Flower basket insertion piece limiting mechanism
The limiting mechanism of the basket insert limiting structure extends into the basket to restrict the displacement of the silicon wafer during insertion, solving the problems of silicon wafer impact and limiting component corrosion, and achieving efficient silicon wafer protection and cost reduction.
Patent Information
- Application Number
- CN202520276757.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-20
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-02-20
AI Technical Summary
The existing silicon wafer anti-collision structure of flower baskets is easily corroded by chemical liquids, resulting in frequent maintenance and replacement, and increasing human and material costs.
Design a basket insert limiting mechanism. The limiting component drives the structure to extend into the basket during silicon wafer insertion to restrict the silicon wafer displacement and prevent impact. After insertion, the wafer detaches from the basket to prevent corrosion.
It effectively prevents silicon wafer impact, reduces defect rate, reduces the risk of corrosion of limiting components, reduces maintenance and replacement frequency, and reduces costs.
Smart Images
Figure CN223957944U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of photovoltaic cell production, in particular to a wafer basket wafer inserting limiting mechanism. BACKGROUND
[0002] In the process of manufacturing silicon wafers, the cut silicon wafers need to be loaded into special wafer baskets in batches for subsequent processes. At present, the silicon wafers are usually inserted into the wafer baskets from the opening of the wafer baskets by manual or mechanical operation. In this process, the wafer insertion may not be in place or the wafer insertion may be too deep. The wafer insertion too deep is the most frequent case. The wafer insertion too deep will cause the silicon wafer to directly collide with the bottom rod of the wafer basket. Since the wafer basket bottom rod has a large hardness, the silicon wafer is easily damaged due to the collision after touching the wafer basket bottom rod, resulting in poor silicon wafer edges and high wafer breakage rate.
[0003] To solve the above problems, a rubber strip or the like structure with a buffer anti-collision function is usually arranged in the wafer basket to reduce the collision of the wafer basket bottom rod on the silicon wafer. However, this method still has the following problems: in the subsequent processing process of the silicon wafer, the wafer basket will carry the silicon wafer to soak in various chemical liquids. Many chemical liquids have strong corrosive properties and are easy to corrode the rubber strip, thereby affecting the subsequent wafer insertion anti-collision effect. The rubber strip needs to be replaced frequently, increasing the labor and material costs. CONTENT OF THE UTILITY MODEL
[0004] Therefore, the wafer basket wafer inserting limiting mechanism is provided to solve the problem that the silicon wafer anti-collision structure of the existing wafer basket is arranged in the wafer basket in a fixed manner, which is easy to be corroded by chemical liquids, has a high maintenance and replacement frequency, and has high labor and material costs.
[0005] The wafer basket wafer inserting limiting mechanism is arranged on a silicon wafer inserting machine and is used to extend into the wafer basket to limit the displacement of the silicon wafer in the wafer basket when the silicon wafer is inserted. The wafer basket includes an opposite entrance and a bottom. The entrance is used for entering the silicon wafer. The bottom has a bottom rod.
[0006] The wafer basket wafer inserting limiting mechanism includes a mounting bottom plate, a limiting piece, and a limiting piece driving structure.
[0007] The mounting bottom plate is arranged on the silicon wafer inserting machine.
[0008] The limiting piece driving structure is arranged on the mounting bottom plate. The limiting piece driving structure is used to drive the limiting piece to switch between a first position and a second position.
[0009] When the limiting piece switches to the first position, the limiting piece at least partially extends into the wafer basket. In the entering direction of the silicon wafer, the side of the limiting piece towards the entrance is located between the entrance and the bottom rod.
[0010] When the limiting member switches to the second position, the limiting member is located outside the flower basket, and in the conveying direction of the flower basket, the limiting member is located outside the conveying track of the flower basket.
[0011] In one of the embodiments, the limiting member driving structure comprises:
[0012] A rotating member is rotatably connected to the mounting base through a vertical rotating shaft, and in the direction in which the entrance of the flower basket points to the bottom, the rotating shaft is located on the side of the side rod of the flower basket away from the entrance, and the limiting member is arranged on the side of the rotating member away from the mounting base;
[0013] A driving assembly is arranged on the mounting base and used to drive the rotating member to rotate around the rotating shaft, so as to switch the limiting member between the first position and the second position.
[0014] In one of the embodiments, the driving assembly comprises a power member and a driving rod;
[0015] One end of the driving rod is connected to the power member and is driven by the power member to move in a first direction, and the first direction is parallel to the direction in which the entrance of the flower basket points to the bottom;
[0016] A sliding groove is arranged on the rotating member between the rotating shaft and the limiting member, the extending direction of the sliding groove is perpendicular to the direction in which the rotating shaft points to the limiting member, and the end of the driving rod away from the power member is movably arranged in the sliding groove,
[0017] In a second direction, the driving rod is located on the side of the rotating shaft close to the flower basket and has a spacing with the rotating shaft, and the second direction is perpendicular to the direction in which the entrance of the flower basket points to the bottom.
[0018] In one of the embodiments, the end of the driving rod away from the power member is provided with a pin, and the pin is movably arranged in the sliding groove.
[0019] In one of the embodiments, the perpendicular distance between the sliding groove and the rotating shaft is equal to the perpendicular distance between the driving rod and the rotating shaft.
[0020] In the extending direction of the sliding groove, one end of the sliding groove is flush with the rotating shaft, and the perpendicular distance between the other end of the sliding groove and the rotating shaft is greater than or equal to the perpendicular distance between the driving rod and the rotating shaft.
[0021] In one of the embodiments, when the rotating member rotates around the rotating shaft to the position where the sliding slot and the driving rod are parallel to each other, the limiting member is in the first position.
[0022] When the rotating member rotates around the rotating shaft to the position where the sliding slot and the driving rod are perpendicular to each other, the limiting member is in the second position.
