Adjustable transmission mechanism suitable for microwave plasma cleaning machine

Abstract

The utility model discloses an adjustable transmission mechanism suitable for a microwave plasma cleaning machine, which comprises a first mounting plate and a second mounting plate which are parallel to each other, a fixedly connected base is arranged between the first mounting plate and the second mounting plate, and a baffle parallel to the base is arranged above the base. The two sides of the baffle are fixedly connected with the first mounting plate and the second mounting plate correspondingly, and a lifting adjusting mechanism is arranged between the base and the baffle and comprises a longitudinal threaded lead screw located between the base and the baffle and rotationally connected with the base and longitudinal supporting rods located on the two sides of the longitudinal threaded lead screw and fixedly connected with the base and the baffle. The lifting table is in threaded connection with the longitudinal threaded lead screw, the first driving motor is in driving connection with the bottom of the longitudinal threaded lead screw, and the surface of the lifting table is in sliding connection with the longitudinal supporting rods on the two sides.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of plasma cleaning, more particularly, it is especially related to a kind of adjustable transmission mechanism suitable for microwave plasma cleaning machine. BACKGROUND

[0002] Microwave plasma cleaning machine is also called plasma cleaning machine or plasma surface treatment instrument, which is a kind of brand-new high-tech technology, using plasma to achieve the effect that conventional cleaning method cannot achieve, and plasma is a state of matter, also called the fourth state of matter, and does not belong to the three states of solid, liquid and gas.

[0003] Most of the existing microwave plasma cleaning machine conveying devices are inconvenient to adjust the conveying height and cleaning station, and cannot well meet the conveying and cleaning of wafer products of different heights, which brings great inconvenience to cleaning work. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides an adjustable transmission mechanism suitable for microwave plasma cleaning machine to solve the problems in the above background technology.

[0005] To achieve the above purpose, the utility model realizes the following technical scheme: an adjustable transmission mechanism suitable for microwave plasma cleaning machine, comprising first mounting plate and second mounting plate arranged in parallel, a fixedly connected base is arranged between the first mounting plate and the second mounting plate, a baffle arranged in parallel is arranged above the base, the baffle is fixedly connected with the first mounting plate and the second mounting plate on both sides, a lifting adjusting mechanism is arranged between the base and the baffle, the lifting adjusting mechanism comprises a rotationally connected longitudinal screw rod between the base and the baffle, a longitudinally supporting rod fixedly connected with the base and the baffle on both sides of the longitudinal screw rod, a lifting platform threadedly connected on the longitudinal screw rod, a first driving motor drivingly connected at the bottom of the longitudinal screw rod, and the lifting platform surface is slidingly connected with the two longitudinal supporting rods; the lifting platform surface is also provided with a horizontal adjusting mechanism, and the horizontal adjusting mechanism surface is provided with a placing rack.

[0006] Preferably, the horizontal adjusting mechanism comprises a fixedly connected supporting plate at both ends of the lifting platform surface, a horizontal screw rod between the two supporting plates, a bracket on both sides of the horizontal screw rod, a movable platform threadedly connected on the horizontal screw rod, the movable platform is slidingly connected with the two brackets, and the lifting platform surface is also provided with a second driving motor drivingly connected with the horizontal screw rod.

[0007] Preferably, the placing rack surface is provided with a limiting groove, and the limiting groove is provided with a protective plate on both sides.

[0008] Preferably, the lifting platform is provided with an anti-vibration sliding sleeve at the connection between the mobile platform surface and the supporting rod and the support.

[0009] Preferably, the first mounting plate is provided with a multi-grade adjustment switch connected with the first driving motor and the second driving motor.

[0010] Preferably, the first mounting plate and the second mounting plate are provided with a plurality of mounting holes, and a plurality of reinforcing bolts and fastening nuts are arranged in the mounting holes.

[0011] The utility model provides a kind of adjustable transmission mechanism suitable for microwave plasma cleaning machine, with following beneficial effects: the height and lateral station of placing rack can be automatically adjusted according to specific work requirement, through lifting adjustment mechanism and lateral adjustment mechanism, meet the different height, multi-station feeding and cleaning needs, and the movement of lifting block and moving block is driven by motor driving screw rotation, guarantee the stability of work, improve the work efficiency of microwave plasma cleaning machine. BRIEF DESCRIPTION OF DRAWINGS

[0012] Fig. 1 It is the front structure schematic diagram of the utility model.

[0013] Fig. 2 It is the overall structure schematic diagram of the utility model.

[0014] Fig. 3 It is the overall structure schematic diagram of the utility model.

[0015] In the figure, 1, first mounting plate;2, second mounting plate;3, mounting hole;4, reinforcing bolt;5, fastening nut;6, base;7, baffle;8, lifting adjustment mechanism;81, longitudinal screw thread screw;82, longitudinal supporting rod;83, lifting platform;84, first driving motor;9, lateral adjustment mechanism;91, support plate;92, lateral screw thread screw;93, support;94, mobile platform;95, second driving motor;10, anti-vibration sliding sleeve;11, placing rack;12, limit slot;13, protection plate;14, multi-grade adjustment switch. DETAILED DESCRIPTION

[0016] The embodiment of the utility model is further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the utility model, but cannot be used to limit the scope of the utility model.

