Ceramic target material forming device

Abstract

The utility model provides a ceramic target material forming device which comprises a mold main body, at least two forming cavities are arranged in the mold main body, each forming cavity is used for forming a ceramic target material, and the forming cavities are formed by an internal structure and / or a separation structure of the mold main body; the upper mold core is located on the upper portion of the forming cavity communicating with the top of the mold body, the lower mold core is located at the bottom of the forming cavity communicating with the bottom of the mold body, and exhaust gaps are formed between the upper mold core and the inner wall of the adjacent forming cavity and between the lower mold core and the inner wall of the adjacent forming cavity; a powder filling opening is formed in the top of the forming cavity communicating with the top of the mold body. The at least two forming cavities are arranged in the mold main body, so that a plurality of target materials can be simultaneously formed through single-time pressing, and compared with a traditional single-cavity mold, the production efficiency is improved, and the problem of low forming efficiency is solved. And the pressing frequency and manual operation are reduced, and the labor cost is reduced. And the defective rate caused by density difference is reduced due to the improvement of density uniformity.

Description

TECHNICAL FIELD

[0001] The utility model relates to ceramic target material manufacturing technical field more specifically, relate to a kind of ceramic target material forming device. BACKGROUND

[0002] In the field of thin film preparation, physical vapor deposition (PVD) technology, especially reactive plasma deposition (RPD) technology, is widely used in the preparation of various high-performance ceramic films. RPD coating principle: Ar ions are generated by an ion generator, and the argon gas is deflected by a controllable magnetic field to hit the target material, thereby generating local high temperature on the target material, and sublimation occurs at the same time, and ionization occurs finally to form an ionized gas group that is adsorbed and deposited on the substrate to form a thin film. The quality of the ceramic target material directly affects the performance of the thin film. Currently, the forming process of RPD ceramic target material usually uses a multifunctional automatic hydraulic press to provide pressure, and the powder is pressed and formed by a tungsten steel mold. However, this traditional forming method has the disadvantages of low forming efficiency, large density difference between different target materials, high labor cost, and unstable product quality, which cannot meet the increasing demand for high-performance thin film preparation.

[0003] Therefore, how to provide a ceramic target material forming device with high efficiency and stable quality has become a technical problem that needs to be solved in the field. SUMMARY

[0004] The utility model aims to provide an improved ceramic target material forming device to solve the problems of low forming efficiency, large density difference, high labor cost, and unstable product quality in the prior art.

[0005] The utility model provides a kind of ceramic target material forming device, comprising:

[0006] The mold body is provided with at least two forming chambers inside, each forming chamber is used to form a ceramic target material, and the forming chambers are formed by the internal structure and / or partition structure of the mold body;

[0007] The upper mold core is located at the upper part of the forming chamber connected to the top of the mold body, and the lower mold core is located at the bottom of the forming chamber connected to the bottom of the mold body, and the exhaust gap is formed between the upper mold core and the lower mold core and the inner wall of the adjacent forming chamber;

[0008] The top of the forming chamber connected to the top of the mold body forms a powder filling port.

[0009] Optionally, the mold body is made of tungsten steel material, and the outer periphery of the mold body is rounded at both ends with an R angle.

[0010] Optionally, the number of forming chambers is 2 or 3.

[0011] Optionally, the mold body further comprises a positioning mechanism for fixing the position of the mold body during pressing; the positioning mechanism comprises positioning pins and positioning holes arranged on the outer side of the mold body, the positioning pins being matched with the positioning holes on the workbench of the hydraulic machine, or the positioning mechanism comprises positioning bosses arranged on the bottom of the mold body and positioning grooves on the workbench of the hydraulic machine, the positioning being realized through the cooperation of the bosses and the grooves.

[0012] Optionally, the mold body is a single-hole structure, and the separation structure is at least one spacer arranged in the single-hole structure.

[0013] Optionally, the mold body is a multi-hole structure, when the number of the forming chambers is 3, the inner hole diameter of the forming chamber is 27.1mm, and the distance between any two adjacent forming holes is greater than or equal to 5mm, and the distance between the inner hole of the forming chamber and the outer peripheral wall of the mold body is greater than or equal to 10mm.

[0014] Optionally, the height of the mold body is 40mm.

[0015] Optionally, the upper mold core and the lower mold core are both made of 45# steel material, and the surfaces of the upper mold core and the lower mold core are both polished, and the roughness is 1.6.

[0016] Optionally, the side of the upper mold core and the lower mold core facing the forming chamber is inverted C-shaped, and the length of the upper mold core is less than the length of the lower mold core.

[0017] Optionally, the height and the width of the inverted C-shaped angle are both 0.5mm.

