Wafer high-speed swinging and throwing rotating mechanical arm for etching machine

Abstract

The utility model relates to the field of semiconductors, in particular to a high-speed wafer swinging and throwing rotating mechanical arm for an etching machine, a rotating shaft is arranged on a rack, a first supporting arm and a second supporting arm are fixedly mounted on one side of the rotating shaft, and a basket mechanism is detachably mounted between the first supporting arm and the second supporting arm; the flower basket mechanism comprises two side plates which are oppositely arranged in the axial direction of the rotating shaft, a plurality of supporting plates are movably installed between the two side plates, the supporting plates are evenly arranged around the rotating axis of the flower basket mechanism at intervals, the supporting plates are slidably installed on the side plates in the rotating radial direction of the flower basket mechanism, and locking mechanisms are arranged between the supporting plates and the side plates; the supporting plates are adjusted in a sliding mode along the sliding grooves, so that the diameter of a circle defined by the multiple supporting plates is adjusted, and the supporting plates can be matched with wafers of different sizes for use.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a high-speed wafer-swinging and tossing rotary robotic arm for etching machines. Background Technology

[0002] The processing and manufacturing of chips and silicon wafers have very strict environmental requirements, requiring the wafers to be transferred between the tanks for as short a time as possible, otherwise it will greatly affect the cleaning and etching effect.

[0003] In the prior art, utility model patent application number CN200920174973.1 discloses a multi-functional projectile rotation mechanism. In this mechanism, a wafer basket is mounted on a rotatable mechanical arm. Under the action of a motor and a synchronous belt, the mechanical arm rotates to send the wafer basket into an etching tank for etching. After etching, the motor rotates in the opposite direction, causing the mechanical arm to carry the wafer basket from the etching tank into a cleaning tank for cleaning. During the etching and cleaning process, another servo motor on the mechanical arm rotates to drive the wafer basket to rotate, thereby allowing the wafer to rotate at any angle during the etching and cleaning process, ensuring uniform contact between the wafer and the chemical solution.

[0004] The aforementioned multi-functional tossing and rotating mechanism incorporates a wafer basket holder mechanism, the primary function of which is to secure the wafer basket. However, this mechanism can only secure one type of wafer basket, thus limiting its application to etching and cleaning of wafers of a single size, making it unsuitable for use with wafers of different sizes. Utility Model Content

[0005] The purpose of this invention is to provide a high-speed slinging and rotating robotic arm for etching machines, which is easy to match with wafers of different sizes, in order to solve the defects mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] An etching machine uses a high-speed wafer-swinging and rotating robotic arm, comprising a frame. The frame has a rotating shaft driven by a first power unit and rotating around its own axis. A first support arm and a second support arm are fixedly mounted opposite each other on one side of the rotating shaft. A basket mechanism driven by a second power unit is detachably mounted between the first and second support arms. The basket mechanism includes two side plates arranged opposite each other along the axial direction of the rotating shaft. A connecting rod is fixedly mounted between the two side plates. A support plate for fixing the wafer is movably mounted between the two side plates. Multiple support plates are evenly spaced around the axis of rotation of the basket mechanism. The support plates are slidably mounted on the side plates along the radial direction of rotation of the basket mechanism. A locking mechanism is provided between the support plate and the side plates.

[0008] As a further improvement, the support plate is fixedly installed with slide blocks at both ends along the length of the rotating shaft, and the two side plates are respectively provided with radially extending slide grooves that rotate along the flower basket mechanism on the side that is close to each other. The slide grooves correspond one-to-one with the slide blocks, and the slide blocks are slidably installed in the corresponding slide grooves.

[0009] As a further improvement, the locking mechanism includes a screw fixedly installed on the side of the slide away from the support plate. The screw extends in the same direction as the rotating shaft. The side plate is provided with a strip-shaped slot for the screw to pass through. The strip-shaped slot is connected to the corresponding slide groove and the length direction of the strip-shaped slot is in the same direction as the corresponding slide groove. A locking nut is screwed onto the screw.

