Dry type ultrasonic cleaning mechanism

Abstract

The utility model discloses a dry-type ultrasonic cleaning mechanism, which relates to the technical field of cleaning, and adopts the technical scheme that the dry-type ultrasonic cleaning mechanism comprises a supporting part which can be fixedly connected with an external structure; the cleaning part is fixedly connected with the supporting part; the cleaning part comprises an air supply passage and an air return passage; a vibrator for generating ultrasonic waves is arranged on the air supply passage of the cleaning part; the pressing part is connected with the supporting part, and the pressing part comprises pressing pieces arranged on the two sides of the cleaning part; and the cleaning part and the pressing part can be close to or far away from the tray to be cleaned. The cleaning part has the beneficial effects that the air supply passage and the air return passage are innovatively integrated in the cleaning part, and the air outlet and the air suction opening are respectively formed, so that air with dust is timely discharged during cleaning, and the cleaning quality is effectively improved. The ultrasonic vibrator arranged on the air supply channel can introduce ultrasonic energy into air flow, waterless cleaning is achieved by means of the dry-type ultrasonic cleaning technology, and it can be ensured that the cleaned chip tray can be put into use immediately.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of cleaning, specifically to a dry type ultrasonic cleaning mechanism. BACKGROUND

[0002] In the chip manufacturing process, the chip tray as a key component to carry and transport chips, the cleanliness of its surface has an important influence on the quality and performance of the chip. However, in the production, processing and transportation of chips, the surface of the chip tray will inevitably be contaminated by various pollutants, such as dust, grease, metal debris, etc. If these pollutants are not removed in time, they may introduce impurities in the chip manufacturing process, resulting in reduced chip performance, yield, and even affecting the stability and reliability of the entire chip manufacturing process.

[0003] The traditional chip tray cleaning method mainly includes wet cleaning and dry blowing. Although the wet cleaning method can effectively remove the pollutants on the surface of the tray, it needs to use a large amount of cleaning liquid, which not only increases the production cost, but also may cause environmental pollution. In addition, the wet cleaning method may also cause water to remain on the surface of the chip tray, affecting the subsequent chip processing process. The dry blowing method does not need to use cleaning liquid, but its cleaning effect is limited and it is difficult to completely remove the small pollutants on the surface of the tray.

[0004] In recent years, with the continuous development of ultrasonic technology, dry ultrasonic cleaning technology has gradually attracted people's attention. The working principle of dry ultrasonic technology is to generate sound waves of a certain frequency through a high-frequency sound wave generator. These sound waves propagate in the air and produce tiny bubbles. When these bubbles encounter the surface of an object, they will quickly burst and release a lot of energy, which can shake off the dust and dirt on the surface of the object, thereby achieving the effect of cleaning. This cleaning method has the advantages of non-contact, high efficiency, environmental protection, etc., and is particularly suitable for cleaning high-precision equipment and sensitive objects that need to avoid water or chemical solvent residues, but this technology has not been able to be applied to the cleaning of chip trays. SUMMARY

[0005] In view of one of the deficiencies of the prior art, the utility model provides a dry ultrasonic cleaning mechanism to solve the cleaning problem of the chip tray.

[0006] To achieve the above purpose, the utility model provides the following technical scheme: a dry ultrasonic cleaning mechanism, comprising:

[0007] The support part can be fixedly connected with the external structure;

[0008] The cleaning part is fixedly connected with the supporting part, and comprises an air supply passage and an air return passage; an air outlet for air supply is arranged corresponding to the air supply passage, and an air inlet for air return is arranged corresponding to the air return passage; a vibrator for generating ultrasonic waves is arranged on the air supply passage of the cleaning part;

[0009] The pressing part is connected with the supporting part, and comprises pressing members arranged on both sides of the cleaning part;

[0010] The cleaning part and the pressing part can be close to or away from the tray to be cleaned.

[0011] Preferably, the supporting part comprises:

[0012] The fixed supporting assembly is fixedly connected with an external structure;

[0013] The movable supporting assembly is arranged inside the fixed supporting assembly, and the cleaning part is fixedly arranged on the movable supporting assembly;

[0014] The adjusting assembly is arranged at the connection between the movable supporting assembly and the fixed supporting assembly, and can adjust the position of the movable supporting assembly.