[0018] According to the technical content disclosed by the utility model, the following beneficial effects are achieved:

[0019] 1. The multi-chamber structure improves the production efficiency: at least two forming chambers are arranged in the mold body, so that multiple target materials can be formed at the same time in a single pressing, compared with the traditional single-chamber mold, the production efficiency is significantly improved, and the problem of low forming efficiency in the prior art is solved.

[0020] 2. The overall structure reduces the labor cost and improves the product quality: through the simultaneous forming of the multi-chamber, the pressing frequency and the manual operation are reduced, and the labor cost is reduced. At the same time, the improvement of the density uniformity reduces the scrap rate caused by the density difference, and further improves the product quality.

[0021] Other features and advantages of the utility model will become clear through the following detailed description of exemplary embodiments of the utility model with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the utility model and, together with the description, serve to explain the principles of the utility model.

[0023] Fig. 1 This is a structural diagram of the main body of the mold of this utility model.

[0024] Fig. 2 This is a structural diagram of the lower mold core of this utility model.

[0025] Fig. 3 This is a structural diagram of the upper mold core of this utility model.

[0026] Explanation of reference numerals in the attached drawings: 1. Mold body; 2. Forming hole; 3. Upper mold core; 4. Lower mold core. Detailed Implementation

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0029] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0030] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0032] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0033] Example 1 (Porous Structure)

[0034] like Figs. 1 to 3 As shown, this embodiment provides a ceramic target forming device, including a mold body 1. The mold body 1 has a porous structure with three independent forming holes 2. Each forming hole 2 contains a forming chamber. The inner diameter of the forming chamber is 27.1 mm, and the distance between any two adjacent forming holes 2 is greater than or equal to 5 mm. The distance between the inner diameter of the forming chamber and the outer peripheral wall of the mold body 1 is greater than or equal to 10 mm. The height of the mold body 1 is 40 mm. It should be noted that the inner diameter of the mold body 1 and the forming chamber can be arbitrarily varied according to the required target size; the above dimensions are only an example.

[0035] The upper mold core 3 and the lower mold core 4 are arranged at the upper and lower ends of each forming hole 2, respectively, that is, the upper mold core 3 is located at the upper part of the forming chamber, and the lower mold core 4 is located at the bottom of the forming chamber. The upper mold core 3 and the lower mold core 4 are both made of 45# steel material, and the surface thereof is polished to have a roughness of 1.6; the side of the upper mold core 3 and the lower mold core 4 facing the forming chamber is inverted C-shaped, and the height and width of the inverted C-shaped corner are both 0.5 mm. The length of the upper mold core 3 is less than the length of the lower mold core 4, so as to prevent the mold core from being eccentric when placed. Specifically, the length of the upper mold core 3 is 25 mm, and the length of the lower mold core 4 is 48 mm. The upper mold core 3 and the lower mold core 4 form an exhaust gap with the inner wall of the adjacent forming chamber. The top of the forming chamber forms a powder filling port. The mold body 1 is made of tungsten steel material, and the outer periphery of both ends thereof is rounded with an R-shaped corner. The mold body 1 further comprises a positioning mechanism 6 in the form of a positioning boss and a positioning groove (not shown in the figure).

[0036] In use, the hydraulic machine applies pressure. After the target material is removed by demolding, the density and size thereof are detected.

[0037] The mold is pressed by using the hydraulic machine, and the pressure value is 120 MPa, and the holding time is 3 s to 8 s. After the pressing is completed, the target material is removed by demolding, and the density and size thereof are detected. The results show that the density difference of each target material is less than 1.5%, which meets the quality requirements.

[0038] Example 2 (single-hole multi-segment structure)

[0039] The present embodiment provides a ceramic target material forming device, which comprises a mold body 1, and the mold body 1 is a single-hole structure (only one forming hole), and three forming chambers formed by segments are arranged in the forming hole, that is, two segments divide the forming hole into three forming chambers. The shape and size of each forming chamber are the same. The height of the mold body 1 is 40 mm.

[0040] The upper mold core 3 and the lower mold core 4 are arranged at the upper and lower ends of the mold body 1 (single-hole structure), respectively. The upper mold core 3 is located at the upper part of the forming chamber connected to the top of the mold body 1, and the lower mold core 4 is located at the bottom of the forming chamber connected to the bottom of the mold body 1. The upper mold core 3 and the lower mold core 4 are both made of 45# steel material, and the surface thereof is polished to have a roughness of 1.6; the side of the upper mold core 3 and the lower mold core 4 facing the forming chamber is inverted C-shaped, and the height and width of the inverted C-shaped corner are both 0.5 mm. The length of the upper mold core 3 is less than the length of the lower mold core 4. The upper mold core 3 and the lower mold core 4 form an exhaust gap with the inner wall of the adjacent forming chamber. The uppermost forming chamber is adjacent to the upper mold core 3, the lowermost forming chamber is adjacent to the lower mold core 4, and the middle forming chamber has segments at the upper and lower ends. The top of the forming chamber connected to the top of the mold body 1 forms a powder filling port.

