Clamping tool for wafer detection

Abstract

The utility model discloses a clamping tool for wafer detection, and relates to the technical field of wafer clamps. The device comprises a detection bench, the detection bench is fixedly provided with a driving mechanism, a moving part of the driving mechanism is fixedly connected with two groups of connecting assemblies, the driving mechanism drives the two groups of connecting assemblies to be close to or far away from each other, and the end parts of the connecting assemblies are fixedly connected with clamping plates. According to the utility model, the synchronous wheel and the synchronous belt are driven by the motor, so that the two groups of connecting assemblies and the clamping plates are close to each other or far away from each other, thereby adapting to wafers with different sizes, solving the problem that the existing clamp cannot be adjusted according to the sizes of the wafers, and improving the flexibility and accuracy of detection; through forward and reverse rotation of the motor, opening and closing of the clamping plate can be rapidly controlled, so that rapid fixing and releasing of the wafer are realized, the detection efficiency is improved, the operation time is reduced, and the convenience of the whole detection process is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer clamp technical field, concretely relates to a clamping tool of wafer detection. BACKGROUND

[0002] Wafer detection is an important link in the semiconductor manufacturing process, and its main purpose is to ensure the quality, production consistency and reliability of wafers. With the continuous development of semiconductor technology, the size of wafers gradually increases, and the requirement of detection technology is also higher and higher.

[0003] The existing detection clamp has some problems when in use, especially when fixing the wafer, most of the existing clamps do not have the function of adjusting according to the size of the wafer, which leads to the fact that the clamp cannot provide stable fixing effect when detecting wafers of different sizes, in addition, the existing technology does not have the structure of quickly fixing and taking the wafer when in use.

[0004] Therefore, a clamping tool for wafer detection is proposed. UTILITY MODEL CONTENTS

[0005] The utility model aims at: for solving the problem in the prior art background, the utility model provides a clamping tool for wafer detection.

[0006] The utility model discloses a specific technical scheme in order to realize the above-mentioned purpose:

[0007] A clamping tool for wafer detection, including detection table, fixedly installed on the detection table open drive mechanism, the moving part of open drive mechanism is fixedly connected with two groups of connecting components, through open drive mechanism to drive two groups of connecting components to approach or move away from each other, the end of connecting component is fixedly connected with clamping plate, to fix and clamp the wafer on the top surface of detection table with two groups of clamping plates.

[0008] Further, the open drive mechanism includes the base fixedly installed on the rear side wall of the detection table, and the top surface of the base is fixedly connected with two groups of L mounting frames, the rear side wall of the L mounting frame is rotatably connected with the motor, the front side wall of one group of L mounting frames is fixedly connected with the synchronous belt, and the output end of the synchronous belt is fixedly connected with the corresponding synchronous wheel, the surface of the two groups of motors is sleeved with the synchronous belt, and the two groups of connecting components are fixed on the upper and lower sides of the synchronous belt.

[0009] Further, the top surface of one group of connecting components is fixedly connected with the clamping plate, and the top surface of the base is fixedly installed with the photoelectric limit switch, the top surface of the base is fixedly installed with two groups of limit blocks to limit the transverse movement of the connecting component.

[0010] Furthermore, the connecting assembly includes a movable frame, which is fixed to the surface of the timing belt by a pressure plate and bolts. A connecting frame is fixedly connected to the end of the movable frame, and a clamping plate is fixedly installed on the connecting frame.

[0011] Furthermore, a guide rail is fixedly installed on the top surface of the base, and the movable frame is slidably disposed on the surface of the guide rail and the top surface of the base.

[0012] Furthermore, both sets of clamping plates have V-shaped openings on their opposite surfaces to clamp the wafer through the V-shaped openings on the surface of the clamping plates.

[0013] The beneficial effects of this utility model are as follows:

[0014] By using a motor to drive a synchronous pulley and a synchronous belt, the two sets of connecting components and clamping plates can be brought closer or further apart, thus adapting to wafers of different sizes. This solves the problem that existing fixtures cannot be adjusted according to wafer size, and improves the flexibility and accuracy of inspection.

