Multi-station photoresist filling equipment

Abstract

The utility model discloses photoresist multi-station filling equipment which comprises a base, a stepped groove is formed in the base, a plurality of vibration motors are installed at the bottom of the stepped groove, a tray is placed in the stepped groove, a plurality of storage grooves are formed in the tray, output shafts of the vibration motors abut against the tray, and a movable frame is arranged on the base in a sliding mode. A lifting plate is movably mounted on the moving frame, and a plurality of filling guns matched with the storage grooves are mounted on the lifting plate. According to the utility model, the containers are fixed in the object placing groove, the movable frame is driven to sequentially stay above each row of containers, then the photoresist is equivalently filled into each row of containers through the flow dividing pipe and the filling gun under the action of the metering pump until all the containers are filled, and in the filling process, the tray is driven by the vibration motor to oscillate up and down, so that the photoresist is uniformly filled into the containers. The mobility of the photoresist in the container is improved, and the filling efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to filling equipment technical field especially relates to a photoresist multi-station filling equipment. BACKGROUND

[0002] Photoresist is one of the key materials for micro-pattern processing in microelectronic technology, especially in recent years, the development of large-scale and super-large scale integrated circuits has greatly promoted the research and application of photoresist, and the photoresist used in silicon wafer manufacturing is coated on the surface of the silicon wafer in liquid state, and then dried into a film.

[0003] In the silicon wafer manufacturing process, the photoresist needs to be filled into a specified container before spraying, and then uniformly coated on the silicon wafer through the container. However, in actual operation, due to the certain viscosity of the photoresist itself, its fluidity is often limited, especially in low temperature environment or after long time standing, this characteristic will be more obvious. Therefore, in the filling process, the photoresist is prone to flow problem, resulting in low filling efficiency. SUMMARY

[0004] The utility model discloses a photoresist multi-station filling equipment.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A photoresist multi-station filling equipment, comprising a base, a stepped groove is formed in the base, a plurality of vibration motors are installed at the bottom of the stepped groove, a tray is placed in the stepped groove, a plurality of object grooves are formed in the tray, the output shaft of the vibration motor abuts against the tray, a moving frame is slidably arranged on the base, a lifting plate is movably installed on the moving frame, a plurality of filling guns matched with the object grooves are installed on the lifting plate, a photoresist storage tank is arranged on one side of the base, the photoresist storage tank and the filling guns are communicated through a shunt pipe, and a metering pump is installed on each branch pipe of the shunt pipe.

[0007] As a further description of the above technical scheme:

[0008] The second screw and the guide rod are sleeved with a plurality of pressing plates located on one side of the object groove.

[0009] As a further description of the above technical scheme:

[0010] The first screw and the light rod are installed on both sides of the base, the free end of the moving frame is sleeved on the first screw and the light rod, the first motor is fixedly installed on the base, and the output shaft of the first motor is in transmission connection with the first screw.

[0011] As a further description of the above technical solutions:

[0012] The electric push rod is fixedly installed on the moving frame, and the push rod end of the electric push rod is fixedly connected with the lifting plate.

[0013] As a further description of the above technical solutions:

[0014] The positioning holes are arranged around the tray, and the positioning columns passing through the positioning holes are fixedly connected around the stepped grooves.

[0015] As a further description of the above technical solutions:

[0016] The handle is fixedly connected to the two sides of the top of the tray.

[0017] As described above, due to the adoption of the above technical solutions, the beneficial effects of the present application are:

[0018] 1. In the present application, the container is fixed in the storage groove, and the lifting plate is driven by the electric push rod to drive the filling gun to descend to the position where it cooperates with the container, and then stop. After that, the photoresist is filled into the first row of containers through the shunt pipe and the filling gun under the action of the metering pump. Then, the first motor is driven to rotate the first screw rod, and the moving frame is driven to move forward to the position where the filling gun cooperates with the second row of containers, and then stop to fill the second row of containers. Repeat this operation until all the containers are filled. During the filling process, the tray is oscillated up and down by the vibration motor to improve the flowability of the photoresist in the container and improve the filling efficiency.

[0019] 2. In the present application, the second motor is used to drive the second screw rod to rotate, and the pressing plate is used to press and fix the containers placed in the storage groove and the groove, so as to avoid the containers from being separated from the tray due to vibration. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A perspective structural schematic view of a photoresist multi-station filling equipment according to an embodiment of the present application is shown;

[0021] Figure 2 A structural schematic view of a moving frame according to an embodiment of the present application is shown;

[0022] Figure 3 A schematic view of the internal structure of a base according to an embodiment of the present application is shown;

[0023] Figure 4 A schematic view of the internal structure of a tray according to an embodiment of the present application is shown.

[0024] LEGEND:

[0025] 1, base; 101, stepped groove; 2, positioning column; 3, handle; 4, tray; 401, storage groove; 402, positioning hole; 5, first motor; 6, first screw; 7, moving frame; 8, electric push rod; 9, shunt pipe; 10, lifting plate; 11, filling gun; 12, photoresist storage tank; 13, metering pump; 14, light pole; 15, vibration motor; 16, guide rod; 17, pressing plate; 18, second screw; 19, second motor. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0027] Please refer to Figures 1-4 The utility model provides a kind of technical scheme: a kind of photoresist multi-station filling equipment, including base 1, base 1 is equipped with stepped groove 101, the bottom of stepped groove 101 is equipped with a plurality of vibration motor 15, stepped groove 101 is placed with tray 4, tray 4 is equipped with a plurality of storage groove 401, the recess corresponding with storage groove 401 is opened in the inside of tray 4, the output shaft of vibration motor 15 is in abutment with tray 4, base 1 is slidably arranged with moving frame 7, the both sides of base 1 are equipped with first screw 6 and light pole 14, the free end of moving frame 7 is sleeved on first screw 6 and light pole 14, first motor 5 is fixedly installed on base 1, the output shaft of first motor 5 is connected with first screw 6, lifting plate 10 is movably installed on moving frame 7, electric push rod 8 is fixedly installed on moving frame 7, the push rod end of electric push rod 8 is fixedly connected with lifting plate 10, a plurality of filling gun 11 cooperating with storage groove 401 are installed on lifting plate 10, photoresist storage tank 12 is arranged on the side of base 1, photoresist storage tank 12 is communicated with filling gun 11 by shunt pipe 9, metering pump 13 is installed on each branch pipe of shunt pipe 9, and shunt pipe 9 is flexible pipe. Container is fixed in storage groove 401, lifting plate 10 is driven to descend to the position of cooperation with container by electric push rod 8 and filling gun 11 stops, then, photoresist is filled into first row of containers by shunt pipe 9 and filling gun 11 under the action of metering pump 13, then, first motor 5 is driven to rotate first screw 6, according to screw transmission principle, moving frame 7 is driven to move forward to the position of cooperation of filling gun 11 and second row of containers and stops, and second row of containers are filled, repeat the operation, until all containers are filled, in the filling process, tray 4 is oscillated up and down by vibration motor 15, the flowability of photoresist in container is improved, and the filling efficiency is improved.

[0028] Specifically, as shown in Figure 4 The second screw rod 18 and the guide rod 16 are arranged inside the tray 4, and the second motor 19 is fixedly arranged in the tray 4 and is in transmission connection with the second screw rod 18. A plurality of pressing plates 17 are sleeved on the second screw rod 18 and the guide rod 16 and are located on one side of the container placing groove 401. The second motor 19 drives the second screw rod 18 to rotate, and according to the screw transmission principle, the pressing plate 17 is driven to tightly fix the container placed in the container placing groove 401 and the groove, so that the container is prevented from being separated from the tray 4 due to vibration. The soft pad is attached to the two sides of the pressing plate 17, and the soft pad protects the container when the pressing plate 17 is tightly fixed.

[0029] Specifically, as shown in Figure 1 and Figure 3 The positioning hole 402 is arranged around the tray 4, and the positioning column 2 penetrating through the positioning hole 402 is fixedly connected around the stepped groove 101, so as to position the tray 4 and limit the transverse sliding of the tray 4.

[0030] Specifically, as shown in Figure 4 The handle 3 is fixedly connected to the two sides of the top of the tray 4, so that the tray 4 is convenient to take and place.

[0031] Working principle: when in use, the container is fixed in the container placing groove 401. The second motor 19 drives the second screw rod 18 to rotate, and according to the screw transmission principle, the pressing plate 17 is driven to tightly fix the container placed in the container placing groove 401 and the groove, so that the container is prevented from being separated from the tray 4 due to vibration. Then, the electric push rod 8 drives the lifting plate 10 to drive the filling gun 11 to stop at a position matched with the container. Then, the photoresist is filled into the first row of containers through the shunt pipe 9 and the filling gun 11 under the action of the metering pump 13. Then, the first motor 5 is driven to drive the first screw rod 6 to rotate, and according to the screw transmission principle, the moving frame 7 is driven to move forward to a position matched with the second row of containers, and the second row of containers is filled. The operation is repeated until all the containers are filled. During the filling process, the tray 4 is oscillated up and down by the vibration motor 15, so as to improve the flowability of the photoresist in the container and improve the filling efficiency.

[0032] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A photoresist multi-station filling apparatus comprising a base (1), characterized in that, The base (1) is provided with a stepped groove (101), a plurality of vibration motors (15) are installed at the bottom of the stepped groove (101), a tray (4) is placed in the stepped groove (101), a plurality of storage grooves (401) are formed in the tray (4), the output shaft of the vibration motor (15) abuts against the tray (4), a moving frame (7) is slidably arranged on the base (1), a lifting plate (10) is movably installed on the moving frame (7), a plurality of filling guns (11) matched with the storage grooves (401) are installed on the lifting plate (10), a photoresist storage tank (12) is arranged on one side of the base (1), the photoresist storage tank (12) is communicated with the filling gun (11) through a shunt pipe (9), and a metering pump (13) is installed on each branch pipe of the shunt pipe (9).

2. The photoresist multi-station filling apparatus of claim 1, wherein, The tray (4) is internally provided with a second screw rod (18) and guide rods (16) located on both sides of the second screw rod (18), the tray (4) is fixedly provided with a second motor (19) in transmission connection with the second screw rod (18), and a plurality of pressing plates (17) located on one side of the storage groove (401) are sleeved on the second screw rod (18) and the guide rod (16).

3. The photoresist multi-station filling apparatus of claim 2, wherein, The base (1) is provided with a first screw rod (6) and a light rod (14) on both sides, the free end of the moving frame (7) is sleeved on the first screw rod (6) and the light rod (14), and a first motor (5) is fixedly installed on the base (1), the output shaft of the first motor (5) is in transmission connection with the first screw rod (6).

4. The photoresist multi-station filling apparatus of claim 3, wherein, The moving frame (7) is fixedly provided with an electric push rod (8), and the push rod end of the electric push rod (8) is fixedly connected with the lifting plate (10).

5. The photoresist multi-station filling apparatus of claim 4, wherein, The tray (4) is provided with positioning holes (402) around, and positioning columns (2) penetrating through the positioning holes (402) are fixedly connected around the tray (4).

6. The photoresist multi-station filling apparatus of claim 5, wherein, The tray (4) is fixedly provided with handles (3) on both sides of the top.

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