Stripping auxiliary jig and stripping device

Abstract

The utility model relates to the field of micro light emitting diode manufacturing, and discloses a stripping auxiliary jig and a stripping device.The stripping auxiliary jig comprises a supporting piece, a moving piece, a fixed piece and a linear driving assembly, the moving piece is slidably installed on the supporting piece, the fixed piece is fixedly installed on the supporting piece, and a first clamping groove is formed in the moving piece in the direction facing the fixed piece; a second clamping groove is formed in the fixed part in the direction facing the moving part, the bearing face of the first clamping groove and the bearing face of the second clamping groove are located on the same plane, and the linear driving assembly is in transmission connection with the moving part and used for driving the moving part to move towards the fixed part. When the sapphire is separated from the gallium nitride epitaxial layer, the sapphire chip fixedly attached with glass is firstly placed in the placing space formed by the first clamping groove and the second clamping groove, then the linear driving assembly drives the moving part to move so as to reduce the width of the placing space, and then clamping of the chip is achieved.

Description

Technical Field

[0001] This application relates to the field of micro light-emitting diode manufacturing, and more particularly to a stripping auxiliary fixture and stripping device. Background Technology

[0002] Laser lift-off (LLO) is a key process that separates the GaN epitaxial layer from the sapphire substrate by irradiating it with a pulsed laser, causing the gallium nitride (GaN) to thermally decompose into nitrogen gas and low-melting-point gallium (Ga) (melting point approximately 30°C) at high temperatures (900°C-1000°C). Compared to other methods such as chemical lift-off, mechanical lift-off, and ion beam lift-off, LLO technology offers advantages such as high energy input efficiency, minimal device damage, and good equipment openness, making it an important technology in the field of flexible electronic device manufacturing. With the rapid development of micro-LED technology, LLO is widely used to separate bare Micro-LED chips from sapphire growth wafers for subsequent transfer to temporary carriers for further processing.

[0003] However, the sapphire stripping process in existing technologies still has significant problems. Conventional methods use a direct prying method to remove the sapphire substrate. Uneven force during the prying process can easily lead to film damage or IC scratches, causing abnormal product illumination. Furthermore, the prying method is highly dependent on the operator's skill level, making it difficult to control process stability and resulting in a significant increase in training costs, management costs, and waste costs during mass production. Utility Model Content

[0004] In view of this, the purpose of this application is to overcome the shortcomings of the prior art and provide a peeling auxiliary jig and peeling device.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] This application provides:

[0007] A dissection aid fixture, comprising:

[0008] Support components;

[0009] A movable component, which is slidably mounted on the support component;

[0010] A fixing member is fixedly installed on the support member. The moving member has a first clamping groove facing the fixing member, and the fixing member has a second clamping groove facing the moving member. The bearing surface of the first clamping groove and the bearing surface of the second clamping groove are located on the same plane.

[0011] A linear drive assembly is mounted on the support member and is connected to the moving member via a transmission connection. The linear drive assembly is used to drive the moving member to move towards the fixed member.

[0012] Furthermore, the linear drive assembly includes a vertical plate fixedly mounted on the support member, the vertical plate having a through threaded groove, a screwing member screwed into the threaded groove, and one end of the screwing member facing the moving member being connected to its transmission.

[0013] Furthermore, the screwing component includes a threaded section, with a limiting element provided at the end of the threaded section facing the moving component, and a screwing handle installed at the end of the threaded section away from the limiting element.

[0014] Furthermore, the stripping auxiliary fixture also includes a transmission structure, which is used by the linear drive assembly to transmit power to the moving part. The transmission structure includes a fixing plate, which is fixedly installed on the side of the moving part facing the linear drive assembly. The side of the moving part facing the fixing plate has an accommodating groove, and the fixing plate has a through clearance hole that communicates with the accommodating groove.

[0015] Furthermore, the fixing member includes a fixing part, and an outward protrusion is provided on one side of the fixing part. The outward protrusion protrudes from the plane of the fixing part facing the moving member, and the second clamping groove is formed in the outward protrusion.

[0016] Furthermore, the movable member includes a movable part, the upper surface of which is provided with a concave portion, the concave portion being recessed into the plane of the movable part facing the fixing member, the first clamping groove being formed in the plane of the concave portion facing the fixing member, and an avoidance gap being formed between the convex portion and the concave portion.