[0023] In one of the embodiments, the distance between the limiting member and the rotating shaft is greater than the vertical distance between the rotating shaft and the first side of the flower basket and less than the vertical distance between the rotating shaft and the second side of the flower basket, wherein the first side is the side of the flower basket close to the mounting base plate, and the second side is the side of the flower basket away from the mounting base plate.
[0024] The vertical distance between the side of the limiting member for contacting the silicon wafer and the rotating shaft is greater than the vertical distance between the side of the bottom rod facing the entrance portion and the rotating shaft.
[0025] In one of the embodiments, the mounting base plate is arranged on the silicon wafer inserting machine and is adjustable in the first direction.
[0026] In one of the embodiments, when the limiting member switches to the first position, the limiting member is parallel to the bottom rod, and the length of the limiting member is less than or equal to the length of the bottom rod.
[0027] In one of the embodiments, the limiting member is arranged on the rotating member and is adjustable in height.
[0028] In one of the embodiments, a buffer pad is arranged on the limiting member, and the buffer pad faces the entrance portion when the limiting member switches to the first position.
[0029] In one of the embodiments, an anti-collision block is further fixedly arranged on the mounting base plate, the anti-collision block is located on the track of the rotating member rotating around the rotating shaft, and when the rotating member moves to abut against the anti-collision block, the limiting member is located in the first position.
[0030] Compared with the prior art, the utility model at least has the following beneficial effects:
[0031] The flower basket inserting limiting mechanism switches the position of the limiting member through the limiting member driving structure, so that the limiting member is a movable component, can be inserted into the flower basket to limit the silicon wafer during the inserting process, avoids the impact of the bottom rod of the flower basket on the silicon wafer, helps to ensure the product quality of the silicon wafer, reduces the defective rate, can be separated from the flower basket after the inserting process, avoids the interference on the conveying of the flower basket, avoids the corrosion risk of the limiting member, ensures the long-term effective use of the limiting member, reduces the maintenance and replacement frequency, and reduces the labor and material cost. BRIEF DESCRIPTION OF DRAWINGS
[0032] Figure 1 Fig. 1 is a structural schematic diagram of a silicon wafer inserting machine;
[0033] Figure 2 Fig. 2 is a structural schematic diagram of a flower basket;
[0034] Figure 3 Fig. 3 is a structural schematic diagram of the flower basket positioned in the silicon wafer inserting machine;
[0035] Figure 4 Fig. 4 is a structural schematic diagram of a flower basket wafer inserting limiting mechanism in one embodiment;
[0036] Figure 5 Fig. 5 is a structural schematic diagram of the flower basket wafer inserting limiting mechanism in another state in one embodiment;
[0037] Figure 6 Fig. 6 is a structural schematic diagram of a limiting member of the flower basket wafer inserting limiting mechanism positioned outside the flower basket in one embodiment;
[0038] Figure 7 Fig. 7 is a structural schematic diagram of the limiting member of the flower basket wafer inserting limiting mechanism extending into the inside of the flower basket in one embodiment;
[0039] Figure 8 Fig. 8 is a sectional view of the silicon wafer inserting machine in the state shown in Fig. 1; Figure 6
[0040] Fig. 9 is a sectional view of the silicon wafer inserting machine in the state shown in Fig. 3; Figure 9 Figure 7
[0041] The reference signs in the drawings of the specification include:
[0042] flower basket wafer inserting limiting mechanism 100, mounting bottom plate 101, strip-shaped mounting hole 1011, limiting member 102, limiting member driving structure 103, rotating member 1031, rotating shaft 1032, power member 1033, driving rod 1034, sliding groove 104, column pin 105, anti-collision block 106;
[0043] flower basket 200, end plate 201, side rod 202, bottom rod 203, inserting tooth 2031, inlet portion 204;
[0044] flower basket lifting mechanism 300, lifting plate 301;
[0045] flower basket clamping mechanism 400;
[0046] flower basket conveying mechanism 500. DETAILED DESCRIPTION
[0047] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.
[0048] It should be noted that the diagrams provided in the embodiments only schematically illustrate the basic concept of the present application.
[0049] The structure, proportion, size, etc. shown in the drawings of the present specification are only used to cooperate with the content disclosed in the specification, so that people skilled in the art can understand and read, and are not used to limit the implementation conditions of the present application. Any modification of structure, change of proportion relationship or adjustment of size, which does not affect the functions and purposes that can be achieved by the present application, should still fall within the scope of the technical content disclosed by the present application.
[0050] The orientations or positional relationships indicated by the terms such as "upper", "lower", "left", "right", "intermediate", "vertical", "horizontal", "horizontal", "inner", "outer", "radial", "circumferential" and the like as used in the present specification are based on the orientations or positional relationships shown in the drawings, and are only used to facilitate the description, and cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance.
[0051] As described in the background, at present, the impact of the bottom rod of the flower basket on the silicon wafer during the insertion of the silicon wafer is mainly buffered by setting a rubber strip in the flower basket, but the rubber strip on the flower basket is easily corroded by chemical liquid in subsequent processes, which not only affects the subsequent insertion anti-collision effect, but also needs to be replaced frequently, increasing the cost of manpower and resources.
[0052] In view of this, the flower basket insertion limiting mechanism provided in the embodiments of the present application is arranged on a silicon wafer insertion machine and used to extend into the flower basket 200 to limit the displacement of the silicon wafer entering the flower basket 200 during the insertion of the silicon wafer.
[0053] Specifically, referring to Figure 2 , the flower basket 200 generally includes an opposite inlet portion 204 and a bottom portion, the inlet portion 204 is used for entering the silicon wafer, and the bottom portion has a bottom rod 203. Based on the structure of the flower basket 200, the flower basket insertion limiting mechanism 100 is used to limit the displacement of the silicon wafer towards the bottom rod 203 of the flower basket 200 during the insertion, so as to prevent the impact of the silicon wafer on the bottom rod 203 of the flower basket 200 during the insertion.
