Chip bearing device and semiconductor detection equipment

Abstract

The utility model discloses a chip bearing device and semiconductor detection equipment. The chip bearing device can be used in cooperation with the scanner, the chip bearing device comprises a bearing structure, and the scanner is arranged above the bearing structure; the bearing structure comprises a supporting component, the supporting component comprises a fixed part and a movable part, the movable part is movably connected with the fixed part, and the movable part can move in the direction close to or away from the scanner in the vertical direction; the sample table is rotationally connected to the side, facing the scanner, of the movable part, the sample table is provided with a bearing surface, and the scanner is arranged opposite to the bearing surface in the vertical direction; the transmission component is located on the side, away from the scanner, of the sample table and rotationally connected with the movable part. The driving mechanism is connected with the sample table and the transmission component, the driving mechanism is configured to drive the transmission component, the movable part and the sample table to reciprocate in the vertical direction, and the driving mechanism is configured to drive the sample table to rotate. The device is high in universality, and can be suitable for scanning measurement of chips of various specifications.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of chip detection, and particularly relates to a chip bearing device and a semiconductor detection equipment. BACKGROUND

[0002] In the manufacturing process of chips, sampling measurement of a key size is involved so as to monitor the size of a pattern formed after a photolithography process, so as to ensure the production yield of the chips.

[0003] The size measurement of the chip is usually performed by a scanning device. The scanning device includes a sample table and an electron gun. The sample table is fixedly arranged, and the electron gun is fixedly arranged above the sample table. The chip is placed on the sample table, and the electron gun is used for scanning measurement. Since the scanning distances required by different chip products may be different, currently, scanning devices need to be separately arranged for various chips. The versatility among various scanning devices is poor, which leads to continuous increase of the measurement cost of the chip products, and the storage is inconvenient due to the multiple scanning devices. CONTENT OF THE UTILITY MODEL

[0004] The application provides a chip bearing device and a semiconductor detection equipment. The chip bearing device can be applied to various specifications of scanning devices, and has the advantage of high versatility.

[0005] The application provides a chip bearing device, which can be used in cooperation with a scanner. The chip bearing device includes a bearing structure, and the scanner is arranged above the bearing structure in a vertical direction. The bearing structure includes:

[0006] A support member includes a fixed part and a movable part. The movable part is movably connected to the fixed part, so as to move in the vertical direction towards or away from the scanner.

[0007] A sample table is arranged on the side of the movable part facing the scanner, and is used for bearing the chip.

[0008] A transmission member is arranged on the side of the sample table away from the scanner, and the transmission member is connected to the movable part.

[0009] A driving mechanism includes a first driving part. The first driving part can rotate around an axis extending in a horizontal direction and is connected to the transmission member. The first driving part can drive the transmission member to reciprocate in the vertical direction during rotation. The transmission member drives the movable part and the sample table to reciprocate in the vertical direction.

[0010] The chip bearing device described above, wherein the transmission member is rotatably connected to the movable part, and the rotation axis extends in the vertical direction.

[0011] The driving mechanism has a support part, the transmission member has a supported part, the supported part abuts against the support part under the gravity of the transmission member to receive support from the support part;

[0012] During rotation of the transmission member driven by the driving mechanism, the supported part abuts against the support part in turn at portions with different heights in the vertical direction, so that the transmission member reciprocates in the vertical direction.

[0013] The chip carrying device as described above, wherein the transmission member is a sleeve including a cylinder and an end plate, the cylinder is through in the vertical direction, the end plate is fixedly connected to the upper end of the cylinder, and the end plate is spaced apart from the sample table;

[0014] A through hole is formed in the center of the end plate, the movable member penetrates the through hole in the vertical direction, and the movable member is rotationally connected to the hole wall of the through hole through a first bearing;

[0015] The supported part is located at the lower end surface of the cylinder.

[0016] The chip carrying device as described above, wherein the first driving member is a rotating wheel to drive the transmission member to rotate, and the rotating wheel constitutes the support part.

