Wireless cavity detection device convenient to use

Abstract

The utility model relates to the technical field of cavity detection, in particular to a wireless cavity detection device convenient to use, which comprises a main body, the top of the main body is provided with a placement groove, the top of the main body is provided with connection limiting mechanisms at equal intervals, the top of the main body is internally provided with a fixed mounting hole, and the fixed mounting hole is internally provided with a clamping groove. A movable mounting rod is arranged in the main body through a fixed mounting hole, a mounting thread is formed in the bottom of the movable mounting rod, and through mutual connection and cooperation between a connection limiting mechanism and a connection limiting mechanism, when an object to be detected is placed on the inner side of a placement groove, the movable mounting rod can be fixed to the inner side of the placement groove; the device can cover the top of the main body under the mutual connection and cooperation of the connection limiting mechanism and the connection limiting mechanism, so that a to-be-detected object can be stably placed on the inner side of the placing groove, detection can be stably accepted, and the operation is convenient and rapid.

Description

Technical Field

[0001] This utility model relates to the field of cavity detection technology, and in particular to a user-friendly wireless cavity detection device. Background Technology

[0002] Advanced Gap Measurement Devices (AGDs) are used to detect gaps in process cavities. The main body of the device relies on a wafer sensor master station for detection and is widely used in the semiconductor industry.

[0003] Existing wireless cavity detection devices have three recessed detection areas on their main body during use. The object to be detected is usually placed in the detection area for detection. However, the object is usually placed directly, which does not ensure that the object and the detection device are in a stable state, thus affecting the detection results. Therefore, we propose a user-friendly wireless cavity detection device. Utility Model Content

[0004] To address the aforementioned problems, this invention provides an easy-to-use wireless cavity detection device that can solve the problems existing in the background art.

[0005] The technical solution of this utility model is:

[0006] A user-friendly wireless cavity detection device includes a main body, a placement groove on the top of the main body, a connection limiting mechanism equidistantly provided on the top of the main body, and a connection restricting mechanism equidistantly provided on the top of the main body.

[0007] In a further technical solution, the main body has a fixed mounting hole inside, and a movable mounting rod is provided inside the main body through the fixed mounting hole. The bottom of the movable mounting rod has a mounting thread, and the bottom of the inner side of the fixed mounting hole has a thread that matches the mounting thread. A connecting limiting plate is fixedly connected to the top of the movable mounting rod, and a movable deflection limiting block is movably sleeved on the outer surface of the movable mounting rod.

[0008] In a further technical solution, the connecting limiting mechanism includes a fixed base, a movable mounting block is movably connected to the inner side of the fixed base via a connecting shaft, a movable limiting cover is fixedly connected to one end of the movable mounting block, a connecting mounting block is fixedly connected to the middle of the bottom end of the movable limiting cover near the movable mounting block, a movable connecting rod is movably connected to the inner side of the connecting mounting block, and a movable connecting arm is fixedly connected to one end of the movable connecting rod.

[0009] In a further technical solution, the connection limiting mechanism includes a limiting base frame, one end of which is fixedly connected to a force-bearing spring, and the other end of which is fixedly connected to a force-bearing mounting block. Connecting support blocks are symmetrically arranged on the side of the force-bearing mounting block away from the force-bearing spring.

[0010] In a further technical solution, the connecting support block and the other end of the movable connecting arm are movably connected by a connecting shaft.

[0011] In a further technical solution, the bottom end of the movable limiting cover is provided with a groove that matches the movable connecting arm.

[0012] In a further technical solution, the bottom end surface of the movable deflection limiting block and the surface of the movable limiting cover are in contact with each other.

[0013] The beneficial effects of this utility model are:

[0014] 1. Through the mutual connection and cooperation between the connection limiting mechanism and the connection restricting mechanism, when the object to be tested is placed inside the placement groove, it can cover the top of the main body under the mutual connection and cooperation between the connection limiting mechanism and the connection restricting mechanism, so that the object to be tested can be stably placed inside the placement groove and can be stably tested. The operation is convenient and quick.

