Workpiece conveying structure of coating equipment and vacuum coating equipment applying workpiece conveying structure

Abstract

The utility model provides a workpiece transmission structure of coating equipment and vacuum coating equipment applying the same, the workpiece transmission structure of the coating equipment comprises a transmission device used for driving a bracket to move close to or far away from a coating station, and the bracket is provided with a positioning hole; the limiting device is used for limiting the bracket at the coating station when the bracket reaches the coating station; the rotating device is arranged above the film coating station and is used for driving the butt joint piece to rotate; connecting pieces matched with the positioning holes are arranged at the bottom of the workpiece frame, and a plurality of workpiece hanging structures are arranged on the peripheral side of the workpiece frame at intervals; the alignment structure is arranged at the top of the workpiece frame; and the jacking device is arranged below the coating station and used for driving the workpiece frame to do lifting motion so as to enable the workpiece frame to be separated from the bracket. When the jacking device jacks the workpiece frame to be separated from the bracket and is in butt joint with the rotating device, the rotating device can drive the workpiece frame to rotate, and the connecting piece of the workpiece frame and the limiting structure arranged corresponding to the bracket can prevent the workpiece frame from returning failure caused by displacement of the workpiece frame or the bracket in the jacking process.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell coating equipment technology, and in particular to a workpiece transport structure for coating equipment and a vacuum coating equipment using the same. Background Technology

[0002] Existing vacuum optical coating equipment requires a lifting mechanism to first lift the workpiece holder from the transport mechanism at the bottom. The lifting mechanism then drives the workpiece holder to rotate, causing each target workpiece on the outer periphery of the holder to pass through the evaporation source and be coated one by one. After all target workpieces are coated, the lifting mechanism drives the workpiece holder back down onto the transport mechanism, and finally, the workpiece is output to the next process.

[0003] When the workpiece rack is lifted by the lifting mechanism, the bottom of the workpiece rack detaches from the support surface of the bracket supported on the rollers of the transfer mechanism, while the bracket remains on the rollers. If, during the process of lifting or lowering the workpiece rack and the bracket waiting for the coating operation, displacement occurs between the bracket and the workpiece rack or between the workpiece rack and the bracket, it may result in inaccurate positioning of the workpiece rack and the bracket after the workpiece rack is lowered, causing the workpiece rack to fail to return to its original position and thus affecting production efficiency. Utility Model Content

[0004] This utility model proposes a workpiece transport structure for a coating equipment and a photovoltaic coating equipment using the same, in order to solve the technical problem that the workpiece holder may fail to return to its original position due to displacement of the workpiece holder or the support during the coating operation process when the workpiece holder of the existing vacuum optical coating equipment is lifted from the support.

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a workpiece transfer structure for a coating equipment, including a transfer device for driving a bracket to move closer to or away from the coating station. The bracket is provided with positioning holes. The workpiece transfer structure for the coating equipment also includes:

[0007] A limiting device is used to restrict the bracket to the coating station when the bracket arrives at the coating station.

[0008] A rotating device is located above the coating station;

[0009] The workpiece holder has a connector at the bottom that mates with the positioning hole, and several workpiece suspension structures for suspending the target workpiece are spaced apart around the perimeter of the workpiece holder; an alignment structure is located at the top of the workpiece holder.

[0010] The lifting device, located below the coating station, is used to drive the workpiece rack to lift the workpiece rack from the positioning hole and detach it from or return it to the bracket.

[0011] When the lifting device lifts the workpiece frame until it is detached from the bracket and the alignment structure is aligned with the rotating device, the rotating device can drive the workpiece frame to rotate.

[0012] Preferably, the rotating device includes:

[0013] The first frame is located above the coating station;

[0014] A rotary drive mechanism is mounted on the first frame and is used to drive a rotary shaft to rotate. The rotary shaft extends out of the first frame toward the alignment structure. A pair of mating parts are installed at the end of the rotary shaft that extends out of the first frame and are used to mate with the alignment structure.

[0015] Preferably, the lifting device includes:

[0016] The second frame is located below the coating station;

[0017] The lifting drive mechanism, located on the second frame, is used to drive the lifting assembly to move up and down.

[0018] A lifting shaft is mounted on the lifting assembly and extends out of the second frame; a lifting component is mounted on the end of the lifting shaft that extends out of the second frame.

[0019] The guide structure, located on the second frame, is used to guide the lifting assembly's lifting movement.

[0020] Preferably, the lifting drive mechanism includes a lifting module mounted on the second frame for driving the lifting motion of the lifting component; the guide structure includes several guide columns vertically mounted on the second frame.

[0021] The lifting assembly includes:

[0022] The first lifting frame is connected to the lifting moving part and is movably mounted on the guide column. One end of the lifting shaft is mounted on the first lifting frame, and the other end of the lifting shaft extends out of the second frame.

[0023] A sealing hose is fitted around the outside of the lifting shaft, with one end of the sealing hose installed on the first lifting frame and the other end installed on the second frame.

