Film placing device for developing films

Abstract

The utility model provides a film placing device for film developing, and belongs to the field of cleaning devices. The film placing device for film developing comprises a film placing body, a placing groove used for placing films is formed in the film placing body, a water passing structure for water to flow in and out is arranged at the bottom of the placing groove, the film placing device further comprises a film blocking body used for blocking an opening of the placing groove to prevent the films from falling out, and the film blocking body is a sleeve body arranged on the film placing body in a sleeving mode. One end of the sleeve body is of an opening structure used for sleeving the sleeve body on the sheet placing body, the sleeving direction of the sleeve body is perpendicular to the groove depth direction of the placing groove, and at least the side wall, corresponding to the placing groove, of the sleeve body is provided with water permeable holes through which water enters and exits the placing groove. According to the utility model, the separation blade body is the sleeve body which can be sleeved on the blade placing body, the separation blade body is simple and convenient to install and operate, and the efficiency of preparatory work before film developing is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of cleaning device, especially, relate to a piece device for washing film. BACKGROUND

[0002] The diamond single crystal wafer needs to be cleaned after processing to remove the pollutants adhered to the surface, which are mainly the adhesive used to fix the wafer during processing and the oil stains contaminated during processing. In addition to the diamond single crystal wafer, the diamond composite wafer also has the same cleaning requirement. The traditional cleaning method is for the operator to use tweezers to pick up a single wafer, and then use hot water or steam to blow the surface of the wafer. This way can only clean one wafer at a time, and the cleaning efficiency is low. Moreover, a large amount of human resources is needed for cleaning, and the labor cost is high. In addition, the position of the wafer picked up by the tweezers cannot be blown, and the cleaning effect is not good.

[0003] At present, there is a special cleaning device that can clean a batch of wafers by soaking or flushing, which can improve the cleaning efficiency and reduce the labor cost. Before cleaning, the wafer needs to be placed in the wafer placing device of the cleaning device to ensure that the wafer can remain stable during cleaning. The Chinese utility model patent with the authorization announcement number CN219025205U discloses a surface cleaning device for diamond composite wafer processing, which comprises a placing plate (i.e. wafer placing body) for placing wafers. The upper surface of the placing plate is provided with a plurality of placing grooves, and the lower surface of the placing groove is provided with a bottom groove hole corresponding to the placing groove. The diameter of the bottom groove hole is smaller than the diameter of the placing groove. The upper side of the placing plate is provided with a cover plate (i.e. wafer blocking body) for covering the placing groove. The cover plate is provided with a flow-through hole for the flow of cleaning water. Before cleaning, the wafer is placed in the corresponding placing groove, and then the cover plate is covered. Each wafer is placed separately, and can remain stable during cleaning due to the limitation of the placing groove and the cover plate.

[0004] In the above-mentioned surface cleaning device, the cover plate is provided with a positioning rod, and the placing plate is provided with a positioning hole for cooperating with the positioning rod. When installing the cover plate, the positioning rod needs to be inserted into the positioning hole to ensure the accuracy of the installation of the cover plate. To ensure that the cover plate can remain stable after installation, a plurality of stabilizing plates are rotatably arranged on the placing plate. After the cover plate is installed, the stabilizing plates are rotated so that they are turned to the side away from the placing plate, thereby pressing the cover plate. The installation process of the cover plate is relatively complex, time-consuming and labor-intensive, resulting in low efficiency of the preparation work before cleaning the wafer. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a wafer placing device for washing film, to solve the technical problem of low efficiency of the preparation work before cleaning the wafer caused by the complex process of assembling the wafer blocking body to the wafer placing body in the prior art.

[0006] To achieve the above object, the technical scheme of the film placing device for film developing is provided by the utility model:

[0007] The utility model provides a film placing device for film developing, which comprises a film placing body, a placing groove for placing a film is arranged on the film placing body, a water passing structure for water inlet and outlet is arranged on the groove bottom of the placing groove, and the film placing device further comprises a film blocking body for blocking the mouth of the placing groove to prevent the film from falling out, the film blocking body is a sleeve body sleeved on the film placing body, one end of the sleeve body is an opening structure for sleeving the film placing body, the sleeving direction of the sleeve body is perpendicular to the groove depth direction of the placing groove, and at least the side wall of the sleeve body corresponding to the placing groove is provided with a water passing hole for water inlet and outlet of the placing groove.