[0015] By controlling the forward and reverse rotation of the motor, the opening and closing of the clamping plate can be quickly controlled, thereby achieving rapid fixing and release of the wafer, improving testing efficiency, reducing operation time, and enhancing the convenience of the overall testing process.

[0016] By setting the V-shaped opening of the clamping plate, the wafer can be clamped more stably, preventing the wafer from slipping or shifting during the inspection process. The V-shaped opening of the clamping plate can better fit the edge of the wafer, providing uniform clamping force, ensuring the stability of the wafer during the inspection process, improving the inspection accuracy, and reducing the inspection error caused by unstable clamping.

[0017] By setting photoelectric limit switches and limit blocks, the movement range of the clamping plate can be effectively controlled to prevent the clamping plate from exceeding the predetermined stroke, thereby avoiding damage to the wafer. When the connecting component moves to the predetermined position, the photoelectric limit switch will sense it and stop the rotation of the motor, ensuring that the clamping plate does not get too close to or away from the wafer, thus protecting the integrity of the wafer. Attached Figure Description

[0018] Fig. 1 This is a three-dimensional structural diagram of the present invention;

[0019] Fig. 2 This is a rear view of the present invention;

[0020] Fig. 3 This is a partial schematic diagram of the present invention;

[0021] Reference numerals in the attached drawings: 1. Testing table; 2. Drive mechanism; 201. Base; 202. L-shaped mounting bracket; 203. Synchronous pulley; 204. Motor; 205. Synchronous belt; 3. Connecting assembly; 301. Moving frame; 302. Pressure plate; 303. Bolt; 304. Connecting frame; 305. Guide rail; 4. Clamping plate; 5. Blocking plate; 6. Photoelectric limit switch; 7. Limit block. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0024] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of this utility model, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] like Figs. 1 to 3As shown, a wafer inspection clamping tool includes an inspection stage 1. An opening drive mechanism 2 is fixedly mounted on the inspection stage 1. Two sets of connecting components 3 are fixedly connected to the moving part of the opening drive mechanism 2. The opening drive mechanism 2 drives the two sets of connecting components 3 to move closer or further apart. A clamping plate 4 is fixedly connected to the end of the connecting components 3 to clamp the wafer on the top surface of the inspection stage 1. More specifically, by placing the wafer on the top surface of the inspection stage 1, the opening drive mechanism 2 drives the two sets of connecting components 3 and the clamping plate 4 to move closer or further apart. By driving the two sets of connecting components 3 and the clamping plate 4 closer together, the clamping plate 4 fixes the wafer on the top surface of the inspection stage 1, thereby enabling the fixing of wafers of different sizes.

[0027] The drive mechanism 2 includes a base 201 fixedly mounted on the rear side wall of the testing station 1. Two sets of L-mount brackets 202 are fixedly connected to the top surface of the base 201. Motors 204 are rotatably connected to the rear side wall of each L-mount bracket 202. A synchronous belt 205 is fixedly connected to the front side wall of one set of L-mount brackets 202, and the output end of the synchronous belt 205 is fixedly connected to a corresponding synchronous pulley 203. The synchronous belt 205 is fitted onto the surfaces of the two sets of motors 204, and two sets of connecting components 3 are fixed to the upper and lower sides of the synchronous belt 205, respectively. More specifically, the motor 204 drives one set of synchronous pulleys 203 to rotate clockwise, allowing the synchronous belt 205 to move the two sets of connecting components 3 and the clamping plate 4 away from each other. Conversely, the motor 204 drives the synchronous pulleys 203 to rotate counterclockwise, causing the synchronous belt 205 to move the two sets of connecting components 3 and the clamping plate 4 closer together, thus clamping the wafer via the clamping plate 4.

[0028] One set of connecting components 3 has a clamping plate 4 fixedly connected to its top surface, and a photoelectric limit switch 6 is fixedly installed on the top surface of the base 201. Two sets of limit blocks 7 are also fixedly installed on the top surface of the base 201 to limit the lateral movement of the connecting components 3. More specifically, through the two sets of photoelectric limit switches 6 and limit blocks 7, when the connecting components 3 are moved by the opening drive mechanism 2, the motor 204 is stopped when the blocking plate 5 enters the photoelectric limit switch 6, thus controlling and limiting the lateral movement of the connecting components 3 and the clamping plate 4 to prevent exceeding the travel limit.