[0024] Preferably, the transmission device includes:

[0025] The first roller mechanism includes: a first roller mounting frame; a plurality of first rollers, which are sequentially and spaced apart on the first roller mounting frame along a first direction; and a first transmission assembly connected between adjacent first rollers.

[0026] The second roller mechanism includes: a second roller mounting frame and a first roller mounting frame arranged parallel to each other at intervals; a coating station located between the second roller mounting frame and the first roller mounting frame; a plurality of second rollers, which are sequentially and at intervals on the second roller mounting frame along a first direction; a second transmission assembly connected between adjacent second rollers; and at least one second roller connected to a corresponding first roller via a connecting shaft.

[0027] The roller drive mechanism is used to drive any one of the first rollers to rotate, so as to drive the first transmission component and the second transmission component to drive each of the first rollers and the second rollers to rotate synchronously, thereby driving the bracket supported on a plurality of first rollers and the second rollers to move closer to or away from the coating station.

[0028] Preferably, the limiting device includes:

[0029] The second lifting drive mechanism is located between the first roller mechanism and the second roller mechanism, and at one end of the coating station in the first direction, for driving the second lifting frame to move up and down; the first limiting mechanism is located on the second lifting frame, for limiting one end of the bracket in the first direction when the bracket arrives at the coating station.

[0030] The third lifting drive mechanism is located between the first roller mechanism and the second roller mechanism, and at the opposite end of the coating station in the first direction, for driving the lifting motion of the third lifting frame; the second limiting mechanism is located on the third lifting frame, for limiting the opposite end of the bracket in the first direction when the bracket arrives at the coating station.

[0031] Preferably, the workpiece holder is cylindrical, and several workpiece suspension structures are evenly spaced along the circumference of the workpiece holder on the outer circumference side of the workpiece holder.

[0032] Preferably, the mating part is a mating gland, the outer periphery of the mating gland is a first conical surface, and the alignment structure is an alignment flange located on the top of the workpiece holder. The alignment flange is provided with a first tapered groove that matches the shape of the mating gland.

[0033] The lifting component is rotatably connected to the lifting device;

[0034] When the docking part is aligned with the alignment structure through its first conical surface and first tapered groove, the rotating device can drive the workpiece frame to rotate relative to the lifting device under the guidance of the lifting part and the lifting device.

[0035] This utility model also provides a vacuum coating equipment, including a vacuum coating chamber and an evaporation source disposed in the vacuum coating chamber, and also includes the above-mentioned workpiece transfer structure of the coating equipment, wherein the workpiece transfer structure of the coating equipment is disposed in the vacuum coating chamber and the evaporation source is disposed on one side of the coating station.

[0036] Preferably, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece is an optical substrate, and the evaporation source is used to perform optical coating operations on the surface of the optical substrate.

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] The workpiece transfer structure for coating equipment provided by this invention

[0039] The rotating device and the lifting device are integrated at the top and bottom of the vacuum coating chamber, respectively. The bottom of the workpiece holder is positioned on the positioning hole of the bracket transferred by the conveying device via a connector. When the bracket arrives at the coating station, the bracket is limited by a limiting device, and the lifting device drives the lifting component to rise and fall so that it is lifted from the positioning hole to align with the docking component. The rotating device drives the docking component to rotate, causing the workpiece holder to rotate relative to the lifting device. Then, the evaporation source on one side of the conveying device sequentially performs coating operations on each target workpiece suspended around the workpiece holder. After coating is completed, the lifting device drives the lifting component to fall back to the positioning hole of the bracket at the coating station and disengage from the connector, so that the workpiece holder is accurately returned to the bracket, avoiding the problem of workpiece holder failure due to workpiece holder or bracket displacement during the lifting process. Attached Figure Description

[0040] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0041] Figure 1 A front view schematic diagram of an embodiment of the workpiece transfer structure of the coating equipment provided by this utility model;

[0042] Figure 2 A three-dimensional structural diagram of the transmission device and the limiting device of the workpiece transmission structure of the coating equipment provided by this utility model;

[0043] Figure 3 A bottom view of the conveying device and limiting device of the workpiece conveying structure of the coating equipment provided by this utility model;

[0044] Figure 4 for Figure 2 A three-dimensional structural diagram of the assembly of the transmission device, limiting device and bracket;

[0045] Figure 5 for Figure 2 A top view of the assembly structure of the transmission device, limiting device and bracket in the process;

[0046] Figure 6 A three-dimensional structural diagram of the bracket for the workpiece transfer structure of the coating equipment provided by this utility model;

[0047] Figure 7 for Figure 6 A schematic cross-sectional view of the bracket along the AA direction;

[0048] Figure 8 A schematic diagram of the main structure of the lifting device for the workpiece transfer structure of the coating equipment provided by this utility model;

[0049] Figure 9 for Figure 2 A schematic diagram of the three-dimensional assembly structure of the third lifting drive mechanism, the third lifting frame, and the second limiting mechanism.

