Vacuum coating equipment for composite current collector

Abstract

The utility model discloses vacuum coating equipment for a composite current collector, which comprises a cavity shell, an evaporation cavity is formed by the cavity shell, and a base film is coated in the evaporation cavity to form the composite current collector; the anti-oxidation tank is arranged on one side of the cavity shell and can be used for carrying out surface anti-oxidation treatment on the composite current collector; and the transition channel is arranged on one side of the cavity shell and communicates with the evaporation cavity, and the composite current collector located in the evaporation cavity can be led out through the transition channel and enters the anti-oxidation tank. And by arranging the transition channel, the distance between the evaporation cavity and the outside is increased, and the influence of the outside on the vacuum degree and cleanliness in the evaporation cavity is reduced. According to the device, roll-to-roll continuous coating of a base material in the evaporation cavity is achieved, then surface anti-oxidation treatment is conducted on a product outside the evaporation cavity, the process that a film material is taken out and penetrates through the film again in an existing device is omitted, product oxidation in the transferring process is avoided, loss is reduced, and the coating efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a battery field, concretely relates to a vacuum coating equipment of composite current collector. BACKGROUND

[0002] In the preparation of composite current collector for lithium battery, it is usually required to evaporate metal layer on polymer base film by roll-to-roll vacuum coating equipment to form composite current collector with sandwich structure of "metal layer-base film-metal layer". The roll-to-roll vacuum coating equipment usually completes continuous coating process of whole roll of products in evaporation cavity, and then opens the cavity to take out the whole roll of products. The roll-to-roll vacuum coating equipment is composed of shell, winding system, evaporation source system and vacuum pump group system. The winding system is arranged in the cavity, and the vacuum degree inside the shell is formed by continuous work of the vacuum pump system.

[0003] At present, the design of the equipment is to carry out roll-to-roll coating in a single closed cavity. In order to maintain the stability of the vacuum degree required by the evaporation process, the processes of unwinding, evaporation and winding are all completed in the closed evaporation cavity. This is suitable for materials that do not need surface treatment after evaporation. However, if a strong reducing metal is selected for the composite current collector, surface oxidation resistance treatment is required after vacuum coating. The existing equipment cannot achieve this. The specific reason is that if a post-treatment mechanism is added in the evaporation cavity, there is a risk of gas generation and contamination of the evaporation cavity. Therefore, in the existing equipment, the whole roll of film material needs to be taken out after the evaporation process is completed and then rewound for surface oxidation resistance treatment of the composite current collector. However, the process of taking out the film material and rewinding it has problems such as oxidation of the product during transportation and low efficiency of preparing the composite current collector. UTILITY MODEL CONTENTS

[0004] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide a vacuum coating equipment for composite current collector, which realizes continuous roll-to-roll coating and surface oxidation resistance treatment of the product at the same time, solves the problem of surface oxidation of the composite current collector during transportation, and improves the efficiency of preparing the composite current collector.

[0005] In order to achieve the above purpose, the utility model adopts the technical scheme of a vacuum coating equipment for composite current collector, which comprises:

[0006] The cavity shell forms an evaporation cavity, and the base film is coated in the evaporation cavity to form a composite current collector;

[0007] The oxidation resistance tank is arranged on one side of the cavity shell, and can perform surface oxidation resistance treatment on the composite current collector;

[0008] A transition channel is arranged on one side of the cavity shell, and the transition channel and the evaporation cavity are communicated, and the composite current collector in the evaporation cavity can be led out through the transition channel and into the anti-oxidation tank.

[0009] Further, an opening is arranged on the upper region of the cavity shell, and the opening is connected with the channel inlet of the transition channel.

[0010] Further, a vacuum pump is arranged on the transition channel, and the vacuum pump is kept open during the continuous film plating process.

[0011] Further, at least one turning section is arranged on the transition channel, and the turning section is used for changing the direction of the transition channel.

[0012] Further, a plurality of vacuum pumps are arranged on the transition channel, and at least one vacuum pump is arranged at the turning section.

[0013] Further, the channel outlet of the transition channel and the anti-oxidation tank do not have overlapping regions in the vertical direction.

[0014] Further, the height of the channel outlet of the transition channel in the vertical direction is lower than the height of the opening of the anti-oxidation tank in the vertical direction.

[0015] Further, the channel outlet of the transition channel is arranged directly above the anti-oxidation tank, and the channel outlet is arranged as an upward opening.