[0054] Specifically, the flower basket wafer inserting limiting mechanism 100 provided by the embodiment of the utility model, including installation bottom plate 101, limiting piece 102 and limiting piece drive structure 103,
[0055] The installation bottom plate 101 is arranged on a wafer inserting machine;
[0056] The limiting piece drive structure 103 is arranged on the installation bottom plate 101, and the limiting piece drive structure 103 is used for driving the limiting piece 102 to switch between the first position and the second position;
[0057] When the limiting piece 102 switches to the first position, the limiting piece 102 at least partially extends into the flower basket 200, and in the entering direction of the wafer, the side of the limiting piece 102 towards the entrance portion 204 is located between the entrance portion 204 and the bottom rod 203;
[0058] When the limiting piece 102 switches to the second position, the limiting piece 102 is located outside the flower basket 200, and in the conveying direction of the flower basket 200, the limiting piece 102 is located outside the conveying track of the flower basket 200.
[0059] According to the flower basket wafer inserting limiting mechanism 100 provided by the embodiment of the utility model, when wafer insertion is needed, first, the empty flower basket 200 is positioned on the wafer inserting machine.
[0060] Then, the flower basket wafer inserting limiting mechanism 100 of the embodiment is started, specifically, the limiting piece 102 is driven by the limiting piece drive structure 103 to switch to the first position, so that the limiting piece 102 at least partially extends into the flower basket 200, and in the entering direction of the wafer, the side of the limiting piece 102 towards the entrance portion 204 of the flower basket 200 is located between the entrance portion 204 and the bottom rod 203, so that in the process of the wafer entering the entrance portion 204 of the flower basket 200 and moving towards the bottom rod 203 of the flower basket 200, the wafer will first contact the side of the limiting piece 102 towards the entrance portion 204 of the flower basket 200, and the limiting piece 102 provides a buffering effect for the wafer, thereby avoiding the wafer from being impacted by the bottom rod 203 of the flower basket 200, which helps to ensure the product quality of the wafer and reduce the defective rate.
[0061] After the wafer insertion of the flower basket 200 is completed, the limiting piece 102 is driven by the limiting piece drive structure 103 to switch to the second position, so that the limiting piece 102 is taken out from the inside of the flower basket 200, that is, the limiting piece 102 is separated from the flower basket 200, thereby avoiding the corrosion defect caused by the immersion of the limiting piece 102 in the chemical liquid along with the flower basket 200, ensuring the long-term effective use of the limiting piece 102, and at this time, the limiting piece 102 is located outside the conveying track of the flower basket 200 in the conveying direction of the flower basket 200, so that the limiting piece 102 does not interfere with the conveying of the flower basket 200, ensuring the smooth operation of the system.
[0062] Based on the above, the wafer basket wafer inserting limiting mechanism 100 switches the position of the limiting piece 102 through the limiting piece driving structure 103, so that the limiting piece 102 is a movable component, which can extend into the wafer basket 200 to limit the silicon wafer when the silicon wafer is inserted, avoid the silicon wafer from being impacted by the bottom rod 203 of the wafer basket 200, help to ensure the product quality of the silicon wafer and reduce the defective rate, and can be separated from the wafer basket 200 after the wafer inserting is completed, avoid interference to the conveying of the wafer basket 200, and also avoid the corrosion risk of the limiting piece 102, ensure long-term effective use of the limiting piece 102, reduce the maintenance and replacement frequency, and reduce the labor and material cost.
[0063] The wafer basket wafer inserting limiting mechanism provided by the embodiment of the utility model will be described in detail below with reference to the drawings.
[0064] It should be noted that the wafer basket wafer inserting limiting mechanism provided by the embodiment is installed on a silicon wafer inserting machine and is used to extend into the wafer basket 200 to limit the displacement of the silicon wafer entering the wafer basket 200 when the silicon wafer is inserted, so the structure and function of the wafer basket wafer inserting limiting mechanism need to be described in combination with the silicon wafer inserting machine and the wafer basket 200, and therefore the structure of the silicon wafer inserting machine and the wafer basket 200 will be described exemplarily below.
[0065] The wafer basket 200 is used to hold silicon wafers as a carrier and is used to hold the silicon wafers into corresponding equipment in some processes to process the silicon wafers in batches.
[0066] For example, referring to Figure 2 which exemplarily shows a wafer basket 200, the wafer basket 200 includes end plates 201 at both ends and a plurality of side rods 202 and a bottom rod 203 connected between the two end plates 201, and the side rods 202 and the bottom rod 203 are provided with a plurality of teeth 2031 on the side facing the inside of the wafer basket 200. In this example, the side rods 202 have four, the bottom rod 203 has two, and the side rods 202 are distributed on both sides of the width direction between the two end plates 201 in a group of two, and the two bottom rods 203 are distributed at the bottom between the two end plates 201, thereby forming a wafer inserting space between the two end plates 201 for inserting silicon wafers.
[0067] Based on the above structure of the wafer basket 200, the side of the wafer basket 200 with the bottom rod 203 is the bottom of the wafer basket 200, and the opening side opposite to the two bottom rods 203 on the wafer basket 200 is the top of the wafer basket 200, and the top opening of the wafer basket 200 can be regarded as the inlet portion 204 of the wafer basket 200 for taking and placing silicon wafers. When the silicon wafer enters the wafer basket 200, it moves from the inlet portion 204 to the bottom rod 203 of the wafer basket 200.