[0050] The main markings in the attached figures are as follows:

[0051] 1. Transmission device; 11. First roller mechanism; 111. First roller mounting frame; 112. First roller; 113. First transmission assembly; 12. Second roller mechanism; 121. Second roller mounting frame; 122. Second roller; 123. Second transmission assembly; 13. Connecting shaft; 131. Shaft support assembly; 14. Roller drive mechanism; 2. Bracket; 21. Positioning hole; 3. Workpiece rack; 31. Workpiece suspension structure; 32. Alignment structure; 4. Lifting device; 41. Second frame; 42. Lifting drive mechanism; 421. Lifting module; 422. Lifting moving part; 43. Lifting assembly; 431. First lifting frame; 432. Sealing hose; 44. Guide Structure; 441, Guide column; 442, Linear bearing; 45, Lifting shaft; 46, Lifting component; 5, Rotating device; 51, First frame; 52, Rotation drive mechanism; 53, Rotation shaft; 54, Connecting component; 541, First conical surface; 55, Magnetohydrodynamic fluid; 6, Limiting device; 61, Second lifting drive mechanism; 62, Second lifting frame; 63, First limiting mechanism; 631, First support assembly; 632, First clamping component; 633, First position sensor; 64, Third lifting drive mechanism; 65, Third lifting frame; 66, Second limiting mechanism; 661, Second support assembly; 662, Second clamping component; 663, Second position sensor; 7, Target workpiece.

[0052] The other markings in the diagram are as follows:

[0053] X, first direction; Y, second direction; Z, third direction; B, coating station. Detailed Implementation

[0054] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-9The present invention will be further described in detail with reference to the embodiments.

[0055] Please refer to the following: Figure 1-9 The workpiece transfer structure for coating equipment provided by this utility model includes a transfer device 1 for driving a bracket 2 to move closer to or further away from the coating station B. The bracket 2 is provided with a positioning hole 21. The workpiece transfer structure for coating equipment also includes:

[0056] The device includes: a limiting device 6 for restricting the bracket 2 to the coating station B when it arrives at the coating station B; a rotating device 5 located above the coating station B; a workpiece rack 3 with a connector (not shown) at its bottom that mates with the positioning hole 21, and several workpiece suspension structures 31 for suspending the target workpiece 7 spaced apart around the workpiece rack 3; an alignment structure 32 located at the top of the workpiece rack 3, which is positioned to match the docking member 54 when the bracket 2 arrives at the coating station B; and a lifting device 4 located below the coating station B, which matches the position of the connector when the bracket 2 arrives at the coating station B. The lifting device 4 drives the workpiece rack 3 to move up and down towards or away from the connector, thereby lifting the workpiece rack 3 upward from the positioning hole 21 and disengaging it from the support surface connector of the bracket 2, and lifting the workpiece rack 3 toward the upper alignment structure 32, or transferring the workpiece rack 3 and guiding it down through the positioning hole 21 to re-support it on the surface of the bracket 2, thus causing the lifting device 4 to disengage downward from the connector.

[0057] When the lifting device 4 lifts the workpiece frame 3 from the positioning hole 21 until it is separated from the bracket 2 and the alignment structure 32 is aligned with the rotating device 5, the rotating device 5 can drive the workpiece frame 3 to rotate, so that each target workpiece 7 suspended around the workpiece frame 3 rotates sequentially between the transmission device 1 and the coating device on one side of the coating station B, so that the coating device can sequentially perform the corresponding coating operation on each target workpiece 7.

[0058] Please refer to the following: Figure 1 , 7 In this embodiment, the rotating device 5 includes:

[0059] The first frame 51 is located above the coating station B, and when the bracket 2 arrives at the coating station B, the first frame 51 and the docking piece 54 are positioned to match each other. The rotary drive mechanism 52 is located on the first frame 51 and is used to drive the rotary shaft 56 to rotate. The rotary shaft 56 extends downward toward the alignment structure 32 from the first frame 51. A docking piece 54 is installed at one end of the rotary shaft 56 that extends out of the first frame 51 and is used to dock with the alignment structure 32.

[0060] Please refer to the following: Figure 1 , 7In a preferred embodiment of this example, the rotary drive mechanism 52 is a motor and reducer drive mechanism. The output shaft of the motor and reducer drive mechanism is parallel to the horizontally extending first direction X, and the first direction X is parallel to the direction in which the conveyor drive bracket 2 moves closer to or further away from the coating station B. The axial direction of the rotary shaft 56 is parallel to the vertically extending third direction Z, which is perpendicular to the first direction X. The rotary shaft 56 is connected to the output shaft of the motor and reducer drive mechanism through a coupling (not shown in the figure).

[0061] In other embodiments of this example, the rotary drive mechanism 52 may also be a rotary cylinder drive mechanism.

[0062] Please refer to the following: Figure 1 , 7 In a preferred embodiment of this invention, a magnetofluid 55 is provided at the point where the rotating shaft 56 passes through the first frame 51 to achieve a seal.

