TBC battery piece and ozone supply system

Abstract

The utility model discloses a TBC battery piece comprising an N-type silicon substrate, a first ozone oxidation layer and a first passivation layer are stacked on the front surface of the N-type silicon substrate from inside to outside, and a plurality of P-type areas and a plurality of N-type areas are alternately arranged on the back surface of the N-type silicon substrate. The P-type region comprises a tunneling oxide layer, a P + doping layer, a second ozone oxide layer and a second passivation layer which are sequentially stacked from inside to outside, and the N-type region comprises a tunneling oxide layer, an N + doping layer, a second ozone oxide layer and a second passivation layer which are sequentially stacked from inside to outside. The front surface and the back surface of the TBC battery piece are provided with the ozone oxidation layers and the oxygen oxidation layers which can isolate environmental influence, when an aluminum oxide film is prepared on the surface of a silicon wafer, the influence of temperature, humidity, cleanliness, in-process preparation time and the like on the silicon wafer is reduced, meanwhile, the oxygen oxidation layers further improve the passivation effect, and therefore the power generation efficiency of the battery piece is improved.

Description

Technical Field

[0001] This utility model relates to the field of solar cell technology, specifically to a TBC solar cell and an ozone supply system. Background Technology

[0002] TBC cells are a type of solar cell technology that combines passivated contact structure technology (Topcon structure) with back contact cell technology. TBC cells use N-type silicon wafers as substrates and poly doping as doping layers. A tunneling oxide layer is deposited in the electrode region to suppress minority carrier drift to the surface and transfer the grid lines to the back side. It has the advantages of BC cells without incident light shading and the excellent passivation effect of TOPCon. TBC cells have a significant improvement in conversion efficiency compared to the current mainstream cells (TOPCon and PERC structure cells).

[0003] During the manufacturing process of solar cells, an aluminum oxide film is prepared on the surface of the silicon wafer (ALD process). However, during the wet feeding to ALD process, the silicon wafer is easily affected by factors such as workshop temperature and humidity, cleanliness, and in-process time, which can lead to efficiency loss.

[0004] Currently, when TBC cells are texturized, the cells have a textured front and a P / N / isolation area on the back. Since the cells do not have an oxide layer for protection, the silicon wafers are easily affected by the environment after texturization (temperature and humidity not meeting standards, cleanliness not meeting standards, long manufacturing time), which can lead to contamination. Under these circumstances, performing ALD to form an aluminum oxide film will result in reduced passivation, thus causing efficiency loss. Utility Model Content

[0005] To solve at least one technical problem of the prior art, this utility model provides a TBC battery cell.

[0006] To achieve the aforementioned objectives, this utility model employs the following technical solution: a TBC solar cell comprising an N-type silicon substrate. The front side of the N-type silicon substrate has a first ozone oxide layer and a first passivation layer stacked from the inside out. The back side of the N-type silicon substrate has alternating P-type regions and N-type regions. Each P-type region includes a tunneling oxide layer and a P-type passivation layer stacked sequentially from the inside out. + The N-type region comprises a doped layer, a second ozone oxide layer, and a second passivation layer, wherein the N-type region includes a tunneling oxide layer and an N-type passivation layer stacked sequentially from the inside out. + Doped layer, second ozone oxidation layer and second passivation layer.

[0007] Furthermore, the P-type region also includes a first electrode, which passes through the second passivation layer and the second ozone oxidation layer and is connected to the P-type region. + Doped layer contact.

[0008] Further, the N-type region further comprises a second electrode, the second electrode penetrating through the second passivation layer and the second ozone oxidation layer and contacting the N + The doped layer is in contact.

[0009] Further, the first passivation layer is at least one of aluminum oxide, silicon nitride, and silicon oxynitride.

[0010] Further, the second passivation layer is at least one of aluminum oxide, silicon nitride, and silicon oxynitride.

[0011] Further, the tunneling oxide layer is a silicon oxide layer.

[0012] The utility model also provides a kind of ozone supply system, for providing ozone to drying groove, to form above-mentioned first ozone oxidation layer and second ozone oxidation layer on the surface of N-type silicon substrate.

[0013] Further, including ozone generator for producing ozone and water vapor box being connected with the ozone generator by pipeline, ozone is humidified into wet ozone in the water vapor box and is inhaled into the drying groove, valve is installed on the pipeline.

[0014] Further, control box is further provided between the ozone generator and the water vapor box.

[0015] Further, the ozone supply system further includes concentration detector for detecting the gas concentration in the drying groove, and the concentration detector is connected with alarm.

[0016] Compared with prior art, the utility model has the advantages that the utility model's TBC battery piece's front and back are all provided with ozone oxidation layer, and the ozone oxidation layer can isolate environmental influence, when preparing aluminum oxide film on the surface of silicon chip, reduce the influence of temperature and humidity, cleanliness, preparation time etc. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the cross section schematic view of the utility model TBC battery piece;

[0018] Figure 2 It is the connection schematic view of the utility model ozone supply system. DETAILED DESCRIPTION

[0019] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present application.