[0017] The chip carrying device as described above, wherein an included angle is formed between the lower end surface of the transmission member and the horizontal direction;

[0018] When different positions of the lower end surface of the transmission member abut against the first driving member, the position of the transmission member in the vertical direction changes, the first driving member can drive the transmission member to rotate during rotation of the first driving member, and the movable member and the sample table are reciprocated in the vertical direction by the transmission member.

[0019] The chip carrying device as described above, wherein the lower end surface of the transmission member is parallel to the horizontal direction, and the first driving member is an eccentric wheel.

[0020] During rotation of the first driving member, the position of the highest point of the first driving member changes in the vertical direction and drives the transmission member to move in the vertical direction, and the movable member and the sample table are reciprocated in the vertical direction by the transmission member.

[0021] The chip carrying device as described above, wherein a first annular gear rack is arranged on the lower end surface of the cylinder, and the rotating wheel is a first gear wheel, the first gear wheel is in meshing engagement with the first annular gear rack.

[0022] The chip carrying device as described above, wherein the carrying structure further comprises an elastic member, which is connected between the movable member and the fixed member in a state of being stretched along the vertical direction.

[0023] The chip carrying device as described above, wherein the chip carrying device further comprises:

[0024] A box, the scanner is detachably arranged on the box wall of the box;

[0025] A placing platform is arranged in the interior of the box, the placing platform is arranged in a spaced manner with the box wall of the box, and the placing platform is connected with the box wall of the box through a plurality of connecting rods, and the carrying structure is arranged on the placing platform.

[0026] The chip carrying device as described above, wherein the sample stage is rotatably connected with the movable member through a second bearing, and the rotation shaft of the sample stage extends along the vertical direction.

[0027] The driving mechanism further comprises a second driving member, the second driving member is connected with the sample stage, and the second driving member is configured to drive the sample stage to rotate.

[0028] The chip carrying device as described above, wherein the second driving member comprises a second gear, the rotation shaft of the second gear extends along the vertical direction, the periphery of the sample stage is provided with a second annular gear rack, and the second gear is in meshing connection with the second annular gear rack.

[0029] The chip carrying device as described above, wherein the driving mechanism comprises:

[0030] A first knob and a first universal connecting rod, one end of the first universal connecting rod is connected with the first knob, the other end of the first universal connecting rod is connected with the first driving member, the first knob can rotate and drive the first driving member to rotate through the first universal connecting rod;

[0031] And / or a second knob and a second universal connecting rod, one end of the second universal connecting rod is connected with the second knob, the other end of the second universal connecting rod is connected with the second driving member, the second knob can rotate and drive the second driving member to rotate through the second universal connecting rod.

[0032] The application also provides a semiconductor detection device, wherein the semiconductor detection device comprises:

[0033] The chip carrying device as described above is used for carrying a chip and driving the chip to reciprocally move along a vertical direction.

[0034] A scanner is disposed above the chip carrier device, and the scanner is used to scan the chip located on the chip carrier device.

[0035] The chip carrier device and semiconductor testing equipment of this application have a support structure including a movable part and a fixed part. The sample stage and the transmission component are respectively connected to the movable part. The transmission component can be driven by a drive device to move the movable part and the sample stage up and down, thereby moving the chip placed on the carrier surface of the sample stage up and down and adjusting the distance between the chip and the scanner. This allows the chip carrier device provided by this application to be adapted to the scanning and measurement of various chips with different specifications. It has the advantage of high versatility, effectively reducing the measurement and storage costs of chip products and reducing the processing and manufacturing costs of chips. Attached Figure Description

[0036] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a schematic diagram of the chip carrier device according to an embodiment of this application;

[0038] Figure 2 for Figure 1 A partial structural diagram;

[0039] Figure 3 This is another structural schematic diagram of the chip carrier device according to an embodiment of this application;

[0040] Figure 4 for Figure 3 A partial structural diagram;

[0041] Figure 5 for Figure 3 The schematic diagram of the transmission component of the chip carrier device shown in the figure, which is engaged with the first gear for transmission.