[0063] Please refer to the following: Figure 1 , 8 In this embodiment, the lifting device 4 includes:

[0064] The second frame 41 is located below the coating station B and is configured to match the position of the connector when the bracket 2 arrives at the coating station B. The first lifting drive mechanism 42 is located on the second frame 41 and is used to drive the lifting assembly 43 to move up and down below the coating station B. The lifting shaft 45 is installed on the lifting assembly 43 and extends upward from the second frame 41. The lifting member 46 is installed at one end of the lifting shaft 45 that extends out of the second frame 41 and is used to lift the connector upward from the positioning hole 21 or to move the connector downward to the positioning hole 21 and then continue to move downward to disengage from the connector. The guide structure 44 is located on the second frame 41 and is used to guide the lifting assembly 43 to move up and down.

[0065] Please refer to the following: Figure 1 , 8 In this embodiment, the first lifting drive mechanism 42 includes a lifting module 421, which is mounted on the second frame 41 and is used to drive the lifting motion component 422 to move up and down; the guide structure 44 includes a plurality of guide columns 441 vertically mounted on the second frame 41 and linear bearings 442 mounted on the guide columns 441.

[0066] The lifting assembly 43 includes: a first lifting frame 431, one end of which is connected to the lifting motion component 422; the periphery of the first lifting frame 431 is mounted on the guide column 441 via a connection to a linear bearing 442; one end of the lifting shaft 45 is mounted on the first lifting frame 431; and the other end of the lifting shaft 45 extends upward out of the second frame 41; a sealing hose 432, which is preferably a corrugated pipe, but can also be a retractable elastic pipe; the sealing hose 432 is sleeved on the outside of the lifting shaft 45, with one end of the sealing hose 432 mounted on the first lifting frame 431 and the other end mounted on the cavity mounting surface of the coating equipment, so that the corrugated pipe plays a sealing role.

[0067] Please refer to the following: Figure 1 , 8 In one embodiment of this invention, the top wall of the second frame 41 can be part of the bottom wall of the cavity of the coating equipment, and the other end of the sealing hose 432 is installed on the top wall of the second frame 41.

[0068] Please refer to the following: Figure 1 , 8 In a more preferred embodiment of this example, the lifting module 421 is a lifting cylinder module, used to drive the cylinder extension rod, which is a lifting moving part 422, to move up and down. The first lifting frame 431 is mounted on the cylinder extension rod of the lifting cylinder module.

[0069] In other embodiments, the lifting module 421 may also be a linear lifting module driven by a motor, such as a lead screw nut, a synchronous pulley, or a gear rack.

[0070] Please refer to the following: Figure 1-9 In a preferred embodiment of this example, the first lifting drive mechanism 42 of the lifting device 4 is used to drive the lifting assembly 43 to move up and down below the coating station B, thereby driving the lifting shaft 45 and the lifting member 46 at the end of the lifting shaft 45 mounted on the lifting assembly 43 to move up and down closer to or away from the connector at the bottom of the workpiece frame 3, so that the lifting member 46 lifts the connector from below the positioning hole 21 and lifts the connector toward the upper alignment structure 32, or transfers the connector and guides it down through the positioning hole 21 to be supported again on the surface of the bracket 2, thereby causing the lifting member 46 to detach downward from the connector.

[0071] When the lifting member 46 lifts the connecting member at the bottom of the workpiece frame 3 from the positioning hole 21 to the alignment structure 32 and the docking member 54, the rotating device 5 can drive the rotating shaft 56 to rotate through the rotating drive mechanism 52, thereby driving the docking member 54 to rotate. Then, the docking member 54 drives the alignment structure 32 and the workpiece frame 3 to rotate synchronously, so that each target workpiece 7 suspended around the workpiece frame 3 rotates sequentially between the transmission device 1 and the coating device on one side of the coating station B, so that the coating device can sequentially perform the corresponding coating operation on each target workpiece 7.

[0072] Please refer to the following: Figure 1-5 In this embodiment, the transmission device 1 includes:

[0073] The first roller mechanism 11 includes: a first roller mounting frame 111; a plurality of first rollers 112, which are sequentially and spaced apart on the first roller mounting frame 111 along a first direction X; and a first transmission assembly 113 connected between adjacent first rollers 112. The second roller mechanism 12 includes: a second roller mounting frame 121 arranged parallel to and spaced apart from the first roller mounting frame 111; and a coating station B located between the second roller mounting frame 121 and the first roller mounting frame 111; and a plurality of second rollers 122, which are sequentially and spaced apart on the first roller mounting frame 111 along a first direction X. On the roller mounting bracket 121; a second transmission assembly 123 is connected between adjacent second rollers 122; at least one second roller 122 is connected to a corresponding first roller 112 via a connecting shaft 13; a roller drive mechanism 14 is used to drive any first roller 112 to rotate, so as to drive the first transmission assembly 113 and the second transmission assembly 123 to drive each first roller 112 and the second roller 122 to rotate synchronously, thereby driving the bracket 2 supported on a plurality of first rollers 112 and the second roller 122 to move closer to or away from the coating station B.

