Vertical insulating layer spraying equipment

Abstract

The utility model relates to a vertical insulating layer spray plating device which comprises a pretreatment cavity, a first spray plating cavity, a second spray plating cavity and an annealing cavity which are connected in sequence, and each of the pretreatment cavity, the first spray plating cavity, the second spray plating cavity and the annealing cavity comprises a shell and a horizontal conveying mechanism arranged in the shell; a vacuumizing opening and a nitrogen interface are formed in each shell, and a heating mechanism is arranged in each shell; gates capable of selectively sealing the shell or sequentially connecting the horizontal conveying mechanisms end to end during opening and closing are arranged at the positions, corresponding to the front and rear ends of the horizontal conveying mechanisms, of the shell; a cabin door capable of selectively sealing the shell is arranged at the position, corresponding to at least one side of the horizontal conveying mechanism, of the shell. A cabin door of the first spraying cavity is provided with a first spraying head; and a cabin door of the second spraying cavity is provided with a second spraying head. The device has the advantages that a CVD + ALD composite technology is adopted, the thickness of a sprayed insulating layer is small, and adhesion does not exist; equipment is arranged linearly, spraying is carried out on the two sides in the horizontal direction, and simultaneous spraying of the battery piece with two cut edges can be perfectly achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic silicon wafer / cell piece and other industries related to the vertical insulating layer spraying equipment of insulating layer needing insulating spraying of side surface in photovoltaic industry. BACKGROUND

[0002] The photovoltaic silicon wafer / cell piece needs to be cut by laser to divide the whole piece into multiple pieces by thermal cracking. The half-piece cell piece after cutting will cause electric leakage during the test of electric performance, thereby reducing the efficiency of the cut cell piece. It is verified by experiment that the side edge of the half-piece or multiple pieces of the photovoltaic silicon wafer / cell piece is plated with an insulating layer, which can effectively improve the efficiency of the cut cell piece, not only can improve the performance of the cell piece, but also can realize the effect of selling up one grade for the cell piece close to the limit value of grading.

[0003] When the processing and spraying are carried out, the cut half-piece cell piece is stacked and loaded into a metal carrier box, and then is sent into the spraying equipment. The common side edge insulating layer spraying equipment on the market is to rotate the metal carrier box in the rotating disc in the cavity, and the side edge of the cell piece is always upward during the rotation, and the spraying head is designed in an arc shape, and the special gas is sprayed from top to bottom through the gap in the middle of the arc to the upper side of the carrier box to spray the insulating film on the side edge of the half-piece of the silicon wafer / cell piece.

[0004] The defects of the above-mentioned equipment are:

[0005] 1. The rotating disc type structure is adopted. The core working cavity opening is arranged at the upper side, and the maintenance and maintenance need to open the cover upward, which is very inconvenient;

[0006] 2. When the carrier box rotates in the cavity, the cell piece inside will be thrown to the inner wall of the carrier box due to inertia, and the cell piece defects such as crystal separation and hidden crack are generated, thereby reducing the yield of the whole line;

[0007] 3. The metal carrier box loaded with the workpiece is an irregular cuboid, and the convex mechanism is arranged on five surfaces, and the heavy pressure mechanism is arranged on the top surface. The carrier box is vertically used in the front and rear processes, and is placed horizontally in the cavity. Therefore, the automatic equipment such as turnover / rotation matched with the carrier box has too many structures, and the automatic matching of the external equipment is complex, difficult and high in cost;

[0008] 4. The existing carrier box can only be sprayed on one side, and the half-piece cell piece with more than three cut edges cannot be used. When the carrier box is turned over, the cell piece defects such as crystal separation and hidden crack are easily generated, and the automatic turnover structure is too many, and the automatic matching of the external equipment is complex, difficult and high in cost;

[0009] 5. The equipment is too large in size and too high in production capacity, and is not suitable for the single line online application in the cell workshop at present, and the economic benefit is redundant;

[0010] 6、The most fatal defect of the device is that the cavity can only use ALD process (use alternate gas phase precursor molecules to react, each precursor molecule reacts on the surface to complete a layer of deposition). In order to meet the higher insulation value or insulation thickness, the metal carrier needs to rotate in the rotating cavity for multiple times, and multiple spraying deposition can reach the required thickness. This leads to another problem, the thicker the deposited coating, the more serious the battery piece adhesion, the higher the fragment rate, and the lower the customer's economic benefit;

[0011] Therefore, it is necessary to improve and optimize the existing vertical insulation layer spraying equipment to better meet the needs of users. Practical new type content

[0012] The purpose of the embodiment of the utility model is to solve the defects in the prior art by proposing a vertical insulation layer spraying equipment aiming at the shortcomings of the prior art structure.