[0008] As a further improvement, at least the side wall of the sleeve body corresponding to the placing groove is a mesh plate structure, and the mesh of the mesh plate structure constitutes the water passing hole.

[0009] As a further improvement, all the side walls of the sleeve body are mesh plate structures.

[0010] As a further improvement, the opposite end faces of the film placing body are each provided with a placing groove, the placing grooves at the two ends one-to-one correspond to each other, the depths of the corresponding two placing grooves are different, and the water passing structure at the groove bottom of the two corresponding placing grooves supplies water flow from one of the placing grooves to the other.

[0011] As a further improvement, a placing hole is arranged through the film placing body, a separation mesh for separating the placing hole into two parts along the through direction of the placing hole is arranged in the placing hole, and the two parts separated by the placing hole each constitute a placing groove, and the separation mesh constitutes the water passing structure.

[0012] As a further improvement, the placing groove is a circular groove.

[0013] As a further improvement, the film placing device for film developing further comprises a base, the film placing body is installed on the upper side of the base, one end of the film placing body extends out of the opening structure of the sleeve body, and an installation structure is arranged between the end and the base, and the opening direction of the placing groove is in a horizontal state.

[0014] As a further improvement, the installation structure comprises a slot arranged on the base, and the end of the film placing body extending out of the sleeve body is an insertion end for plug-in cooperation with the slot.

[0015] As a further improvement, one end of the length direction of the slot penetrates one end face of the base in the horizontal direction.

[0016] As a further improvement, at least part of the edge of one end of the film placing body located in the sleeve body is provided with a round corner structure or a chamfer structure.

[0017] The beneficial effect is that the film placing device for film washing provided by the utility model is an improvement on the prior art. The blocking piece body in the film placing device for film washing is a sleeve body, and the installation of the sleeve body is completed by sleeving the sleeve body on the film placing body. Compared with the prior art, the installation process of the blocking piece body in the utility model is simpler, time-saving and labor-saving, and effectively improves the operation efficiency of the preparation work before film cleaning. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is an overall structure schematic view of the film placing device for film washing in embodiment 1 of the utility model.

[0019] Figure 2 It is a structure schematic view of the film placing device for film washing in embodiment 1 of the utility model after removing the cleaning cover.

[0020] Figure 3 It is a structure schematic view of the film placing body and the sleeve body of the film placing device for film washing in embodiment 1 of the utility model.

[0021] Figure 4 It is a process schematic view of placing the film in the film placing device for film washing in embodiment 1 of the utility model.

[0022] Figure 5 It is a sectional view of one perspective of the film placing device for film washing in embodiment 1 of the utility model.

[0023] Figure 6 It is a local structure schematic view of embodiment 1 of the film placing device for film washing in the utility model.

[0024] Figure 7 It is a sectional view of another perspective of the film placing device for film washing in embodiment 1 of the utility model.

[0025] BRIEF DESCRIPTION OF DRAWINGS

[0026] 1, frame body; 11, rectangular frame; 12, supporting leg; 2, table plate; 21, water leakage hole; 3, film placing device; 31, film placing body; 311, placing groove; 312, separation mesh; 313, insertion end; 32, sleeve body; 321, water permeable hole; 33, base; 331, insertion groove; 4, cleaning cover; 41, cover body; 42, door body; 5, film washing nozzle; 6, water supply pipe; 61, main pipe; 62, branch pipe; 7, control valve; 8, water collecting funnel; 9, film. DETAILED DESCRIPTION

[0027] The utility model will be further described in detail in combination with embodiments.

[0028] To solve the problems of the prior art, the basic concept of the utility model is to set the blocking piece body as a sleeve body that can be sleeved on the film placing body, so as to facilitate the installation of the blocking piece body.

[0029] The specific embodiment 1 of the film placing device for film washing provided by the utility model is as follows:

[0030] The film placing device for film washing is applied in a film washing equipment. The film washing equipment can wash films by means of flushing or by means of immersion plus ultrasonic waves. The present embodiment mainly takes the flushing mode as an example to illustrate the scheme of the utility model.

[0031] The film washing equipment to which the film placing device is applied is shown in Figure 1 and Figure 2 , and comprises a frame body 1, a table plate 2, a film placing device 3, a cleaning cover 4, a film washing nozzle 5, a water supply pipe 6 and a control valve 7.