[0016] Further, a guide roller is arranged in the transition channel, and the guide roller guides the movement of the composite current collector from the channel inlet to the channel outlet.

[0017] Further, the winding device comprises a unwinding roller, a film plating drum, a guide roller, a flattening roller and a winding roller, the unwinding roller, the film plating drum, the guide roller and the flattening roller are arranged in the evaporation cavity, the winding roller is arranged on the side of the anti-oxidation tank away from the cavity shell, under the action of the guide roller and the flattening roller, the base film is unwound from the unwinding roller, guided by the guide roller and the flattening roller, passes through the film plating drum, enters the anti-oxidation tank through the transition channel after the metal layer is deposited on the surface of the base film, and is wound by the winding roller.

[0018] The utility model discloses the beneficial effects are:

[0019] 1) By setting a transition channel, increasing the distance between the evaporation chamber and the outside world, reducing the influence of the outside world on the vacuum degree and cleanliness inside the evaporation chamber. Realize the substrate in the evaporation chamber inside the roll-to-roll continuous coating, then the product is surface oxidation resistant treatment outside the evaporation chamber, save the existing equipment to take out the film and re-wear the process, avoid the oxidation of the product in the process of transportation, reduce the loss, improve the coating efficiency.

[0020] 2) By setting the winding roller outside the evaporation chamber, the film surface can be continuously monitored in real time during continuous coating. BRIEF DESCRIPTION OF DRAWINGS

[0021] The accompanying drawings, which form a part of this application, are intended to provide further understanding of the present application and are incorporated herein for a purpose of explanation and are not intended to limit the present application in an inappropriate manner.

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0023] Figure 1 The schematic diagram of the vacuum coating equipment of the composite current collector of an embodiment of the present application.

[0024] In the figure: 1, cavity shell; 2, winding device; 21, unwinding roller; 22, coating drum one; 23, coating drum two; 24, guide roller; 25, flattening roller; 26, torque roller; 27, squeezing roller; 28, winding roller; 3, evaporation source device; 31, evaporation boat; 32, wire feeding mechanism; 4, transition channel; 41, channel inlet; 42, channel outlet; 43, turning section; 5, vacuum pump; 6, oxidation resistant tank; 7, oven; 8, base film; 9, composite current collector. DETAILED DESCRIPTION

[0025] In order to make the above-mentioned purposes, features and advantages of the present application more apparent and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. In the following description, a lot of specific details are set forth in order to give a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0026] Referring to the drawings Figure 1As shown, the vacuum plating equipment for a composite current collector in the embodiment includes a cavity shell 1 and a plurality of vacuum pumps 5. Some of the vacuum pumps 5 are arranged to perform vacuumization on the internal space formed by the cavity shell 1, so that an evaporation cavity is formed inside the cavity shell 1. The vacuum plating equipment also includes an oxidation-resistant tank 6 and an oven 7. The oxidation-resistant tank 6 is arranged on one side of the cavity shell 1. After the deposition of the metal layer on the front and back sides of the base film 8 in the evaporation cavity, the base film 8 is subjected to surface oxidation-resistant treatment in the oxidation-resistant tank 6 and then dried in the oven 7 to form a dry composite current collector 9. Finally, the composite current collector 9 is wound by the winding roller 28 of the winding device 2.

[0027] In some embodiments, the winding device 2 includes an unwinding roller 21, a plating drum, guide rollers 24, flattening rollers 25, and a winding roller 28. The unwinding roller 21, the plating drum, and some of the guide rollers 24 and some of the flattening rollers 25 are arranged in the evaporation cavity. Under the action of the guide rollers 24 and the flattening rollers 25, the base film 8 is unwound from the unwinding roller 21, guided by the guide rollers 24 and the flattening rollers 25, and passes through the plating drum to deposit a metal layer on the surface of the base film 8.

[0028] Specifically, the plating drum includes two plating drums, namely, a plating drum one 22 and a plating drum two 23. An evaporation source device 3 is arranged below the plating drum. The evaporation source device 3 includes two evaporation boats 31 and a wire feeding mechanism 32 arranged below the plating drum one 22 and the plating drum two 23, respectively. The base film 8 passes through the plating drum one 22 to deposit a first metal layer on the A surface of the base film 8. Then, the base film 8 is flipped by the guide rollers 24 and passes through the plating drum two 23 to deposit a second metal layer on the B surface of the base film 8, thereby preparing the composite current collector 9.