[0042] Figure 6 This is a schematic diagram illustrating the transmission principle between the sample stage and the second gear in the chip carrier device according to an embodiment of this application.

[0043] Explanation of icon numbers:

[0044] 1. Scanner;

[0045] 2, bearing structure; 21, support member; 211, fixing member; 2111, base; 2112, guide column; 212, movable member; 2121, guide hole; 213, elastic member; 22, sample table; 221, bearing surface; 222, second bearing; 23, transmission member; 231, cylinder; 232, end plate; 233, first bearing; 24, driving mechanism; 241, first driving member; 242, first shaft; 243, second driving member; 244, second shaft; 245, first knob; 246, first universal connecting rod; 247, second knob; 248, second universal connecting rod;

[0046] 3, box;

[0047] 4, placing platform; 41, connecting rod;

[0048] S, chip;

[0049] X, vertical direction. DETAILED DESCRIPTION

[0050] The features and exemplary embodiments of various aspects of the present application will be described in detail below with reference to the drawings. To make the purposes, technical solutions and advantages of the present application more clear, the present application will be further described in detail below with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, but not to limit the present application. The present application can be implemented without some of these specific details by those skilled in the art. The following description of the embodiments is only to provide a better understanding of the present application by showing examples of the present application.

[0051] The semiconductor industry, as a core component of modern high-tech fields, its manufacturing process covers a number of high-precision processes and technologies. In recent years, chips are widely used in integrated circuits, solar panels, flat panel displays, microelectronics, light-emitting diodes and other fields.

[0052] The chip manufacturing process involves a large amount of measurement of critical dimensions or surface parameters. Currently, the critical dimensions and surface parameters are usually measured by an electron gun to monitor the pattern size and surface parameters of the chip after the photolithography process in the chip manufacturing process to ensure yield.

[0053] With the increase of the same product, the problem of poor universality between the measurement devices arises. Specifically, the chip is usually placed on the sample table to complete the scanning measurement. The sample table and the electron gun are usually fixedly installed, and the relative position of the two is fixed. However, due to the different sizes of the chips, the distance between the chip and the electron gun requires different distances when measuring the chip. Therefore, different sizes of chips require separate sample tables and electron guns, resulting in increasing cost of scanning measurement of chip products and causing storage inconvenience.

[0054] Therefore, it is particularly important to develop a device with high universality and capable of being applied to chip scanning measurement of various specifications.

[0055] It should be noted that the vertical direction X indicating the direction in the present application is only for more clearly illustrating the specific structure of the present application in conjunction with the drawings, and the present application is not limited thereto. In some embodiments, the vertical direction X is parallel to the vertical direction.

[0056] As shown in Figures 1 to 4 The chip carrying device provided by the embodiments of the present application is used in cooperation with the scanner 1 to realize scanning measurement of the chip.

[0057] The chip carrying device comprises a carrying structure 2, and the scanner 1 is arranged opposite to the carrying structure 2 along the vertical direction X, and the scanner 1 is located above the carrying structure 2.

[0058] The carrying structure 2 is used to carry and place the chip S and adjust the distance and angle of the chip S relative to the scanner 1.

[0059] The scanner 1 is used to scan the chip S to obtain size data of the chip S and complete the measurement of the size of the chip S. Optionally, the scanner 1 is a scanning electron gun.

[0060] The carrying structure 2 comprises a support member 21, a sample table 22, a transmission member 23 and a driving mechanism 24.

[0061] The support member 21 is used to provide a mounting basis for the sample table 22 and the transmission member 23. The support member 21 comprises a fixed part 211 and a movable part 212, and the movable part 212 is movably connected to the fixed part 211, and the movable part 212 can move along the vertical direction X towards the direction of approaching or moving away from the scanner 1.