[0068] The silicon wafer inserting machine is used to realize automatic wafer inserting of the wafer basket 200, which usually includes a wafer basket lifting mechanism 300, a wafer basket clamping mechanism 400 and a wafer basket conveying mechanism 500.
[0069] The flower basket conveying mechanism 500 is used to convey the empty flower basket 200 to the wafer inserting machine and convey the full flower basket 200 away. For example, referring to Figure 1 , the flower basket conveying mechanism 500 can be a conveying belt structure arranged at the lower part of the wafer inserting machine, and the conveying direction is the left-right direction.
[0070] The flower basket clamping mechanism 400 is used to position the flower basket 200 on the wafer inserting machine. For example, referring to Figure 1 , the flower basket clamping mechanism 400 includes a guide rail and a clamping plate arranged on the guide rail and can be lifted.
[0071] The flower basket lifting mechanism 300 adopts an existing lifting module and is used to drive the flower basket 200 to lift. For example, the lifting plate 301 is arranged on the flower basket lifting mechanism 300, and the flower basket conveying mechanism 500 and the flower basket clamping mechanism 400 are arranged on the lifting plate 301. When the flower basket 200 is positioned on the wafer inserting machine by the flower basket clamping mechanism 400, the flower basket lifting mechanism 300 drives the lifting plate 301 to lift, so that the flower basket 200 is lifted by the flower basket conveying mechanism 500 and the flower basket clamping mechanism 400.
[0072] When the wafer inserting is performed, referring to Figure 3 , the flower basket 200 is positioned vertically on the wafer inserting machine by the flower basket clamping mechanism 400 and the flower basket conveying mechanism 500, the inlet part 204 of the flower basket 200 faces the right side, and the bottom of the flower basket 200 faces the left side. It should be noted that, for the convenience of description, the horizontal direction parallel to the inlet part 204 of the flower basket 200 and pointing to the bottom direction is defined as the first direction, that is, the X direction shown in Figure 8 , that is, the left-right direction, and the horizontal direction perpendicular to the inlet part 204 of the flower basket 200 and pointing to the bottom direction is defined as the second direction, that is, the Y direction shown in Figure 8 , that is, the front-rear direction.
[0073] Then, the wafers are conveyed to the inlet part 204 of the flower basket 200 by the conveying belt one by one, so that the wafers are inserted into the flower basket 200, and in this process, the flower basket lifting mechanism 300 drives the flower basket 200 to stepwise ascend, that is, the flower basket 200 ascends one step after inserting a wafer, until the flower basket 200 is full of wafers.
[0074] After the wafer inserting is completed, the flower basket lifting mechanism 300 drives the flower basket 200 to descend to the bottom, then the flower basket clamping mechanism 400 releases the flower basket 200, the flower basket conveying mechanism 500 drives the flower basket 200 to convey to the left side, and then the next flower basket 200 is conveyed to the wafer inserting station to repeat the work.
[0075] Referring to Figure 4The flower basket inserting piece limiting mechanism of at least one embodiment of the utility model, including: installation bottom plate 101, limiting piece 102 and limiting piece drive structure 103.
[0076] Among them, installation bottom plate 101 is the main body support structure of flower basket inserting piece limiting mechanism 100, for providing installation support for limiting piece 102 and limiting piece drive structure 103.
[0077] For example, see Figure 4 In this embodiment, installation bottom plate 101 is a plate, which is installed on the silicon wafer inserting piece machine, specifically, see Figure 1 Installation bottom plate 101 is installed on the lifting plate 301 of the silicon wafer inserting piece machine by bolts, and since installation bottom plate 101 is arranged on the lifting plate 301, the flower basket inserting piece limiting mechanism 100 can be lifted synchronously with the flower basket 200, ensuring that the flower basket inserting piece limiting mechanism 100 always extends into the interior of the flower basket 200 during the lifting and inserting process of the flower basket 200, which not only ensures the buffering and anti-collision effect during the inserting of the silicon wafer, but also avoids the structural interference caused by the relative displacement between the flower basket inserting piece limiting mechanism 100 and the flower basket 200, ensuring the stable operation of the system.
[0078] And, see Figure 8 And Figure 9 In this embodiment, the position of installation bottom plate 101 satisfies: when the flower basket 200 is positioned on the silicon wafer inserting piece machine, in the second direction, installation bottom plate 101 is located on the side of the flower basket 200 close to the lifting plate 301, that is, there is a gap between installation bottom plate 101 and the flower basket 200, so that the interference between installation bottom plate 101 and the transportation of the flower basket 200 can be avoided.
[0079] In this embodiment, limiting piece drive structure 103 is arranged on installation bottom plate 101, for driving limiting piece 102 to switch between the first position and the second position.
[0080] Specifically, see Figure 4 Limiting piece drive structure 103 includes a rotating piece 1031 and a driving assembly for driving the rotating piece 1031 to rotate. Among them, the rotating piece 1031 can be a plate, one end of which is rotatably installed on installation bottom plate 101 through a vertically arranged rotating shaft 1032, and the other end is a free end. And, see Figure 8The axis of rotation of the rotating component 1031 is located on the side of the side rod 202 of the basket 200 away from the entrance 204; that is, the rotating shaft 1032 is located on the left side of the side rod 202 of the basket 200. This arrangement allows the rotating component 1031 to swing from the left side of the side rod 202, i.e., the bottom of the basket 200, towards the basket 200 when rotating around the rotating shaft 1032. This provides a basis for the limiting component 102 to extend into the basket 200 from the bottom to buffer and limit the silicon wafer. It should be noted that, in the context of this embodiment, the positional relationship between each component and the basket 200 or its structural components refers to the positional relationship between each component and the basket 200 or its structural components, provided that the basket 200 is locked and positioned on the silicon wafer insertion machine.