[0013] In order to achieve the above-mentioned utility model purposes, the vertical insulation layer spraying equipment proposed in the embodiment of the utility model is realized by the following technical scheme:

[0014] A vertical cutout insulation layer spraying equipment, characterized in that: the equipment comprises a pretreatment cavity, a first spraying cavity, a second spraying cavity and an annealing cavity connected in sequence; the pretreatment cavity, the first spraying cavity, the second spraying cavity and the annealing cavity all comprise a shell and a horizontal conveying mechanism arranged in the shell, and the connection between the four and the end of the pretreatment cavity and the annealing cavity correspond to the positions of the front and rear ends of the horizontal conveying mechanism, and the gates capable of selectively sealing the shell or making the horizontal conveying mechanism sequentially connected at the head and tail are arranged at the positions; the shell is provided with a vacuum extraction port and a nitrogen gas interface, and a heating mechanism is arranged in the shell; the position corresponding to at least one side of the horizontal conveying mechanism of the shell is provided with a hatch capable of selectively sealing the shell; the hatch of the first spraying cavity is provided with a first shower head; the hatch of the second spraying cavity is provided with a second shower head; the first shower head and the second shower head are both provided with a plurality of gas inlets and a plurality of gas outlets horizontally and vertically towards the horizontal conveying mechanism.

[0015] The hatches capable of selectively sealing the shell are arranged at both sides of the shell corresponding to the horizontal conveying mechanism.

[0016] The equipment comprises an ALD cavity for ALD process and a CVD cavity for CVD process; the first spraying cavity is one of the ALD cavity and the CVD cavity, and the second spraying cavity is the other one of the ALD cavity and the CVD cavity.

[0017] Cooling water channels are arranged on the top of the shell and the hatches; nitrogen gas interfaces are arranged on the hatches of the pretreatment cavity and the annealing cavity.

[0018] The heating mechanism is a heating lamp group, which is arranged on the inner side of the hatch and below the horizontal conveying mechanism in the shell; and the horizontal conveying mechanism is a metal horizontal conveying roller.

[0019] The first spray head comprises a partition plate set and a main body with a plane outlet end, the main body is internally provided with a plurality of independent first cavities, the first cavities are provided with a plurality of outlets and at least one inlet; the outlets of each first cavity form uniformly linearly arranged air outlet holes at the outlet end through air outlet pipelines, and the air outlet holes of adjacent first cavities are arranged at equal intervals, thereby forming a rectangular array; the main body is further internally provided with air inlet pipelines corresponding to the number of first cavities, the air inlet pipelines are in one-to-one correspondence with the inlets of the first cavities and are in communication with the inlets of the first cavities, and an air inlet interface is formed outside the main body; the partition plate set is detachably fixed at the outlet end and is composed of at least two partition plates which are the same in shape and are stacked; the partition plate forms a long strip-shaped slit corresponding to the air outlet holes of each first cavity.

[0020] The main body is provided with a plurality of second cavities in communication with each other, and the second cavities are provided with a plurality of inlets; the inlets of each second cavity form uniformly linearly arranged air outlet holes at the outlet end through sub-air extraction pipelines, and the air outlet holes of each second cavity are located between the air outlet holes of adjacent first cavities and are arranged at equal intervals; the main body is further internally provided with a main air extraction pipeline, the main air extraction pipeline is in communication with the second cavities, and an air extraction interface is formed outside the main body; the partition plate forms a long strip-shaped slit corresponding to the air outlet holes of each second cavity.