[0032] The frame body 1 has a rectangular frame 11 and four supporting legs 12 located at the bottom of the rectangular frame 11. The table plate 2 is fixedly installed on the inner side of the rectangular frame 11. A water leakage hole 21 for allowing water on the upper side of the table plate 2 to flow downward is arranged at the middle position of the table plate 2. A water collecting funnel 8 is installed below the table plate 2. The upper end opening of the water collecting funnel 8 covers all the water leakage holes 21 so that all the water on the table plate 2 can be collected by the water collecting funnel 8.

[0033] The film placing device 3 is used for placing the films 9 to be cleaned. The film placing device 3 is arranged at the central position on the upper side of the table plate 2. The cleaning cover 4 is opened downward and buckled on the table plate 2. The film placing device 3 is located on the inner side of the cleaning cover 4. The cleaning cover 4 is connected with the table plate 2 by means of buckling. Referring to Figure 5 , the film washing nozzle 5 is provided with two and is installed on the opposite two side walls of the cleaning cover 4. The nozzle of the film washing nozzle 5 faces the film placing device 3. The water flow sprayed by the film washing nozzle 5 can clean the films 9 in the film placing device 3. The water supply pipe 6 comprises a main pipe 61 and two branch pipes 62. One end of the main pipe 61 is connected with a water source. The other end of the main pipe 61 is connected with the control valve 7. One end of each branch pipe 62 is connected with a corresponding film washing nozzle 5. The other end of each branch pipe 62 is connected with the control valve 7.

[0034] The cleaning cover 4 can prevent water flow from splashing during the cleaning process. In order to facilitate the observation of the internal cleaning process, the cleaning cover 4 can use a transparent cover. The cleaning cover 4 comprises a cover body 41 and a door body 42. A hole for conveniently taking and placing the film placing device 3 by an operator is formed on one side of the cover body 41 in the horizontal direction. The door body 42 is arranged at the hole. One side of the door body 42 is connected with the cover body 41 by means of a hinge. The other side of the door body 42 is connected with the cover body 41 by means of a lock buckle.

[0035] Referring to Figure 5 , attached Figure 6 and attached Figure 7 , the film placing device 3 comprises a film placing body 31, a sleeve body 32 and a base 33.

[0036] Referring to attached Figure 3 and attached Figure 4The plate-shaped placement body 31 has a through-hole along its thickness direction. All placement holes are circular. A dividing mesh 312 is fixedly installed within each placement hole, dividing the placement hole into two parts along its through-hole. Both parts form placement grooves 311 for placing the plate 9, and each placement groove 311 is also circular. The dividing mesh 312 is positioned off-center within the placement hole, resulting in different depths in the two placement grooves 311 formed by the same placement hole. In other embodiments, the placement hole can also be a square hole or a hole of other shapes.

[0037] The sleeve 32 has a box-shaped structure with an open end, allowing it to be fitted onto the plate 31. All sidewalls of the sleeve 32 are mesh structures, with the mesh forming permeable holes 321 for water flow. After the sleeve 32 is fitted onto the plate 31, one end of the plate 31 still protrudes from the open end of the sleeve 32, serving as the insertion end 313. To facilitate fitting the sleeve 32 onto the plate 31, the shorter edge of the end of the plate 31 located inside the sleeve 32 is rounded; in other embodiments, the rounded corner can be replaced with a chamfer.

[0038] The base 33 is bolted to the center of the upper side of the platform 2. A slot 331 is provided on the upper surface of the base 33. The insertion end 313 of the plate holder 31 engages with the slot 331. Before cleaning the plate 9, the insertion end 313 of the plate holder 31 containing the plate 9 needs to be inserted downwards into the slot 331, making the plate holder 31 upright. The openings of the placement slots 311 on the plate holder 31 face horizontally. One end of the slot 331 extends through the horizontal end face of the base 33, facilitating the operator to open the door 42 of the cleaning hood 4 and remove the plate holder 31 horizontally. The slot 331 and the insertion end 313 together constitute the mounting structure for installing the plate holder 31 onto the base 33.

