CMP (chemical mechanical polishing) machine

Abstract

A CMP (chemical mechanical polishing) machine comprises a table board; the machine table main body and the machine table cover are arranged on the table top, the spray heads are arranged on the inner side of the machine table cover, the machine table cover is arranged around the machine table main body in a surrounding mode, the machine table cover is provided with a machine table door, the machine table door can be opened outwards around a door shaft of the machine table door, and the spray heads are used for spraying water to the machine table door to form a water curtain; the distance sensor is arranged on the inner side of the machine table cover and used for measuring the distance between the distance sensor and the machine table door in real time; and the control system is used for controlling the plurality of nozzles to stop spraying water according to the change value of the distance, so that the product quality is improved, the equipment safety is improved, and the probability of accident generation is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field especially, it relates to a kind of CMP machine platform. BACKGROUND

[0002] Chemical-Mechanical Polishing (CMP) is a kind of technology that is accurately ground and polished to the surface of silicon wafer by the way of chemical and mechanical combination.It can realize the global planarization of the surface of silicon wafer, and provide good foundation for subsequent process.CMP machine platform is the key process equipment in the field of semiconductor manufacturing.

[0003] With the chip process continuously advancing to smaller nanometer level, CMP technology faces increasingly stringent precision and uniformity requirements.In advanced process, the flatness of wafer surface needs to be accurately controlled, while the cleanliness of the environment where CMP machine platform is placed is also put forward higher requirements when the super-high precision control requirements of various parameters such as pressure, rotation speed of CMP machine platform are put forward.

[0004] However, the existing CMP machine platform needs to be further improved. UTILITY MODEL CONTENT

[0005] The technical problem solved by the utility model is to provide a CMP machine platform to improve equipment safety.

[0006] To solve the above technical problem, the utility model embodiment provides a kind of CMP machine platform, comprising: table top;Machine platform main body and machine platform cover placed on the table top and several spray heads placed in the inner side of the machine platform cover, the machine platform cover is surrounded around the machine platform main body, the machine platform cover has machine platform door, the machine platform door can be opened outward around its door shaft, and several spray heads are used to spray water to the machine platform door to form water curtain;Distance sensor placed in the inner side of the machine platform cover, the distance sensor is used to measure the distance between the distance sensor and the machine platform door in real time;Control system, the control system is used to control several spray heads to stop spraying water according to the change value of the distance.

[0007] Optionally, the control system comprises: distance acquisition unit, the distance acquisition unit is used to obtain the measured value of the distance, and obtains the change value according to the measured value;Control module, the control module is used to control several spray heads to stop spraying water when the change value is greater than preset value.

[0008] Optionally, it further comprises: water pipeline is arranged between the machine platform door and the machine platform main body, one end of the water pipeline is connected to water source, and several spray heads are connected to the water pipeline.

[0009] Optionally, the water channel extends along a first direction, and the first direction is parallel to a horizontal plane and parallel to a surface of the machine door in the closed state.

[0010] Optionally, the plurality of nozzles are uniformly distributed along the first direction.

[0011] Optionally, the distance sensor is mounted on the water channel.

[0012] Optionally, the machine door has a door edge away from the door shaft, and a distance between the distance sensor edge and the door edge is in a range of 4.0 cm to 4.5 cm in parallel to the first direction.

[0013] Optionally, the sensor type includes an optical distance sensor, an infrared distance sensor, or an ultrasonic distance sensor.

[0014] Optionally, an initial distance between the distance sensor and the machine door is in a range of 8 cm to 10 cm in the closed state of the machine door.

[0015] Optionally, a height of the plurality of nozzles relative to the table surface is in a range of 60 cm to 80 cm.

[0016] Optionally, the control system includes a programmable logic controller system.

[0017] Optionally, the control system is integrated in a CMP machine system for controlling operation of the machine body.

[0018] Compared with the prior art, the technical scheme of the embodiment of the present application has the following beneficial effects:

[0019] In the CMP machine provided by the technical scheme of the present application, a distance sensor is arranged on an inner side of a machine cover, for measuring a distance between the distance sensor and the machine door in real time, and according to a change value of the distance, the plurality of nozzles are controlled to stop water spraying, so as to avoid a large amount of water sprayed by the nozzles from splashing to an outside of the machine when the machine door is abnormally opened, improve product quality, improve equipment safety, and reduce a probability of an accident. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a structural schematic diagram of a CMP machine;

[0021] Figures 2 to 3 is a structural schematic diagram of a CMP machine in an embodiment of the present application. DETAILED DESCRIPTION

[0022] It should be noted that the "surface", "upper" in the utility model, for the description of the relative position relationship of space, and not limited to whether direct contact.