[0021] The air outlet holes and the air outlet holes form a rectangular array as a whole; the first cavities and the second cavities are long strip-shaped and are uniformly and parallelly arranged to the outlet end.

[0022] The main body is a cuboid-shaped metal block, the first cavities, the second cavities, the air outlet pipelines, the air inlet pipelines, the main air extraction pipeline and the sub-air extraction pipelines are formed on the metal block through deep hole drilling; the metal block is further provided with a communication pipeline which is perpendicular to all the second cavities and is formed through deep hole drilling, and the communication pipeline, the first cavities and the second cavities are all sealed at the ends; the air outlet pipelines and the air inlet pipelines are blind holes which are vertically connected to the first cavities; the sub-air extraction pipelines are blind holes which are vertically connected to the second cavities; and the main air extraction pipeline is a blind hole which is vertically connected to the communication pipeline.

[0023] The central axes of all the first cavities are located on a virtual plane, and the central axes of all the second cavities are located on another virtual plane which is parallel to the central axes of the first cavities; the communication pipeline, the first cavities and the second cavities are all through holes, and the ends of the through holes are sealed by plugs.

[0024] Compared with the prior art, the utility model has the beneficial effects that:

[0025] 1. This equipment is arranged in a straight line, occupies a regular area, and has maintenance ports on both sides for easy maintenance;

[0026] 2. The carrier box used is a standard cuboid, with the solar cells placed one on top of the other, and no heavy pressure is required on the top surface. Each box contains 400-700 solar cells.

[0027] 3. The carrier box enters the equipment in a straight line and exits directly. The box has cutouts on both sides, allowing for horizontal spraying on both sides, perfectly solving the problem of simultaneously spraying solar cells with two cut edges. When spraying a single-cut solar cell, the other side of the box is fixed with a sealing plate.

[0028] 4. This equipment employs a CVD+ALD composite process for spraying. First, a thin film is deposited in the first chamber by pyrolyzing gaseous precursor molecules, typically depositing a relatively thick film layer in a single pass (i.e., CVD). Then, in the second chamber, alternating reactions are performed, depositing only a single atomic or molecular-thick film each time (i.e., ALD). This composite process results in a thin insulating layer with no adhesion.

[0029] 5. This equipment adopts a low-temperature composite spraying process. An annealing chamber is set at the tail end of the equipment, which helps to form the sprayed insulating film at the cut and reasonably controls the growth of the film.

[0030] 6. The capacity of this equipment is equal to that of the mainstream equipment before and after it, making it easy to match with various upstream and downstream supporting equipment, and optimizing the footprint for direct single-line connection of customer workshop production lines. Attached Figure Description

[0031] The above features and advantages of the present invention will become clearer and easier to understand from the following description of exemplary embodiments thereof in conjunction with the accompanying drawings.

[0032] Figure 1 This is a schematic diagram of the spray coating equipment according to an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the preheating cavity structure according to an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the ALD cavity structure according to an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the CVD cavity structure according to an embodiment of the present invention;

[0036] Figure 5 This is a cross-sectional schematic diagram of the second spray head according to an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of the partition and spray plate structure of the second spray head in an embodiment of the present invention;

[0038] Figure 7 Figure 1 is a perspective view of a first spray head according to an embodiment of the present application;

[0039] Figure 8 Figure 2 is a perspective view of a first spray head according to an embodiment of the present application;

[0040] Figure 9 Figure 3 is a bottom view of a first spray head according to an embodiment of the present application;

[0041] Figure 10 Figure 4 is a sectional view along A-A of Figure 1; Figure 9

[0042] Figure 11 Figure 5 is a sectional view along C-C of Figure 1; Figure 9

[0043] Figure 12 Figure 6 is a front view of a first spray head according to an embodiment of the present application;

[0044] Figure 13 Figure 7 is a sectional view along B-B of Figure 1; Figure 12

[0045] Figure 14 Figure 8 is a sectional view along D-D of Figure 1; Figure 12

[0046] Figure 15 Figure 9 is a sectional view along E-E of Figure 1; Figure 12

[0047] Figure 10 is a perspective view of a first spray head according to an embodiment of the present application, with a partition group removed; Figure 16

