15), which is fixedly connected to one end of the stirring rod (14). The other end of the stirring rod (14) passes through the baffle (11) and is connected to the baffle (11) through a sealed bearing. A fixing frame (17) is fixedly connected to the outside of the baffle (11), and a motor is fixedly connected inside the fixing frame (17). The output end of the motor is fixedly connected to the stirring rod (14).

7. The quick-release roller of a semiconductor wafer mixing equipment according to claim 6, characterized in that: A retaining ring (13) is fixedly connected to one side of the baffle (11), and a circular groove (12) is opened at one end of the mixing barrel (2). The retaining ring (13) is set inside the circular groove (12), and a sealing gasket is sleeved on the outside of the retaining ring (13). The sealing gasket is in contact with the mixing barrel (2).

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