[0015] 2. Through the cooperation of the movable mounting rod, mounting thread, connecting limit plate and movable deflection limit block, when the object to be tested is stably placed inside the placement groove, the connecting limit mechanism and the connecting restriction mechanism restrict it. Then, the movable deflection limit block is rotated so that the movable deflection limit block restricts the connecting limit mechanism, further improving stability and making operation convenient. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a user-friendly wireless cavity detection device according to an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the overall unfolded structure of a user-friendly wireless cavity detection device according to an embodiment of this utility model;

[0018] Figure 3 This is a schematic diagram of the connection limiting mechanism and connection restricting mechanism of a user-friendly wireless cavity detection device according to an embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the connection and mounting block structure of a user-friendly wireless cavity detection device according to an embodiment of this utility model;

[0020] Figure 5 This is a schematic diagram of the overall storage and limiting structure of a user-friendly wireless cavity detection device according to an embodiment of this utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. Main body; 2. Placement groove; 3. Connecting limiting mechanism; 4. Connecting limiting mechanism; 5. Fixed mounting hole; 6. Movable mounting rod; 7. Mounting thread; 8. Connecting limiting top plate; 9. Movable deflection limiting block; 10. Fixed base; 11. Movable mounting block; 12. Movable limiting cover; 13. Connecting mounting block; 14. Movable connecting arm; 15. Movable connecting rod; 16. Limiting base frame; 17. Force-bearing spring; 18. Force-bearing mounting block; 19. Connecting support block. Detailed Implementation

[0023] The embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0024] Example:

[0025] like Figures 1-5 As shown, a user-friendly wireless cavity detection device includes a main body 1, a placement groove 2 on the top of the main body 1, a connection limiting mechanism 3 equidistantly provided on the top of the main body 1, and a connection restricting mechanism 4 equidistantly provided on the top of the main body 1.

[0026] The working principle of the above technical solution is as follows:

[0027] During use, the object to be tested is first placed inside the placement groove 2. Then, the connecting limiting mechanism 3 is folded over the top of the placement groove 2 to limit the object to be tested. At the same time, the connecting limiting mechanism 4 can restrict the connecting limiting mechanism 3, so that the connecting limiting mechanism 3 can be used stably, and thus the object to be tested can be tested stably. The overall structure is simple and convenient to use.

[0028] In another embodiment, such as Figure 2 As shown, a fixed mounting hole 5 is provided inside the main body 1, and a movable mounting rod 6 is provided inside the main body 1 through the fixed mounting hole 5. The bottom of the movable mounting rod 6 is provided with a mounting thread 7, and the bottom of the inner side of the fixed mounting hole 5 is provided with a thread that matches the mounting thread 7. A connecting limiting plate 8 is fixedly connected to the top of the movable mounting rod 6, and a movable deflection limiting block 9 is movably sleeved on the outer side of the surface of the movable mounting rod 6.

[0029] The movable mounting rod 6 is easily inserted into the inner side of the fixed mounting hole 5, and connected through the connection between the mounting thread 7 and the thread, thereby enabling the movable deflection limiting block 9 to be installed movably. When the connecting limiting mechanism 3 is on top of the placement groove 2, the movable deflection limiting block 9 is rotated so that the end of the movable deflection limiting block 9 is on top of the connecting limiting mechanism 3, further restricting the connecting limiting mechanism 3. The operation is convenient.

[0030] In another embodiment, such as Figure 3 As shown, the connecting limiting mechanism 3 includes a fixed base 10. A movable mounting block 11 is movably connected to the inner side of the fixed base 10 via a connecting shaft. A movable limiting cover 12 is fixedly connected to one end of the movable mounting block 11. A connecting mounting block 13 is fixedly connected to the middle of the bottom end of the movable limiting cover 12 near the movable mounting block 11. A movable connecting rod 15 is movably connected to the inner side of the connecting mounting block 13. A movable connecting arm 14 is fixedly connected to one end of the movable connecting rod 15.

[0031] When the movable limiting cover 12 is deflected, it can drive the movable mounting block 11 to deflect inside the fixed base 10. At the same time, the connecting mounting block 13 and the movable connecting rod 15 can be offset, causing the movable connecting arm 14 to be offset, which in turn acts on the connecting limiting mechanism 4. When the movable limiting cover 12 is on top of the main body 1, the connecting limiting mechanism 4 can continuously provide thrust to the movable connecting arm 14, making operation convenient.

[0032] In another embodiment, such as Figure 3 As shown, the connection limiting mechanism 4 includes a limiting base frame 16. A force-bearing spring 17 is fixedly connected to one end of the inner side of the limiting base frame 16, and a force-bearing mounting block 18 is fixedly connected to the other end of the force-bearing spring 17. A connecting support block 19 is symmetrically provided on the side of the force-bearing mounting block 18 away from the force-bearing spring 17.