[0017] Furthermore, the stripping auxiliary fixture also includes a guide structure, which includes a groove formed on the support member. The groove is formed along the moving direction of the moving member, and a slider is slidably disposed in the groove. The slider is fixedly connected to the moving member.

[0018] Furthermore, the opening length of the groove facing the first direction is L, and the length of the slider along the second direction is D. The first direction and the second direction are perpendicular, satisfying that D > L.

[0019] Furthermore, the cross-section of the groove is arc-shaped, rectangular, or cross-shaped.

[0020] This application also provides a peeling device, including a mounting base and a peeling auxiliary fixture as described in any of the above claims, wherein the peeling auxiliary fixture is fixedly mounted on the mounting base.

[0021] This application enables the separation of sapphire from the gallium nitride epitaxial layer by first placing the sapphire chip with its inherent glass attached in a placement space consisting of a first clamping groove and a second clamping groove. Next, a linear drive component moves a moving part to reduce the width of the placement space, thereby clamping the chip. Afterward, the sapphire chip can be removed simply by prying. During this process, because the chip is clamped and fixed as a whole, it is not easy to scratch the adjacent electronic components when prying it off. The operation is simple and reduces training costs.

[0022] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This diagram illustrates the product clamping state of the fixture in this application.

[0025] Figure 2 This diagram illustrates the product being released from clamping by the fixture of this application.

[0026] Figure 3 A schematic diagram of the explosive state of the fixture of this application is shown;

[0027] Figure 4 This paper shows a front view schematic diagram of the fixture structure of this application;

[0028] Figure 5 A cross-sectional schematic diagram of the fixture of this application is shown;

[0029] Figure 6 A schematic diagram of the screwing component structure of this application is shown;

[0030] Figure 7 A schematic diagram of the fastener structure of this application is shown;

[0031] Figure 8 This shows a first-view structural schematic diagram of the movable component of this application;

[0032] Figure 9 This shows a schematic diagram of the second-view structure of the movable component of this application;

[0033] Figure 10 A side view of the support component of this application is shown;

[0034] Figure 11 A side view of the slider structure of this application is shown.

[0035] Explanation of key component symbols:

[0036] 100-Support component; 200-Moving component; 210-Moving part; 220-Concave part; 201-First clamping groove; 300-Fixing component; 310-Fixing part; 320-External protrusion; 301-Second clamping groove; 400-Linear drive assembly; 410-Upright plate; 420-Turning component; 430-Threaded groove; 421-Threaded section; 422-Limiting component; 423-Turning handle; 500-Guide structure; 510-Slide groove; 520-Slider; 600-Transmission structure; 610-Fixing plate; 620-Allowing hole; 630-Accommodating groove; 700-Allowing clearance. Detailed Implementation

[0037] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0038] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0041] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0042] When separating the sapphire substrate from the gallium nitride epitaxial layer, the sapphire with glass attached is usually separated from the gallium nitride epitaxial layer manually. However, because the entire chip is not easy to fix, it is easy to rub against the adjacent electronic components during the separation process, which can damage the chip. In addition, because the overall chip size is small, it is not easy to fix it manually during separation. Therefore, it is somewhat dependent on the proficiency of the sapphire substrate separation, which increases the cost of manual training.

[0043] This application provides a peeling auxiliary fixture, which includes a support member 100, a movable member 200, a fixing member 300, and a linear drive assembly 400. The linear drive assembly 400 drives the movable member 200 to move towards the fixing member 300, thereby fixing the chip (hereinafter referred to as the product) between the movable member 200 and the fixing member 300. This allows the sapphire and gallium nitride epitaxial layer attached to the glass to be separated by prying it off, thus completing the separation of the sapphire. In this process, because the chip is fixed, the risk of scratching the adjacent electronic components is greatly reduced, the product yield is improved, and the manual training cost is reduced.

[0044] In some embodiments, the movable member 200 is slidably mounted on the support member 100, and the fixed member 300 is fixedly mounted on the support member 100. The movable member 200 has a first clamping groove 201 facing the fixed member 300, and the fixed member 300 has a second clamping groove 301 facing the movable member 200. The bearing surface of the first clamping groove 201 and the bearing surface of the second clamping groove 301 are located on the same plane. The linear drive assembly 400 is mounted on the support member 100 and is connected to the movable member 200 in a transmission manner. The linear drive assembly 400 is used to drive the movable member 200 to move towards the fixed member 300.