[0062] Optionally, the fixed part 211 comprises a base 2111 and a guide column 2112 fixedly connected to the base 2111, the guide column 2112 extends along the vertical direction X, and a guide hole 2121 is recessed on the side of the movable part 212 facing the fixed part 211, and a part of the guide column 2112 is inserted into the guide hole 2121 along the vertical direction X.

[0063] Optionally, the guide hole 2121 is a blind hole, which limits the movement range of the movable part 212 relative to the fixed part 211 along the vertical direction X, limits the movable range of the movable part 212 along the vertical direction X, and makes the movable range of the movable part 212 along the vertical direction X meet the chip S position adjustment requirement.

[0064] The sample table 22 is rotationally connected to the movable member 212 on the side facing the scanner 1, and the sample table 22 has a bearing surface 221, and the scanner 1 is arranged opposite to the bearing surface 221 along the vertical direction X, so that the chip S can be opposite to the scanner 1 when placed on the bearing surface 221, facilitating the scanning of the chip S by the scanner 1.

[0065] The transmission member 23 is located on the side of the sample table 22 away from the scanner 1, and the transmission member 23 is connected to the movable member 212, and the transmission member 23 is used to realize the transmission connection between the driving mechanism 24 and the movable member 212.

[0066] The driving mechanism 24 includes a first driving member 241, which can rotate along an axis extending in the horizontal direction and is connected to the transmission member 23, and the driving mechanism 24 is configured to drive the transmission member 23 to reciprocate along the vertical direction X, so as to drive the movable member 212, the sample table 22 and the chip S placed on the bearing surface 221 of the sample table 22 to rise and fall, and adjust the distance between the chip S and the scanner 1.

[0067] The chip bearing device provided by the application can effectively adjust the distance between the chip and the scanner, so as to complete the size measurement of various chips S with different specifications, has the advantages of high universality, effectively reduces the measurement and storage cost of the chip S product, and reduces the processing cost of the chip S.

[0068] As shown in Figure 1 and Figure 2 The chip bearing device provided by the embodiment of the application is rotationally connected with the transmission member 23 and the movable member 212, and the rotation shaft of the transmission member 23 extends along the vertical direction X;

[0069] The driving mechanism 24 has a supporting portion, and the transmission member 23 has a supported portion, and the supported portion abuts against the supporting portion under the action of the gravity of the transmission member 23, so that the supported portion is supported by the supporting portion.

[0070] During the rotation of the transmission member 23 driven by the driving mechanism 24, the supported portion abuts against the supporting portion in turn at portions with different heights in the vertical direction, so that the transmission member 23 reciprocates along the vertical direction, and drives the movable member 212, the sample table 22 and the chip S placed on the bearing surface 221 of the sample table 22 to rise and fall.

[0071] As shown in Figures 1 to 4As shown, the chip carrying device provided by the embodiment of the present application, wherein the transmission member 23 is a sleeve, comprising a barrel 231 and an end plate 232, the barrel 231 is through in the vertical direction X, the end face of the barrel 231 close to the sample table 22 in the vertical direction X is a plane ring structure, and the end plate 232 is fixedly connected to the end of the barrel 231 close to the sample table 22 in the vertical direction X, that is, the end plate 232 is fixedly connected to the upper end of the barrel 231.

[0072] Optionally, the end plate 232 and the barrel 231 can be detachably connected, so as to facilitate the separate processing and maintenance replacement of components.

[0073] Optionally, the end plate 232 and the barrel 231 are fixedly connected by welding or integrally formed, so as to ensure the structural strength therebetween.

[0074] The end plate 232 is arranged in a spaced manner with the sample table 22, so as to reduce the abrasion caused by the interference between the transmission member 23 and the sample table 22 during the rotation of the transmission member 23.