[0048] Figure 11 is a rear view of a first spray head according to an embodiment of the present application, with a partition group removed; Figure 17

[0049] Figure 12 is a sectional view along F-F of Figure 1. Figure 18 DETAILED DESCRIPTION Figure 17 The present application will be described in more detail by the following specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in the specification. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0050] The present application will be described in more detail by the following specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in the specification. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0051] ​​​​​The terms such as "front", "back", "left", "right", "inner", "outer" and the like cited in the specification are only for the convenience of clear description, and are not intended to limit the scope of the utility model, and the change or adjustment of the relative relationship is also considered as the scope of the utility model without substantial change of the technical content.

[0052] In the description of the following embodiments, unless otherwise explicitly specified and limited, the term "connection" and the like should be understood broadly, for example, "connection" can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be indirectly connected through intermediate medium, can be internal communication of two elements or interaction relationship of two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above-mentioned terms in the utility model can be understood according to the specific circumstances.

[0053] Referring to Figures 1-4 As shown in the utility model embodiment, a vertical insulation layer spraying equipment is provided, which mainly comprises a pretreatment cavity a, an annealing cavity d and an ALD cavity b and a CVD cavity c arranged between the pretreatment cavity a and the annealing cavity d, and the ALD cavity b and the CVD cavity c can be arbitrarily changed in sequence according to requirements. In the embodiment, the arrangement order of the above-mentioned cavities is pretreatment cavity a, ALD cavity b, CVD cavity c and annealing cavity d.

[0054] The pretreatment cavity a, the ALD cavity b, the CVD cavity c and the annealing cavity d all comprise a rack 1, a vacuum shell 2 arranged on the rack 1 and a horizontal conveying mechanism 3 arranged in the shell 2.

[0055] The horizontal conveying mechanism 3 adopts a rolling transportation mode to transport the carrier box, and metal horizontal conveying rollers are arranged at the bottoms of all the cavities, and the cavity conveying rollers and the cavity driving motor are sealed by magnetic fluid.

[0056] Gates 4 are arranged at the positions corresponding to the front and rear ends of the horizontal conveying mechanism 3 at the connecting parts between the pretreatment cavity a and the ALD cavity b, between the ALD cavity b and the CVD cavity c, between the CVD cavity c and the annealing cavity d and at the end parts of the pretreatment cavity a and the annealing cavity d, and there are a total of five gates 4. The gate 4 is controlled to rise and fall by a cylinder 41, and when it is lowered, the shell 2 can be selectively sealed, and when it is raised, the horizontal conveying mechanisms 3 in the pretreatment cavity a, the ALD cavity b, the CVD cavity c and the annealing cavity d can be sequentially connected, so that the materials can circulate among the four through the horizontal conveying mechanism 3.

[0057] The shell 2 is provided with a hatch 5 at the positions corresponding to the two sides of the horizontal conveying mechanism 3. The lower side of the hatch 5 is hinged to the shell 2, and the two sides are connected to the shell 2 by a cylinder 51, and the upper part is provided with a hatch lock 52 for selectively fixing the shell 2. Through the cylinder 51, the hatch 5 can selectively seal the shell 2.

[0058] The bottom surface of the shell 2 is provided with a vacuum extraction port 21, and the top surface is provided with six interfaces, two of which are nitrogen gas interfaces 22, the middle two are Pirani type vacuum gauge interfaces 23 for detecting the vacuum degree of the cavity, and the other two are reserved interfaces blocked by plugs. The above interfaces are connected to the cavity of the shell 2.

[0059] The top surface of the shell 2 and the position corresponding to the gate are also provided with cooling water channels 6 for cooling the corresponding positions of the device. The cooling water channels are integrally welded close to the cavity.

[0060] The lower part of the horizontal conveying mechanism in the shell 2 is provided with a heating lamp group 7 for heating the inside of the cavity. The heating lamp group 7 is externally detachable, and the heating lamp can be pulled out after the lamp cover plate is removed, which is convenient for replacement and maintenance.

[0061] In addition to the above common points, the main difference between the pretreatment cavity a, the ALD cavity b, the CVD cavity c and the annealing cavity d lies in the hatch 5.