[0017] In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more than two;The terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0018] In the description of the utility model, it should be pointed out that, unless otherwise specified and limited, the terms "connected", "connected" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected;It can be mechanically connected, or it can be electrically connected;It can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary skilled persons in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0019] Please refer to Figs. 1 to 3The utility model provides a kind of technical scheme: a kind of adjustable transmission mechanism suitable for microwave plasma cleaning machine, including mutually parallelly arranged first mounting plate 1, second mounting plate 2, first mounting plate 1 and second mounting plate 2 surface are equipped with a plurality of mounting holes 3, a plurality of mounting holes 3 are equipped with reinforcing bolt 4, fastening nut 5.First mounting plate 1 and second mounting plate 2 between are equipped with the base 6 of fixed connection, the base 6 top is equipped with with parallelly arranged baffle 7, baffle 7 both sides are fixedly connected with first mounting plate 1, second mounting plate 2, and the lifting adjusting mechanism 8 between base 6 and baffle 7 is equipped with, lifting adjusting mechanism 8 includes the rotationally connected longitudinal screw rod 81 between base 6 and baffle 7, the longitudinal support rod 82 fixedly connected with base 6, baffle 7 located longitudinal screw rod 81 both sides, the lifting platform 83 of screw connection on longitudinal screw rod 81, the first drive motor 84 of drive connection located at the bottom of longitudinal screw rod 81, lifting platform 83 surface is slidably connected with both sides longitudinal support rod 82;Lifting platform 83 surface is also equipped with horizontal adjusting mechanism 9, horizontal adjusting mechanism 9 surface is equipped with placing rack 11, placing rack 11 surface is equipped with limit groove 12, limit groove 12 both sides are equipped with protective plate 13.Horizontal adjusting mechanism 9 includes the fixedly connected support plate 91 located at the both ends of lifting platform 83 surface, the horizontal screw rod 92 between both sides support plate 91, the bracket 93 located longitudinal screw rod 92 both sides, the moving platform 94 of screw connection on horizontal screw rod 92, moving platform 94 is slidably connected with both sides bracket 93, and the second drive motor 95 of drive connection is also equipped with with horizontal screw rod 92 on the surface of lifting platform 83.Second drive motor 95 is connected with horizontal screw rod 92.

[0020] First mounting plate 1 is equipped with the multi-grade adjusting switch 14 of control connection with first drive motor 84, second drive motor 95.

[0021] The specific use mode and effect of the embodiment: the wafer product needing cleaning can be placed on placing rack 11, and then the height is adjusted according to specific work demand, the first drive motor 84 drives longitudinal screw rod 81 to rotate, so that the lifting platform 83 on the surface moves up and down, and then reaches the designated position, and the second drive motor 95 works to drive horizontal screw rod 92 to rotate, so that the moving platform 94 moves, which is convenient for adjusting the cleaning station of placing rack 11, and meets the multi-station cleaning demand of wafer product.And limit groove 12 and protective plate 13 are arranged on the surface of placing rack 11, which can ensure that the wafer product maintains relatively stable working state during transportation;The anti-vibration sliding sleeve 10 located at the connection of support rod and bracket 93 can play a good lifting protection and supporting role, and improve the working efficiency of microwave plasma cleaning machine.

[0022] The above merely describes a preferred embodiment of the present application, and the protection scope of the present application is not limited thereto, and any skilled person in the art, according to the technical scheme and the inventive concept of the present application, makes equivalent replacement or change within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. An adjustable transmission mechanism suitable for microwave plasma cleaners, characterized in that, The utility model provides a kind of installation board, including mutually parallel first installation plate (1), second installation plate (2), the first installation plate (1) and second installation plate (2) between being equipped with fixedly connected base (6), the base (6) top is equipped with with parallelly arranged baffle (7), the baffle (7) both sides are fixedly connected with first installation plate (1), second installation plate (2), the base (6) and baffle (7) between being equipped with lifting adjusting mechanism (8), the lifting adjusting mechanism (8) includes the rotationally connected longitudinal screw rod (81) between base (6) and baffle (7), the longitudinal support rod (82) being fixedly connected with base (6), baffle (7) in longitudinal screw rod (81) both sides, the screw connection lifting platform (83) on longitudinal screw rod (81), the first drive motor (84) of drive connection in longitudinal screw rod (81) bottom, the lifting platform (83) surface is slidably connected with two sides longitudinal support rod (82);The lifting platform (83) surface is also equipped with transverse adjusting mechanism (9), the transverse adjusting mechanism (9) surface is equipped with rack (11).

2. The adjustable transport mechanism for use in a microwave plasma cleaning machine according to claim 1, wherein: The transverse adjusting mechanism (9) includes the fixedly connected support plate (91) in the lifting platform (83) surface both ends, the transverse screw rod (92) between two sides support plate (91), bracket (93) in transverse screw rod (92) both sides, the screw connection moving platform (94) on transverse screw rod (92), the moving platform (94) is slidably connected with two sides bracket (93), the lifting platform (83) surface is also equipped with the second drive motor (95) of drive connection with transverse screw rod (92).

3. The adjustable transport mechanism for use in a microwave plasma cleaning machine according to claim 1, wherein: The rack (11) surface is equipped with limiting groove (12), the limiting groove (12) both sides are equipped with guard plate (13).

4. The adjustable transport mechanism for use in a microwave plasma cleaning machine according to claim 1, wherein: The lifting platform (83) and moving platform (94) surface are equipped with anti-vibration sliding sleeve (10) with support rod, bracket (93) connection place.

5. The adjustable transport mechanism for use in a microwave plasma cleaning machine according to claim 1, wherein: The first installation plate (1) is equipped with multiple-grade adjusting switch (14) of control connection with first drive motor (84), second drive motor (95).

6. The adjustable transport mechanism for use in a microwave plasma cleaning machine according to claim 1, wherein: The first installation plate (1) and second installation plate (2) surface are equipped with a plurality of mounting holes (3), and a plurality of reinforcing bolts (4) and fastening nuts (5) are arranged in the mounting holes (3).

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