[0075] The central part of the end plate 232 is provided with a through hole, and the movable part 212 penetrates through the through hole in the vertical direction X, the center axis of the through hole coincides with the center axis of the movable part 212 in the vertical direction X, so that the transmission member 23 and the movable part 212 are coaxially arranged.

[0076] Optionally, the movable part 212 is rotatably connected to the hole wall of the through hole through the first bearing 233, and the assembly precision between the transmission member 23 and the movable part 212 can be effectively improved by arranging the bearing, the smoothness of the rotation of the transmission member 23 relative to the movable part 212 is improved, and the abrasion generated during the rotation of the transmission member 23 relative to the movable part 212 is reduced.

[0077] The supported part is located at the lower end face of the barrel, so as to ensure that the supported part can abut against the supporting part in the vertical direction, thereby providing reliable supporting force in the vertical direction.

[0078] The chip carrying device provided by the embodiment of the present application, wherein the first driving part 241 is a runner, which drives the transmission member 23 to rotate by itself, and the runner constituting the supporting part is arranged below the supported part, thereby providing the supported part with supporting force in the vertical direction from bottom to top.

[0079] As shown in Figure 1 and Figure 2 The chip carrying device provided by the embodiment of the present application, wherein an included angle is formed between the lower end face of the transmission member and the horizontal direction.

[0080] Specifically, the lower end face of the transmission member 23 is an inclined plane, and an included angle greater than 0° and less than 90° is formed between the inclined plane and the horizontal plane.

[0081] When different positions of the lower end surface of the transmission member 23 abut against the first driving member 241, the position of the transmission member 23 along the vertical direction X changes, and the first driving member 241 can drive the transmission member 23 to rotate through the abutment and cooperation of the inclined surface and the first driving member 241, and drive the movable member 212 and the sample table 22 to reciprocate along the vertical direction X through the transmission member 23.

[0082] As shown in Figures 3 to 5 The chip carrying device provided by the embodiment of the present application, wherein the lower end surface of the transmission member 23 is parallel to the horizontal direction, and the first driving member 241 is an eccentric wheel.

[0083] During the rotation of the first driving member 241, the position of the highest point of the first driving member changes along the vertical direction through the abutment and cooperation of the first driving member 241 and the lower end surface of the transmission member 23, and drives the transmission member to move along the vertical direction, and drives the movable member 212 and the sample table 22 to reciprocate along the vertical direction X through the transmission member 23.

[0084] Specifically, the first driving member 241 is an eccentric wheel, and the distance between the rotation center of the first driving member 241 and the lower end surface of the transmission member 23 changes during the rotation of the first driving member 241, so as to realize the reciprocating movement of the transmission member 23 along the vertical direction X.

[0085] In some embodiments, the lower end surface of the transmission member 23 is provided with a first annular gear rack, and the rotating wheel is a first gear, that is, the first driving member 241 is a first gear, and the first gear is in meshing connection with the first annular gear rack. During the rotation of the first driving member 241, the first driving member 241 drives the transmission member 23 to rotate through the meshing cooperation with the first annular gear rack.

[0086] As shown in Figures 1 to 4 The chip carrying device provided by the embodiment of the present application, wherein the first driving member 241 is rotatably sleeved on the first shaft 242, the first driving member 241 can rotate relative to the first shaft 242, but along the axial direction of the first shaft 242, the first driving member 241 and the first shaft 242 remain relatively static, so as to ensure that the first driving member 241 can only rotate and cannot move in other directions, and ensure that the first driving member 241 always meshes with the first meshing gear during the rotation.

[0087] The extension direction of the first shaft 242 is perpendicular to the vertical direction X, and the first shaft 242 is fixedly connected with the fixed member 211.

[0088] Optionally, the first shaft 242 extends along any one radial direction of the transmission member 23, the first driving member 241 is arranged at one end of the first shaft 242, and the other end of the first shaft 242 is fixedly connected with the fixed member 211.