[0015] Preferably, the fixed supporting assembly comprises:

[0016] The fixed supporting members are L-shaped frame bodies, and two fixed supporting members are arranged, the bottom of each fixed supporting member is fixedly connected with an external supporting structure, and the upper part of each fixed supporting member is provided with a vertical sliding groove, and the movable supporting assembly is slidably connected with the fixed supporting members through the sliding grooves.

[0017] Preferably, the adjusting assembly comprises:

[0018] The adjusting rod is rotatably connected with the movable supporting assembly;

[0019] The adjusting seat is fixedly connected with the fixed supporting member, and the adjusting rod is threadedly connected with the adjusting seat.

[0020] Preferably, the movable supporting assembly comprises:

[0021] The supporting plate is a horizontally arranged plate body, and the cleaning part and the pressing part are connected with the supporting plate;

[0022] The sliding plates are fixedly arranged at both ends of the supporting plate, and the sliding plates are slidably connected with the fixed supporting assembly through the adjusting assembly.

[0023] Preferably, the cleaning part comprises:

[0024] An air guide shell is fixedly arranged at the lower side of the plate body of the support plate; the bottom of the air guide shell is provided with an air outlet and an air inlet, and the air guide shell is internally provided with a partition structure which divides the inside of the air guide shell into a supply air chamber and a return air chamber;

[0025] A supply air assembly is in communication with the supply air chamber inside the air guide shell, and the supply air assembly is in communication with an external air source through a pipeline;

[0026] A return air assembly is in communication with the return air chamber inside the air guide shell.

[0027] Preferably, the partition structure inside the air guide shell comprises:

[0028] Two partition plates are arranged, which divide the inside of the air guide shell into three chambers, with the supply air chamber in the middle and one return air chamber on each side of the supply air chamber;

[0029] The air outlet and the air inlet at the bottom of the air guide shell are both long strip-shaped openings; the air outlet is located at the middle of the bottom end of the air guide shell, and the air inlet is provided with two symmetrical structures distributed on both sides of the air outlet.

[0030] Preferably, a plurality of supply air holes are formed in the middle of the plate body of the support plate, and a plurality of air suction grooves are formed on both sides of the supply air holes; the supply air holes and the air suction grooves both penetrate through the plate body of the support plate;

[0031] The supply air assembly comprises:

[0032] A plurality of air nozzles are arranged, the number of the air nozzles corresponds to the number of the supply air holes, and the air nozzles are in communication with the supply air chamber inside the air guide shell through the supply air holes on the support plate;

[0033] The return air assembly comprises:

[0034] A return air shell is covered on the upper side of the plate body of the support plate, the inside of the return air shell is a cavity, and the air suction grooves on the support plate are all located within the covering range of the return air shell;

[0035] A return air pipe is in communication with the inside of the return air shell.

[0036] Preferably, the pressing part further comprises:

[0037] A pressing frame is fixedly arranged on one side of the plate body of the support plate, and the frame body of the pressing frame is provided with one pressing piece;

[0038] The pressing piece is a roller body, and the pressing piece is rotationally connected with the pressing frame.

[0039] Preferably, the pressing frame comprises:

[0040] A fixing seat is fixedly connected with the plate body of the support plate;

[0041] The connecting seat is connected with the fixing seat through the adjusting slot;

[0042] The connecting plate is a horizontally arranged plate body; the fixing seat and the connecting seat are provided with two groups respectively on two sides of the connecting plate, and the two ends of the connecting plate are fixedly connected with one of the connecting seats respectively;

[0043] The suspension frame is connected with the connecting plate; and the pressing member is rotationally connected with the suspension frame.

[0044] Compared with the prior art, the cleaning part of the present application has the following beneficial effects: the cleaning part of the present application innovatively integrates the air supply passage and the air return passage, and is respectively provided with the air outlet and the air inlet, so that the dust-containing air can be discharged in time during cleaning, and the cleaning quality is effectively improved. The ultrasonic vibrator arranged on the air supply passage can introduce ultrasonic energy into the airflow, and the dry ultrasonic cleaning technology is used to realize waterless cleaning, so that the cleaned chip tray can be immediately put into use.

