Magnetic screening module and super-atom beam source screening device

Abstract

The utility model discloses a magnetic screening module and a super-atom beam source screening device, and relates to the technical field of semiconductor material surface treatment. The magnetic screening module comprises an even number of magnets, the even number of magnets are evenly distributed in the circumferential direction to form an annular magnetic array, in the annular magnetic array, every two opposite magnets form magnetic pairs with the same magnetizing direction, the included angle of the magnetizing directions of every two adjacent magnetic pairs is 360 degrees / n, n is the number of the magnetic pairs and is larger than or equal to 2, and n is larger than or equal to 2. And an area with the lowest synthetic magnetic field intensity is formed in the center of the annular magnetic array. When the super-atomic beam source penetrates through the central axis of the annular magnetic array, the deflection radius of the super-atomic ions with the large mass is large, the super-atomic ions cannot deflect in a magnetic field generated by the annular magnetic array and can smoothly penetrate through the magnetic screening module, and the single-atomic ions with the small mass can deflect in the magnetic field generated by the annular magnetic array and can smoothly penetrate through the magnetic screening module. Therefore, screening of monatomic ions is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor material surface treatment, especially relates to a magnetic screening module and super atom beam source screening device. BACKGROUND

[0002] With the development of ultra large scale integrated circuit, semiconductor surface processing technology is increasingly fine, especially in wafer surface polishing and etching process, the precision requirement has been very high. In the conventional plasma process, gas molecules are ionized to form single atom ion bombardment wafer surface, which will have a significant injection effect on wafer surface lattice, affect the surface smoothness and lattice quality; compared with single atom ion, the particle mass and collision cross section of super atom ion increase several to several thousand times, when the super atom ion collides with the material surface, the transverse sputtering effect and local thermal annealing effect appear, which can effectively improve the surface smoothness and surface lattice quality, and this characteristic has good process effect in wafer surface treatment.

[0003] In the formation of super atom beam source, the process of gas molecules experiencing adiabatic expansion and then sharply reducing thermal motion, and combining the collided gas molecules to form super atom by intermolecular van der waals force, not all gas molecules can combine to form super atom, those uncombined gas molecules exist alone, these single existing gas molecules are ionized to form similar single atom ions, which will have a significant injection effect on wafer surface lattice when subsequent bombardment wafer surface, affect the surface smoothness and lattice quality. In order to improve the process effect of wafer surface treatment, it is necessary to screen out single atom ions in super atom beam source and improve the proportion of super atom ions in super atom beam source.

[0004] Therefore, it is urgent to provide a magnetic screening module and super atom beam source screening device. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a magnetic screening module and super atom beam source screening device to screen out single atom ions in super atom beam source.

[0006] To achieve this purpose, the utility model adopts the following technical scheme:

[0007] The magnetic screening module comprises an even number of magnets, the even number of magnets are uniformly arranged into a ring-shaped magnetic array along the circumference, in the ring-shaped magnetic array, every two opposite magnets form a magnetic pair with the same magnetization direction, the included angle of the magnetization directions of adjacent magnetic pairs is 360° / n, wherein n is the number of magnetic pairs, and n is greater than or equal to 2, so as to form a region with the lowest synthetic magnetic field strength in the center of the ring-shaped magnetic array.

[0008] As an optional scheme of the magnetic screening module, the number of the magnets is 12, and the included angle between the magnetization directions of two adjacent magnets is 60°.

[0009] As an optional scheme of the magnetic screening module, the magnet is in isosceles trapezoidal structure.

[0010] As an optional scheme of the magnetic screening module, the length of the annular magnetic array is 20mm-160mm.

[0011] As an optional scheme of the magnetic screening module, the magnetic screening module further comprises a support assembly, and the annular magnetic array is fixedly connected to the support assembly.

[0012] As an optional scheme of the magnetic screening module, the support assembly comprises an annular base body, and the inner wall of the annular base body is uniformly provided with mounting positions in the circumferential direction, and the magnets are fixed to the mounting positions.

[0013] As an optional scheme of the magnetic screening module, the support assembly further comprises a reinforcing sleeve body, and the annular base body and the reinforcing sleeve body are coaxially arranged, and the annular magnetic array is fixedly arranged in the annular space between the annular base body and the reinforcing sleeve body.

[0014] As an optional scheme of the magnetic screening module, the magnetic screening module further comprises a magnetic conducting cylinder coaxially arranged in the reinforcing sleeve body, and the magnetic conducting cylinder forms a magnetic screening channel inside.