[0089] As shown in Figures 1 to 4As shown in the embodiment of this application, the chip carrier device includes a carrier structure 2 that further includes an elastic element 213. The elastic element 213 is connected between the movable element 212 and the fixed element 211 in a stretched state along the vertical direction X. A tensioning force is always provided between the movable element 212 and the fixed element 211 along the vertical direction X, driving the movable element 212 and the fixed element 211 closer to each other. During the process of the first driving member 241 pushing the transmission member 23 to move the movable element 212 toward the scanner 1, the elastic element 213 is further stretched, and the tensioning force continues to increase. During the process of the transmission member 23 driving the movable element 212 away from the scanner 1, although the deformation of the elastic element 213 gradually decreases, it can still continuously provide a force between the fixed element 211 and the movable element 212, pulling the movable element 212 to move the transmission member 23 away from the scanner 1.

[0090] like Figures 1 to 4 As shown in the embodiment of this application, the chip carrier device further includes a housing 3 and a placement platform 4.

[0091] The interior of the housing 3 forms a sealed space; in some embodiments, the interior space of the housing 3 is a vacuum space. The scanner 1 is detachably mounted on the wall of the housing 3.

[0092] The placement platform 4 is located inside the box 3, and the placement platform 4 is spaced apart from the box wall of the box 3. The placement platform 4 is connected to the box wall of the box 3 through multiple connecting rods 41.

[0093] Optionally, the scanner 1 is detachably mounted on the top wall of the housing 3, and the placement platform 4 is mounted parallel to the top wall of the housing 3 and spaced apart from the scanner 1.

[0094] The supporting structure 2 is set on the placement platform 4. The placement platform 4 provides the installation foundation for the supporting structure 2. The space inside the box 3 located below the placement platform 4 can be used to install other devices and equipment.

[0095] like Figures 1 to 4 and Figure 6 As shown in the embodiment of this application, the chip carrier device includes a sample stage 22 rotatably connected to a movable part 212 via a second bearing 222, and the axis of rotation of the sample stage 22 extends in the vertical direction X. By setting the second bearing 222, the assembly accuracy between the sample stage 22 and the movable part 212 can be effectively improved, the smoothness of the rotation of the sample stage 22 relative to the movable part 212 can be improved, and the wear generated during the rotation of the sample stage 22 relative to the movable part 212 can be reduced.

[0096] The driving mechanism also includes a second driving member 243, which is connected to the sample stage 22 and is configured to drive the sample stage 22 to rotate.

[0097] Specifically, the second driving member 243 comprises a second gear, a rotation axis of the second gear extends along the vertical direction X, a circumferential side of the sample table 22 is provided with a second annular gear rack, the second driving member 243 is engaged with the circumferential surface of the sample table 22 through the second annular gear rack, and the second driving member 243 drives the sample table 22 to rotate in the rotation process.

[0098] As shown in Figures 1 to 4 , the chip bearing device provided by the embodiment of the present application, wherein the second driving member 243 is sleeved on the second shaft rod 244, the second driving member 243 can rotate relative to the second shaft rod 244, but along the axial direction of the second shaft rod 244, the second driving member 243 and the second shaft rod 244 remain relatively stationary, thereby ensuring that the second driving member 243 can only rotate and cannot move in other directions, and ensuring that the second driving member 243 always engages with the second annular gear rack in the rotation process.

[0099] The second shaft rod 244 extends along the vertical direction X, the second driving member 243 is arranged at one end of the second shaft rod 244, and the other end of the second shaft rod 244 is fixedly connected with the placement platform 4.

[0100] As shown in Figure 1 and Figure 3 , the chip bearing device provided by the embodiment of the present application, wherein the driving mechanism 24 comprises a first knob 245 and a first universal connecting rod 246, one end of the first universal connecting rod 246 is connected with the first knob 245, the other end of the first universal connecting rod 246 is connected with the first driving member 241, and the first knob 245 can rotate and drive the first driving member 241 to rotate through the first universal connecting rod 246; thereby realizing the rotation adjustment of the sample table 22, and by screwing the first knob 245, the angle of the chip S relative to the scanner 1 can be adjusted, and the chip S can be rotated to the required scanning angle.