[0062] The hatches 5 of the pretreatment cavity a, the CVD cavity c and the annealing cavity d are similar in structure, and the inside of one side is provided with a heating lamp group 7 and the outside is provided with a cooling water channel 6; the other side of the hatch 5 is provided with two gas interfaces, of which the two interfaces of the hatches of the pretreatment cavity a and the annealing cavity d are nitrogen gas interfaces 53, and the two interfaces of the CVD cavity c are TMA interfaces 54.

[0063] Corresponding to the TMA interface 54, the hatch 5 of the CVD cavity c is provided with a second shower head 8 inside. As shown in Figures 5-6 The inside of the hatch 5 corresponding to the TMA interface 54 is embedded with a recessed part, the outside of the recessed part is provided with a shower plate 82, and the middle part is provided with a partition plate 81, so that the recessed part in the hatch 5 is divided into two chambers by the shower plate 82 and the partition plate 81. The partition plate 81 and the shower plate 82 are both uniformly provided with a plurality of through holes, of which the through holes of the partition plate 81 are sparse and have larger diameters, and the through holes of the shower plate 82 are dense and have smaller diameters. Through this structure, the TMA gas entering the chamber through the TMA interface 54 is sequentially shunted through the partition plate 81 and the shower plate 82, which can make the gas distribution from the shower plate 82 more uniform. The TMA gas flows through the two chambers through the TMA interface 54 and is sprayed out through the shower plate 82, and the direction of the sprayed TMA gas flow is horizontal and vertically towards the horizontal conveying mechanism 3.

[0064] The hatch 5 of the ALD cavity b is provided with a heating lamp group 7 inside and a cooling water channel 6 outside, and is provided with a first shower head 9 in the middle part.

[0065] The first shower head 9 includes a partition plate group 92 and a main body 91.

[0066] The main body 91 is internally provided with a plurality of independent first cavities 911 and a plurality of mutually communicating second cavities 912. The first cavities 911 and the second cavities 912 are both long-strip-shaped and arranged uniformly and in parallel to the outlet end of the main body 91.

[0067] The first cavities 911 are provided with a plurality of outlets and an inlet; the outlet of each first cavity 911 forms a uniformly linearly arranged outlet hole 9131 at the outlet end of the main body 91 through an outlet pipeline 913; and the outlet holes 9131 of adjacent first cavities 911 are arranged at equal intervals.

[0068] The second cavities 912 are provided with a plurality of inlets; the inlet of each second cavity 912 forms a uniformly linearly arranged suction hole 9141 at the outlet end of the main body 91 through a sub-suction pipeline 914. The suction hole 9141 of each second cavity 912 is located between the outlet holes 9131 of adjacent first cavities 911 and arranged at equal intervals.

[0069] Thus, the outlet holes 9131 and the suction holes 9141 form a rectangular array.

[0070] In addition, the main body is internally also provided with an inlet pipeline 915 corresponding in number to the first cavities 911, the inlet pipeline 915 communicates the inlets of the first cavities 911 and forms respective inlet interfaces 918 outside the main body 91.

[0071] In addition, the main body is internally also provided with a main suction pipeline 916, which communicates the second cavities 912 and forms a suction interface 919 outside the main body 91.

[0072] Referring to Figures 7-18 In a specific preferred embodiment, the main body 91 is a cuboid-shaped metal block, and the first cavities 911, the second cavities 912, the outlet pipeline 913, the inlet pipeline 915, the main suction pipeline 916 and the sub-suction pipeline 914 are all formed by deep hole drilling on the metal block. The metal block is also formed with a communicating pipeline 917 perpendicularly intersecting the second cavities 912 by deep hole drilling.

[0073] For the convenience of description, the following takes the side of the main body 91 provided with the inlet interfaces 918 as the front side to describe the arrangement direction of each pipeline, which can be specifically understood with reference to the front view of the main body. Figure 12 .

[0074] The first cavities 911 and the second cavities 912 are arranged in parallel to the front side of the main body 91 and vertically.

[0075] The communicating pipeline 917 is arranged in parallel to the front side of the main body 91 and horizontally.

