Microporous ceramic adsorption carrying platform

Abstract

The utility model discloses a micropore ceramic adsorption platform deck which comprises a ceramic plate with adsorption holes, a sealing mechanism is arranged in the circumferential direction of the ceramic plate, the sealing mechanism is connected with a negative pressure pipe, and the sealing mechanism wraps the circumferential direction of the ceramic plate so that a flexible film on the upper side can be adsorbed and flattened by the ceramic plate in the negative pressure state. Compared with a common adsorption assembly with holes, the ceramic plate has more and more uniform holes, small gaps and good adsorption effect, and the deposition effect is improved. The sealing mechanism is mainly used for forming a sealing cavity, and downward suction force is conveniently generated. The diameter of the adsorption holes of the ceramic plate is 3-4 microns, the planeness can reach 0.01 mm, the phenomenon of sinking and unevenness when flexible materials are adsorbed is well avoided, the whole surface is full of the adsorption micropores, and the uniformity of the adsorption surface is better guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of ceramic adsorption for thin film deposition, in particular to a microporous ceramic adsorption loading platform. BACKGROUND

[0002] In the process of making perovskite and other thin film solar cells, the thin film will be fixed on the carrier. The traditional adsorption method has larger adsorption holes and cannot be arranged densely. When adsorbing flexible substrates, it cannot be well positioned, and the material is relatively thin and has a certain toughness. There is a depression at the adsorbed place, and there is a height difference between the adsorbed place and the place without adsorption, which leads to low flatness and affects precision. Therefore, how to more evenly adsorb the thin film and reduce deformation is a problem that technicians in the field urgently need to solve. SUMMARY

[0003] The utility model aims at providing a microporous ceramic adsorption loading platform to solve the problems in the background art.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a microporous ceramic adsorption loading platform, comprising a ceramic plate with adsorption holes, and a sealing mechanism is arranged on the circumference of the ceramic plate, the sealing mechanism is connected with a negative pressure pipe, and the sealing mechanism is wrapped around the circumference of the ceramic plate, so that the ceramic plate can adsorb the flexible thin film on the upper side in a flat manner under negative pressure. Compared with general hole adsorption assemblies, the ceramic plate has more holes, is more uniform, has small gaps, and can adsorb flexible thin films at multiple points with a large adsorption area, so that the thin film is more flat and the deposition effect is improved. The sealing mechanism is mainly used to form a closed cavity to facilitate the generation of downward suction force.

[0005] Preferably, the sealing mechanism comprises a surrounding plate wrapped around the circumference of the ceramic plate, and a negative pressure hole connected with the negative pressure pipe is formed in the circumference of the surrounding plate. The bottom of the surrounding plate can be sealed or unsealed according to the installation of the equipment to form a closed cavity for easy negative pressure extraction.

[0006] Preferably, the upper end of the surrounding plate extends horizontally to form a support part. This is convenient for installation and provides better support.

[0007] Preferably, a scale line is arranged on the support part. The scale line can be symmetrically arranged on both sides to facilitate the determination of the position of the thin film.

[0008] Preferably, the utility model further comprises a magnetic attraction mechanism for fixing the thin film on the ceramic plate.

[0009] Preferably, the magnetic attraction mechanism comprises a plurality of neodymium magnets adsorbed on the support part. The neodymium magnets are used for adsorption and fixation.

[0010] Preferably, the utility model further comprises a position measuring mechanism perpendicular to the scale line. The measuring mechanism is used in cooperation with the scale line to serve as a coordinate function.

[0011] Preferably, the measuring mechanism includes a scale perpendicularly resting on the graduation line, with the end of the scale bent downwards to form a guide block. A knob with its inner end abutting against the surrounding plate is threaded onto the guide block. The guide block fits against the support portion, serving a guiding function, and is then fixed by the knob.

[0012] Preferably, a waste liquid collection tank is connected to the enclosure to collect waste liquid.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. The ceramic plate has an adsorption pore diameter of 3-4μm and a flatness of 0.01mm, which effectively solves the problem of unevenness when adsorbing flexible materials. Moreover, the entire surface is covered with adsorption micropores, which better ensures the uniformity of the adsorption surface, and guarantees the flatness and coating processing accuracy. It also has the same effect on glass substrates or rigid materials, and the performance is even better.

[0015] 2. Neodymium magnets facilitate the fixation of thin films;

[0016] 3. The scale lines and ruler facilitate the positioning of the film. Attached Figure Description

[0017] Fig. 1 This is a front view of the first embodiment of the present invention;

[0018] Fig. 2 This is a top view of the first embodiment of the present invention;

[0019] Fig. 3 This is an axonometric view of the first embodiment of the present invention;

[0020] Fig. 4 This is a top view of the second embodiment of the present invention;

[0021] Fig. 5 This is an axonometric view of the second embodiment of the present invention.

[0022] In the diagram: 1. Ceramic plate; 2. Enclosure; 3. Negative pressure hole; 4. Scale line; 5. Neodymium magnet; 6. Ruler; 7. Knob; 8. Waste liquid collection tank. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Example 1

[0025] Please see Figs. 1 to 3 This invention provides a microporous ceramic adsorption platform solution: a microporous ceramic adsorption platform includes a ceramic plate 1 with adsorption pores, the pore diameter being 3-4 μm, and a sealing mechanism arranged circumferentially on the ceramic plate 1. The sealing mechanism is connected to a negative pressure tube and wraps around the circumference of the ceramic plate 1, so that the ceramic plate 1 generates a downward suction force to adsorb the film on the upper side under negative pressure. Compared with general porous adsorption components, the ceramic plate 1 has more, finer, and more uniform pores with smaller gaps, resulting in more adsorption points for the flexible film, a larger adsorption area, and a flatter surface, thus improving the deposition effect. The sealing mechanism is mainly used to form a closed cavity, facilitating the generation of downward suction force.