[0039] Before cleaning slide 9, first remove slide holder 31, see appendix. Figure 4 With the opening of the placement slot 311 facing upwards, place the wafers 9 to be cleaned one by one into the placement slot 311, one wafer 9 in each placement slot 311. Then, horizontally slip the sleeve 32 onto the wafer holder 31. At this point, the opening of the placement slot 311 is blocked by the corresponding side wall of the sleeve 32, making it difficult for the wafers 9 to fall out of the corresponding placement slot 311. Next, with the insertion end 313 of the wafer holder 31 facing downwards, install the wafer holder 31 onto the base 33, completing the preparation work before cleaning. Finally, open the control valve 7, and use the water flow from the washing nozzle 5 to clean the wafers 9.

[0040] Compared with the prior art, the sleeve 32 in the film placing device 3 only needs to be sleeved on the film placing body 31 to complete the installation of the sleeve 32, the overall assembly process of the film placing device 3 is simple to operate, and the preparation work before cleaning of the film 9 can be greatly simplified, and the preparation efficiency is improved. Moreover, in the process of film washing, the opening structure of the sleeve 32 faces downward, and the sleeve 32 can be stably sleeved on the film placing body 31 under the action of gravity.

[0041] The film placing body 31 is provided with a film washing nozzle 5 on each side, and the water flow sprayed by one side of the film washing nozzle 5 directly washes the film 9 after passing through the sleeve 32, and the water flow sprayed by the other side of the film washing nozzle 5 washes the film 9 after passing through the sleeve 32 and the separation mesh 312. Both sides of the film 9 can be washed, and the film 9 has a certain activity space in the corresponding placing groove 311, which can ensure that there is no dead angle in washing and obtain a better washing effect. Since a plurality of films 9 can be washed at the same time, the efficiency is higher and the labor cost is lower compared with manual cleaning.

[0042] Generally, the shape of a single crystal diamond wafer is close to a square, so there is a large gap between the four sides of the film 9 and the inner wall of the circular placing groove, which can be used for water flow to pass through to improve the washing effect, or for forceps to extend in, which is convenient for an operator to take the film 9.

[0043] The film 9 needs to select a placing groove 311 with a thickness suitable for the film 9 to be placed, because if the depth of the placing groove 311 is shallow, the film 9 cannot be completely placed in the placing groove 311; if the depth of the placing groove 311 is deep, the activity space of the film 9 in the placing groove 311 is too large, the stability of the film 9 is poor, and the water flow in the washing process will have a large impact force on the film 9, which will cause the film 9 to swing or even roll in the placing groove 311, so that the film 9 collides with the inner wall of the placing groove 311 and is damaged. In the embodiment, since the same film placing body 31 has two kinds of depths of the placing groove 311, two kinds of different thicknesses of the film 9 can be placed, so that the film placing body 31 has good versatility, and the cost of cleaning the film 9 is reduced in the process of mass production of the film 9.

[0044] In other embodiments, the film washing device can also not use the water flow sprayed by the film washing nozzle to wash the film, but a cleaning tank is arranged on the frame body, the cleaning tank is used for containing clean water, the film placing device containing the film is soaked in the water in the cleaning tank during cleaning, and then an ultrasonic generator is arranged in the cleaning tank to clean the film by ultrasonic vibration. The film washing by soaking and ultrasonic vibration is the prior art, which will not be described here.

[0045] The specific embodiment 2 of the film placing device for film washing provided by the utility model:

[0046] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that one end of the length direction of the slot in the embodiment does not penetrate through the base, and in order to facilitate the taking and placing of the film body, the door body of the cleaning cover can be arranged on the top of the door body.

[0047] The specific embodiment 3 of the film placing device for film washing provided by the utility model:

[0048] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the mounting structure for mounting the film placing body on the base in the embodiment comprises three vertical plugs arranged on the base, and the lower end of the film placing body is provided with a plug hole for plug-in cooperation with the plug.

[0049] The specific embodiment 4 of the film placing device for film washing provided by the utility model:

[0050] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the film placing device in the embodiment does not comprise the base, the film placing device is horizontally placed on the table plate, the mouth part of the placing slot loaded with the film is upward, the film washing nozzle is provided with one and is mounted on the top of the cleaning cover, and the water flow sprayed by the film washing nozzle washes the film from top to bottom.

[0051] The specific embodiment 5 of the film placing device for film washing provided by the utility model:

[0052] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the film placing body in the embodiment is processed from a plate material with a certain thickness, the placing slots with different depths are respectively processed at two ends in the thickness direction of the plate material, the placing slots at two ends are coaxially corresponding, a plurality of water passing holes are processed between the slot bottoms of the two corresponding placing slots, and the water passing holes constitute the water passing structure for water flow flowing from one placing slot to another placing slot.