[0029] The connecting assembly 3 includes a movable frame 301, which is fixed to the surface of the timing belt 205 by a pressure plate 302 and bolts 303. A connecting frame 304 is fixedly connected to the end of the movable frame 301, and a clamping plate 4 is fixedly installed on the connecting frame 304. More specifically, the movable frame 301 is fixed to the surface of the timing belt 205 by bolts 303 threadedly inserted into the surfaces of the movable frame 301 and the pressure plate 302, and the clamping plate 4 is fixedly installed via the connecting frame 304 at the end of the movable frame 301.

[0030] A guide rail 305 is fixedly mounted on the top surface of the base 201, and the movable frame 301 is slidably disposed on the surface of the guide rail 305 and the top surface of the base 201. More specifically, the guide rail 305 on the top surface of the base 201 guides and limits the movement of the movable frame 301, making the clamping plate 4 more stable when moving laterally.

[0031] Both sets of clamping plates 4 have V-shaped openings on their opposite surfaces to clamp the wafer through the V-shaped openings on the surface of the clamping plates 4. More specifically, the V-shaped openings on the opposite surfaces of the clamping plates 4 enable the fixing of the blocking plate 5.

[0032] In summary: by placing the wafer on the top surface of the inspection station 1, and by using the drive mechanism 2 to move the two sets of connecting components 3 and the clamping plate 4 closer or further apart, the wafer is fixed to the top surface of the inspection station 1 by the clamping plate 4, thereby enabling the fixing of wafers of different sizes.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A clamping tool for wafer inspection, characterized in that, The device includes a testing station (1), on which an opening drive mechanism (2) is fixedly installed. Two sets of connecting components (3) are fixedly connected to the moving part of the opening drive mechanism (2). The opening drive mechanism (2) drives the two sets of connecting components (3) to move closer or further away from each other. A clamping plate (4) is fixedly connected to the end of the connecting component (3) to clamp the wafer on the top surface of the testing station (1) with the two sets of clamping plates (4).

2. The wafer inspection clamping tool according to claim 1, characterized in that, The opening drive mechanism (2) includes a base (201) fixedly installed on the rear side wall of the testing table (1), and two sets of L-mount brackets (202) are fixedly connected to the top surface of the base (201). The rear side wall of the L-mount bracket (202) is rotatably connected to a motor (204). The front side wall of one set of L-mount brackets (202) is fixedly connected to a synchronous belt (205), and the output end of the synchronous belt (205) is fixedly connected to the corresponding synchronous pulley (203). The surfaces of the two sets of motors (204) are fitted with synchronous belts (205), and two sets of connecting components (3) are fixed on the upper and lower sides of the synchronous belt (205) respectively.

3. The wafer inspection clamping tool according to claim 2, characterized in that, One of the connecting components (3) has a clamping plate (4) fixedly connected to its top surface, and a photoelectric limit switch (6) is fixedly installed on the top surface of the base (201). Two sets of limit blocks (7) are fixedly installed on the top surface of the base (201) to limit the lateral movement of the connecting component (3).

4. The wafer inspection clamping tool according to claim 2, characterized in that, The connecting assembly (3) includes a movable frame (301), which is fixed to the surface of the timing belt (205) by a pressure plate (302) and bolts (303). A connecting frame (304) is fixedly connected to the end of the movable frame (301), and a clamping plate (4) is fixedly installed on the connecting frame (304).

5. A wafer inspection clamping tool according to claim 4, characterized in that, The top surface of the base (201) is fixedly mounted with a guide rail (305), and the movable frame (301) is slidably arranged on the surface of the guide rail (305) and the top surface of the base (201).

6. The wafer inspection clamping tool according to claim 1, characterized in that, Both sets of clamping plates (4) have V-shaped openings on their opposite surfaces to clamp the wafer through the V-shaped openings on the surface of the clamping plates (4).

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