Chassis cooling system of polycrystalline silicon reduction furnace

Abstract

The utility model relates to the technical field of polycrystalline silicon, in particular to a polycrystalline silicon reduction furnace chassis cooling system, which comprises a refrigerator, a cooling device and a cooling device, one end of the circulating water tank is connected with the refrigerator, the other end of the circulating water tank is connected with the reduction furnace chassis water inlet header pipe, cooling water carrying waste heat in the reduction furnace chassis water return header pipe is divided into multiple branches, then the cooling water carrying waste heat on the branches is cooled through the refrigerator, and the cooling efficiency of the cooling water is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the polycrystal silicon technical field especially is involved in polycrystal silicon reduction furnace bottom disc cooling system. BACKGROUND

[0002] Polycrystal silicon reduction furnace is the core equipment in the preparation process of crystalline silicon, and is mainly used for converting trichlorosilane (SiHCl3) or silicon tetrachloride (SiCl4) into high-purity polycrystal silicon through high-temperature reduction reaction. After the chemical reaction in the reduction furnace is completed, the reduction furnace needs to be cooled immediately.

[0003] At present, the cooling treatment mode that is more adopted is that a large amount of cooling water is passed into the reduction furnace bottom disc water inlet main pipe through a water pump, is further shunted, and the cooling water circulation carries away the heat on the reduction furnace, the cooling water carrying waste heat is transported to the lithium bromide unit through a pipeline to be cooled, and then is transported to the circulating water pool to be used as cooling water for the reduction furnace again.

[0004] With the development of industry, the demand for high-purity polycrystal silicon is increasing, and in order to provide more high-purity polycrystal silicon, the number of reduction furnaces is also increasing. With the increase of the number of reduction furnaces, the demand for cooling water is also increasing, and the original cooling treatment mode of the cooling water carrying waste heat through the lithium bromide unit cannot meet the actual demand, and the cooling water carrying waste heat cannot be cooled down in time and effectively, which not only causes the reduction furnace bottom disc to be damaged due to over-temperature, and has a leakage risk, but also may change the temperature field in the reduction furnace, and affect the product quality. INVENTION CONTENTS

[0005] The utility model discloses a polycrystal silicon reduction furnace bottom disc cooling system to solve the problems in the background art.

[0006] The utility model discloses the technical scheme that adopts is:

[0007] Polycrystal silicon reduction furnace bottom disc cooling system, including:

[0008] Refrigerator is connected with the reduction furnace bottom disc backwater main pipe;

[0009] Circulating water pool, one end is connected with the refrigerator, and the other end is connected with the reduction furnace bottom disc water inlet main pipe;

[0010] Among them, the refrigerator includes:

[0011] Lithium bromide cooling unit, one end is connected with the reduction furnace bottom disc backwater main pipe, and the other end is connected with the circulating water pool;

[0012] An air cooler is connected in parallel with the lithium bromide cooling unit, one end of the air cooler is connected with the reduced furnace bottom backwater main pipe, and the other end is connected with the circulating water pool.

[0013] Optionally, the air cooler comprises:

[0014] A support frame;

[0015] At least one fan is arranged on the support frame;

[0016] A static pressure tank is arranged on the support frame, and the static pressure tank has an upper and lower through cavity;

[0017] A tube bundle is arranged in the cavity;

[0018] A louver is arranged on the static pressure tank.

[0019] Optionally, the tube bundle comprises:

[0020] A tube body;

[0021] A wire mesh is arranged on the outer wall of the tube body, and the wire mesh is arranged in a wave shape along the circumferential direction of the tube body and is attached to the outer wall of the tube body at the wave trough.

[0022] Optionally, the clamp comprises:

[0023] An outer fixing cylinder is sleeved on the wave crest of the wire mesh, and the length of the outer fixing cylinder is consistent with the length of the tube body;

[0024] A pressing strip is arranged at the wave trough of the wire mesh and extends along the circumferential direction of the tube body until the pressing strip is attached to the inner wall of the outer fixing cylinder;

[0025] A pressing screw is threadedly connected with the outer fixing cylinder, and one end of the pressing screw penetrates through the outer fixing cylinder and is pressed on the pressing strip.