[0010] As a further improvement, one end of the slide away from the axis of rotation of the basket mechanism and one end of the strip slot away from the axis of rotation of the basket mechanism both penetrate the outer wall of the side plate.

[0011] As a further improvement, a spring pin is movably mounted on the slide block, and an arc-shaped groove is provided on the inner wall of the slide groove for one end of the spring pin to be engaged. The arc-shaped groove is provided in multiples and the multiple arc-shaped grooves are evenly spaced along the length direction of the slide groove.

[0012] As a further improvement, the first support arm is provided with a drive shaft driven by the second power device and rotating around its own axis. A movable plate is detachably installed on the second support arm. A driven shaft coaxially arranged with the drive shaft is rotatably installed on the movable plate. Both the drive shaft and the driven shaft are arranged parallel to the rotating shaft. The ends of the drive shaft and the driven shaft that are close to each other are respectively provided with a polygonal prism-shaped connector. The two side plates that are far apart from each other are respectively provided with mounting grooves for the connectors to be inserted.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This application facilitates the rapid transfer of the basket mechanism between the etching tank and the cleaning tank by the first motor driving the rotating shaft to rotate, and the rotating shaft driving the basket mechanism through the first support arm and the second support arm, thereby avoiding over-etching of the wafer;

[0015] 2. In the process of etching the wafer, the second motor drives the drive shaft to rotate, the drive shaft drives the basket mechanism to rotate, and the basket mechanism drives the wafer to rotate, so that the wafer is in uniform contact with the etching solution, thereby improving the etching effect on the wafer.

[0016] 3. This application allows for adjustment of the diameter of the circle formed by multiple support plates by sliding the support plates along the groove, so as to match the use of wafers of different sizes;

[0017] 4. When the support plate is slidably adjusted along the slide groove, when the spring pin moves to be aligned with the arc groove, the spring's thrust causes one end of the spring pin to engage in the arc groove, thereby increasing the resistance of the slide block moving along the slide groove and playing a preliminary positioning role for the support plate, improving the convenience of adjusting the support plate; at the same time, it is also convenient to observe the position of the spring pin in the arc groove, thereby making it easy to adjust multiple support plates to the same position.

[0018] 5. After the movable plate is removed from the second support arm, the basket mechanism can be removed from between the first and second support arms to facilitate the assembly and disassembly of the wafers inside the basket mechanism. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model;

[0021] Figure 2 yes Figure 1 A top-down view;

[0022] Figure 3 This is a schematic diagram of the structure of the flower basket mechanism according to an embodiment of the present utility model;

[0023] Figure 4 This is an exploded view of the flower basket mechanism according to an embodiment of the present utility model;

[0024] Figure 5 This is a schematic diagram of the slide block according to an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the first support arm in an embodiment of this utility model.

[0026] In the diagram: 1-Frame; 2-Base plate; 3-Upright plate; 4-Rotating shaft; 5-First motor; 6-Support shaft; 7-First support arm; 8-Second support arm; 9-Basket mechanism; 10-Etching tank; 11-Cleaning tank; 12-Side plate; 13-Connecting rod; 14-Support plate; 15-Divider plate; 16-Slide groove; 17-Screw; 18-Strip groove; 19-Locking nut; 20-Mounting cavity; 21-Spring pin; 22-Stop block; 23-Spring; 24-Arc groove; 25-Drive shaft; 26-Slide seat; 27-Second motor; 28-First sprocket; 29-Second sprocket; 30-First chain; 31-Third sprocket; 32-Fourth sprocket; 33-Second chain; 34-Moving plate; 35-Driven shaft; 36-Plug; 37-Connecting column; 38-Mounting groove. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] like Figures 1 to 6 As shown, the etching machine uses a high-speed wafer-swinging and rotating robotic arm, which includes a frame 1. The frame 1 has a base plate 2, and two opposing vertical plates 3 are bolted or welded to the top of the base plate 2. Between the two vertical plates 3 is a rotating shaft 4 driven by a first power device and rotating around its own axis. The rotating shaft 4 extends back and forth. The first power device is a first motor 5 bolted to the front vertical plate 3. The front end of the rotating shaft 4 is coaxially fixed to the rotating shaft of the first motor 5 by bolts. A support shaft 6, coaxially arranged with the rotating shaft 4, is rotatably mounted on the rear vertical plate 3 via bearings. The rear end of the rotating shaft 4 is rotatably connected to the support shaft 6 via bearings.