[0029] In some embodiments, the vacuum plating equipment also includes a transition channel 4 arranged on one side of the cavity shell 1 close to the oxidation-resistant tank 6. The transition channel 4 is in communication with the evaporation cavity. After the surface plating of the base film 8, the base film 8 is guided out of the transition channel 4 and into the oxidation-resistant tank 6 for surface oxidation-resistant treatment.

[0030] An opening is arranged in the upper region of the cavity shell 1. The opening is used to connect with the transition channel 4 and serves as a channel inlet 41 of the transition channel 4. The opening is arranged in the upper region of the cavity shell 1 for the following purpose: the evaporation source device 3 is arranged in the lower region of the cavity, and the vacuum degree is required to be high during the continuous plating. The arrangement of the opening in the upper region can reduce the influence of the transition channel 4 on the vacuum degree of the vacuum plating region.

[0031] The transition channel 4 is arranged to increase the distance between the evaporation cavity and the outside environment and to reduce the influence of the outside environment on the vacuum degree and the cleanliness of the evaporation cavity. The structure of the transition channel 4 is designed to be compact to reduce the possibility of deformation of the film material during traction.

[0032] In some embodiments, a guide roller 24 is arranged inside the transition channel 4 to guide the composite current collector 9 to move from the channel inlet 41 to the channel outlet 42. A vacuum pump 5 is arranged on the transition channel 4, which is kept open during the continuous coating process to improve the vacuum degree of the transition channel 4 and reduce the influence of the transition channel 4 on the vacuum degree of the evaporation chamber.

[0033] In some embodiments, at least one turning section 43 is arranged on the transition channel 4 to change the direction of the channel to maintain the vacuum degree in the transition channel 4 and further reduce the influence of the opening on the housing on the vacuum degree of the coating chamber. A plurality of vacuum pumps 5 are arranged on the transition channel 4, at least one vacuum pump 5 is arranged at the turning section to improve the vacuum degree of the transition channel 4. The vacuum pump 5 is selected from one or more of a screw pump, a maintenance pump, a diffusion pump, and a molecular pump.

[0034] In some embodiments, the channel outlet 43 of the transition channel 4 is arranged outside the oxidation-resistant tank 6, i.e., the projections of the transition channel 4 and the oxidation-resistant tank 6 in the vertical direction do not overlap, to avoid the evaporation of the plating solution in the oxidation-resistant tank 6 into the transition channel 4 and further pollute the evaporation chamber. Further, the height of the channel outlet 43 of the transition channel 4 is lower than the opening height of the oxidation-resistant tank 6, to further avoid the evaporation of the plating solution in the oxidation-resistant tank 6 into the channel.

[0035] In another specific embodiment, to increase the space utilization, the channel outlet 43 is arranged directly above the oxidation-resistant tank 6, and the channel outlet 43 is arranged as an upward opening, which can not only avoid the evaporation of the plating solution in the oxidation-resistant tank 6 into the channel and pollute the evaporation chamber, but also increase the space utilization.

[0036] In some embodiments, the oxidation-resistant tank 6 has a space for placing the oxidation-resistant solution, and torque rollers 26 and guide rollers 24 are arranged in the oxidation-resistant tank 6. The torque rollers 26 can automatically adjust the speed when the load changes to maintain the tension of the material constant. By arranging the torque rollers 26 and the guide rollers 24 in the oxidation-resistant tank 6, the composite current collector 9 is guided to pass through the oxidation-resistant solution at a constant speed, and the surface of the composite current collector 9 is subjected to oxidation-resistant treatment.

[0037] In some embodiments, a squeeze roller 27 is arranged at the outlet position of the oxidation-resistant tank 6, which pushes the oxidation-resistant solution brought out by the composite current collector 9 back into the oxidation-resistant tank 6, reducing the loss of the oxidation-resistant solution and reducing the drying pressure of the subsequent oven 7.

[0038] In some embodiments, an oven 7 is arranged on the side of the oxidation-resistant tank 6 away from the chamber housing 1, and a winding roller 28 is arranged on the side of the oven 7 away from the oxidation-resistant tank 6 to wind the composite current collector 9 dried by the oven 7.