[0053] The specific embodiment 6 of the film placing device for film washing provided by the utility model:

[0054] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the separation mesh in the embodiment is located at one end in the axial direction of the placing hole, so that the placing hole in the embodiment can only form one placing slot.

[0055] The specific embodiment 7 of the film placing device for film washing provided by the utility model:

[0056] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the sleeve body in the embodiment is only a mesh plate structure in the thickness direction of the film placing body.

[0057] The specific embodiment 8 of the film placing device for film washing provided by the utility model:

[0058] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the sleeve body in the embodiment is provided with water permeable holes on two side walls in the thickness direction of the sheet body, the water permeable holes correspond to the placing grooves one by one, and the diameter of the water permeable holes is smaller than that of the placing grooves to prevent the sheet from falling out of the placing grooves.

[0059] The specific embodiment 9 of the sheet placing device for film development provided by the utility model is as follows:

[0060] The embodiment is based on the embodiment 1, and different from the embodiment 1 is that the sheet body in the embodiment is fixedly connected by arranging a plurality of cylindrical sheets together, the axial one end of the cylindrical sheet is fixedly provided with a mesh, and the inner cavity of each cylindrical sheet constitutes a placing groove, and the mesh at the end of the cylindrical sheet constitutes a water passing structure.

[0061] Finally, it should be noted that the above only for the preferred embodiments of the utility model, and is not used to limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can be modified without paying the creative labor to the technical scheme recorded in the foregoing each embodiment, or equivalent replacement is carried out to part of the technical features. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A film placing device for film developing, comprising a film placing body, a placing groove for placing a film being provided on the film placing body, a water passage structure for water inlet and outlet being provided on a groove bottom of the placing groove, and a film blocking body for blocking an opening of the placing groove to prevent the film from falling off, characterized in that, The sleeve body is sleeved on the placing body, one end of the sleeve body is an opening structure for sleeving on the placing body, the sleeving direction of the sleeve body is perpendicular to the groove depth direction of the placing groove, and at least the side wall of the sleeve body corresponding to the placing groove is provided with a water permeable hole for water to enter and exit the placing groove.

2. The film mounting device for use in film processing according to claim 1, wherein At least the side wall of the sleeve body corresponding to the placing groove is a mesh plate structure, and the mesh of the mesh plate structure constitutes the water permeable hole.

3. The film mounting device for use in film processing according to claim 2, wherein All the side walls of the sleeve body are mesh plate structures.

4. The film holder according to any one of claims 1 to 3, wherein The opposite two end faces of the placing body are each provided with a placing groove, the placing grooves at the two ends correspond to each other, the depths of the corresponding two placing grooves are different, and the water passing structure at the groove bottoms of the two corresponding placing grooves is used for water flow to flow from one of the placing grooves to the other.

5. The film mounting device for use in film processing according to claim 4, wherein The placing body is provided with a placing hole penetrating therethrough, a separation mesh for separating the placing hole into two parts along the penetrating direction of the placing hole is mounted in the placing hole, and the two parts separated by the placing hole each constitute a placing groove, and the separation mesh constitutes a water passing structure.

6. The film holder according to any one of claims 1 to 3, wherein The placing groove is a circular groove.

7. The film holder according to any one of claims 1 to 3, wherein The film placing device for film developing further comprises a base, the placing body is mounted on the upper side of the base, one end of the placing body extends out of the opening structure of the sleeve body, and a mounting structure is arranged between the end and the base, and the opening direction of the placing groove is in a horizontal state.

8. The film processing apparatus according to claim 7, wherein The mounting structure comprises a slot arranged on the base, and the end of the placing body extending out of the sleeve body is an insertion end for plug-in cooperation with the slot.

9. The film processing apparatus according to claim 8, wherein One end of the length direction of the slot penetrates through one end face of the base in the horizontal direction.

10. The film processing apparatus according to any one of claims 1 to 3, wherein At least part of the edge of the end of the placing body located in the sleeve body is provided with a round corner structure or a chamfer structure. At least part of the edge of the end of the placing body located in the sleeve body is provided with a round corner structure or a chamfer structure.

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