[0033] When the movable connecting arm 14 is offset, the end of the movable connecting arm 14 can push the connecting support block 19 and the force-bearing mounting block 18, and compress the force-bearing spring 17. Under the action of the force-bearing spring 17, it can stably provide thrust to the force-bearing mounting block 18, the connecting support block 19 and the movable connecting arm 14, making the operation convenient and quick.

[0034] In another embodiment, such as Figure 3 As shown, the connecting support block 19 is movably connected to the other end of the movable connecting arm 14 via a connecting shaft.

[0035] The end of the movable connecting arm 14 can be deflected inside the connecting support block 19, making operation convenient.

[0036] In another embodiment, such as Figure 3As shown, the bottom end of the movable limiting cover 12 has a groove that matches the movable connecting arm 14.

[0037] When the movable limiting cover 12 is in a vertical position, the bottom end of the movable limiting cover 12 can be fitted onto the outer surface of the movable connecting arm 14, making operation convenient.

[0038] In another embodiment, such as Figure 5 As shown, the bottom end surface of the movable deflection limiting block 9 is in contact with the surface of the movable limiting cover 12.

[0039] The end of the movable deflection limiting block 9 can be stably positioned at the top of the movable limiting cover 12 to limit the movable limiting cover 12, making operation convenient.

[0040] The working principle of this utility model is as follows: During use, the object to be tested is placed inside the placement groove 2. Then, the movable limiting cover 12 is deflected, which causes the movable mounting block 11 to deflect inside the fixed base 10. At the same time, the connecting mounting block 13 and the movable connecting rod 15 can be offset, causing the movable connecting arm 14 to offset. When the movable connecting arm 14 is offset, the end of the movable connecting arm 14 can push the connecting support block 19 and the force-bearing mounting block 18, which compresses the force-bearing spring 17. Under the action of the force-bearing spring 17, it can stably provide a pushing force to the force-bearing mounting block 18, the connecting support block 19 and the movable connecting arm 14, so that the movable limiting cover 12 is in a closed state. Then, the movable deflection limiting block 9 is rotated, so that the end of the movable deflection limiting block 9 can be stably placed on the top of the movable limiting cover 12, further restricting the movable limiting cover 12, thereby stably detecting the object to be tested. The overall structure is simple and the operation is convenient and quick.

[0041] The above embodiments merely illustrate specific implementations of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model.

Claims

1. A wireless cavity detection device for ease of use comprising a body (1) characterised in that: The top of the main body (1) is provided with a placing groove (2), and the top of the main body (1) is provided with a connecting limiting mechanism (3) at equal intervals.

2. A wireless cavity detection device for ease of use according to claim 1, wherein: The inside of the main body (1) is provided with a fixed mounting hole (5), and the inside of the main body (1) is provided with a movable mounting rod (6) through the fixed mounting hole (5), and the bottom of the movable mounting rod (6) is provided with a mounting thread (7), and the inside bottom of the fixed mounting hole (5) is provided with a thread matched with the mounting thread (7), and the top of the movable mounting rod (6) is fixedly connected with a connecting limiting top disc (8), and the surface of the movable mounting rod (6) is movably sleeved with an active deflection limiting block (9).

3. A wireless cavity detection device for ease of use according to claim 2, wherein: The connecting limiting mechanism (3) comprises a fixed base (10), the inside of the fixed base (10) is movably connected with a movable mounting block (11) through a connecting shaft, one end of the movable mounting block (11) is fixedly connected with a movable limiting cover (12), the movable limiting cover (12) is fixedly connected with a connecting mounting block (13) on one side bottom end middle part close to the movable mounting block (11), the inside of the connecting mounting block (13) is movably connected with a movable connecting rod (15), one end of the movable connecting rod (15) is fixedly connected with a movable connecting arm (14).

4. A wireless cavity detection device for ease of use according to claim 3, wherein: The connecting limiting mechanism (4) comprises a limiting chassis (16), and the inside of the limiting chassis (16) is fixedly connected with a stress spring (17) at one end.

5. A wireless cavity detection device for ease of use according to claim 4, wherein: The connecting branch block (19) and the other end of the movable connecting arm (14) are movably connected through the connecting shaft.

6. A wireless cavity detection device for ease of use according to claim 3, wherein: The bottom end of the movable limiting cover (12) is provided with a groove matched with the movable connecting arm (14).

7. A wireless cavity detection device for ease of use according to claim 3, wherein: The bottom end surface of the active deflection limiting block (9) and the surface of the movable limiting cover (12) are mutually attached. The bottom end surface of the active deflection limiting block (9) and the surface of the movable limiting cover (12) are mutually attached.

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