Adjustable cleaning tool for semiconductor parts

Abstract

The utility model relates to the field of semiconductor part processing equipment, in particular to an adjustable cleaning tool for semiconductor parts, which comprises a placing layer plate, a clamping mechanism and a bearing frame, the placing layer plate comprises a plurality of parallel and coaxially distributed layer plates, each layer plate is detachably mounted on the bearing frame, and each layer plate is provided with water permeable holes in a penetrating manner; the clamping mechanisms are arranged on all the layer plates, each clamping mechanism comprises a sliding guide rail and positioning frames, the positioning frames are movably arranged on the sliding guide rails, the positioning frames are arranged in pairs, and clamping positions used for containing parts are arranged on the opposite inner sides of each pair of positioning frames. According to the utility model, a plurality of disc-shaped or annular parts can be clamped at the same time through the plurality of laminated plates which are arranged at intervals, so that the cleaning efficiency is effectively improved; the applicable size of the clamping mechanism is adjustable, the number and interval of the laminates are adjustable, the cleaning requirements of parts of different sizes, different heights and various shapes can be met, and the application range is wide.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor component processing equipment, and in particular to an adjustable cleaning fixture for semiconductor components. Background Technology

[0002] In the semiconductor component manufacturing process, the processing of various circular and annular semiconductor components, such as spray discs and plasma focusing rings, all involve a cleaning step. In existing technologies, suction cups or clamping devices are often used for cleaning circular and annular components. The suction cup adsorption method can cause problems such as the inability to clean the connection points and low cleaning efficiency. On the other hand, clamping devices usually need to be customized according to the size and shape characteristics of the components to be cleaned, which is difficult to meet the requirements of batch and rapid production. Utility Model Content

[0003] The present invention aims to solve the above problems and provides an adjustable cleaning fixture for semiconductor components, the technical solution of which is as follows:

[0004] An adjustable cleaning fixture for semiconductor components includes a placement shelf, a clamping mechanism, and a support frame. The placement shelf comprises multiple parallel and coaxially distributed shelves with intervals between adjacent shelves. Each shelf is detachably mounted on the support frame, and each shelf has through-holes for water permeability. The clamping mechanism is disposed on each shelf and includes a sliding guide rail and a positioning frame. The sliding guide rail is arranged in a cross shape on the shelf, and the positioning frame is movably disposed on the sliding guide rail. The positioning frames are arranged in pairs, and each pair of positioning frames has clamping positions on their opposite inner sides for accommodating components. The positioning frame is provided with a fastening mechanism.

[0005] Based on the above scheme, the placement shelf includes a first shelf, a second shelf and a third shelf arranged in sequence, and the number of the load-bearing frame is 4, which are evenly distributed around the central axis of the shelf; the upper end and the lower end of the load-bearing frame are respectively set through the first shelf and the third shelf, and a positioning slot is set in the middle of the load-bearing frame, and the edge of the second shelf is engaged with the positioning slot.

[0006] Based on the above scheme, the number of positioning slots is multiple, and they are distributed along the axis of the layer plate.

[0007] Preferably, the upper end of the load-bearing frame is the upper connecting end, and the lower end of the load-bearing frame is the lower connecting end. The upper connecting end and the lower connecting end are respectively threaded with a first fixing nut and a second fixing nut. The first fixing nut and the second fixing nut are respectively disposed on the upper surface of the first layer plate and the lower surface of the third layer plate.

[0008] Preferably, the positioning frame has a trapezoidal opening facing the axis of the shelf, and the size of the trapezoidal opening gradually increases along the direction close to the axis.

[0009] Preferably, the fastening mechanism includes a fastening bolt and a fastening nut, wherein the fastening bolt passes through the positioning frame and the fastening nut is threadedly connected to the fastening bolt.

[0010] Preferably, there are multiple pairs of positioning frames on the sliding guide rail.

[0011] Preferably, the bottom of the lowest layer is fixedly connected to a support leg.

[0012] Preferably, the number of water-permeable holes on the shelf is multiple, and they are evenly distributed around the central axis of the shelf.

[0013] The beneficial effects of this utility model are as follows: multiple spaced shelves can simultaneously clamp multiple disc-shaped or ring-shaped parts, effectively improving cleaning efficiency; clamping by the edge ensures that the surface of the parts can be thoroughly and with high quality; the applicable size of the clamping mechanism is adjustable, and the number and spacing of the shelves are adjustable, which can meet the cleaning requirements of parts of different sizes, heights and shapes, and has a wide range of applications. Attached Figure Description

[0014] Figure 1 : A schematic diagram of the structure of this utility model;

[0015] Figure 2 : Schematic diagram of the clamping mechanism of this utility model;

[0016] Figure 3 : Schematic diagram of the installation state of the second layer plate of this utility model. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0018] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0019] In the description of this utility model, it should be understood that the terms "center," "length," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," and "inner," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0020] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0021] like Figures 1 to 3 As shown, an adjustable cleaning fixture for semiconductor components includes a placement shelf, a clamping mechanism, and a support frame 31. The placement shelf comprises multiple parallel and coaxially distributed shelves with gaps between adjacent shelves. Each shelf is detachably mounted on the support frame 31. Water-permeable holes 14 are provided through each shelf, allowing cleaning liquid to flow through the gaps between the shelves and the water-permeable holes 14, achieving omnidirectional cleaning of the components. Preferably, the number of water-permeable holes 14 on the shelf is multiple, and they are evenly distributed circumferentially about the central axis of the shelf.