[0023] As described in the background, the existing CMP machine needs to be further improved, and a CMP machine will be described.

[0024] Figure 1 A structure diagram of a CMP machine.

[0025] Please refer to Figure 1 , the CMP machine comprises a machine body 101, a machine cover 102, and a nozzle 103 placed inside the machine cover 102, the machine cover 102 is arranged around the machine body 101, the machine cover 102 has a machine door 104, the machine door 104 can be opened outward around the door shaft 105, the nozzle 103 can spray water to the machine door 104 to form a water curtain 106.

[0026] The machine body 101 is used for mechanical and chemical polishing treatment of the wafer to obtain a planar surface, during the mechanical and chemical polishing treatment, impurities such as polishing particles will be sputtered to the machine door 104, forming crystals on the surface of the machine door 104, in order to reduce the contamination introduced by the crystals to the wafer and affect the product quality, the nozzle 103 needs to be opened to keep the water curtain 106 clean to the machine door 104. When the machine door 104 needs to be opened, the nozzle 103 needs to be closed.

[0027] However, when the machine door 104 is abnormally opened, such as misoperation or emergency maintenance of the machine body 101, the nozzle 103 cannot be closed in time, which will cause a large amount of water sprayed by the nozzle 103 to splash to the outside of the machine, resulting in abnormal alarm, and even causing damage to the surrounding electrical components, resulting in unexpected loss.

[0028] To solve the above technical problems, the utility model technical scheme provides a CMP machine, by setting a distance sensor inside the machine cover, for real-time measurement of the distance between the distance sensor and the machine door, and according to the change value of the distance, the nozzle is stopped to spray water, to avoid the water sprayed by the nozzle to splash to the outside of the machine when the machine door is abnormally opened, to improve the product quality, improve the safety of the equipment, and reduce the probability of accidents.

[0029] In order to make the above purpose, characteristics and beneficial effects of the utility model more obvious and easy to understand, the specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0030] Figures 2 to 3It is the structural schematic view of the CMP machine table in an embodiment of the utility model.

[0031] Please refer to Figures 2 to 3 , Figure 2 It is the whole structural schematic view of the CMP machine table, Figure 3 It is the local structural schematic view, the CMP machine table includes: the table 200;The machine table main body 201 and the machine table cover 202 on the table 200 and the several shower nozzles 203 inside the machine table cover 202, the machine table cover 202 is around the machine table main body 201, the machine table cover 202 has the machine table door 204, the machine table door 204 can be opened outward around its door shaft 205, several shower nozzles 203 are used to spray water to the machine table door 204 and form water curtain 206;Distance sensor 207 inside the machine table cover 202, the distance sensor 207 is used to measure the distance between the distance sensor 207 and the machine table door 204 in real time;Control system (not shown in the figure), the control system is used to control several shower nozzles 203 to stop spraying water according to the change value of the distance.

[0032] Here, the machine table main body 201 is used for mechanical and chemical polishing treatment of wafer, the water curtain 206 is used to reduce the crystallization on the surface of the machine table door 204, the distance sensor 207 is arranged inside the machine table cover 202 to measure the distance between the distance sensor 207 and the machine table door 204 in real time, and several shower nozzles 202 are controlled to stop spraying water according to the change value of the distance, so as to avoid the abnormal opening of the machine table door 204, the water sprayed by the shower nozzle 202 splashes to the outside of the machine table, improves the product quality, improves the safety of the equipment, and reduces the probability of accidents.

[0033] In the embodiment, the initial distance d1 between the distance sensor 207 and the machine table door 204 in the closed state of the machine table door 204 (position A) is 8-10cm.

[0034] It should be noted that the change value of the distance refers to the difference between the real-time distance d2 (position B when the machine table door 204 is opened) between the distance sensor 207 and the machine table door 204 and the initial distance d1, and the real-time distance d2 is obtained by real-time measurement of the distance sensor 207.

[0035] In the embodiment, the machine table door 204 is made of light-transmitting material, which facilitates the operator to see the running condition of the machine table main body 201 from the outside. Specifically, the light-transmitting material can be glass or resin.

[0036] The number of the plurality of spray heads 203 is greater than or equal to 1. In the embodiment, the number of the plurality of spray heads 203 is two. The number of the plurality of spray heads 203 can be adjusted according to actual needs.

[0037] In the embodiment, the control system comprises a distance acquisition unit configured to acquire a measured value of the distance and acquire the change value according to the measured value; and a control module configured to control the plurality of spray heads 204 to stop spraying water when the change value is greater than a preset value.