[0015] As an optional scheme of the magnetic screening module, the magnetic screening module further comprises two insulating end covers, and the two insulating end covers are symmetrically arranged at the axial two ends of the annular magnetic array.

[0016] The radial gap is arranged between the magnetic conducting cylinder and the reinforcing sleeve body, and the insulating end cover can isolate the reinforcing sleeve body and the magnetic conducting cylinder.

[0017] The super atom beam source screening device comprises the magnetic screening module according to any one of the above schemes.

[0018] The beneficial effects of the utility model are as follows:

[0019] The magnetic screening module provided by the utility model, including even number of magnets, even number of magnets are arranged into annular magnetic array along the circumference, in annular magnetic array, every two opposite arranged magnets form magnetic pair with same magnetization direction, the included angle of magnetization direction of adjacent magnetic pair is 360° / n, wherein, n is the number of magnetic pair, and n≥2, so that the center of annular magnetic array forms the area with lowest synthetic magnetic field intensity. Since the mass of super atom ion is several hundred to several thousand times of the mass of single atom ion, for super atom ion and single atom ion with same kinetic energy, the deflection radius will be different by tens to hundreds of times, when super atom beam source passes through the central axis of annular magnetic array, the deflection radius of super atom ion with larger mass is very large, and the super atom ion will not deflect in the magnetic field generated by annular magnetic array, and can pass through the magnetic screening module smoothly, while the single atom ion with smaller mass will deflect in the magnetic field generated by annular magnetic array, so that the single atom ion is screened out.

[0020] The utility model provides a super atom beam source screening device, application above -mentioned magnetic screening module, when super atom beam source passes through the center of annular magnetic array of magnetic screening module, the super atom ion in super atom beam source will be directly emitted from magnetic screening module, and almost will not deflect, while single atom ion will deflect and fall in magnetic screening module, so that the single atom ion is screened out. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is the arrangement schematic view of annular magnetic array in the magnetic screening module provided by the utility model specific embodiment;

[0022] Figure 2 It is the cross section schematic view of annular magnetic array in the magnetic screening module provided by the utility model specific embodiment;

[0023] Figure 3 It is the state schematic view of magnet installation in annular base body when the utility model specific embodiment provides;

[0024] Figure 4 It is the cross section schematic view of super atom beam source screening device provided by the utility model specific embodiment.

[0025] In the drawing:

[0026] 1, annular magnetic array;11, magnet;

[0027] 2, support assembly;21, annular base body;211, installation site;22, reinforcing sleeve body;

[0028] 3, magnetic conducting cylinder;31, flange;

[0029] 4, insulating end cover. DETAILED DESCRIPTION

[0030] In order to make the technical problems solved by the utility model, the technical scheme adopted and the technical effects reached more clear, the technical scheme of the utility model is further illustrated below in combination with the drawings and through specific implementation manners.

[0031] In the description of the utility model, unless another explicit stipulation and limitation, the terms "connection", "connect", "fix" should be understood broadly, for example, can be fixed connection, also can be detachable connection, or be integrated, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through intermediate medium, can be the intercommunication of two elements or the interaction relationship of two elements. For the ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0032] As shown in Figure 1 And Figure 2 The embodiment provides a magnetic screening module, which comprises an even number of magnets 11, the even number of magnets 11 are uniformly arranged into a ring-shaped magnetic array 1 in a circumferential direction, in the ring-shaped magnetic array 1, every two opposite magnets 11 form a magnetic pair with the same magnetization direction, and the included angle of the magnetization directions of adjacent magnetic pairs is 360° / n, wherein n is the number of magnetic pairs, and n is greater than or equal to 2, so that a region with the lowest synthetic magnetic field strength is formed at the center of the ring-shaped magnetic array 1.

[0033] The working principle of the magnetic screening module provided by the embodiment is as follows: assuming that the mass of ions is m, the charge amount is elementary charge e, the kinetic energy is E, and the uniform magnetic field is B, the ions make circular motion in the magnetic field, and the motion radius is:

[0034]

[0035] Since the mass of superatomic ions is several hundred to several thousand times that of single-atomic ions, for superatomic ions and single-atomic ions with the same kinetic energy, the deflection radius will be tens to hundreds of times different, when the superatomic beam source passes through the center of the ring-shaped magnetic array 1, the deflection radius of the superatomic ions with larger mass is large, the superatomic ions will not be deflected in the magnetic field generated by the ring-shaped magnetic array 1, and can pass through the magnetic screening module smoothly, while the single-atomic ions with smaller mass will be deflected in the magnetic field generated by the ring-shaped magnetic array 1, so that the single-atomic ions are screened out.