[0076] The outlet pipeline 913, the inlet pipeline 915, the sub-suction pipeline 914 and the main suction pipeline 916 are all arranged perpendicularly to the front side of the main body 91.

[0077] The communication pipeline 917, the first cavity 911 and the second cavity 912 are all through holes, and the ends of both ends are sealed by plugs. In order to arrange closely between the gas outlet hole 9131 and the gas suction hole 9141, while not reducing the diameter of the first cavity 911 and the second cavity 912, the first cavity 911 and the second cavity 912 can be arranged in two layers, that is, the central axes of all the first cavities 911 are located on a virtual vertical plane, and the central axes of all the second cavities 912 are located on another virtual vertical plane parallel to the central axes of the first cavities.

[0078] The gas outlet pipeline 913 and the gas inlet pipeline 915 are blind holes vertically connected to the first cavity 911, and the outer end of the gas inlet pipeline 915 is fixed with a gas inlet interface 918. The sub-gas suction pipeline 914 is a blind hole vertically connected to the second cavity 912. The main gas suction pipeline 916 is a blind hole vertically connected to the communication pipeline 917, and the outer end is fixed with a gas suction interface 919. The gas inlet interface 918 can be divided into N2, TMA and H2O three kinds, and the four joints of N2, TMA, N2 and H2O form a group of spray port groups. The spray head can be stacked and configured with multiple groups of spray port groups according to needs.

[0079] The baffle group 92 is detachably fixed at the outlet end of the main body 91, and is composed of at least two grid-shaped baffles 921 which are the same in shape and are stacked. Specifically, the outlet end of the metal block of the main body 91 is provided with screw holes, and the baffles 921 are rectangular perforated metal plates. The baffles 921 are stacked one by one and fixed to the screw holes at the outlet end by bolts, forming the baffle group 92. By adjusting the number of layers of the baffles 921 of the baffle group 92, the thickness of the baffle group 92 can be adjusted, and the distance from the workpiece can be adjusted. Therefore, it can be adapted to the size of the material box, not only strong compatibility, but also can realize the close distance coating process, reduce the waste of process gas in the coating process.

[0080] The baffle 921 corresponds to the gas outlet hole 9131 of each first cavity 911 and forms a long strip-shaped slit, and corresponds to the gas suction hole 9141 of each second cavity 912 and forms a long strip-shaped slit. Therefore, the spray gas can be isolated from each other.

[0081] Obviously, from the above application, in the technical solution, the terms such as "gas inlet pipeline", "gas outlet pipeline", "gas inlet hole", "gas outlet hole" are not limited to only gas passing through, and other liquids such as water can also pass through.

[0082] Through the above structure, the operation principle of the device is described as follows:

[0083] The pre-treatment cavity a and the annealing cavity d have substantially identical structures and are used to provide a transition between the external natural environment and the ALD cavity b / CVD cavity c.

[0084] The ALD cavity b and the CVD cavity c are in a high-temperature vacuum state, and if the workpiece directly enters the ALD cavity b or the CVD cavity c from the outside through the gate, the temperature and the vacuum degree of the ALD cavity b or the CVD cavity c are greatly reduced, and then it takes too long to improve the vacuum degree and the temperature again.

[0085] The side cabin door is adopted, so that the dust deposited in the cavity can be treated by opening the cabin door.

[0086] The workpiece enters the pre-treatment cavity a through the gate, the nitrogen gas interface of the cabin door of the pre-treatment cavity a blows the workpiece, after the vacuum degree and the temperature of the pre-treatment cavity a are improved, the gate at the joint of the pre-treatment cavity a and the ALD cavity b is opened, and the workpiece enters the ALD cavity b;

[0087] After the workpiece is sprayed in the ALD cavity b, the gate at the joint of the ALD cavity b and the CVD cavity c is opened, and the workpiece enters the CVD cavity c;

[0088] The workpiece is sprayed in the ALD cavity b;

[0089] According to the requirement, the workpiece can also reciprocate to perform the ALD and CVD processes, at this time, the gate at the joint of the ALD cavity b and the CVD cavity c is opened, the workpiece returns to the ALD cavity b to be sprayed again, and the process is repeated several times;

[0090] After the spraying is completed, the gate at the joint of the CVD cavity c and the annealing cavity d is opened, the workpiece enters the annealing cavity d to be cooled, and finally is output from the annealing cavity d, and the whole spraying work is completed.