[0045] Before separating the sapphire, a glass plate is first attached to the sapphire with glue, so that the glass plate can be pried off during separation, thus separating the sapphire from the chip.

[0046] Please see Figure 1 , Figure 2 , Figure 3 as well as Figure 4 First, the linear drive assembly 400 moves the movable part 200 to adjust the distance between the first clamping groove 201 and the second clamping groove 301, so that the product can be placed in the placement space formed by the first clamping groove 201 and the second clamping groove 301. Then, in order to prevent the product from moving, the linear drive assembly 400 moves the movable part 200 toward the fixed part 300 to reduce the distance between the first clamping groove 201 and the second clamping groove 301, thereby clamping and fixing the product to prevent the product from moving when prying it off.

[0047] Please continue reading. Figures 1 to 4 As shown, when the product is fixed between the first clamping groove 201 and the second clamping groove 301, tweezers can be used to hold the glass plate and pry it upwards. With the help of adhesive bonding, the sapphire can be pried off the product together, thereby achieving the separation of the sapphire from the product.

[0048] Furthermore, in order to clamp and fix the product, the height of the first clamping groove 201 and the second clamping groove 301 should be greater than the thickness of the product. Specifically, the width, thickness, groove depth and other parameters of the first clamping groove 201 and the second clamping groove 301 can be adaptively designed and adjusted according to the specifications of the actual product.

[0049] It should be noted that after the product is laser-eluted, the sapphire and the underlying gallium nitride epitaxial layer are already separated. Due to the incomplete separation of residual gallium, they cannot separate automatically, so external force is required for separation. Therefore, a large prying force is not needed, so the glass will not be broken.

[0050] In this embodiment, the support member 100, the movable member 200, and the fixing member 300 are all plate-shaped.

[0051] The linear drive assembly 400 includes a vertical plate 410 fixedly installed on the support member 100. The vertical plate 410 has a through threaded groove 430. A screwing member 420 is screwed into the threaded groove 430. One end of the screwing member 420 facing the moving member 200 is connected to it for transmission.

[0052] See Figure 3 , Figure 4 as well as Figure 5 As shown, through the cooperation between the threaded groove 430 and the screwing part 420, it can be seen that as the screwing part 420 rotates, it will move towards the moving part 200. Therefore, the movement of the screwing part 420 will drive the moving part 200 to move towards the fixed part 300, thereby clamping and fixing the product located between the moving part 200 and the fixed part 300.

[0053] It should be noted that the screwing part 420 is connected to the moving part 200 in a transmission manner. Therefore, the end of the screwing part 420 should be engaged with the moving part 200 in a transmission manner, and should not affect the rotation of the screwing part 420. It should be able to transmit force to the moving part 200 to drive it to move toward or away from the fixed part 300, so as to realize the clamping or unclamping state of the product.

[0054] The screwing component 420 includes a threaded section 421, and a limiting component 422 is provided at the end of the threaded section 421 facing the moving component 200. A screwing handle 423 is installed at the end of the threaded section 421 away from the limiting component 422.

[0055] See Figure 4 , Figure 5 as well as Figure 6 As shown, the threaded section 421 and the threaded groove 430 are threaded together. It can be understood that the threaded section 421 is a cylindrical bar with external threads on its outer surface. It is threadedly connected to the internal thread of the threaded groove 430 through the external threads. Since the position of the upright plate 410 is fixed, as the screwing part 420 rotates, the end of the threaded section 421 moves toward or away from the moving part 200 under the action of the threaded connection, thereby driving the moving part 200 to move toward or away from the fixed part 300.

[0056] Furthermore, in order to enable the threaded segment 421 to be connected to the moving part 200 for transmission, a limiting member 422 is fixedly provided at the end of the screwing member 420 facing the moving part 200, and the limiting member 422 is used to achieve the locking and transmission with the moving part 200. Further, to facilitate the rotational drive of the threaded segment 421, a screwing handle 423 is installed at the end of the threaded segment 421 away from the limiting member 422, so that the threaded segment 421 can be easily driven to rotate manually by screwing the handle 423. In this embodiment, the screwing handle 423 and the threaded segment 421 can be detachably fixedly connected by bolts.