[0074] Please refer to the following: Figure 1-5 In a preferred embodiment of this example, a plurality of first rotating shafts are sequentially and spaced apart on a first roller mounting bracket 111 along a first direction X. Each first roller 112 is respectively mounted on a corresponding first rotating shaft. A pair of first sprockets are spaced apart at the same end of each first rotating shaft. The corresponding first sprockets between adjacent first rotating shafts are sequentially and alternately connected along the first direction X by a first transmission chain, so that each first sprocket and the first sprocket constitute the aforementioned first transmission assembly 113 (chain transmission assembly).

[0075] Several second rotating shafts are sequentially and spaced apart on the second roller mounting bracket 121 along the first direction X, and the number and position of the second rotating shafts are coaxially matched with each first rotating shaft. Each second roller 122 is respectively mounted on the corresponding second rotating shaft. A pair of first sprockets are spaced apart at the same end of each second rotating shaft. The corresponding second sprockets between adjacent second rotating shafts are sequentially and alternately connected along the first direction X by a second transmission chain, so that each second sprocket and the second sprocket constitute the aforementioned second transmission assembly 123 (chain transmission assembly).

[0076] In other embodiments of this example, the first transmission component 113 and the second transmission component 123 may also use belt drive mechanisms, linkage mechanisms, or other transmission components instead of chain drive components.

[0077] Please refer to the following: Figure 1-5 In a preferred embodiment of this invention, the transmission device 1 further includes:

[0078] A shaft support assembly 131 is disposed between the first roller mechanism 11 and the second roller mechanism 12, and is used to support the connecting shaft 13.

[0079] Please refer to the following: Figure 1-5 In a more preferred embodiment of this example, the shaft support assembly 131 includes a pair of support bearings, which are spaced apart between the first roller mechanism 11 and the second roller mechanism 12 along a second direction Y perpendicular to the first direction X. The connecting shaft 13 passes through the bearing holes of the pair of support bearings along the second direction Y, so that the connecting shaft 13 can drive each of the first rollers 112, the first transmission assembly 113, the second rollers 122, and the second transmission assembly 123 to rotate synchronously relative to the pair of support bearings.

[0080] Please refer to the following: Figure 1-5 9. In this embodiment, the limiting device 6 includes:

[0081] The second lifting drive mechanism 61 is located between the first roller mechanism 11 and the second roller mechanism 12, and at one end of the coating station B in the first direction X, for driving the second lifting frame 62 to move up and down; the first limiting mechanism 63 is located on the second lifting frame 62, for limiting one end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station B; the third lifting drive mechanism 64 is located between the first roller mechanism 11 and the second roller mechanism 12, and at the opposite end of the coating station B in the first direction X, for driving the third lifting frame 65 to move up and down; the second limiting mechanism 66 is located on the third lifting frame 65, for limiting the opposite end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station B.

[0082] Please refer to the following: Figure 1-59. In a preferred embodiment of this example, the second lifting frame 62 is a second lifting plate extending along the aforementioned second direction. The third lifting frame 65 is a third lifting plate extending along the second direction Y.

[0083] The first limiting mechanism 63 includes at least two first support components 631, which are spaced apart at both ends of the second lifting plate (second lifting frame 62) in the second direction Y, and are respectively used to support a pair of first clamping members 632.

[0084] The second limiting mechanism 66 includes at least two second support components 661, which are spaced apart at both ends of the third lifting plate (third lifting frame 65) in the second direction Y. They are respectively used to support a pair of second clamping members 662 to cooperate with a pair of first clamping members 632 to clamp the bracket 2 at both ends in the first direction X. This achieves the goal of limiting the bracket 2 to the coating station B, preventing the bracket 2 and the workpiece frame 3 from shifting relative to the transmission device 1 during the process of the lifting device 4 driving the connecting lifting motion to align the docking member 54 with the alignment structure 32. This would cause the workpiece frame 3 to fall and fail to accurately position and align with the bracket 2, resulting in the workpiece frame 3 failing to return to its original position and thus affecting production efficiency.

[0085] Please refer to the following: Figure 1-5 9. In a preferred embodiment of this example, the limiting device 6 further includes:

[0086] The third limiting mechanism (not shown in the figure) is located on the second lifting plate (second lifting frame 62) or the third lifting plate (third lifting frame 65) and is used to drive the third clamping member to move closer to or away from the bracket 2 to cooperate with the first limiting mechanism 63 and the second limiting mechanism 66 to limit the bracket 2. The third limiting mechanism can drive the movement of the third clamping member through a linear drive module such as a cylinder or motor-driven lead screw nut, synchronous pulley, gear rack, etc.

[0087] Please refer to the following: Figure 1-5 9. In a more preferred embodiment of this example, the bracket 2 is generally rectangular (i.e., the bracket 2 is generally cuboid), and the end faces of the opposite ends of the bracket 2 in the first direction X are mutually symmetrical inverted conical surfaces. The first clamping member 632 and the second clamping member 662 are respectively inclined clamping plates whose posture matches the end faces of the opposite ends of the bracket 2 in the first direction X.

[0088] In other embodiments of this example, the bracket 2 can also be constructed using square tubing, profiles, or other forms.

[0089] Please refer to the following: Figure 1-5 9. In this embodiment, the first limiting mechanism 63 further includes: a first position sensor 633, which is disposed on the first support component 631 and is used to sense whether the first clamping member 632 clamps the bracket 2 in place.