[0045] In addition, the pressing member arranged on both sides of the cleaning part can apply a downward pressure to the surface of the tray, so that the stability of the tray during cleaning is improved, and the cleaning effect is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 The figure is a schematic diagram of the overall structure of the embodiment of the present application Figure 1 ;

[0047] Figure 2 The figure is a schematic diagram of the overall structure of the embodiment of the present application Figure 2 ;

[0048] Figure 3 The figure is a schematic diagram of the cleaning part structure of the embodiment of the present application

[0049] Figure 4 The figure is a schematic diagram of the A part of the embodiment of the present application Figure 3 ;

[0050] Figure 5 The figure is a schematic diagram of the air guide shell structure of the embodiment of the present application Figure 1 ;

[0051] Figure 6 The figure is a schematic diagram of the air guide shell structure of the embodiment of the present application Figure 2 ;

[0052] Figure 7 The figure is a schematic diagram of the support plate structure of the embodiment of the present application

[0053] In the figure:

[0054] 1, support part; 11, fixed support assembly; 12, movable support assembly; 121, support plate; 13, adjusting assembly; 2, cleaning part; 21, air guide shell; 211, air outlet; 212, air inlet; 22, air supply assembly; 221, air nozzle; 23, air return assembly; 231, air return shell; 232, air return pipe; 24, vibrator 3, pressing part; 31, pressing member; 32, pressing frame; 321, fixed seat; 322, connecting seat; 323, connecting plate; 324, suspension frame. DETAILED DESCRIPTION

[0055] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0056] Please refer to Figure 1 and Figure 2 The present application provides the following technical solutions:

[0057] A dry ultrasonic cleaning mechanism, comprising a support part 1 for fixed connection with an external structure, the support part 1 being used to erect the cleaning mechanism on a tray conveying path. A cleaning part 2 is fixedly arranged on the support part 1, the cleaning part 2 comprising an air supply passage and an air return passage, the air supply passage being provided with an air outlet 211 for air outlet, and the air return passage being provided with an air inlet 212 for air return; a vibrator 24 for generating ultrasonic waves is arranged on the air supply passage of the cleaning part 2. The support part 1 is further provided with a pressing part 3, the pressing part 3 comprising pressing members 31 arranged on both sides of the cleaning part 2; the cleaning part 2 and the pressing part 3 can be close to or away from the tray to be cleaned.

[0058] Through the structure of the present solution, the cleaning part 2 is formed into an approximately gantry erection structure on the conveying path of the tray by the support part 1. The dry ultrasonic cleaning mechanism is formed by means of the vibrator 24, which cleans the dust and other dirt on the tray, and then the air above the tray is sucked by means of the air inlet 212, so that the cleaned dirt is sucked away, thereby completing the cleaning of the tray. The problem of position deviation and shaking of the tray during cleaning can be avoided by means of the pressing part 3, thereby ensuring good cleaning effect.

[0059] On the basis of the above-mentioned embodiment, the support part 1 comprises a fixed support assembly 11, a movable support assembly 12 and an adjusting assembly 13.

[0060] The fixed support assembly 11 comprises two fixed supports, which are "L" shaped frame bodies, the bottom of the fixed support is fixedly connected with the external support structure through bolts, and a reinforcing member is arranged between the vertical part and the horizontal part of the fixed support. A vertical sliding groove is formed in the upper part of the fixed support, and the two sides of the movable support assembly 12 are slidably connected with the fixed support through the sliding groove.

[0061] The movable support assembly 12 is arranged inside the two fixed supports of the fixed support assembly 11, and the cleaning part 2 is fixedly arranged on the movable support assembly 12. The adjusting assembly 13 is arranged at the connection between the movable support assembly 12 and the fixed support assembly 11, and the position of the movable support assembly 12 can be adjusted by the adjusting assembly 13.

[0062] The adjusting assembly 13 comprises an adjusting rod and an adjusting seat. The adjusting rod is rotatably connected with the movable support assembly 12, the adjusting seat is fixedly connected with the fixed support, and the adjusting rod is threadedly connected with the adjusting seat. Through the combination structure of the screw rod and the nut, the adjusting rod drives the movable support assembly 12 to ascend and descend.