[0036] In an embodiment, the number of magnets 11 is 12, and the included angle of the magnetization directions of adjacent two magnets 11 is 60°. By arranging 12 magnets 11 in a ring-shaped array, the included angle of the magnetization directions of adjacent magnets 11 is 60°, the symmetry of the magnetic field distribution and the harmonic optimization are realized. The ring-shaped array structure makes the spatial distribution of the magnetic field more uniform, reduces the local magnetic field distortion, and the periodic change of the magnetization direction of 60° between adjacent magnets 11 can effectively suppress the magnetic field harmonics of specific frequencies, thereby reducing the torque fluctuation and energy loss, and improving the stability of the magnetic screening module.

[0037] Of course, in other embodiments, the number of magnets 11 can also be 4, 6 or other even numbers.

[0038] In an embodiment, the magnet 11 is isosceles trapezoidal structure. By setting the magnet 11 as isosceles trapezoidal structure, the upper base and the lower base of the magnet 11 are both planes, and the annular magnetic array 1 formed is more convenient to install.

[0039] In other embodiments, the magnet 11 can also be a semi-annular magnet.

[0040] In an embodiment, the length of the annular magnetic array 1 is 20mm-160mm. By controlling the length of the annular magnetic array 1, the length of the magnetic screening channel is also controlled, avoiding a large number of single-atom ions from being deflected and shooting to the channel side wall of the magnetic screening channel, causing the temperature to rise sharply, affecting the magnetic field strength, and then affecting the reliability of the magnetic screening module.

[0041] In an embodiment, as shown in Figure 3 and Figure 4 The magnetic screening module also includes a support assembly 2, and the annular magnetic array 1 is fixedly connected to the support assembly 2. By fixing the annular magnetic array 1 through the support assembly 2, the position and magnetization direction of the magnet 11 in the annular magnetic array 1 are avoided to change, affecting the magnetic field strength.

[0042] In an embodiment, the support assembly 2 includes an annular base body 21, and the inner wall of the annular base body 21 is uniformly arranged with mounting sites 211, and the magnet 11 is fixed to the mounting site 211. The even number of magnets 11 are one-to-one correspondingly arranged on the even number of mounting sites 211 to form the annular magnetic array 1.

[0043] Specifically, for the isosceles trapezoidal structure magnet 11, the inner wall of the annular base body 21 is uniformly arranged with a mounting surface matched with the lower surface of the isosceles trapezoidal structure magnet 11, and the lower surface of the isosceles trapezoidal magnet 11 is bonded to the mounting surface by double-component epoxy resin or acrylic adhesive glue, etc. to realize the fixation of the magnet 11.

[0044] Of course, in other embodiments, the magnet 11 can also be clamped in the clamping groove or inserted in the insertion groove by setting the clamping groove or the insertion groove on the mounting site 211.

[0045] In one embodiment, the support component 2 further includes a reinforcing sleeve 22. The annular base 21 and the reinforcing sleeve 22 are coaxially arranged, and the annular magnetic array 1 is fixed in the annular space between the annular base 21 and the reinforcing sleeve 22. After an even number of magnets 11 are installed on the annular base 21 one by one, the reinforcing sleeve 22 is inserted into the inner cavity of the annular magnetic array 1, and the outer wall of the reinforcing sleeve 22 is interference-fitted with the inner cavity of the annular magnetic array 1 to prevent the position of the magnets 11 from changing due to poor adhesion, thus affecting the magnetic field strength.

[0046] Specifically, the reinforcing sleeve 22 is a cylindrical support sleeve, which is made of metal and does not affect the magnetic field strength and magnetic transmission of the annular magnetic array 1.

[0047] In one embodiment, the magnetic screening module further includes a magnetically conductive cylinder 3 coaxially sleeved within the reinforcing sleeve 22, with a magnetic screening channel formed inside the magnetically conductive cylinder 3. By setting the magnetically conductive cylinder 3, the magnetic field generated by the annular magnetic array 1 can be transmitted to the magnetically conductive cylinder 3, thus forming a magnetic screening channel inside the magnetically conductive cylinder 3. When the superatomic beam originates from the central axis of the magnetically conductive cylinder 3 and passes through it, if a single-atom ion deflected within the magnetic screening channel falls, it will not fall directly onto the annular magnetic array 1, but rather onto the inner wall of the magnetically conductive cylinder 3. This avoids the direct fall onto the annular magnetic array 1, which would cause the annular magnetic array 1 to heat up too quickly and significantly affect the magnetic field strength.