[0101] As shown in Figure 1 and Figure 3 , the chip bearing device provided by the embodiment of the present application, wherein the driving mechanism 24 comprises a second knob 247 and a second universal connecting rod 248, one end of the second universal connecting rod 248 is connected with the second knob 247, the other end of the second universal connecting rod 248 is connected with the second driving member 243, and the second knob 247 can rotate and drive the second driving member 243 to rotate through the second universal connecting rod 248; thereby realizing the adjustment of the distance between the transmission member 23 and the scanner 1, and by screwing the second knob 247, the distance of the chip S relative to the scanner 1 can be adjusted, and the chip S can be moved to the required scanning distance.

[0102] As shown in Figure 1 and Figure 3 , the first knob 245 and the second knob 247 are both mounted on the box wall of the box body 3.

[0103] The application also provides a semiconductor detection device, wherein the semiconductor detection device is a wafer size measurement device, a wafer defect detection device or a wafer defect review device, wherein the wafer size measurement device is used for measuring size data of a wafer, and the wafer defect detection device and the wafer defect review device are used for detecting defects on the surface of the wafer, such as surface particles, scratches, concaves and convexes, and can be applied to defect detection of semiconductor mask plates, substrates, epitaxial wafers and the like. Specifically, the wafer size measurement device, the wafer defect detection device or the wafer defect review device can be an electron beam imaging device.

[0104] The semiconductor detection device comprises a scanner 1 and a chip carrying device as described above.

[0105] The scanner 1 is arranged above a carrying structure 2 of the chip carrying device, and the two are arranged relative to each other in the vertical direction X.

[0106] The carrying structure 2 is used for carrying the chip S and driving the chip S to ascend and descend in the vertical direction X, so as to adjust the distance between the chip S and the scanner 1, thereby adjusting the scanning distance of the scanner 1 to the chip S.

[0107] Optionally, the scanner 1 is an electron gun, which is used for scanning the chip S to obtain size data, surface defect and flaw conditions and the like of the chip.

[0108] The semiconductor detection device provided by the application has the carrying structure 2 of the chip carrying device, which is provided with the support member 21 comprising the movable member 212 and the fixed member 211, and the sample table 22 and the transmission member 23 are respectively rotationally connected with the movable member 212. The driving device can drive the transmission member 23 to drive the movable member 212 and the sample table 22 to ascend and descend, so as to drive the chip S placed on the carrying surface 221 of the sample table 22 to ascend and descend, and adjust the distance between the chip S and the scanner 1. The chip carrying device provided by the application can be adapted to scanning and measurement processes of chips S with different specifications, has the advantage of high universality, effectively reduces the scanning and measurement and storage costs of the chip S product, and reduces the manufacturing cost of the chip S.

[0109] It should be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0110] The above description is merely illustrative of the application, and not restrictive. Various modifications can be made by those skilled in the art without departing from the scope of the application. Thus, it is intended that the scope of the application should be determined by the appended claims and their equivalents.

Claims

1. A chip carrier device, characterized in that, The chip carrier device, which can be used in conjunction with a scanner, includes a carrier structure, with the scanner vertically positioned above the carrier structure; the carrier structure includes: The support member includes a fixed part and a movable part, the movable part being movably connected to the fixed part so as to move along the vertical direction toward or away from the scanner; A sample stage, used to hold the chip, is connected to the side of the movable component facing the scanner; A transmission component is located on the side of the sample stage away from the scanner, and the transmission component is connected to the movable part; The driving mechanism includes a first driving member, which is rotatable about an axis extending in the horizontal direction and connected to the transmission member. During the rotation of the first driving member, it can drive the transmission member to reciprocate along the vertical direction, thereby driving the movable part and the sample stage to reciprocate along the vertical direction through the transmission member.