[0063] On the basis of the above-mentioned embodiment, the movable support assembly 12 comprises a support plate 121 and two sliding plates 122. The support plate 121 is a horizontally arranged plate body, and the cleaning part 2 and the pressing part 3 are fixedly connected with the support plate 121. One sliding plate 122 is fixedly arranged at each end of the support plate 121, and the sliding plates 122 are slidably connected with the fixed support assembly 11 through the adjusting assembly 13.

[0064] The specific connection mode of the sliding plate 122 and the adjusting assembly 13 can adopt various forms, and one provided in the present scheme is as follows. A bearing seat is fixedly arranged on the outer side of the sliding plate 122, the bearing seat extends to the outer side of the fixed support through the sliding groove of the fixed support, the lower end of the adjusting rod is connected with the bearing seat, and the free rotation of the adjusting rod is satisfied. The adjusting seat is also arranged on the outer side of the fixed support, and the adjusting rod is threadedly connected with the adjusting seat. A rotating cap is fixedly arranged at the top end of the adjusting rod, and the rotating cap is provided with a scale. The rotating cap is convenient for screwing the adjusting rod, and the amount of rotation of the adjusting rod can be easily grasped.

[0065] On the basis of the above-mentioned embodiment, referring to Figures 3 to 7 , the cleaning part 2 comprises an air guide shell 21, a blowing assembly 22 and an air return assembly 23. The air guide shell 21 is fixedly arranged on the lower side of the plate body of the support plate 121, the bottom of the air guide shell 21 is provided with an air outlet 211 and an air inlet 212, a partition structure is arranged in the air guide shell 21, and the air guide shell 21 is divided into a blowing chamber and an air return chamber by the partition structure. The blowing assembly 22 is in communication with the blowing chamber in the air guide shell 21, and the blowing assembly 22 is connected with an external air source through a pipeline, and the external air source can be a gas pump. The air return assembly 23 is connected with the air return chamber in the air guide shell 21, and the air return assembly 23 can be connected with a gas suction pump through a pipeline.

[0066] See Figure 5 The air guide shell 21 is an inverted body structure with a large area at the top and an open opening. The internal partition structure of the air guide shell 21 includes two vertically arranged partition plates 213, which divide the interior of the air guide shell 21 into three chambers. The air supply chamber is located in the middle, and there is a return air chamber on each side of the air supply chamber.

[0067] See Figure 6 The air outlet 211 and the air inlet 212 at the bottom of the air guide shell 21 are both elongated openings; the air outlet 211 is located in the middle of the bottom end of the air guide shell 21, and there are two air inlets 212, which are symmetrically distributed on both sides of the air outlet 212.

[0068] Through this structure, based on the principle of dry ultrasonic cleaning, microbubbles are generated by the vibrator 24, then discharged through the air outlet 211 and impact the tray. Dust and other dirt on the tray are dislodged by the bubbles and then sucked in through the air inlet 212, thereby cleaning the tray.

[0069] Based on the above implementation plan, see Figure 7 The support plate 121 has four air supply holes in the middle and several air suction slots on both sides of the air supply holes. The air supply holes are round holes and the air suction slots are elongated slots, with three slots on each side of the air supply holes. Both the air supply holes and the air suction slots penetrate the support plate 121.

[0070] The air supply assembly 22 includes four air nozzles 221. The air nozzles 221 are connected to the air supply chamber inside the air guide shell 21 through air supply holes on the support plate 121, and the air nozzles 221 are connected to the air source through pipes. The air supplied by the air source enters the air supply chamber of the air guide shell 21 after passing through the air nozzles 221.

[0071] The return air assembly 23 includes a return air housing 231, which is fitted over the upper side of the support plate 121. The return air housing 231 is approximately "I"-shaped, with an internal cavity, and the air intake slots on the support plate 121 are all located within the fitted area of ​​the return air housing 231. A return air duct 232 is provided on the top of the return air housing 231, and the return air duct 232 is connected to the interior of the return air housing 231. The return air duct 232 can be connected to an air pump via a pipeline.