[0039] In the prior technical solution, the whole roll of film material needs to be taken out after the evaporation process is completed and then rewound before the surface is plated with an oxidation-resistant layer. The application directly performs oxidation-resistant treatment on the plated product by adding a transition channel 4 for the film material. The process of taking out the film material and rewinding it is saved, the oxidation of the product during the transfer process is avoided, the loss is reduced, and the efficiency is improved. In addition, the new design realizes continuous roll-to-roll plating and surface oxidation-resistant treatment of the product at the same time, thereby improving the processability of the product in the subsequent process.

[0040] Moreover, the conventional vacuum evaporation equipment places the winding shaft in the evaporation cavity, and can only observe the finished product effect after the plating is completed. The equipment of the application can continuously monitor the film surface during the continuous plating process by setting the winding roller 28 behind the oven 7.

[0041] The above embodiments are only for illustrating the technical concept and characteristics of the application, and the purpose is to enable those skilled in the art to understand the content of the application and implement it, and cannot limit the protection scope of the application. Any equivalent changes or modifications made in accordance with the spirit and essence of the application shall be covered within the protection scope of the application.

Claims

1. A vacuum plating apparatus for a composite current collector, characterized by comprising: The application relates to a vacuum evaporation device for depositing a metal layer on a substrate, comprising: a cavity shell (1) forming an evaporation cavity, a base film (8) being deposited on the evaporation cavity to form a composite current collector (9); an oxidation-resistant groove (6) arranged on one side of the cavity shell (1), the oxidation-resistant groove (6) being capable of performing surface oxidation-resistant treatment on the composite current collector (9); a transition channel (4) arranged on one side of the cavity shell (1), the transition channel (4) being in communication with the evaporation cavity, and the composite current collector (9) in the evaporation cavity being capable of being led out through the transition channel (4) and entering the oxidation-resistant groove (6).

2. The vacuum plating apparatus for a composite current collector according to claim 1, wherein An opening is arranged in an upper region of the cavity shell (1), and the opening is connected with a channel inlet (41) of the transition channel (4).

3. The vacuum plating apparatus for a composite current collector according to claim 1, wherein A vacuum pump (5) is arranged on the transition channel (4), and the vacuum pump (5) is kept in an open state during the deposition process.

4. The vacuum plating apparatus for a composite current collector according to claim 1, wherein At least one turning section (43) is arranged on the transition channel (4), and the turning section (43) is used for changing the direction of the transition channel (4).

5. The vacuum plating apparatus for a composite current collector according to claim 4, wherein A plurality of vacuum pumps (5) are arranged on the transition channel (4), and at least one vacuum pump (5) is arranged at the turning section (43).

6. The vacuum plating apparatus for a composite current collector according to claim 1, wherein A channel outlet (42) of the transition channel (4) and a projection of the oxidation-resistant groove (6) in a vertical direction do not have an overlapping region.

7. The vacuum plating apparatus for a composite current collector according to claim 6, wherein The height of the channel outlet (42) of the transition channel (4) in a vertical direction is lower than the height of an opening of the oxidation-resistant groove (6) in a vertical direction.

8. The vacuum plating apparatus for a composite current collector according to claim 1, wherein The channel outlet (42) of the transition channel (4) is arranged directly above the oxidation-resistant groove (6), and the channel outlet (42) is arranged as an upward opening.

9. The vacuum plating apparatus for a composite current collector according to claim 1, wherein A guide roller is arranged in the transition channel (4), and the guide roller guides the composite current collector (9) to move from the channel inlet (41) to the channel outlet (42).

10. The vacuum plating apparatus for a composite current collector according to any one of claims 1 to 9, wherein The application further comprises a winding device (2), the winding device (2) comprising an unwinding roller (21), a deposition drum one (22), a deposition drum two (23), a guide roller (24), a flattening roller (25) and a winding roller (28), the unwinding roller (21), the deposition drum one (22), the deposition drum two (23), the guide roller (24) and the flattening roller (25) being arranged in the evaporation cavity, the winding roller (28) being arranged on a side, away from the cavity shell (1), of the oxidation-resistant groove (6), the base film (8) being unwound from a film roll by the unwinding roller (21), the guide roller (24) and the flattening roller (25) being used for guiding the film roll to pass through the deposition drum one (22) and the deposition drum two (23) respectively, the base film (8) being deposited with a metal layer and then entering the oxidation-resistant groove (6) through the transition channel (4), and finally being wound by the winding roller (28).

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