[0090] The second limiting mechanism 66 also includes a second position sensor 663, which is disposed on the second support assembly 661 and is used to sense whether the second clamping member 662 clamps the bracket 2 in place.

[0091] Please refer to the following: Figure 1-5 9. In a more preferred embodiment of this example, the first support component 631 includes: at least one first support base disposed on the second lifting plate (second lifting frame 62); a first support cantilever disposed on the first support base; and a first clamping member 632 and a first position sensor 633 mounted on the first support cantilever.

[0092] The second support assembly 661 includes: at least one second support base disposed on the third lifting plate (third lifting frame 65); a second support cantilever disposed on the second support base; and a second clamping member 662 and a second position sensor 663 mounted on the first support cantilever.

[0093] Please see Figure 1 In this embodiment, the workpiece holder 3 is cylindrical, and a number of workpiece suspension structures 31 are evenly distributed along the circumference of the workpiece holder 3 on the outer circumference of the workpiece holder 3.

[0094] Please see Figure 1 In a preferred embodiment of this invention, the workpiece suspension structure 31 consists of a plurality of suspension members spaced apart on the outer circumference of the workpiece holder 3, and the target workpiece 7 is provided with suspension holes that match the suspension members. The target workpiece 7 is suspended on the outer circumference of the workpiece holder 3 through its suspension holes and correspondingly engaged with the suspension members.

[0095] Please see Figure 1 In this embodiment, the docking member 54 is a docking cap, the outer periphery of which forms a first conical surface 541. The alignment structure 32 is an alignment flange located on the top of the workpiece holder 3, and the alignment flange has a first tapered groove (not shown in the figure) that matches the shape of the docking cap. The lifting member 46 is rotatably connected to the lifting device 4. When the docking member 54 engages with the alignment structure 32 through its first conical surface 541 and the first tapered groove, the rotating device 5 can drive the workpiece holder 3 to rotate relative to the lifting device 4 under the guidance of the lifting member 46 and the lifting device 4.

[0096] Please refer to the following: Figure 1 , 4-8. In a more preferred embodiment of this example, the positioning hole 21 is located in the middle of the bracket 2, and the inner wall of the positioning hole 21 is a second conical surface. The connecting member is a boss located at the bottom of the workpiece holder 3 and extending downward from the bottom of the workpiece holder 3 in a vertical direction. The outer wall of the boss is a third conical surface that matches the shape of the second conical surface, and a second tapered groove is provided in the middle of the bottom end face of the boss. The lifting member 46 is a lifting pressure cover. The outer circumference of the lifting pressure cover is a fourth conical surface that matches the shape of the second tapered groove. The inner circumference of the lifting member 46 is rotatably mounted on one end of the lifting shaft 45 that extends out of the second frame 41.

[0097] The workpiece holder 3 is firmly connected to the second conical surface of the bracket 2 through the third conical surface of the boss (connector) and supported on the bracket 2. When the transmission device 1 drives the bracket 2 and the workpiece holder 3 to the coating station B, the lifting module 421 drives the lifting motion component 422 to move upward below the coating station B until the fourth conical surface of the lifting component 46 (lifting pressure cover) abuts against the inner side wall of the second conical groove of the boss (connector). Then the lifting module 421 drives the lifting motion component 422 to continue to rise, thereby driving the lifting component 46 (lifting pressure cover) to lift the boss (connector) and the workpiece holder 3 upward, so that the third conical surface of the boss (connector) is separated from the second conical surface of the bracket 2. At the same time, the lifting shaft 45 passes upward through the positioning hole 21 of the bracket 2. Subsequently, the lifting module 421 drives the lifting motion component 422 to rise continuously until the first tapered groove of the alignment flange at the top of the workpiece frame 3 abuts against the first tapered surface 541 of the docking cover (dating component 54). At this time, the rotating device 5 can drive the docking cover (dating component 54) to rotate, thereby driving the workpiece frame 3 to rotate synchronously relative to the lifting device 4 under the guidance of the rotational engagement of the inner circumference side of the lifting component 46 along the outer circumference side of the lifting shaft 45, so that the coating device can sequentially perform the corresponding coating operation on each target workpiece 7.

[0098] After all target workpieces 7 have completed coating, the lifting module 421 drives the lifting motion component 422 to descend below the coating station B, causing the first tapered groove of the alignment flange at the top of the workpiece holder 3 to disengage from the first tapered surface 541 of the mating cap (matting component 54). Then, the lifting module 421 drives the lifting motion component 422 to continue descending until the third tapered surface of the boss (connector) abuts against the second tapered surface of the bracket 2, while the lifting shaft 45 retracts below the positioning hole 21 of the bracket 2. Afterward, the lifting module 421 drives the lifting motion component 422 to continue descending until the fourth tapered surface of the lifting component 46 (lifting cap) disengages from the inner wall of the second tapered groove of the boss (connector), thereby causing the boss (connector) and workpiece holder 3 to return to their downward position and be supported in the positioning hole 21 of the bracket 2.