[0072] Based on the above implementation plan, see Figure 3 and Figure 4The pressing member 31 is a roller body, and the pressing part 3 further comprises a pressing frame 32. The pressing frame 32 is fixedly arranged on one side of the plate body of the support plate 121. The pressing frame 32 comprises a fixed seat 321 fixedly connected with the plate body of the support plate 121. The fixed seat 321 is provided with two connecting seats 322 arranged on opposite sides of the two fixed seats 321 respectively. The connecting seat 322 is provided with a vertical adjusting slot. The connecting seat 322 is connected with the fixed seat 321 through the adjusting slot. A horizontal bolt is arranged at the connecting position of the fixed seat 321 and the connecting seat 322. The bolt penetrates through the adjusting slot of the connecting seat 322, and a locking nut is arranged on the bolt. A connecting plate 323 is fixedly arranged between the two connecting seats 322. The connecting plate 323 is a horizontally arranged plate body. Through this structure, the vertical height of the connecting plate 323 can be adjusted. This is the first adjusting structure of the pressing frame 32.

[0073] In addition, a hanging frame 324 is further arranged below the connecting plate 323. The roller body of the pressing member 31 is rotatably connected with the lower part of the hanging frame 324. Two insertion rods are arranged on the upper part of the hanging frame 324. The connecting plate 323 is provided with insertion holes corresponding to the insertion rods. The hanging frame 324 is inserted with the connecting plate 323 through the insertion rods and the insertion holes.

[0074] Through adjusting the position of the insertion rod relative to the insertion hole, the height of the pressing member 31 can be adjusted. This is the second adjusting structure of the pressing frame 32.

[0075] Combined with the two adjusting structures, the pressing member 31 can be adjusted in a sufficient range, so as to adapt to trays with different thicknesses.

[0076] In the description of the present application and the embodiments thereof, it should be understood that the terms "top", "bottom", "height" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0077] In the present application and the embodiments thereof, unless otherwise specified and limited, the terms "arrangement", "installation", "connection", "linkage", "fixation" and the like should be understood in a broad sense, for example, they can be fixed connection, or detachable connection, or integrated; they can be mechanical connection, or electrical connection, or communication; they can be directly connected, or indirectly connected through an intermediate medium; they can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0078] In the present application and embodiments thereof, unless specifically stated and limited otherwise, "on" or "under" of a first feature with respect to a second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Also, "over", "above", and "on top of" of a first feature with respect to a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. "Under", "below", and "underneath" of a first feature with respect to a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is horizontally lower than the second feature.

[0079] The above disclosure provides many different embodiments or examples for implementing different structures of the present application. For the purpose of simplicity, the elements and settings of the particular examples in the above are described in some detail. This is, of course, done without loss of generality and is intended to provide what is believed to be the most useful and readily understood description of the structures as well as to fully convey the scope of the application. Descriptions of the various embodiments and / or settings are intended merely as illustrative examples and are not intended to limit the scope of the application. Furthermore, the various examples of the present application can be used in different embodiments and / or settings without departing from the scope of the present application. It is therefore contemplated to be within the scope of the present application that the various features and aspects of the present application can be used in combination with each other, if such a feature would not technically result in inconsistency or logical contradiction. Furthermore, it is intended to be within the scope of the present application that the various features and aspects of the present application can be used in different embodiments and / or settings without departing from the scope of the present application. It is therefore contemplated to be within the scope of the present application that the various features and aspects of the present application can be used in combination with each other, if such a feature would not technically result in inconsistency or logical contradiction. Furthermore, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art can recognize that other processes can be applied and / or other materials can be used.

[0080] While the preferred embodiments of the application have been described, additional variations and modifications can be made to the embodiments without departing from the spirit and scope of the application. Therefore, it is intended that the appended claims be construed to include all such variations and modifications as falling within the scope of the application. This application claims priority to U.S. Provisional Patent Application No. 61 / 1 12, 1 1 1, filed November 9, 2008, the entire contents of which are incorporated herein by reference.

[0081] It will be apparent to those skilled in the art that various modifications and variations can be made to the present application without departing from the spirit or scope of the application. Thus, it is intended that the present application cover modifications and variations of this application provided they come within the scope of the appended claims and their equivalents.