[0029] A first support arm 7 and a second support arm 8, arranged opposite each other, are bolted to one side of the rotating shaft 4. A basket mechanism 9, driven by a second power device, is detachably installed between the first support arm 7 and the second support arm 8. An etching tank 10 is provided on the left side of the frame 1, and a cleaning tank 11 is provided on the right side. The rotating shaft 4 is driven to rotate counterclockwise by the first motor 5. The rotating shaft 4, through the first support arm 7 and the second support arm 8, drives the basket mechanism 9 into the etching tank 10 to etch the wafer. After etching, the rotating shaft 4 is driven to rotate clockwise by the first motor 5. The rotating shaft 4, through the first support arm 7 and the second support arm 8, quickly transfers the basket mechanism 9 from the etching tank 10 to the cleaning tank 11 to avoid over-etching of the wafer and ensure the etching effect.

[0030] like Figure 3 and Figure 4 As shown, the basket mechanism 9 includes two circular side plates 12 arranged opposite each other along the axial direction of the rotating shaft 4. Two connecting rods 13 arranged opposite each other are fixed between the two side plates 12 by bolts to ensure the stability of the connection between the two side plates 12. A support plate 14 for fixing the wafer is movably installed between the two side plates 12. The support plate 14 is a long strip extending along the axial direction of the rotating shaft 4. Multiple support plates 14 are evenly spaced around the axis of the side plates 12. The wafer is placed between the multiple support plates 14. Multiple partition plates 15 for separating the wafer are integrally formed on the side of the support plate 14 near the center of the side plate 12. The multiple partition plates 15 are evenly spaced along the length direction of the support plate 14.

[0031] The support plate 14 is slidably mounted on the side plate 12 along the radial direction of the side plate 12, and a locking mechanism is provided between the support plate 14 and the side plate 12.

[0032] Specifically, slide blocks 26 are welded or bolted to the front and rear ends of the support plate 14 along the length of the shaft 4. Each of the two side plates 12 has a radially extending groove 16 on its adjacent side. Each groove 16 corresponds to a slide block 26, and the slide block 26 is slidably installed within the corresponding groove 16, providing support and guidance for the side plate 12. The diameter of the circle formed by the multiple support plates 14 can be adjusted by sliding the support plate 14 along the groove 16 to accommodate wafers of different sizes.

[0033] The locking mechanism includes a screw 17 welded to the side of the slide 26 away from the support plate 14. The screw 17 extends in the same direction as the rotating shaft 4. The side plate 12 has a strip-shaped slot 18 through which the screw 17 passes. The strip-shaped slot 18 connects to the corresponding slide groove 16 and extends in the same direction as the corresponding slide groove 16. The width of the strip-shaped slot 18 is smaller than the width of the slide groove 16. A locking nut 19 is screwed onto the end of the screw 17 away from the slide 26. In actual use, first loosen the locking nut 19 to move it away from the corresponding slide 26. The locking nut 19 separates from the corresponding side plate 12. Then, the support plate 14 can be slid along the slide groove 16 to adjust it. After adjusting the support plate 14 to the desired position, tighten the locking nut 19 to move it closer to the corresponding slide 26. The locking nut 19 presses against the corresponding side plate 12, thereby fixing the position of the support plate 14.