[0099] In other embodiments of this example, the lifting member 46 may also be rotatably connected to the lifting device 4 by cooperating with the bearing at the top of the lifting shaft 45.

[0100] This utility model also provides a vacuum coating equipment, including a vacuum coating chamber (not shown in the figure) and a coating device (not shown in the figure) disposed in the vacuum coating chamber, and also includes the above-mentioned workpiece transfer system structure of the coating equipment. The workpiece transfer system structure of the coating equipment is disposed in the vacuum coating chamber, and the coating device is disposed on one side of the coating station B (that is, the coating device is disposed at one end of the coating station B in the second direction Y).

[0101] In this embodiment, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece 7 is an optical substrate, and the coating apparatus includes an evaporation source for performing optical coating operations on the surface of the optical substrate.

[0102] Please refer to the following: Figure 1-5 The working process of the workpiece transfer structure of the coating equipment provided by the present invention is as follows:

[0103] S1: The transmission device 1 drives the bracket 2 to move the workpiece rack 3 from the loading station along the first direction X towards the coating station B.

[0104] S2: When the bracket 2 arrives at the loading station, the limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to lift the bracket 2 at both ends (front end and rear end) in the first direction X, so as to limit the bracket 2 to the coating station B.

[0105] S3: The lifting device 4 drives the lifting shaft 45 to move the lifting component 46 from below the coating station B near the bottom of the connector of the workpiece frame 3, so that the lifting component 46 lifts the connector from the positioning hole 21 from below and lifts the workpiece frame 3 upward away from the bracket 2. At the same time, the lifting shaft 45 passes through the positioning hole 21 upward and lifts the connector toward the upper alignment structure 32 until the docking component 54 of the rotating device 5 is aligned with the alignment structure 32 on the top of the workpiece frame 3.

[0106] S4: The rotating device 5 drives the docking part 54 to rotate, thereby driving the workpiece frame 3 to rotate synchronously with the lifting device 4 under the guidance of the inner circumference of the lifting part 46 along the outer circumference of the lifting shaft 45, so that each target workpiece 7 suspended on the periphery of the workpiece frame 3 rotates sequentially between the transfer device 1 and the coating device on the side of the coating station B, so that the evaporation source of the coating device can sequentially perform the corresponding optical coating operation on each target workpiece 7.

[0107] S5: After all target workpieces 7 have been coated, the lifting device 4 drives the lifting shaft 45 to move the lifting component 46 downward, so that the docking component 54 of the rotating device 5 is disengaged from the alignment structure 32 at the top of the workpiece frame 3. At the same time, the lifting shaft 45 drives the lifting component 46 and the workpiece frame 3 to continue to descend until the connecting component at the bottom of the workpiece frame 3 is repositioned and abuts against the positioning hole 21 on the bracket 2. The lifting shaft 45 drives the lifting component 46 to continue to descend so that the lifting component 46 is disengaged from the connecting component, and the workpiece frame 3 returns to its original position and is supported on the bracket 2.

[0108] S6: The limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to descend at both ends (front end and rear end) of the bracket 2 in the first direction X, so as to release the bracket 2 from the limiting position at the coating station B.

[0109] S7: The transmission device 1 drives the bracket 2 to move the workpiece rack 3 from the coating station B along the first direction X towards the unloading station. Finally, the workpiece rack 3 and each of the target workpieces 7 that have been coated are removed from the bracket 2 to perform the next process.

[0110] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A workpiece transfer structure for a coating equipment, comprising a transfer device (1) for driving a support (2) to move closer to or further away from the coating station (B), characterized in that, The bracket (2) is provided with positioning holes (21), and the workpiece transfer structure of the coating equipment further includes: A limiting device (6) is used to restrict the bracket (2) to the coating station (B) when the bracket (2) arrives at the coating station (B); A rotating device (5) is located above the coating station (B); The workpiece holder (3) has a connector at the bottom that mates with the positioning hole (21), and several workpiece suspension structures (31) for suspending the target workpiece (7) are spaced apart around the workpiece holder (3); and an alignment structure (32) is located at the top of the workpiece holder (3). A lifting device (4) is located below the coating station (B) and is used to drive the workpiece rack (3) to lift the workpiece rack (3) from the positioning hole (21) and detach it or return it to the bracket (2). When the lifting device (4) lifts the workpiece frame (3) to the point of disengagement from the bracket and aligns the alignment structure (32) with the rotating device (5), the rotating device (5) can drive the workpiece frame (3) to rotate.

2. The workpiece conveying structure of the coating equipment as described in claim 1, characterized in that, The rotating device (5) includes: The first frame (51) is located above the coating station (B); A rotary drive mechanism (52) is provided on the first frame (51) for driving the rotary shaft (56) to rotate. The rotary shaft (56) extends out of the first frame (51) toward the alignment structure (32). A mating piece (54) is installed at one end of the rotary shaft (56) extending out of the first frame (51) for mating with the alignment structure (32).