[0091] Compared with the prior art, the device has the following beneficial effects:

[0092] 1. The device is linearly arranged, occupies regular land, and has maintenance openings on both sides to facilitate maintenance;

[0093] 2. The carrier box used is a standard cuboid, the battery pieces are placed up and down, the top surface does not need to be pressed, and each box can contain 400-700 battery pieces;

[0094] 3. The box enters the equipment directly and comes out directly. The box is hollowed out on both sides, and the two sides are sprayed horizontally. The perfect solution is to spray both cutting edges of the battery piece at the same time. When a single cutting edge battery piece is to be sprayed, the other side of the box is fixed with a sealing plate;

[0095] 4. The equipment uses CVD+ALD composite process for spraying. The thin film is deposited in the first cavity by pyrolysis of gas phase precursor molecules, which usually deposits a thick film layer at one time (i.e. CVD); and in another cavity, the process is carried out by alternating reaction, which only deposits one atomic or molecular thickness of film each time (i.e. ALD). The composite process for spraying has a thin insulating layer thickness and no sticking.

[0096] 5. The equipment uses a low-temperature composite spraying process, and an annealing cavity is arranged at the tail end of the equipment, which helps to form the insulating film of the cutout and reasonably control the growth of the film.

[0097] 6. The equipment has the same capacity as the mainstream equipment before and after, which is convenient for matching various upstream and downstream supporting equipment, and directly connects the single line of the customer's workshop production line to occupy the optimal land.

[0098] In addition, the shower head of the ALD cavity has the following advantages:

[0099] The pipeline of the shower head uses a deep hole drill, and the gas paths are isolated from each other to avoid cross contamination. The inlet pipeline of the special gas uses a large hole, and the outlet pipeline uses a small hole to form a jet gas flow. A partition is arranged in front of the shower head to isolate the spraying gases from each other, and the distance from the workpiece is adjusted by increasing or decreasing the partition. Thus, the size of the box can be adapted, which not only has strong compatibility, but also can realize a close-range coating process to reduce the waste of process gas in the coating process. The shower head uses N2, TMA, N2 and H2O as a group of multiple groups, and the number of groups and the type of process gas can be freely adjusted according to the process requirements of the customer. The shower head is an independent unit, which can be installed on the production line in a positive and negative direction. Thus, double-sided spraying can be realized, and the situation of double pieces and multiple pieces can be adapted.

[0100] The above embodiments are used to explain the utility model and the implementation of the utility model in detail. However, those skilled in the art can understand that the above embodiments are only one of the preferred embodiments of the utility model. Due to the limitation of the length, all the implementation modes cannot be listed here. Any implementation that can reflect the technical solution of the claims of the utility model is within the protection scope of the utility model.

[0101] It should be noted that the above is a further detailed description of the utility model in combination with specific embodiments, and cannot be determined that the specific embodiments of the utility model are limited to this. Under the guidance of the above examples, those skilled in the art can make various improvements and deformations on the basis of the above examples, and these improvements or deformations fall within the protection scope of the utility model.

Claims

1. A vertical insulating layer spraying equipment, characterized in that: The device comprises a pretreatment cavity, a first sputtering cavity, a second sputtering cavity and an annealing cavity connected in sequence; the pretreatment cavity, the first sputtering cavity, the second sputtering cavity and the annealing cavity each comprise a shell and a horizontal conveying mechanism arranged in the shell, and the connecting part between the four cavities and the end part of the pretreatment cavity and the annealing cavity are provided with gate valves capable of selectively sealing the shell or connecting the horizontal conveying mechanisms in sequence; the shell is provided with a vacuum extraction port and a nitrogen gas interface, and a heating mechanism is arranged in the shell; the shell is provided with a hatch capable of selectively sealing the shell at a position corresponding to at least one side of the horizontal conveying mechanism; the hatch of the first sputtering cavity is provided with a first shower head; the hatch of the second sputtering cavity is provided with a second shower head; the first shower head and the second shower head are each provided with a plurality of gas inlets and a plurality of gas outlets horizontally and vertically oriented to the horizontal conveying mechanism.