[0057] The stripping auxiliary fixture also includes a transmission structure 600, which is used by the linear drive assembly 400 to transmit power to the moving member 200. The transmission structure 600 includes a fixing plate 610, which is fixedly installed on the side of the moving member 200 facing the linear drive assembly 400. The moving member 200 has a receiving groove 630 on the side facing the fixing plate 610, and the fixing plate 610 has a through hole 620, which communicates with the receiving groove 630.

[0058] Please see Figure 3 , Figure 4 , Figure 5 as well as Figure 9 As shown, in order to facilitate the conversion of the rotational force of the threaded segment 421 into the force for the movement of the moving part 200, a receiving groove 630 is opened on the side of the moving part 200, and a fixing plate 610 is fixedly installed on this side. A clearance hole 620 communicating with the receiving groove 630 is opened on the fixing plate 610. The shape of the receiving groove 630 is adapted to the shape of the limiting part 422. It can be understood that the diameter of the receiving groove 630 should be larger than the outer diameter of the limiting part 422, and the diameter of the clearance hole 620 should be larger than the outer diameter of the threaded segment 421, that is, the threaded segment 421 can pass through the clearance hole 620.

[0059] In this embodiment, the limiting member 422, the clearance hole 620, and the receiving groove 630 are all circular.

[0060] Furthermore, during assembly, the threaded section 421 first passes through the clearance hole 620, and the limiting member 422 is placed in the receiving groove 630. The fixing plate 610 and the moving member 200 are fixedly connected by bolts. At this time, the limiting member 422 is enclosed inside the receiving groove 630. Therefore, when the threaded section 421 rotates and moves, the moving member 200 can be driven to move by the abutment between the threaded section 421 and the inner wall of the receiving groove 630.

[0061] The fixing member 300 includes a fixing part 310, and a protruding part 320 is provided on one side of the fixing part 310. The protruding part 320 protrudes from the plane of the fixing part 310 facing the moving member 200, and the second clamping groove 301 is formed in the protruding part 320.

[0062] The movable member 200 includes a movable part 210, and the upper surface of the movable part 210 is provided with a concave part 220. The concave part 220 is recessed into the plane of the movable part 210 facing the fixing member 300. The first clamping groove 201 is formed in the plane of the concave part 220 facing the fixing member 300. A clearance gap 700 is formed between the convex part 320 and the concave part 220.

[0063] See Figure 1 , Figure 4 , Figure 7 and Figure 8 As shown, in order to prevent hard compression of the product, both the moving part 200 and the fixed part 300 are made of Teflon material. Teflon material has the characteristics of corrosion resistance, low friction, insulation and a certain degree of elasticity. It can undergo a certain deformation when the product is clamped without damaging the product.

[0064] Furthermore, the second clamping groove 301 is formed on the side of the outward protrusion 320, and the first clamping groove 201 is formed on the side of the inward concave portion 220. When it is necessary to clamp the product, the side of the moving part 210 is in direct contact with the side of the outward protrusion 320. At this time, the sum of the groove depth length of the second clamping groove 301 in the horizontal direction, the groove depth of the first clamping groove 201 in the horizontal direction, and the width of the clearance gap 700 should be slightly less than the width of the product. When clamping the product, the deformation of the material compensates for this difference.

[0065] The peeling auxiliary fixture also includes a guide structure 500, which includes a groove 510 formed on the support member 100. The groove 510 is formed along the moving direction of the moving member 200. A slider 520 is slidably disposed in the groove 510 and is fixedly connected to the moving member 200.

[0066] See Figure 1 , Figure 3 , Figure 10 as well as Figure 11 As shown, the slider 520 is slidably installed in the slide groove 510 and is fixedly connected to the bottom surface of the moving part 200. Therefore, the cooperation between the slide groove 510 and the slider 520 makes the movement of the moving part 200 more stable, thereby preventing the moving part 200 from shifting its position during movement.

[0067] The opening length of the groove 510 facing the first direction is L, and the length of the slider 520 along the second direction is D. The first direction and the second direction are perpendicular, satisfying that D > L.

[0068] It should be noted that the first direction is the up-down direction and the second direction is the left-right horizontal direction, so that the width of the slider 520 is greater than the opening length of the groove 510, that is, D is greater than L, thereby preventing the slider 520 from disengaging from the groove 510.