[0034] To facilitate the removal of the support plate 14 from between the two side plates 12, the end of the slide groove 16 away from the center of the side plate 12 and the end of the strip groove 18 away from the center of the side plate 12 both penetrate the outer peripheral wall of the side plate 12.

[0035] like Figure 5As shown, two mounting cavities 20 are provided opposite each other in the slide block 26 along the width direction of the slide groove 16. The side walls of the two mounting cavities 20 that are far apart from each other are respectively provided with through holes that penetrate outward through the outer wall of the slide block 26. A spring pin 21 is slidably installed in the through hole along the width direction of the slide groove 16. One end of the spring pin 21 is integrally formed with a stop block 22 located in the corresponding mounting cavity 20. The side of the two stop blocks 22 that are close to each other is connected to the inner wall of the corresponding mounting cavity 20 respectively with a spring 23. The end of the spring pin 21 that extends outward from the outside of the slide block 26 is arc-shaped. The two side walls of the slide groove 16 along the width direction are respectively provided with arc-shaped grooves 24 for the corresponding spring pin 21 to be inserted. There are multiple arc-shaped grooves 24, and the multiple arc-shaped grooves 24 are evenly spaced along the length direction of the slide groove 16.

[0036] When the support plate 14 is slidably adjusted along the slide groove 16, the support plate 14 drives the slide block 26 to move along the slide groove 16. When the slide block 26 drives the spring pin 21 to align with the arc groove 24, the thrust of the spring 23 causes one end of the spring pin 21 to be engaged in the arc groove 24, thereby increasing the resistance of the slide block 26 moving along the slide groove 16, which plays a preliminary positioning role for the support plate 14 and improves the convenience of adjusting the support plate 14. At the same time, it is also convenient to observe the position of the arc groove 24 where the spring pin 21 is located, so as to conveniently adjust multiple support plates 14 to the same position.

[0037] like Figure 2 and Figure 6 As shown, the first support arm 7 is equipped with a drive shaft 25 driven by a second power device and rotating around its own axis. The drive shaft 25 is rotatably mounted on the first support arm 7 via bearings. The second power device is specifically a second motor 27 bolted to the rear upright plate 3. A first sprocket 28 is fixedly mounted on the rotating shaft of the second motor 27, and a second sprocket 29 is fixedly mounted on the support shaft 6 located outside the rotating shaft 4. A first chain 30 connects the first sprocket 28 and the second sprocket 29. Both the rotating shaft 4 and the first support arm 7 are hollow and their inner cavities are connected. A third sprocket 31 is fixedly mounted on the support shaft 6 located inside the rotating shaft 4, and a fourth sprocket 32 ​​is fixedly mounted on the drive shaft 25 located inside the first support arm 7. A second chain 33 connects the third sprocket 31 and the fourth sprocket 32. When the second motor 27 is working, it drives the support shaft 6 to rotate via the first chain 30, and the support shaft 6 drives the drive shaft 25 to rotate via the second chain 33.

[0038] like Figure 3As shown, a movable plate 34 is detachably installed on the side of the second support arm 8 away from the first support arm 7 by bolts. A driven shaft 35, coaxially arranged with the drive shaft 25, is rotatably installed on the movable plate 34 by bearings. The second support arm 8 is provided with a reserved hole for the driven shaft 35 to pass through. Both the drive shaft 25 and the driven shaft 35 are arranged parallel to the rotating shaft 4. The ends of the drive shaft 25 and the driven shaft 35 that are close to each other are respectively integrally formed with coaxially arranged polygonal prism-shaped plugs 36. The two side plates 12 that are far from each other are respectively integrally formed with coaxially arranged connecting posts 37. The end of the connecting post 37 that is far from the side plate 12 is provided with an installation groove 38 for the plugs 36 to be inserted.