[0026] The sealing mechanism includes a surrounding plate 2 that wraps around the ceramic plate 1 in a circumferential direction, and a negative pressure hole 3 connected to a negative pressure pipe is formed on the circumference of the surrounding plate 2. The bottom of the surrounding plate 2 can be sealed, or it can be left unsealed when installed with the equipment, as long as a closed cavity is formed to facilitate the extraction of negative pressure. The upper end of the surrounding plate 2 extends horizontally to form a support section. This facilitates installation and provides better support. The support section is provided with scale lines 4. The scale lines 4 can be symmetrically arranged on both sides to facilitate the determination of the membrane position.

[0027] It also includes a magnetic attraction mechanism for fixing the film onto the ceramic plate 1. The magnetic attraction mechanism includes multiple neodymium magnets 5 that are attracted to the support. The film is fixed by attraction using the neodymium magnets 5.

[0028] Example 2

[0029] Please see Figs. 4 to 5 This invention provides a microporous ceramic adsorption platform solution: a microporous ceramic adsorption platform includes a ceramic plate 1 with adsorption pores, the pore diameter being 3-4 μm, and a sealing mechanism arranged circumferentially on the ceramic plate 1. The sealing mechanism is connected to a negative pressure tube and wraps around the circumference of the ceramic plate 1, so that the ceramic plate 1 generates a downward suction force to adsorb the film on the upper side under negative pressure. Compared with general porous adsorption components, the ceramic plate 1 has more, finer, and more uniform pores with smaller gaps, resulting in more adsorption points for the flexible film, a larger adsorption area, and a flatter surface, thus improving the deposition effect. The sealing mechanism is mainly used to form a closed cavity, facilitating the generation of downward suction force.

[0030] The sealing mechanism includes a surrounding plate 2 that wraps around the ceramic plate 1 in a circumferential direction, and a negative pressure hole 3 connected to a negative pressure pipe is formed on the circumference of the surrounding plate 2. The bottom of the surrounding plate 2 can be sealed, or it can be left unsealed when installed with the equipment, as long as a closed cavity is formed to facilitate the extraction of negative pressure. The upper end of the surrounding plate 2 extends horizontally to form a support section. This facilitates installation and provides better support. The support section is provided with scale lines 4. The scale lines 4 can be symmetrically arranged on both sides to facilitate the determination of the membrane position.

[0031] It also includes a magnetic attraction mechanism for fixing the film onto the ceramic plate 1. The magnetic attraction mechanism includes multiple neodymium magnets 5 that are attracted to the support. The film is fixed by attraction using the neodymium magnets 5.

[0032] It also includes a position measuring mechanism perpendicular to the scale line 4. The measuring mechanism works in conjunction with the scale line 4 to function as a coordinate system. The measuring mechanism includes a scale 6 that rests vertically on the scale line 4, with the end of the scale 6 bent downwards to form a guide block. A knob 7, whose inner end abuts against the surrounding plate 2, is threaded onto the guide block. The guide block fits against the support, providing guidance, and is then fixed by the knob 7. A waste liquid collection tank 8 is connected to the surrounding plate 2 to collect waste liquid. A level can also be added to the support.

[0033] Working principle: The ceramic plate 1 has adsorption pores with a diameter of 3-4μm and a flatness of 0.01mm, effectively solving the problem of unevenness when adsorbing flexible materials. Furthermore, the entire surface is covered with adsorption micropores, ensuring better uniformity of the adsorption surface, guaranteeing flatness and coating precision. It also achieves the same effect on glass substrates or rigid materials, with even better performance. Neodymium magnet 5 facilitates film fixation. Scale lines 4 and a scale 6 facilitate film positioning.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A microporous ceramic adsorption platform, characterized in that, It includes a ceramic plate (1) with adsorption holes, and the ceramic plate (1) is provided with a sealing mechanism in the circumferential direction. The sealing mechanism is connected to a negative pressure pipe and the sealing mechanism is wrapped around the circumferential direction of the ceramic plate (1) so that the ceramic plate (1) can adsorb and flatten the flexible film on the upper side under negative pressure. The sealing mechanism includes a surrounding plate (2) wrapped around the ceramic plate (1) in the circumferential direction, and the surrounding plate (2) is provided with a negative pressure hole (3) connected to the negative pressure pipe in the circumferential direction. The upper end of the enclosure (2) extends horizontally to form a support part. The support part is provided with a scale line (4) and also includes a position measuring mechanism perpendicular to the scale line (4). The measuring mechanism includes a scale ruler (6) that is vertically placed on the scale line (4), and the end of the scale ruler (6) is bent downward to form a guide block. A knob (7) with its inner end pressed against the enclosure (2) is threaded onto the guide block.

2. The microporous ceramic adsorption platform according to claim 1, characterized in that: It also includes a magnetic attraction mechanism for fixing the film onto the ceramic plate (1).

3. The microporous ceramic adsorption platform according to claim 2, characterized in that: The magnetic attraction mechanism includes multiple neodymium magnets (5) that are attracted to the support.

4. The microporous ceramic adsorption platform according to claim 1, characterized in that: Waste liquid collection tank (8) is connected to the enclosure (2).

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