[0081] See Figure 4 The drive assembly includes a power component 1033 and a drive rod 1034. The power component 1033 is a horizontal drive component with horizontal driving function; for example, it can be a cylinder, a linear motor, etc., and in this embodiment, a cylinder is preferred. See also... Figure 8 The cylinder is fixedly connected to the side of the mounting base plate 101 away from the lifting plate 301, and the extension and retraction direction of the cylinder piston rod is the first direction, that is, the left and right direction.
[0082] In this embodiment, the drive rod 1034 is connected between the power component 1033 and the rotating component 1031 to transmit the power of the power component 1033 to the rotating component 1031, thereby driving the rotating component 1031 to rotate.
[0083] For details, see Figure 4 One end of the drive rod 1034 is coaxially connected to the cylinder piston rod, allowing it to move in the first direction, i.e., the left-right direction, under the drive of the cylinder. See also... Figure 8 The drive rod 1034 is located on the side of the rotating shaft 1032 near the flower basket 200. That is to say, in the second direction, the drive rod 1034 is located between the rotating shaft 1032 and the flower basket 200 and has a gap with the rotating shaft 1032 so that the drive rod 1034 applies force to the rotating member 1031.
[0084] In this embodiment, a groove 104 is provided on the rotating member 1031 at a position between the rotating shaft 1032 and the limiting member 102. The extending direction of the groove 104 is perpendicular to the direction in which the rotating shaft 1032 points towards the limiting member 102. One end of the drive rod 1034 away from the power member 1033 is movably disposed in the groove 104. The other end of the drive rod 1034 is movably connected to the rotating member 1031, for example, see... Figure 4The rotating member 1031 is provided with an extension part which is perpendicular to the direction in which the rotating shaft 1032 points to the limiting member 102, and the extension part is provided with a sliding groove 104 which extends along the extension direction of the extension part. The end of the driving rod 1034 which is away from the power member 1033 is provided with a pin 105 which is movably arranged in the sliding groove 104. In this way, during the horizontal movement of the driving rod 1034 driven by the power member 1033, the pin 105 can drive the rotating member 1031 to rotate around the rotating shaft 1032, and the pin 105 can move in the sliding groove 104 to avoid structural interference.
[0085] More specifically, referring to Figure 4 In the embodiment, in the direction in which the rotating shaft 1032 points to the limiting member 102, the sliding groove 104 is located between the rotating shaft 1032 and the limiting member 102, so that the pin 105 in the sliding groove 104 is located between the rotating shaft 1032 and the limiting member 102, so that the pin 105 has a distance from the rotating shaft 1032 and has a torque to drive the rotating member 1031 to rotate around the rotating shaft 1032, and can ensure that the pin 105 is located within the limiting member 102 to avoid structural interference between the driving assembly and the limiting member 102.
[0086] Further, referring to Figure 9 In the embodiment, the perpendicular distance between the sliding groove 104 and the rotating shaft 1032 is equal to the perpendicular distance between the driving rod 1034 and the rotating shaft 1032, that is, the rotating radius of the sliding groove 104 around the rotating shaft 1032 is equal to the perpendicular distance between the driving rod 1034 and the rotating shaft 1032. In this way, the sliding groove 104 can rotate around the rotating shaft 1032 with the rotating member 1031 in the position perpendicular to the driving rod 1034 to the position in the same moving direction of the driving rod 1034, so as to realize the ninety-degree swing of the rotating member 1031. It should be noted that in the embodiment, the distance between the sliding groove 104 and the rotating shaft 1032 can be understood as the perpendicular distance between the center line of the sliding groove 104 and the center line of the rotating shaft 1032, and the distance between the driving rod 1034 and the rotating shaft 1032 can be understood as the perpendicular distance between the center line of the driving rod 1034 and the center line of the rotating shaft 1032.
[0087] Further, referring to Figure 8 In the embodiment, in the extension direction of the sliding groove 104, one end of the sliding groove 104 is flush with the rotating shaft 1032, and the perpendicular distance between the other end of the sliding groove 104 and the rotating shaft 1032 is greater than or equal to the distance between the driving rod 1034 and the rotating shaft 1032. In this way, referring to Figure 8When the chute 104 is perpendicular to the driving rod 1034, the outer end of the chute 104 can intersect the moving direction of the driving rod 1034, so that the pin 105 at the end of the driving rod 1034 can extend into the chute 104 to drive the rotating member 1031 to rotate by the pin 105; since the inner end of the chute 104 is flush with the rotating shaft 1032, see Figure 9 The length of the chute 104 is long enough to ensure that the pin 105 can drive the rotating member 1031 to swing 90 degrees.
[0088] Similarly, in the embodiment, to ensure that the power member 1033 and the driving rod 1034 do not interfere with the flower basket 200 during transportation, in the second direction, the power member 1033 and the driving rod 1034 are located on the side of the flower basket 200 close to the lifting plate 301, that is, the power member 1033 and the driving rod 1034 have a gap with the flower basket 200, so that interference between the power member 1033 and the driving rod 1034 and the transportation of the flower basket 200 can be avoided.
[0089] The principle of the limiting member driving structure 103 based on the above structure design is as follows:
[0090] Referring to Figure 4 , Figure 6 and Figure 8 , in the initial state, the rotating member 1031 is parallel to the first direction and located outside the transportation track of the flower basket 200, at this time, the chute 104 is perpendicular to the driving rod 1034, the pin 105 is located at the outer end of the chute 104, and the piston rod of the cylinder is in the extended state.
[0091] Referring to Figure 5 , Figure 7 and Figure 9 , when the insert piece is needed, the cylinder is started, the piston rod is retracted, the driving rod 1034 is driven to move to the right, so that the pin 105 applies a counterclockwise driving force to the rotating member 1031, the rotating member 1031 rotates counterclockwise around the rotating shaft 1032, until the rotating member 1031 rotates 90 degrees, at this time, the chute 104 is parallel to the moving direction of the driving rod 1034. During this process, the pin 105 moves relatively along the chute 104 to the inner end of the chute 104 to avoid structural interference.