[0026] Optionally, the peak height of the wave shape of the wire mesh is 3-8 mm.

[0027] Optionally, the wire mesh is in a sheet structure, and the length of the wire mesh is consistent with the length of the tube body.

[0028] Optionally, the wire mesh is made of stainless steel, and a graphene coating is coated on the surface of the wire mesh.

[0029] Optionally, the wire mesh has a wire diameter of 0.1-0.35 mm and a mesh diameter of 0.2-0.5 mm.

[0030] Optionally, the air cooler further comprises a plate heat exchanger.

[0031] Optionally, the plate heat exchanger is connected in parallel with the lithium bromide cooling unit and the air cooler, one end of the plate heat exchanger is connected with the reducing furnace bottom disc backwater main pipe, and the other end is connected with the circulating water pool.

[0032] Compared with the prior art, the plate heat exchanger has the advantages that:

[0033] In the utility model, the cooling water carrying waste heat in the reducing furnace bottom disc backwater main pipe is branched into multiple paths, and then the cooling water carrying waste heat on the branch is cooled by the refrigerator, thereby improving the cooling efficiency of the cooling water. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0035] Fig. 1 The structure schematic view of the embodiment of the present application is shown in the figure.

[0036] Fig. 2 The structure schematic view of the air cooler in the present application is shown in the figure.

[0037] Fig. 3 The cross-sectional structure schematic view of the pipe bundle in the present application is shown in the figure.

[0038] Reference signs:

[0039] 1, refrigerator; 11, lithium bromide cooling unit; 12, plate heat exchanger;

[0040] 13, air cooler; 131, support frame; 132, fan; 133, static pressure tank; 134, louver;

[0041] 135, pipe bundle; 1351, pipe body; 1352, wire mesh;

[0042] 1353, clamp; 13531, outer fixing cylinder; 13532, pressing strip; 13533, pressing screw;

[0043] 2, circulating water pool; 3, circulating pipe; 4, reducing furnace bottom disc backwater main pipe; 5, reducing furnace bottom disc water inlet main pipe. DETAILED DESCRIPTION

[0044] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is placed, or the orientation or positional relationship commonly understood by those skilled in the art, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0045] Since the existing lithium bromide unit cannot meet the actual demand for cooling water cooling treatment, the reduction furnace bottom plate is damaged by over-temperature, the temperature field in the furnace changes, and the product quality is affected.

[0046] As shown in Figs. 1-3 The utility model discloses a polycrystal silicon reduction furnace bottom plate cooling system, comprising: a refrigerator 1 and the circulating water pool 2 connected with the refrigerator 1.

[0047] The refrigerator 1 is connected with the reduction furnace bottom plate backwater main pipe 4, and the refrigerator 1 specifically comprises a lithium bromide cooling unit 11 and an air cooler 13.

[0048] The lithium bromide cooling unit 11 is connected with the reduction furnace bottom plate backwater main pipe 4 through a circulating pipe 3 at one end and connected with the circulating water pool 2 through the circulating pipe 3 at the other end. The lithium bromide cooling unit 11 is configured to cool part of the cooling water carrying waste heat, and the cooling water after cooling flows into the circulating water pool 2.

[0049] The air cooler 13 is connected with the lithium bromide cooling unit 11 in parallel. The air cooler 13 is connected with the reduction furnace bottom plate backwater main pipe 4 through the circulating pipe 3 at one end and connected with the circulating water pool 2 through the circulating pipe 3 at the other end. The air cooler 13 is configured to cool the remaining part of the cooling water carrying waste heat, and the cooling water after cooling flows into the circulating water pool 2.