[0048] Specifically, the magnetic tube 3 is made of metal and is resistant to corrosion; stainless steel is preferred.

[0049] In one embodiment, the magnetic screening module further includes two insulating end caps 4, which are symmetrically disposed at both ends of the annular magnetic array 1. The two insulating end caps 4 serve to limit and fix the annular magnetic array 1 in the axial direction.

[0050] A radial gap is provided between the magnetic cylinder 3 and the reinforcing sleeve 22, and the insulating end cap 4 can isolate the reinforcing sleeve 22 and the magnetic cylinder 3. Due to the high mass of the superatomic ions, the probability of generating electrons after colliding with the magnetic cylinder 3 is very high. By testing the charge quantity of the magnetic cylinder 3, the screening effect of the magnetic screening module can be detected. To prevent the contact of the cylindrical support sleeve made of metal from affecting the charge of the magnetic cylinder 3, and thus affecting the accuracy of the charge quantity test, a radial gap is provided between the magnetic cylinder 3 and the reinforcing sleeve 22 for radial conductive isolation. To avoid affecting the axial support of the reinforcing sleeve 22, the end cap that axially limits and fixes the reinforcing sleeve 22 is set as the insulating end cap 4, achieving axial conductive isolation between the magnetic cylinder 3 and the reinforcing sleeve 22.

[0051] Furthermore, the magnetic cylinder 3 is provided with fixed flanges 31 at both ends, and a snap-fit ​​groove is provided on the side of the fixed flanges 31 that are close to each other. The center hole of the insulating end cover 4 is a trapezoidal hole. The fixed flange 31 is located in the larger hole of the trapezoidal hole. The smaller hole of the trapezoidal hole is interference-fitted with the bottom of the snap-fit ​​groove to achieve the support and fixation of the magnetic cylinder 3.

[0052] This embodiment also provides a superatomic beam source screening device, including the aforementioned magnetic screening module. In the superatomic beam source screening device, using the aforementioned magnetic screening module, when the superatomic beam source passes through the central axis of the annular magnetic array 1 of the magnetic screening module, the superatomic ions in the superatomic beam source will be directly emitted from the magnetic screening module with almost no deflection; while monatomic ions will be deflected and fall off in the magnetic screening module, thereby achieving the screening out of monatomic ions.

[0053] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A magnetic screening module, characterized in that, The array includes an even number of magnets (11), which are evenly arranged in a ring magnetic array (1) along the circumference. In the ring magnetic array (1), every two opposing magnets (11) form a magnetic pair with the same magnetization direction. The angle between the magnetization directions of adjacent magnetic pairs is 360° / n, where n is the number of magnetic pairs and n≥2, so as to form a region with the lowest combined magnetic field strength at the center of the ring magnetic array (1).

2. The magnetic screening module according to claim 1, characterized in that, The number of magnets (11) is 12, and the angle between the magnetization directions of two adjacent magnets (11) is 60°.

3. The magnetic screening module according to claim 2, characterized in that, The magnet (11) has an isosceles trapezoidal structure.

4. The magnetic screening module according to claim 3, characterized in that, The length of the annular magnetic array (1) is 20mm to 160mm.

5. The magnetic screening module according to any one of claims 1-4, characterized in that, The magnetic screening module also includes a support component (2), and the annular magnetic array (1) is fixedly connected to the support component (2).

6. The magnetic screening module according to claim 5, characterized in that, The support component (2) includes an annular base (21), and mounting positions (211) are evenly distributed around the inner wall of the annular base (21). The magnet (11) is fixed to the mounting position (211).

7. The magnetic screening module according to claim 6, characterized in that, The support component (2) also includes a reinforcing sleeve (22), the annular base (21) and the reinforcing sleeve (22) are coaxially arranged, and the annular magnetic array (1) is fixed in the annular space between the annular base (21) and the reinforcing sleeve (22).

8. The magnetic screening module according to claim 7, characterized in that, The magnetic screening module also includes a magnetic tube (3) coaxially sleeved inside the reinforcing sleeve (22), and a magnetic screening channel is formed inside the magnetic tube (3).

9. The magnetic screening module according to claim 8, characterized in that, The magnetic screening module also includes two insulating end caps (4), which are symmetrically arranged at both ends of the annular magnetic array (1). A radial gap is provided between the magnetic tube (3) and the reinforcing sleeve (22), and the insulating end cap (4) can isolate the reinforcing sleeve (22) and the magnetic tube (3).

10. A superatomic beam source screening device, characterized in that, Includes the magnetic screening module as described in any one of claims 1-9.

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