3. The workpiece conveying structure of the coating equipment as described in claim 2, characterized in that, The lifting device (4) includes: The second frame (41) is located below the coating station (B); The first lifting drive mechanism (42) is mounted on the second frame (41) and is used to drive the lifting assembly (43) to move up and down. A lifting shaft (45) is mounted on the lifting assembly (43) and extends out of the second frame (41); A lifting member (46) is installed at one end of the lifting shaft (45) extending out of the second frame (41) for lifting or disengaging from the connecting member through the positioning hole (21); A guide structure (44) is provided on the second frame (41) and is used to guide the lifting assembly (43) to move up and down.

4. The workpiece conveying structure of the coating equipment as described in claim 3, characterized in that, The first lifting drive mechanism (42) includes a lifting module (421) mounted on the second frame (41) for driving the lifting motion component (422) to move up and down; the guide structure (44) includes a plurality of guide columns (441) vertically mounted on the second frame (41) and linear bearings (442) mounted on the guide columns (441); The lifting assembly (43) includes: The first lifting frame (431) has one end connected to the lifting motion component (422), and the periphery of the first lifting frame (431) is installed on the guide column (441) by connecting with the linear bearing (442). One end of the lifting shaft (45) is installed on the first lifting frame (431), and the other end of the lifting shaft (45) extends out of the second frame (41). A sealing hose (432) is sleeved on the outside of the lifting shaft (45), and one end of the sealing hose (432) is installed on the first lifting frame (431), and the other end of the sealing hose (432) is installed on the cavity mounting surface of the coating equipment.

5. The workpiece conveying structure of the coating equipment as described in any one of claims 1-4, characterized in that, The transmission device (1) includes: The first roller mechanism (11) includes: a first roller mounting frame (111); a plurality of first rollers (112) sequentially and spaced apart on the first roller mounting frame (111) along a first direction (X); and a first transmission assembly (113) connected between adjacent first rollers (112). The second roller mechanism (12) includes: a second roller mounting frame (121) and a first roller mounting frame (111) arranged parallel to each other and spaced apart, the coating station (B) being located between the second roller mounting frame (121) and the first roller mounting frame (111); a plurality of second rollers (122) being sequentially and spaced apart on the second roller mounting frame (121) along the first direction (X); a second transmission assembly (123) being connected between adjacent second rollers (122); and at least one second roller (122) being connected to a corresponding first roller (112) via a connecting shaft (13). The roller drive mechanism (14) is used to drive any one of the first rollers (112) to rotate, so as to drive the first transmission component (113) and the second transmission component (123) to drive each of the first rollers (112) and the second rollers (122) to rotate synchronously, thereby driving the bracket (2) supported on a plurality of first rollers (112) and second rollers (122) to move closer to or away from the coating station (B).

6. The workpiece conveying structure of the coating equipment as described in claim 5, characterized in that, The limiting device (6) includes: The second lifting drive mechanism (61) is located between the first roller mechanism (11) and the second roller mechanism (12), and is located at one end of the coating station (B) in the first direction (X), for driving the second lifting frame (62) to move up and down; the first limiting mechanism (63) is located on the second lifting frame (62), for limiting one end of the bracket (2) in the first direction (X) when the bracket (2) arrives at the coating station (B); The third lifting drive mechanism (64) is located between the first roller mechanism (11) and the second roller mechanism (12) and at the opposite end of the coating station (B) in the first direction (X), for driving the third lifting frame (65) to move up and down; the second limiting mechanism (66) is located on the third lifting frame (65) for limiting the opposite end of the bracket (2) in the first direction (X) when the bracket (2) arrives at the coating station (B).

7. The workpiece conveying structure of the coating equipment as described in claim 3 or 4, characterized in that, The workpiece holder (3) is cylindrical, and several workpiece suspension structures (31) are evenly distributed at intervals along the circumference of the workpiece holder (3) on the outer circumference of the workpiece holder (3).

8. The workpiece conveying structure of the coating equipment as described in claim 7, characterized in that, The docking part (54) is a docking cover, the outer periphery of the docking cover is a first conical surface (541), the alignment structure (32) is an alignment flange provided on the top of the workpiece holder (3), and the alignment flange is provided with a first tapered groove that matches the shape of the docking cover. The lifting member (46) is rotatably connected to the lifting device (4); When the docking part (54) engages with the first tapered groove through its first conical surface (541) and is aligned with the alignment structure (32), the rotating device (5) can drive the workpiece frame (3) to rotate relative to the lifting device (4) under the guidance of the lifting part (46) and the lifting device (4).

9. A vacuum coating apparatus, comprising a vacuum coating chamber and an evaporation source disposed within the vacuum coating chamber, characterized in that, It also includes a workpiece transfer structure for a coating equipment as described in any one of claims 1-8, wherein the workpiece transfer structure for the coating equipment is disposed in the vacuum coating chamber, and the evaporation source is disposed on one side of the coating station (B).

10. The vacuum coating equipment as described in claim 9, characterized in that, The vacuum coating equipment is a vacuum optical coating equipment, the target workpiece (7) is an optical substrate, and the evaporation source is used to perform optical coating operations on the surface of the optical substrate.

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