2. The chip carrier device according to claim 1, characterized in that, The transmission component is rotatably connected to the movable component, and the rotating shaft extends along the vertical direction; The drive mechanism has a support portion, and the transmission member has a supported portion. The supported portion abuts against the support portion under the gravity of the transmission member to receive its support. During the rotation of the transmission component driven by the driving mechanism, the supported parts at different heights in the vertical direction abut against the supporting part in sequence, causing the transmission component to reciprocate in the vertical direction.

3. The chip carrier device according to claim 2, characterized in that, The transmission component is a sleeve, including a cylinder body and an end plate. The cylinder body is through-shaped along the vertical direction, and the end plate is fixedly connected to the upper end of the cylinder body. The end plate is spaced apart from the sample stage. The end plate has a through hole in the center, the movable part passes through the through hole in the vertical direction, and the movable part is rotatably connected to the hole wall of the through hole through a first bearing; The supported portion is located on the lower end face of the cylinder.

4. The chip carrier device according to claim 3, characterized in that, The first driving element is a rotating wheel that drives the transmission component to rotate, and the rotating wheel constitutes the support part.

5. The chip carrier device according to claim 4, characterized in that, The lower end face of the transmission component forms an angle with the horizontal direction; When the lower end face of the transmission component abuts against the first driving member at different positions, the position of the transmission component changes along the vertical direction. During the rotation of the first driving member, the transmission component can be driven to rotate, and the movable part and the sample stage can be driven to reciprocate along the vertical direction through the transmission component.

6. The chip carrier device according to claim 4, characterized in that, The lower end face of the transmission component is parallel to the horizontal direction, and the first driving component is an eccentric wheel; During the rotation of the first driving member, the position of the highest point of the first driving member changes along the vertical direction and drives the transmission component to move along the vertical direction. The transmission component drives the movable part and the sample stage to reciprocate along the vertical direction.

7. The chip carrier device according to claim 4, characterized in that, The lower end face of the cylinder is provided with a first annular rack, and the rotating wheel is a first gear, which meshes with the first annular rack.

8. The chip carrier device according to claim 1, characterized in that, The load-bearing structure further includes an elastic element, which is connected between the movable element and the fixed element in a stretched state along the vertical direction.

9. The chip carrier device according to claim 1, characterized in that, The chip carrier device further includes: The scanner is detachably mounted on the wall of the enclosure. A placement platform is located inside the box, and the placement platform is spaced apart from the box wall. The placement platform is connected to the box wall via multiple connecting rods, and the load-bearing structure is located on the placement platform.

10. The chip carrier device according to claim 9, characterized in that, The sample stage is rotatably connected to the movable part via a second bearing, and the rotating shaft of the sample stage extends along the vertical direction. The driving mechanism further includes a second driving member, which is connected to the sample stage and is configured to drive the sample stage to rotate.

11. The chip carrier device according to claim 10, characterized in that, The second driving component includes a second gear, the shaft of which extends along the vertical direction, and a second annular rack is provided on the periphery of the sample stage, the second gear meshing with the second annular rack.

12. The chip carrier device according to claim 11, characterized in that, The drive mechanism includes: A first knob and a first universal joint, one end of the first universal joint is connected to the first knob, and the other end of the first universal joint is connected to the first drive component. The first knob can rotate and drive the first drive component to rotate through the first universal joint. And / or, a second knob and a second universal joint, one end of the second universal joint being connected to the second knob, and the other end of the second universal joint being connected to the second drive member, wherein the second knob can rotate and drive the second drive member to rotate through the second universal joint.

13. A semiconductor testing device, characterized in that, The semiconductor testing equipment includes: The chip carrier device according to any one of claims 1 to 12, wherein the chip carrier device is used to carry a chip and drive the chip to reciprocate in a vertical direction; A scanner is disposed above the chip carrier device, and the scanner is used to scan the chip located on the chip carrier device.

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