[0050] The circulating water pool 2 is connected with the reduction furnace bottom plate water inlet main pipe 5 through the circulating pipe 3 to provide circulating cooling water for the reduction furnace bottom plate.

[0051] Specifically, as shown in Fig. 2 The air cooler 13 comprises a support frame 131, a fan 132, a static pressure tank 133, a pipe bundle 135 and a louver 134.

[0052] The support frame 131 is provided with a fan 132 and a static pressure tank 133, and the fan 132 is at least one. The static pressure tank 133 has a cavity penetrating from top to bottom, and the cavity is arranged with a pipe bundle 135 for carrying waste heat cooling water. A louver 134 is arranged opposite to the upper part of the pipe bundle 135, that is, the top of the static pressure tank 133. By controlling the opening degree of the louver 134, the amount of air entering the static pressure tank 133 is adjusted, so as to control the cooling effect of the air cooler 13.

[0053] The cooling water carrying waste heat in the reduction furnace bottom disc water return main pipe 4 enters the pipe bundle 135, the fan 132 is started, the flow of air is accelerated, the air generates upward convection, and sequentially passes through the static pressure tank 133 and the pipe bundle 135, so as to take away the heat on the pipe bundle 135, thereby cooling the cooling water carrying waste heat.

[0054] Further, in order to improve the stability of the air cooler 13, the air cooler 13 in the embodiment adopts a one standby one use structure.

[0055] More specifically, as shown in Fig. 3 The pipe bundle 135 in the embodiment includes a pipe body 1351 and a metal wire mesh 1352 fixed on the outer circle of the pipe body 1351 by a clamp 1353.

[0056] The pipe body 1351 is a metal pipe.

[0057] The metal wire mesh 1352 is in a wave shape along the circumferential direction of the pipe body 1351, and the wave trough is attached to the outer circle of the pipe body 1351. The metal wire mesh 1352 is smoothly transitioned at each part of the wave shape.

[0058] Preferably, in the embodiment, the metal wire mesh 1352 is made of stainless steel, and a graphene coating is coated on the surface of the metal wire mesh 1352 to improve the heat conduction efficiency of the metal wire mesh 1352. The wire diameter of the metal wire mesh 1352 is 0.1-0.35 mm, and the mesh diameter is 0.2-0.5 mm. The metal wire mesh 1352 is in a sheet structure and is fixed on the outer circle of the pipe body 1351 after being bent. The length of the metal wire mesh 1352 is consistent with the length of the pipe body 1351. The peak height of the wave shape of the metal wire mesh 1352 is 3-8 mm.

[0059] The clamp 1353 includes an outer fixed cylinder 13531, a pressing strip 13532, and a pressing screw 13533, and the like.

[0060] The outer fixed cylinder 13531 is sleeved on the wave peak of the metal wire mesh 1352, and the length thereof is consistent with the length of the pipe body 1351. The pressing strip 13532 is tightly pressed on the wave trough of the metal wire mesh 1352 and extends along the circumferential direction of the pipe body 1351 until it is attached to the inner wall of the outer fixed cylinder 13531, and the number thereof is multiple.

[0061] Further, the surface of the pressing strip 13532 that is attached to the metal mesh 1352 is an arc surface that is attached to the outer wall of the pipe body 1351, thereby increasing the contact area between the metal mesh 1352 and the pipe body 1351 and enhancing the heat dissipation effect.

[0062] The compression screw 13533 is threadedly connected to the outer fixing cylinder 13531, and one end of the compression screw 13533 penetrates through the outer fixing cylinder 13531 and is compressed on the pressing strip 13532. The compression screw 13533 is an internal hexagonal cylindrical head screw that is fastened to the pressing strip 13532 in the radial direction.

[0063] During use, part of the cooling water carrying waste heat in the reduction furnace bottom disc water return main pipe 4 is delivered to the lithium bromide cooling unit 11 for temperature reduction treatment, and the other part of the cooling water carrying waste heat is delivered to the air cooler 13 for temperature reduction treatment. The cooling water after the temperature reduction treatment is delivered to the circulating water pool 2 through the circulating pipe 3, and then is delivered to the reduction furnace bottom disc water inlet main pipe 5 through the water pump, thereby taking away the heat on the reduction furnace.