[0069] For example, to prevent the slider 520 from disengaging from the groove 510 in the height direction, the length of L can be 16.7 mm and the length of D can be 20 mm. Since 20 mm > 16.7 mm, the groove 510 can thus limit the position of the slider 520 in the height direction, so that the slider 520 cannot disengage from the opening of the groove 510 in the height direction. It should be noted that the above parameters can be set according to actual needs, and are not limited here.

[0070] Furthermore, the cross-section of the groove 510 is arc-shaped, rectangular, or cross-shaped, and the shape of the corresponding slider 520 should be adapted to the shape of the groove 510.

[0071] This application also provides a peeling device, wherein the peeling device includes a mounting base and a peeling auxiliary fixture as described in any of the above claims, and the peeling auxiliary fixture is fixedly mounted on the mounting base.

[0072] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0073] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A peeling auxiliary fixture, characterized in that, include: Support component (100); A movable component (200) is slidably mounted on the support component (100); A fixing member (300) is fixedly installed on the support member (100). The moving member (200) has a first clamping groove (201) facing the fixing member (300), and the fixing member (300) has a second clamping groove (301) facing the moving member (200). The bearing surface of the first clamping groove (201) and the bearing surface of the second clamping groove (301) are located on the same plane. A linear drive assembly (400) is mounted on the support member (100) and is connected to the moving member (200) in a transmission manner. The linear drive assembly (400) is used to drive the moving member (200) to move in the direction of the fixed member (300).

2. The peeling auxiliary fixture according to claim 1, characterized in that, The linear drive assembly (400) includes a vertical plate (410) fixedly mounted on the support member (100). The vertical plate (410) has a through threaded groove (430). A screwing member (420) is screwed into the threaded groove (430). One end of the screwing member (420) facing the moving member (200) is connected to it in a transmission manner.

3. The peeling auxiliary fixture according to claim 2, characterized in that, The screwing component (420) includes a threaded section (421), and a limiting element (422) is provided at the end of the threaded section (421) facing the moving component (200), and a screwing handle (423) is installed at the end of the threaded section (421) away from the limiting element (422).

4. The peeling auxiliary fixture according to claim 1, characterized in that, The stripping auxiliary fixture also includes a transmission structure (600), which is used by the linear drive assembly (400) to transmit power to the moving part (200). The transmission structure (600) includes a fixing plate (610), which is fixedly installed on the side of the moving part (200) facing the linear drive assembly (400). The moving part (200) has a receiving groove (630) on the side facing the fixing plate (610), and the fixing plate (610) has a through hole (620) that communicates with the receiving groove (630).

5. The peeling auxiliary fixture according to claim 1, characterized in that, The fixing member (300) includes a fixing part (310), and a protruding part (320) is provided on one side of the fixing part (310). The protruding part (320) protrudes from the plane of the fixing part (310) facing the moving member (200), and the second clamping groove (301) is formed in the protruding part (320).

6. The peeling auxiliary fixture according to claim 5, characterized in that, The movable member (200) includes a movable part (210), and the upper surface of the movable part (210) is provided with a concave part (220). The concave part (220) is recessed into the plane of the movable part (210) facing the fixed member (300). The first clamping groove (201) is formed in the plane of the concave part (220) facing the fixed member (300). A clearance gap (700) is formed between the convex part (320) and the concave part (220).

7. The peeling auxiliary fixture according to claim 1, characterized in that, The stripping auxiliary fixture also includes a guide structure (500), which includes a groove (510) formed on the support member (100). The groove (510) is formed along the moving direction of the moving member (200). A slider (520) is slidably disposed in the groove (510), and the slider (520) is fixedly connected to the moving member (200).

8. The peeling auxiliary fixture according to claim 7, characterized in that, The opening length of the groove (510) facing the first direction is L, and the length of the slider (520) along the second direction is D. The first direction and the second direction are perpendicular to each other, satisfying that D > L.

9. The peeling auxiliary fixture according to claim 8, characterized in that, The cross-section of the groove (510) is arc-shaped, rectangular, or cross-shaped.

10. A peeling device, characterized in that, It includes a mounting base and a peeling auxiliary fixture as described in any one of claims 1 to 9, wherein the peeling auxiliary fixture is fixedly mounted on the mounting base.

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