[0039] When installing the basket mechanism 9, first insert the connector 36 at the end of the drive shaft 25 into the mounting slot 38 at the rear end of the basket mechanism 9. Then, install the movable plate 34 onto the second support arm 8 with bolts, and insert the connector 36 at the end of the driven shaft 35 into the mounting slot 38 at the front end of the basket mechanism 9. Thus, the drive shaft 25 and the driven shaft 35 provide support for the basket mechanism 9. Furthermore, during the wafer etching process, the second motor 27 can drive the drive shaft 25 to rotate, which in turn drives the basket mechanism 9 to rotate, thereby causing the wafer to rotate and ensuring uniform contact between the wafer and the etching solution, improving the etching effect.

[0040] Conversely, after removing the movable plate 34 from the second support arm 8, the basket mechanism 9 can be removed from between the first support arm 7 and the second support arm 8 to allow for the assembly and disassembly of the wafers within the basket mechanism 9.

[0041] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A high-speed rotating robotic arm for slinging and tossing wafers in an etching machine, characterized in that: The device includes a frame on which a rotating shaft driven by a first power device and rotating about its own axis is mounted. A first support arm and a second support arm are fixedly mounted on one side of the rotating shaft and are arranged opposite each other. A basket mechanism driven by a second power device is detachably mounted between the first support arm and the second support arm. The basket mechanism includes two side plates arranged opposite each other along the axial direction of the rotating shaft. A connecting rod is fixedly mounted between the two side plates. A support plate for fixing a wafer is movably mounted between the two side plates. Multiple support plates are evenly spaced around the axis of rotation of the basket mechanism. The support plates are slidably mounted on the side plates along the radial direction of rotation of the basket mechanism. A locking mechanism is provided between the support plate and the side plate.

2. The high-speed wafer-swinging and throwing rotary robotic arm for etching machines as described in claim 1, characterized in that: The support plate is fixedly mounted with slide blocks at both ends along the length of the rotating shaft. The two side plates are respectively provided with radially extending slide grooves on the side that is close to each other, which rotate along the flower basket mechanism. The slide grooves correspond one-to-one with the slide blocks, and the slide blocks are slidably installed in the corresponding slide grooves.

3. The high-speed wafer-swinging and slinging rotary robotic arm for etching machines as described in claim 2, characterized in that: The locking mechanism includes a screw fixedly installed on the side of the slide away from the support plate. The screw extends in the same direction as the rotating shaft. The side plate is provided with a strip-shaped slot for the screw to pass through. The strip-shaped slot is connected to the corresponding slide groove and the length direction of the strip-shaped slot is in the same direction as the corresponding slide groove. A locking nut is screwed onto the screw.

4. The high-speed wafer-swinging and throwing rotary robotic arm for etching machines as described in claim 3, characterized in that: The end of the chute away from the axis of rotation of the flower basket mechanism and the end of the strip slot away from the axis of rotation of the flower basket mechanism both penetrate the outer wall of the side plate.

5. The high-speed wafer-swinging and slinging rotary robotic arm for etching machines as described in claim 2, characterized in that: A spring pin is movably mounted on the slide block, and an arc-shaped groove is provided on the inner wall of the slide groove for one end of the spring pin to be inserted. The arc-shaped groove is provided in multiple ways and the multiple arc-shaped grooves are evenly spaced along the length direction of the slide groove.

6. The high-speed wafer-swinging and throwing rotary robotic arm for etching machines as described in claim 1, characterized in that: The first support arm is provided with a drive shaft driven by the second power device and rotating around its own axis. The second support arm is detachably mounted with a movable plate. A driven shaft coaxially arranged with the drive shaft is rotatably mounted on the movable plate. Both the drive shaft and the driven shaft are arranged parallel to the rotating shaft. The ends of the drive shaft and the driven shaft that are close to each other are respectively provided with a polygonal prism-shaped connector. The two side plates that are far apart from each other are respectively provided with mounting grooves for the connectors to be inserted.

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