[0064] Further, in order to cope with extreme cases, the refrigerator 1 further comprises a plate heat exchanger 12.

[0065] Specifically, the plate heat exchanger 12 is connected in parallel with the lithium bromide cooling unit 11 and the air cooler 13. One end of the plate heat exchanger 12 is connected to the reduction furnace bottom disc water return main pipe 4 through the circulating pipe 3, and the other end of the plate heat exchanger 12 is connected to the circulating water pool 2 through the circulating pipe 3. The plate heat exchanger 12 is configured to perform temperature reduction treatment on part of the cooling water carrying waste heat, and the cooling water after the temperature reduction treatment flows to the circulating water pool 2.

[0066] Similarly, in order to improve the stability of the plate heat exchanger 12, the plate heat exchanger 12 in the embodiment also adopts a one-backup-one-use structure.

[0067] Finally, it should be noted that the above description is only preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or equivalently replace some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A polysilicon reduction furnace base cooling system characterized by, The application relates to a cooling device for a reduction furnace bottom. The cooling device comprises a refrigerating device connected with a reduction furnace bottom backwater main pipe; a circulating water pool connected with the refrigerating device at one end and connected with a reduction furnace bottom water inlet main pipe at the other end; wherein the refrigerating device comprises a lithium bromide cooling unit connected with the reduction furnace bottom backwater main pipe at one end and connected with the circulating water pool at the other end; and an air cooler connected with the lithium bromide cooling unit in parallel, wherein one end of the air cooler is connected with the reduction furnace bottom backwater main pipe and the other end is connected with the circulating water pool. The air cooler comprises a support frame, at least one fan arranged on the support frame, a static pressure box arranged on the support frame and having an up-down cavity, a tube bundle arranged in the cavity, and a louver arranged on the static pressure box.

2. The polysilicon reduction furnace bottom cooling system of claim 1, wherein, The tube bundle comprises a tube body and a metal screen, wherein the metal screen is in a wave shape along the circumferential direction of the tube body and is attached to the outer circle of the tube body at the wave trough, and the metal screen is fixed on the outer circle of the tube body by a clamp.

3. The polysilicon reduction furnace bottom cooling system of claim 2, wherein, The clamp comprises an outer fixing cylinder sleeved on the wave peak of the metal screen, a pressing strip pressed on the wave trough of the metal screen and extending along the circumferential direction of the tube body until being attached to the inner wall of the outer fixing cylinder, and a pressing screw threadedly connected with the outer fixing cylinder and pressed on the pressing strip at one end.

4. The polysilicon reduction furnace bottom cooling system of claim 3, wherein, The peak height of the wave shape of the metal screen is 3-8 mm.

5. The polysilicon reduction furnace bottom cooling system of claim 3, wherein, The metal screen is in a sheet structure and has a length consistent with that of the tube body.

6. The polysilicon reduction furnace bottom cooling system of claim 3, wherein, The metal screen is made of stainless steel and coated with a graphene coating.

7. The polysilicon reduction furnace bottom cooling system of claim 6, wherein, The wire diameter of the metal screen is 0.1-0.35 mm and the mesh diameter is 0.2-0.5 mm.

8. The polysilicon reduction furnace bottom cooling system of claim 6 or 7, wherein, The refrigerating device further comprises a plate heat exchanger.

9. The polysilicon reduction furnace bottom cooling system of claim 1, wherein, The plate heat exchanger is connected with the lithium bromide cooling unit and the air cooler in parallel, one end of the plate heat exchanger is connected with the reduction furnace bottom backwater main pipe, and the other end is connected with the circulating water pool.

10. The polysilicon reduction furnace bottom cooling system of claim 9, wherein, ​

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