[0092] Referring to Figure 8 , after the insertion of the insert piece is completed, the rotating member 1031 is reset, the cylinder is started, the piston rod is extended, the driving rod 1034 is driven to move to the left, so that the pin 105 applies a clockwise driving force to the rotating member 1031, the rotating member 1031 rotates clockwise around the rotating shaft 1032, until the rotating member 1031 rotates 90 degrees, at this time, the chute 104 is perpendicular to the driving rod 1034. During this process, the pin 105 moves relatively along the chute 104 to the outer end of the chute 104 to avoid structural interference.
[0093] Further, in the embodiment, the anti-collision block 106 is fixedly arranged on the mounting base plate 101 and located on the track of the rotating member 1031 rotating around the rotating shaft 1032, and when the rotating member 1031 moves to abut against the anti-collision block 106, the limiting member 102 is located at the first position. Specifically, referring to Figure 5 and Figure 9 , the anti-collision block 106 is arranged on the side of the mounting base plate 101 away from the lifting plate 301 and located on the track of the rotating member 1031 rotating counterclockwise around the rotating shaft 1032, so that when the rotating member 1031 rotates counterclockwise to a specified position, it is limited by the anti-collision block 106, and at this time, the limiting member 102 is just located at the first position, ensuring that the limiting member 102 is accurately positioned in the flower basket 200, improving its reliability.
[0094] Referring to Figure 4 , in the embodiment, the limiting member 102 is arranged at the end of the rotating member 1031 away from the mounting base plate 101, so that it can swing with the rotating member 1031 around the rotating shaft 1032, realizing the switching between the first position and the second position.
[0095] Specifically, referring to Figure 5 and Figure 9 , when the rotating member 1031 rotates around the rotating shaft 1032 to a position where the sliding groove 104 and the driving rod 1034 are parallel to each other, the limiting member 102 is at the first position, at this time, the limiting member 102 at least partially extends into the flower basket 200, providing a buffer for the silicon wafer. Referring to Figure 4 and Figure 8 , when the rotating member 1031 rotates around the rotating shaft 1032 to a position where the sliding groove 104 and the driving rod 1034 are perpendicular to each other, the limiting member 102 is at the second position, at this time, the limiting member 102 is located outside the conveying track of the flower basket 200, for example, to the left of the conveying direction of the flower basket 200, then the limiting member 102 is located in the area outside the projection of the flower basket 200 to the left.
[0096] More specifically, referring to Figure 9 , in the embodiment, the first vertical distance between the side of the limiting member 102 for contacting the silicon wafer and the rotating shaft 1032, the second vertical distance between the side of the bottom rod 203 facing the inlet portion 204 and the rotating shaft 1032, and the third vertical distance between the side of the spline 2031 on the bottom rod 203 close to the inlet portion 204 and the rotating shaft 1032, wherein the first vertical distance is greater than the second vertical distance and less than the third vertical distance. Referring to Figure 9, the first vertical distance is greater than the second vertical distance, which means that when the rotating member 1031 is rotated to be perpendicular to the driving rod 1034 and the limiting member 102 is in the first position, the contact side of the limiting member 102 is closer to the entrance portion 204 of the flower basket 200 than the bottom rod 203; and the first vertical distance is less than the third vertical distance, which means that when the limiting member 102 is in the first position, the contact side of the limiting member 102 is closer to the bottom of the flower basket 200 than the outside of the pinion 2031. Thus, referring to Figure 9 When the limiting member 102 is in the first position, in the first direction, the contact side of the limiting member 102 is located between the bottom rod 203 and the outside of the pinion 2031, so that when the wafer is inserted, it can not only ensure that the wafer is inserted into the pinion 2031 of the bottom rod 203 to ensure the stability of the wafer insertion, but also ensure that the limiting member 102 buffers and limits the wafer on the front side of the bottom rod 203 to prevent the wafer from hitting the bottom rod 203.
[0097] Further, in the embodiment, the depth of the limiting member 102 extending into the flower basket 200 is adjustable, so as to ensure the most suitable wafer insertion depth of the flower basket 200, adapt to the wafer insertion of different specifications, and improve the versatility.
[0098] For example, the mounting plate 101 is arranged on the lifting plate 301 in the first direction, so that by adjusting the position of the mounting plate 101 in the first direction, the left and right positions of the limiting mechanism as a whole can be adjusted, and then the depth of the limiting member 102 extending into the flower basket 200 can be adjusted. For example, in the example of Figure 9 When the mounting plate 101 is adjusted to the left side, the depth of the limiting member 102 extending into the flower basket 200 is reduced, and vice versa.
[0099] Referring to Figure 3 In a specific example, the mounting plate 101 is provided with a first direction extending strip-shaped mounting hole 1011, the number of strip-shaped mounting holes 1011 is two, and the strip-shaped mounting hole 1011 is used for fixing the bolt through the lifting plate 301. In this way, when it is necessary to adjust the horizontal position of the mounting plate 101, the bolt is loosened, then the strip-shaped mounting hole 1011 of the mounting plate 101 is moved horizontally along the bolt, and after moving to the position, the bolt is tightened.