[0038] It is to be noted that the preset value can be set to a reasonable range according to actual needs, so as to avoid the case that the distance between the distance sensor 207 and the machine door 204 changes due to slight vibration and the like, resulting in misjudgment, and also avoid the case that the preset value is too large and the plurality of spray heads 202 do not stop spraying water in time.

[0039] In the embodiment, the CMP machine further comprises a water pipeline 208 arranged between the machine door 204 and the machine body 201, one end of the water pipeline 208 being connected to a water source, and the plurality of spray heads 203 being connected to the water pipeline 208.

[0040] In the embodiment, the water pipeline 208 extends along a first direction X, and in the closed state of the machine door, the first direction X is parallel to the horizontal plane and parallel to the surface of the machine door 204.

[0041] In the embodiment, the plurality of spray heads 203 are uniformly distributed along the first direction X.

[0042] In the embodiment, the distance sensor 203 is mounted on the water pipeline 208. Here, the water pipeline 208 serves as a support frame for the distance sensor 203, so that the installation is convenient and the space occupied is small.

[0043] In other embodiments, the distance sensor can be arranged at any other position inside the machine cover. More preferably, the distance sensor is arranged between the machine body and the machine door and obliquely above the machine body, so as to avoid the influence of the operation of the machine body and the like on the measurement of the distance sensor.

[0044] In the embodiment, the distance between the edge of the distance sensor 207 and the door edge 2041 is in the range of 4.0cm to 4.5cm in the first direction X. The distance between the distance sensor 207 and the door edge 2041 is set to make the distance sensor 207 accurately obtain the distance change between the distance sensor 207 and the machine door 204 in a short time when the machine door 204 is opened. In other embodiments, the distance between the edge of the distance sensor and the door edge can not be limited to this.

[0045] The type of the sensor includes an optical distance sensor, an infrared distance sensor, or an ultrasonic distance sensor. In the embodiment, the type of the sensor is an ultrasonic distance sensor.

[0046] In the embodiment, the height of the shower head 203 relative to the surface of the table top 200 is in the range of 60cm to 80cm.

[0047] In the embodiment, the control system includes a programmable logic controller system.

[0048] In the embodiment, the control system is integrated in a CMP machine system for controlling the operation of the machine body 201. Specifically, the control of the operation of the machine body 201 includes adjusting various parameters (such as pressure and rotation speed).

[0049] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be the range limited by the claims.

Claims

1. A CMP machine, characterized in that, The application relates to a water curtain system for a CMP machine, comprising: a table top; a machine body and a machine cover placed on the table top, and a plurality of nozzles placed inside the machine cover, wherein the machine cover surrounds the machine body, the machine cover has a machine door which can be opened outwardly around a door shaft, and the plurality of nozzles are used for spraying water to the machine door to form a water curtain; a distance sensor placed inside the machine cover, which is used for measuring the distance between the distance sensor and the machine door in real time; a control system which is used for controlling the plurality of nozzles to stop spraying water according to the change value of the distance.

2. The CMP machine of claim 1, wherein, The control system comprises a distance acquisition unit which is used for acquiring the measured value of the distance and acquiring the change value according to the measured value, and a control module which is used for controlling the plurality of nozzles to stop spraying water when the change value is greater than a preset value.

3. The CMP machine of claim 1, wherein the polishing pad is a fixed pad. Further comprising: a water pipeline which is arranged between the machine door and the machine body, one end of the water pipeline is connected to a water source, and the plurality of nozzles are connected to the water pipeline.

4. The CMP machine as described in claim 3, characterized in that, The water pipeline extends along a first direction, in the closed state of the machine door, the first direction is parallel to a horizontal plane and parallel to the surface of the machine door.

5. The CMP machine as described in claim 4, characterized in that, The plurality of nozzles are uniformly distributed along the first direction.

6. The CMP machine as described in claim 4, characterized in that, The distance sensor is mounted on the water pipeline.

7. The CMP machine as described in claim 4, characterized in that, The machine door has a door edge which is away from the door shaft, and the distance between the edge of the distance sensor and the door edge is in the range of 4.0cm to 4.5cm in parallel to the first direction.

8. The CMP machine of claim 1, wherein, The type of the sensor comprises an optical distance sensor, an infrared distance sensor or an ultrasonic distance sensor.

9. The CMP machine of claim 1, wherein, In the closed state of the machine door, the initial distance between the distance sensor and the machine door is in the range of 8cm to 10cm.

10. The CMP machine of claim 1, wherein, The height of the plurality of nozzles relative to the surface of the table top is in the range of 60cm to 80cm.

11. The CMP machine of claim 1, wherein the polishing pad is a fixed pad. The control system comprises a programmable logic controller system.

12. The CMP machine of claim 1, wherein, The control system is integrated into a CMP machine system which is used for controlling the operation of the machine body.

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