[0041] The mold body 1 is made of tungsten steel material, and the outer periphery of both ends is rounded with an R angle. The mold body 1 further comprises a positioning mechanism 6, which is a positioning pin and positioning hole cooperation mode (not shown in the figure).

[0042] In use, the RPD ceramic powder is uniformly filled into each forming chamber through the powder filling port, and a spacer is placed after the amount of one forming chamber is filled. The ends of the forming hole are sealed with the mold core, and the gas is discharged through the exhaust gap between the upper mold core 3 and the lower mold core 4 and the inner wall of the forming chamber. Then the mold body 1 is pressed by using a hydraulic machine. After the pressing is completed, the target material is taken out.

[0043] In summary, the ceramic target material forming device provided by the utility model, when the mold is designed, the layout and structure of the chamber are optimized, so that the pressure provided by the hydraulic machine can be uniformly distributed to each chamber, thereby ensuring the consistency of the density of the formed target material. Through the design of the multi-chamber structure, the exhaust gap, the powder filling port and the like, efficient and stable forming of the ceramic target material is realized, the production efficiency is significantly improved, the production cost is reduced, the product quality is guaranteed, and the demand for high-quality ceramic target material for RPD and other thin film preparation technologies is met.

[0044] Although some specific embodiments of the utility model have been described in detail through examples, those skilled in the art should understand that the above examples are only for illustration, and are not intended to limit the scope of the utility model. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the utility model. The scope of the utility model is defined by the appended claims.

Claims

1. A ceramic target material forming apparatus characterized by comprising: The ceramic target material forming device comprises: a mold body (1) having at least two forming cavities, each of which is used for forming a ceramic target material, and the forming cavities are formed by the internal structure and / or the partition structure of the mold body (1); an upper mold core (3) located at the upper part of the forming cavities communicating with the top of the mold body (1) and a lower mold core (4) located at the bottom of the forming cavities communicating with the bottom of the mold body (1), and the upper mold core (3) and the lower mold core (4) form exhaust gaps with the inner walls of the adjacent forming cavities; the top of the forming cavities communicating with the top of the mold body (1) forms a powder filling port.

2. The ceramic target material forming device according to claim 1, wherein: the mold body (1) is made of tungsten steel material, and the outer periphery of the mold body (1) is rounded at both ends with an R angle.

3. The ceramic target material forming device according to claim 2, wherein: the number of the forming cavities is 2 or 3.

4. The ceramic target material forming device according to claim 3, wherein: the mold body (1) further comprises a positioning mechanism for fixing the position of the mold body (1) during pressing; the positioning mechanism comprises positioning pins and positioning holes arranged on the outer side of the mold body (1), the positioning pins are matched with the positioning holes on the workbench of the hydraulic machine, or the positioning mechanism comprises positioning bosses arranged on the bottom of the mold body (1) and positioning grooves on the workbench of the hydraulic machine, and the positioning is realized through the matching of the bosses and the grooves.

5. The ceramic target material forming device according to claim 1 or 2, wherein: the mold body (1) is a single-hole structure, and the partition structure is at least one spacer arranged in the single-hole structure.

6. The ceramic target material forming device according to claim 1 or 2, wherein: the mold body (1) is a multi-hole structure, when the number of the forming cavities is 3, the inner hole diameter of the forming cavities is 27.1 mm, the distance between any two adjacent forming holes (2) is greater than or equal to 5 mm, and the distance between the inner hole of the forming cavities and the outer peripheral wall of the mold body (1) is greater than or equal to 10 mm.

7. The ceramic target material forming device according to claim 1, wherein: the height of the mold body (1) is 40 mm.

8. The ceramic target material forming device according to claim 1, wherein: the upper mold core (3) and the lower mold core (4) are both made of 45# steel material, and the surfaces thereof are polished to have a roughness of 1.

6.

9. The ceramic target material forming device according to claim 1 or 2, wherein: the side of the upper mold core (3) and the lower mold core (4) facing the forming cavities is rounded with a C angle; the length of the upper mold core (3) is less than the length of the lower mold core (4).

10. The ceramic target forming apparatus of claim 9, wherein the height and width of the rounded C angle are both 0.5 mm.

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