[0020] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0021] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0022] In addition, in addition to indicating the orientation or positional relationship, the above-mentioned part of the terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For the person skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0023] In addition, the terms "mount", "set", "provided with", "connected", "connected", "sleeved" should be broadly understood. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For the person skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0024] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0025] Embodiment one

[0026] With reference to Figure 1 The utility model provides a kind of TBC battery piece, including N-type silicon substrate 1, the first ozone oxidation layer 2 and the first passivation layer 3 are arranged from inside to outside in stack in the front of N-type silicon substrate 1, the back of N-type silicon substrate 1 is alternately provided with multiple P-type regions and multiple N-type regions, P-type region includes from inside to outside sequentially stacked setting through oxide layer 4, P + Doped layer 5, second ozone oxidation layer 6 and second passivation layer 7, N-type region includes from inside to outside sequentially stacked setting through oxide layer 4, N + Doped layer 8, second ozone oxidation layer 6 and second passivation layer 7.

[0027] The front and back of the utility model new TBC battery piece both have ozone oxidation layer, ozone oxidation layer can insulate environment influence, when preparing alumina film on the surface of silicon wafer, reduce temperature and humidity, cleanliness, in time and so on The influence of silicon wafer, while ozone oxidation layer also further increases passivation effect, to improve the power generation efficiency of battery piece.

[0028] Further, P-type region further includes first electrode 9, first electrode 9 passes through second passivation layer 7 and second ozone oxidation layer 6 and P + Doped layer 5 contact.

[0029] Further, N-type region further includes second electrode 10, second electrode 10 passes through second passivation layer 7 and second ozone oxidation layer 6 and N + Doped layer 8 contact.

[0030] Further, the first passivation layer 3 is at least one of aluminum oxide, silicon nitride, silicon oxynitride.

[0031] Further, the second passivation layer 7 is at least one of aluminum oxide, silicon nitride, silicon oxynitride.

[0032] Further, the through oxide layer 4 is silicon oxide layer.

[0033] Embodiment two

[0034] The utility model further provides an ozone supply system for providing ozone to drying groove to form the first ozone oxidation layer 2 and the second ozone oxidation layer 6 in embodiment one on the surface of N-type silicon substrate 1.

[0035] Further, the ozone generator 01 for producing ozone and the water vapor box 03 connected with the ozone generator 01 through a pipeline are included, the ozone is humidified into wet ozone in the water vapor box 03 and then is introduced into the drying groove 04, and a valve is installed on the pipeline.

[0036] As a preferred embodiment, one ozone generator 01 supplies ozone to two drying grooves 04, and the ozone entering the drying grooves 04 is subjected to uniform flow operation.

[0037] Further, the control box 02 is further arranged between the ozone generator and the water vapor box to realize remote control.

[0038] Further, the ozone supply system further includes a concentration detector for detecting the gas concentration in the drying groove 04, and the concentration detector is connected with the alarm.

[0039] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to the above-described embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the above-described embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A TBC cell, characterized in that, The application relates to a silicon substrate, comprising an N-type silicon substrate (1), the front surface of which is provided with a first ozone oxidation layer (2) and a first passivation layer (3) from inside to outside, the back surface of which is alternately provided with a plurality of P-type regions and a plurality of N-type regions, the P-type region comprising a through-oxidation layer (4), a P + doped layer (5), a second ozone oxidation layer (6) and a second passivation layer (7) from inside to outside, and the N-type region comprising a through-oxidation layer (4), an N + doped layer (8), a second ozone oxidation layer (6) and a second passivation layer (7) from inside to outside.

2. The TBC cell sheet of claim 1, wherein, The P-type region also comprises a first electrode (9) which, through the second passivation layer (7) and the second ozone-oxidized layer (6), is in contact with the P + doped layer (5) contacts.

3. The TBC cell sheet of claim 1, wherein, The N-type region also comprises a second electrode (10) which passes through the second passivation layer (7) and the second ozone-oxidized layer (6) to the N + The doped layer (8) is in contact.

4. The TBC cell sheet of claim 1, wherein, The first passivation layer (3) is at least one of aluminum oxide, silicon nitride, silicon oxynitride.

5. The TBC cell sheet of claim 1, wherein, The second passivation layer (7) is at least one of aluminum oxide, silicon nitride, silicon oxynitride.

6. The TBC cell sheet of claim 1, wherein, The tunneling oxide layer (4) is a silicon oxide layer.

7. An ozone supply system characterized by comprising: A system for providing ozone into a drying tank to form a first ozone oxidation layer (2) and a second ozone oxidation layer (6) on the surface of an N-type silicon substrate (1) as claimed in any one of claims 1 to 6.

8. The ozone supply system according to claim 7, characterized by The system comprises an ozone generator (01) for producing ozone and a water vapor box (03) connected with the ozone generator (01) by a pipeline, the ozone is humidified into wet ozone in the water vapor box (03) and then enters the drying tank (04), and a valve is installed on the pipeline.

9. The ozone supply system according to claim 8, characterized by A control box (02) is further arranged between the ozone generator and the water vapor box.

10. The ozone supply system according to claim 8, characterized by The ozone supply system further comprises a concentration detector for detecting the gas concentration in the drying tank (04), and the concentration detector is connected with an alarm.

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