[0100] Further, in the embodiment, the vertical distance between the limiting member 102 and the rotating shaft 1032 is greater than the vertical distance between the rotating shaft 1032 and the first side of the flower basket 200 and less than the vertical distance between the rotating shaft 1032 and the second side of the flower basket 200, wherein the first side is the side of the flower basket 200 close to the mounting plate 101, and the second side is the side of the flower basket 200 away from the mounting plate 101. For example, Figure 9The distance between the limiting member 102 and the rotating shaft 1032 is slightly greater than the vertical distance between the rotating shaft 1032 and the first side of the flower basket 200. For example, referring to Figure 9 The distance between the limiting member 102 and the rotating shaft 1032 being greater than the vertical distance between the rotating shaft 1032 and the first side of the flower basket 200 means that the radius of rotation of the limiting member 102 around the rotating shaft 1032 is greater than the distance between the first side of the flower basket 200 and the rotating shaft 1032, so that when the limiting member 102 rotates around the rotating shaft 1032, the limiting member 102 can at least move to a position within the first side of the flower basket 200. The distance between the limiting member 102 and the rotating shaft 1032 being less than the vertical distance between the rotating shaft 1032 and the second side of the flower basket 200 means that the radius of rotation of the limiting member 102 around the rotating shaft 1032 is less than the distance between the second side of the flower basket 200 and the rotating shaft 1032, so that when the limiting member 102 rotates around the rotating shaft 1032, the limiting member 102 will not move to a position outside the second side of the flower basket 200. Thus, when the limiting member 102 rotates around the rotating shaft 1032, the limiting member 102 can at least move to a position within the range of the tab space of the flower basket 200 in the second direction, ensuring that the limiting member 102 can extend into the flower basket 200 to buffer and limit the silicon wafer.
[0101] Further, in the present embodiment, the first side of the flower basket 200 and the rotating shaft 1032 have a fourth vertical distance, and the fourth vertical distance is greater than the first vertical distance. Thus, referring to Figure 8 When the limiting member 102 is in the second position, the contact side of the limiting member 102 and the first side of the flower basket 200 have a gap, so that the limiting member 102 is located outside the conveying track of the flower basket 200, avoiding interference of the limiting member 102 with the conveying of the flower basket 200 when the limiting member 102 is in the second position. Correspondingly, referring to Figure 8 When the limiting member 102 is in the second position, the rotating member 1031 is located on the side of the flower basket 200 close to the lifting plate 301 in the second direction, i.e., the rotating member 1031 and the flower basket 200 have a gap, so that interference of the rotating member 1031 with the conveying of the flower basket 200 can be avoided.
[0102] In the present embodiment, the limiting member 102 is specifically a long strip-shaped structural member, such as a profile, which is arranged on the side surface of the rotating member 1031 away from the lifting plate 301, and the limiting member 102 and the bottom rod 203 of the flower basket 200 are parallel to each other. For example, referring to Figure 3 , Figure 6 and Figure 7, corresponding to the vertical positioning of the flower basket 200 on the silicon wafer patch machine, the bottom rod 203 is vertically arranged, and then the limiting piece 102 is also vertically arranged. Moreover, the length of the limiting piece 102 is equal to or slightly less than the length of the bottom rod 203 (i.e. the distance between the two end plates 201), so that the limiting piece 102 can extend into the interior of the flower basket 200, and after the limiting piece 102 extends into the flower basket 200, it can basically cover the bottom rod 203 in the length direction, so that the coverage of the limiting piece 102 is larger and the overall buffering is better.
[0103] Further, in the embodiment, the limiting piece 102 is adjustably arranged on the rotating piece 1031. For example, the limiting piece 102 is detachably fixedly connected with the rotating piece 1031 through a bolt fastener, and the limiting piece 102 is provided with a mounting groove extending along the length direction thereof. For example, corresponding to the above-mentioned embodiment that the limiting piece 102 is a profile, the mounting groove can be a slot of the profile. In this way, the height of the limiting piece 102 can be adjusted by adjusting the position of the bolt fastener in the mounting groove, so that the limiting piece 102 can match the flower basket 200 of different positioning heights or different size specifications, and has stronger universality.
[0104] Further, in the embodiment, the limiting piece 102 is provided with a buffer pad, and the buffer pad faces the entrance portion 204 when the limiting piece 102 is switched to the first position. For example, referring to Figure 8 , the buffer pad is arranged on the side of the limiting piece 102 away from the rotating piece 1031, and when the limiting piece 102 extends into the flower basket 200, the buffer pad faces the entrance portion 204 of the flower basket 200, so that the buffer pad can provide better buffering effect for the silicon wafer inserted through the entrance portion 204, and reduce the impact effect on the silicon wafer. Specifically, the buffer pad can be made of rubber or silicone.
[0105] The use principle of the utility model is:
[0106] After the empty flower basket 200 is conveyed to the silicon wafer patch machine and positioned through the flower basket clamping mechanism 400, the cylinder is started, the cylinder drives the piston rod to retract, thereby driving the driving rod 1034 to move to the right, the pin 105 at the end of the driving rod 1034 applies a counterclockwise driving force to the rotating piece 1031, drives the limiting piece 102 to swing counterclockwise around the rotating shaft 1032, and the pin 105 slides in the sliding groove 104 to avoid structural interference. When the rotating piece 1031 is rotated to abut against the anti-collision block 106, the cylinder stops acting, at this time the limiting piece 102 extends into the interior of the flower basket 200, and then the silicon wafer patching is started.
[0107] After the silicon wafer inserting is finished, the cylinder drives the piston rod to extend, thus driving the rod 1034 to move leftwards, the pin 105 at the end of the rod 1034 applies clockwise driving force to the rotating piece 1031, thus driving the limiting piece 102 to swing clockwise around the rotating shaft 1032, and the pin 105 slides in the sliding groove 104 to avoid structural interference, when the rotating piece 1031 rotates to be parallel to the mounting bottom plate 101, the cylinder stops working, at this time, the limiting piece 102 is located outside the conveying track of the flower basket 200, then the flower basket 200 is conveyed away.
[0108] The technical features of the above embodiments can be combined in any manner. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combinations of the technical features do not contradict, they should be considered as the scope of the present disclosure.