Claims

1. A dry ultrasonic cleaning mechanism, characterized by, The utility model relates to a cleaning device for tray, including: Support part, can be fixedly connected with external structure; Cleaning part, and support part fixedly connected;Cleaning part includes air supply passage and return air passage;Corresponding air supply passage is provided with air outlet for air outlet, and corresponding return air passage is provided with air inlet for return air;The stator for generating ultrasonic wave is arranged on the air supply passage of cleaning part; Compression part, and support part connection, compression part includes the compression spare of setting in the both sides of cleaning part; Cleaning part and compression part can be close or far from the tray to be cleaned.

2. The dry ultrasonic cleaning mechanism of claim 1, wherein, The support part includes: Fixed support assembly, can be fixedly connected with external structure; Movable support assembly, setting in fixed support assembly inside, cleaning part fixedly setting on movable support assembly; Adjusting assembly, setting at the junction of movable support assembly and fixed support assembly;Adjusting assembly can adjust the position of movable support assembly.

3. The dry ultrasonic cleaning mechanism of claim 2, wherein, The fixed support assembly includes: Fixed support spare, for "L" shaped frame body, setting up two, fixed support spare bottom can be fixedly connected with external support structure;Fixed support spare upper portion is provided with vertical direction's sliding slot, and both sides of movable support assembly are slidably connected with fixed support spare through the sliding slot.

4. The dry ultrasonic cleaning mechanism of claim 3, wherein, The adjusting assembly includes: Adjusting rod, and movable support assembly rotationally connected; Adjusting seat, and fixed support spare fixedly connected, and adjusting rod and adjusting seat are threadedly connected.

5. The dry ultrasonic cleaning mechanism of claim 2, wherein, The movable support assembly includes: Support plate, for horizontally arranged plate body, cleaning part and compression part are connected with support plate; Sliding plate, one is fixedly arranged at both ends of support plate respectively, and sliding plate is slidably connected with fixed support assembly through adjusting assembly.

6. The dry ultrasonic cleaning mechanism of claim 5, wherein, The cleaning part includes: Air guide shell, fixedly setting at the lower side of plate body of support plate;Air guide shell bottom is provided with air outlet and air inlet, and air guide shell inside is provided with separation structure, and separation structure divides air guide shell inside into air supply chamber and return air chamber; Air supply assembly, and air supply chamber in air guide shell inside are communicated;And air supply assembly is communicated with external air source through pipeline; Return air assembly, and return air chamber in air guide shell inside.

7. The dry ultrasonic cleaning mechanism of claim 6, wherein, The separation structure in the air guide shell includes: Separation plate, setting up two, separation plate divides air guide shell inside into three chambers, and air supply chamber is located in the middle, and one return air chamber is respectively arranged on both sides of air supply chamber; The air outlet and air inlet of the bottom of the air guide shell are both long strip-shaped openings;Air outlet is located in the middle of the bottom end of air guide shell, and air inlet is provided with two and is symmetrically distributed on both sides of air outlet.

8. The dry ultrasonic cleaning mechanism of claim 7, wherein, The middle part of the plate body of the support plate is provided with a plurality of air supply holes, and a plurality of air suction grooves are provided on both sides of the air supply holes;The air supply holes and air suction grooves all penetrate the plate body of the support plate; The air supply assembly includes: Air nozzle, setting up several, the number of air nozzles corresponds to the number of air supply holes, and air nozzle is communicated with air supply chamber in air guide shell inside through air supply hole on support plate; The return air assembly includes: Return air shell, covering on the upper side of the plate body of the support plate, the inside of return air shell is a cavity, and the air suction grooves on the support plate are all located in the covering range of return air shell; Return air pipe, and the inside of return air shell is communicated.

9. The dry ultrasonic cleaning mechanism of claim 5, wherein, The compression part further includes: A pressing frame is fixedly arranged on one side of the plate body of the support plate, and a pressing part is arranged on the lower part of the frame body of the pressing frame. The pressing part is a roller body, and the pressing part and the pressing frame are rotationally connected.

10. The dry ultrasonic cleaning mechanism of claim 9, wherein, The pressing frame comprises: A fixing seat is fixedly connected with the plate body of the support plate; An adjusting groove is vertically arranged on the connecting seat, and the connecting seat is connected with the fixing seat through the adjusting groove; A connecting plate is horizontally arranged, and the fixing seat and the connecting seat are arranged in two groups on both sides of the connecting plate. A hanging frame is connected with the connecting plate, and the pressing part and the hanging frame are rotationally connected.

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