[0022] Preferably, the shelf arrangement includes a first shelf 11, a second shelf 12, and a third shelf 13 arranged sequentially. There are four support frames 31, evenly distributed circumferentially about the central axis of the shelf. The upper and lower ends of each support frame 31 pass through the first shelf 11 and the third shelf 13, respectively. A positioning slot 33 is provided in the middle of each support frame 31, and the edge of the second shelf 12 engages with the positioning slot 33. During installation, the second shelf 12 is first engaged with each support frame 31, and then the first shelf 11 and the third shelf 13 are installed on the support frames 31, facilitating installation, replacement, and adjustment.

[0023] The number of positioning slots 33 is multiple and distributed along the axis of the shelf, so that the position of the second shelf 12 can be adjusted, the distance between the second shelf 12 and the upper and lower side shelves can be adjusted, and the number of shelves can be increased to improve clamping and cleaning efficiency.

[0024] The upper end of the load-bearing frame 31 is the upper connecting end 32, and the lower end of the load-bearing frame 31 is the lower connecting end 34. A first fixing nut and a second fixing nut are threaded onto the upper connecting end 32 and the lower connecting end 34, respectively. The first fixing nut and the second fixing nut are respectively located on the upper surface of the first layer plate 11 and the lower surface of the third layer plate 13. The first fixing nut and the second fixing nut fix the first layer plate 11 and the third layer plate 13, which facilitates loading, unloading and replacement.

[0025] The bottom of the lowest layer plate and the bottom of the third layer plate 13 are fixedly connected to the support leg 4, so that the bottom surface of the third layer plate 13 is separated from the bottom of the cleaning equipment by a certain distance, which facilitates the flow of cleaning liquid and improves the cleaning effect.

[0026] The clamping mechanism is installed on each shelf. The clamping mechanism includes a sliding guide rail 21 and a positioning frame 22. The sliding guide rail 21 is arranged in a cross shape on the shelf. The positioning frame 22 is movably arranged on the sliding guide rail 21. The positioning frames 22 are arranged in pairs, and each pair of positioning frames 22 has a clamping position for accommodating parts on its opposite inner side. The parts to be cleaned are placed in the clamping position, and the position of each positioning frame 22 is adjusted. The parts are positioned and clamped by at least two positioning frames 22 to meet the clamping requirements of parts of various sizes and shapes.

[0027] Preferably, the positioning frame 22 is provided with a trapezoidal opening facing the axis of the shelf, and the size of the trapezoidal opening gradually increases along the direction close to the axis. The trapezoidal opening is the clamping position, which facilitates the clamping and disassembly of parts, and improves operating efficiency and clamping stability.

[0028] The positioning frame 22 is provided with a fastening mechanism. Specifically, the fastening mechanism includes a fastening bolt 23 and a fastening nut. The fastening bolt 23 passes through the positioning frame 22, and the fastening nut is threadedly connected to the fastening bolt 23. After the positioning frame 22 is moved to a suitable position and the parts are stably clamped, the position of the positioning frame 22 can be fixed by tightening the fastening nut.

[0029] When cleaning ring-shaped parts of different sizes, the positioning brackets 22 on the sliding guide rail 21 can be in multiple pairs, so that multiple ring-shaped parts of different diameters can be clamped at the same time on the same layer plate, thereby improving cleaning efficiency.

[0030] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. An adjustable cleaning fixture for semiconductor components, characterized in that, The system includes a shelf, a clamping mechanism, and a support frame (31). The shelf includes multiple parallel and coaxially distributed shelves with a gap between adjacent shelves. Each shelf is detachably mounted on the support frame (31), and each shelf has a through-hole (14). The clamping mechanism is mounted on each shelf and includes a sliding guide rail (21) and a positioning frame (22). The sliding guide rail (21) is arranged in a cross shape on the shelf, and the positioning frame (22) is movably mounted on the sliding guide rail (21). The positioning frames (22) are arranged in pairs, and each pair of positioning frames (22) has a clamping position on its inner side for accommodating parts. The positioning frame (22) is provided with a fastening mechanism.

2. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, The placement shelf includes a first shelf (11), a second shelf (12) and a third shelf (13) arranged in sequence. There are 4 load-bearing frames (31) and they are evenly distributed around the central axis of the shelf. The upper and lower ends of the load-bearing frames (31) are respectively set through the first shelf (11) and the third shelf (13). A positioning slot (33) is set in the middle of the load-bearing frame (31), and the edge of the second shelf (12) is engaged with the positioning slot (33).

3. The adjustable cleaning fixture for semiconductor components according to claim 2, characterized in that, The number of positioning slots (33) is multiple and they are distributed along the axis of the layer plate.

4. The adjustable cleaning fixture for semiconductor components according to claim 2, characterized in that, The upper end of the load-bearing frame (31) is the upper connecting end (32), and the lower end of the load-bearing frame (31) is the lower connecting end (34). The upper connecting end (32) and the lower connecting end (34) are respectively threaded with a first fixing nut and a second fixing nut. The first fixing nut and the second fixing nut are respectively set on the upper surface of the first layer plate (11) and the lower surface of the third layer plate (13).

5. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, The positioning frame (22) is provided with a trapezoidal opening facing the axis of the shelf, and the size of the trapezoidal opening gradually increases along the direction close to the axis.

6. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, The fastening mechanism includes a fastening bolt (23) and a fastening nut. The fastening bolt (23) is installed through the positioning frame (22), and the fastening nut is threadedly connected to the fastening bolt (23).

7. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, There are multiple pairs of positioning frames (22) on the sliding guide rail (21).

8. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, The bottom of the lowest shelf is fixedly connected to the support leg (4).

9. The adjustable cleaning fixture for semiconductor components according to claim 1, characterized in that, The number of permeable holes (14) on the shelf is multiple, and they are evenly distributed around the central axis of the shelf.

Images