[0109] The above embodiments only express several implementation manners of the present application, the description is relatively specific and detailed, however, it should not be understood as the limitation of the scope of the utility model patent. It should be pointed out that, for the ordinary skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.
Claims
1. A flower basket insert limiting mechanism, characterized by, The application discloses a wafer inserting position limiting mechanism which is arranged on a wafer inserting machine and is used for extending into a wafer basket (200) to limit the displacement of a wafer entering the wafer basket (200) during wafer inserting. The wafer inserting position limiting mechanism comprises a mounting bottom plate (101), a limiting piece (102) and a limiting piece driving structure (103). The mounting bottom plate (101) is arranged on the wafer inserting machine. The limiting piece driving structure (103) is arranged on the mounting bottom plate (101) and is used for driving the limiting piece (102) to switch between a first position and a second position. When the limiting piece (102) switches to the first position, the limiting piece (102) at least partially extends into the wafer basket (200) and, in the entering direction of the wafer, a side of the limiting piece (102) towards the entrance portion (204) is located between the entrance portion (204) and the bottom rod (203). When the limiting piece (102) switches to the second position, the limiting piece (102) is located outside the wafer basket (200) and, in the conveying direction of the wafer basket (200), the limiting piece (102) is located outside the conveying track of the wafer basket (200).
2. The flower basket insert limiting mechanism of claim 1, wherein, The limiting piece driving structure (103) comprises: a rotating piece (1031) which is rotatably connected to the mounting bottom plate (101) through a vertically arranged rotating shaft (1032) and, in the direction in which the entrance portion (204) of the wafer basket (200) points to the bottom portion, the rotating shaft (1032) is located on the side of the side rod (202) of the wafer basket (200) away from the entrance portion (204), and the limiting piece (102) is arranged on the side of the rotating piece (1031) away from the mounting bottom plate (101); a driving assembly which is arranged on the mounting bottom plate (101) and is used for driving the rotating piece (1031) to rotate around the rotating shaft (1032) so as to switch the limiting piece (102) between the first position and the second position.
3. The flower basket insert limiting mechanism of claim 2, wherein, The driving assembly comprises a power piece (1033) and a driving rod (1034). One end of the driving rod (1034) is connected to the power piece (1033) and is driven by the power piece (1033) to move in a first direction which is parallel to the direction in which the entrance portion (204) of the wafer basket (200) points to the bottom portion. A sliding groove (104) is arranged on the rotating piece (1031) at a position between the rotating shaft (1032) and the limiting piece (102), the extending direction of the sliding groove (104) is perpendicular to the direction in which the rotating shaft (1032) points to the limiting piece (102), and the end of the driving rod (1034) away from the power piece (1033) is movably arranged in the sliding groove (104). In the second direction, the driving rod (1034) is located on the side of the rotating shaft (1032) close to the flower basket (200) with a distance between the driving rod (1034) and the rotating shaft (1032), and the second direction is perpendicular to the direction in which the inlet portion (204) of the flower basket (200) points to the bottom.
4. The flower basket insert sheet limiting mechanism according to claim 3, wherein, The end of the driving rod (1034) away from the power element (1033) is provided with a pin (105), and the pin (105) is movably arranged in the sliding groove (104).
5. The flower basket insert limiting mechanism of claim 4, wherein, The vertical distance between the sliding groove (104) and the rotating shaft (1032) is equal to the vertical distance between the driving rod (1034) and the rotating shaft (1032). In the extension direction of the sliding groove (104), one end of the sliding groove (104) is flush with the rotating shaft (1032), and the vertical distance between the other end of the sliding groove (104) and the rotating shaft (1032) is greater than or equal to the vertical distance between the driving rod (1034) and the rotating shaft (1032).
6. The flower basket insert sheet limiting mechanism according to claim 5, wherein, When the rotating element (1031) rotates around the rotating shaft (1032) to the position where the sliding groove (104) and the driving rod (1034) are parallel to each other, the limiting element (102) is in the first position. When the rotating element (1031) rotates around the rotating shaft (1032) to the position where the sliding groove (104) and the driving rod (1034) are perpendicular to each other, the limiting element (102) is in the second position.
7. The flower basket insert limiting mechanism of claim 5, wherein, The distance between the limiting element (102) and the rotating shaft (1032) is greater than the vertical distance between the rotating shaft (1032) and the first side of the flower basket (200) and less than the vertical distance between the rotating shaft (1032) and the second side of the flower basket (200), wherein the first side is the side of the flower basket (200) close to the mounting bottom plate (101), and the second side is the side of the flower basket (200) away from the mounting bottom plate (101). The vertical distance between the side of the limiting element (102) for contacting the silicon wafer and the rotating shaft (1032) is greater than the vertical distance between the side of the bottom rod (203) facing the inlet portion (204) and the rotating shaft (1032).
8. The flower basket insert limiting mechanism of claim 7, wherein, The mounting bottom plate (101) is adjustably arranged on the silicon wafer insert sheet machine in the first direction.
9. The flower basket insert limiting mechanism of claim 8, wherein, When the limiting element switches to the first position, the limiting element (102) is parallel to the bottom rod (203), and the length of the limiting element (102) is less than or equal to the length of the bottom rod (203).
10. The flower basket insert limiting mechanism of claim 9, wherein, The limiting element (102) is adjustably arranged on the rotating element (1031) in height; Preferably, a buffer pad is arranged on the limiting element (102), and the buffer pad faces the inlet portion (204) when the limiting element (102) switches to the first position. Preferably, an anti-collision block (106) is further fixed on the mounting base plate (101) and located on a track of the rotating member (1031) rotating around the rotating shaft (1032), and when the rotating member (1031) moves to abut against the anti-collision block (106), the limiting member (102) is located at the first position.