2. A vertical insulating layer sputtering apparatus according to claim 1, characterized by: The shell is provided with a hatch capable of selectively sealing the shell at a position corresponding to both sides of the horizontal conveying mechanism.

3. A vertical insulating layer sputtering apparatus according to claim 2, wherein: The device comprises an ALD cavity for an ALD process and a CVD cavity for a CVD process; The first sputtering cavity is one of the ALD cavity and the CVD cavity, and the second sputtering cavity is the other one of the ALD cavity and the CVD cavity.

4. A vertical insulating layer sputtering apparatus according to claim 3, wherein: The shell top and the hatch are each provided with a cooling water channel; the hatch of the pretreatment cavity and the annealing cavity is provided with a nitrogen gas interface.

5. A vertical insulating layer sputtering apparatus according to claim 4, wherein: The heating mechanism is a heating lamp group, which is arranged on the inner side of the hatch and below the horizontal conveying mechanism in the shell; the horizontal conveying mechanism is a metal horizontal conveying roller.

6. A vertical insulating layer sputtering apparatus according to any one of claims 1 to 5, characterized by: The first shower head comprises a baffle group and a main body with a planar outlet end, the main body is internally provided with a plurality of independent first cavities, the first cavities are provided with a plurality of outlets and at least one inlet; the outlets of each first cavity form uniformly linearly arranged gas outlet holes at the outlet end through gas outlet pipelines, and the gas outlet holes of adjacent first cavities are arranged at equal intervals, thereby forming a rectangular array; the main body is further internally provided with gas inlet pipelines corresponding to the number of first cavities, the gas inlet pipelines are in one-to-one correspondence with the first cavity inlets and form a gas inlet interface outside the main body; the baffle group is detachably fixed at the outlet end and is composed of at least two baffles with the same shape and stacked; the baffle forms a long strip-shaped slit corresponding to the gas outlet holes of each first cavity.

7. A vertical insulating layer sputtering apparatus according to claim 6, wherein: The main body is provided with a plurality of second cavities in communication with each other, and the second cavities are provided with a plurality of inlets; the inlets of each second cavity form uniformly linearly arranged gas extraction holes at the outlet end through sub-gas extraction pipelines, and the gas extraction holes of each second cavity are located between the gas outlet holes of adjacent first cavities and are arranged at equal intervals; the main body is further internally provided with a main gas extraction pipeline, the main gas extraction pipeline communicates with the second cavities and forms a gas extraction interface outside the main body; the baffle forms a long strip-shaped slit corresponding to the gas extraction holes of each second cavity.

8. A vertical insulating layer sputtering apparatus according to claim 7, wherein: The gas extraction holes and the gas outlet holes form a rectangular array as a whole; the first cavities and the second cavities are long strip-shaped and are arranged uniformly and parallel to the outlet end.

9. A vertical insulating layer sputtering apparatus according to claim 8, wherein: The main body is a cuboid metal block, the first cavity, the second cavity, the gas outlet pipeline, the gas inlet pipeline, the main air extraction pipeline and the sub air extraction pipeline are formed on the metal block by deep hole drilling; the metal block is further provided with a communication pipeline which is perpendicularly intersected with all the second cavities by deep hole drilling, the communication pipeline, the end of the first cavity and the end of the second cavity are all sealed; the gas outlet pipeline and the gas inlet pipeline are blind holes which are perpendicularly connected with the first cavity; the sub air extraction pipeline is a blind hole which is perpendicularly connected with the second cavity; the main air extraction pipeline is a blind hole which is perpendicularly connected with the communication pipeline.

10. A vertical insulating layer sputtering apparatus according to claim 9, wherein: The central axes of all the first cavities are located on a virtual plane, the central axes of all the second cavities are located on another virtual plane which is parallel to the central axes of the first cavities; the communication pipeline, the first cavity and the second cavity are all through holes, and the ends of both ends are sealed by plugs.

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