Cleaning head
By designing the guide section and exhaust channel of the cleaning head, the problem of inaccurate liquid spraying was solved, ensuring that the liquid is sprayed only onto the crystal edge that needs cleaning, thereby improving cleaning efficiency and product yield.
Patent Information
- Application Number
- CN202520340689.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-03-03
- Estimated Expiration
- 2035-02-28
AI Technical Summary
Existing nozzles have difficulty controlling the spray range of the cleaning solution, causing the solution to be sprayed onto areas of the wafer that do not need cleaning, affecting product yield and cleaning efficiency.
A cleaning head was designed, including a connector and a guide. Through the combination of an inlet channel, a dispensing chamber and an outlet hole, the guide is used to ensure that the cleaning solution is sprayed only onto the edge of the wafer that needs to be cleaned. The evaporated cleaning solution is discharged through the exhaust channel to prevent the cleaning solution from corroding the inside of the wafer.
Effective control of the spray range of the cleaning solution prevents it from spraying onto areas of the wafer that do not require cleaning, thereby improving cleaning efficiency and product yield.
Smart Images
Figure CN223959831U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer cleaning technology, and in particular to a cleaning head. Background Technology
[0002] In semiconductor manufacturing, if circuit structures need to be fabricated at the edge of the wafer, the wafer edge must first be cleaned. For example... Figure 1 As shown, the device for cleaning the crystal edge includes a nozzle 1 and a rotating table 2, with the nozzle 1 positioned above the rotating table 2. When the crystal edge needs cleaning, the wafer 3 is fixed on the rotating table 2, and a cleaning solution 4 is sprayed onto the crystal edge through the nozzle 1. The cleaning solution 4 dissolves the foreign matter on the crystal edge upon contact. Furthermore, the rotation of the rotating table 2 ensures that the circumferential area of the crystal edge is cleaned, and the centrifugal force generated by the rotating table 2 can dislodge any remaining cleaning solution 4.
[0003] However, the existing nozzle 1 has difficulty controlling the spray range of the liquid 4, such as Figure 1 and Figure 4 As shown, some of the chemical solution 4 (represented by black dots in the figure) often sprays onto the inner edge of the wafer, causing areas of wafer 3 that do not require cleaning to be corroded by the chemical solution 4, thus affecting product yield; for example Figure 2 and Figure 3 As shown, the desired drug distribution and the actual drug distribution are often inconsistent. If the actual drug distribution is too narrow, the crystal edge needs to be cleaned multiple times, resulting in low cleaning efficiency. If the actual drug distribution is too wide, the product yield will be affected. Utility Model Content
[0004] This invention provides a cleaning head to solve the technical problem that existing nozzles have difficulty controlling the spray range of the medicine.
[0005] To solve the above-mentioned technical problems, this utility model provides a cleaning head, including a connector and a guide; the connector has an inlet channel and a distribution chamber inside, one end of the inlet channel penetrates the upper surface or side of the connector, and the other end of the inlet channel communicates with the distribution chamber; the side and / or lower surface of the distribution chamber is provided with a plurality of outlet holes;
[0006] The guide portion is shaped like a frustum. One end of the guide portion is connected to the lower surface of the liquid distribution chamber, and the other end of the guide portion extends away from the liquid distribution chamber. One end of the guide portion is located inside the area formed by the plurality of liquid outlet holes.
[0007] Preferably, the cleaning head further includes an exhaust block, which is installed on the liquid distribution chamber and located inside the guide portion; the exhaust block is provided with a first exhaust channel, which penetrates the upper and lower surfaces of the exhaust block; the connector is provided with a second exhaust channel, one end of the second exhaust channel is connected to one end of the first exhaust channel, and the other end of the second exhaust channel penetrates the upper surface or side of the connector.
[0008] Preferably, one end of the liquid inlet channel penetrates vertically through the upper surface of the connector, and the other end of the second exhaust channel penetrates vertically through the side of the connector.
[0009] Preferably, the number of the first exhaust passage and the number of the second exhaust passage are equal and there are multiple first exhaust passages and multiple second exhaust passages, and each first exhaust passage is connected to the corresponding second exhaust passage.
[0010] Preferably, there are three exhaust channels for both the first exhaust channel and the second exhaust channel.
[0011] Preferably, the cleaning head further includes a temperature probe, a temperature control LED strip, and a temperature controller; the temperature probe and the temperature control LED strip are respectively connected to the temperature controller; the temperature probe is installed on the outer surface of the guide portion, and the temperature control LED strip and the temperature controller are both installed on the inner surface of the guide portion.
[0012] Preferably, the temperature-controlled light strip is evenly distributed on the inner surface of the guide portion.
[0013] Preferably, the plurality of liquid outlet holes are arranged in a circular pattern on the liquid distribution chamber.
[0014] Preferably, the plurality of liquid outlet holes are arranged on the curve where the side and lower surfaces of the liquid distribution chamber intersect. Preferably, the center of the circle formed by the plurality of liquid outlet holes is on the axis of the guide portion.
[0015] This invention provides a cleaning head, comprising a connector and a guide. The upper end of the connector can connect to an external liquid inlet pipe. The liquid solution delivered by the liquid inlet pipe is sprayed in a circular pattern onto the wafer edge through the liquid inlet channel, the liquid distribution chamber, the liquid outlet, and the outer surface of the guide, thereby cleaning the wafer edge. Due to the guiding and hydrophobic effect of the guide, the liquid solution is sprayed only onto the wafer edge that needs cleaning, preventing it from reaching the inner edge and thus preventing corrosion of areas on the wafer that do not need cleaning. This improves cleaning efficiency and product yield. An unexpected benefit of this product is its ability to effectively control the spray range of the liquid solution, ensuring that it is sprayed only onto the wafer edge that needs cleaning, avoiding the inner edge. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the structure of a device for cleaning crystal edges in the prior art during use.
[0017] Figure 2 This is a schematic diagram of the desired drug distribution.
[0018] Figure 3 This is a schematic diagram of the actual distribution of the medicine liquid.
[0019] Figure 4 This is a top-down schematic diagram of the actual distribution of the medicinal liquid.
[0020] Figure 5 This is a schematic diagram of the structure of a cleaning head in use according to an embodiment of the present invention.
[0021] Figure 6 yes Figure 5 The diagram shows the internal structure of the connector and the structure of the exhaust block.
[0022] Figure 7 yes Figure 5 A schematic diagram of the internal structure of the exhaust block.
[0023] Figure 8 This is a schematic diagram showing the connection of a temperature probe, a temperature control light strip, and a temperature controller according to an embodiment of this utility model.
[0024] The attached figures are labeled as follows:
[0025] Nozzle-1, Rotary stage-2, Wafer-3, Solution-4;
[0026] Connector-11, guide-12, exhaust block-13, temperature probe-14, temperature control light strip-15, temperature controller-16;
[0027] Liquid inlet channel-111, liquid distribution chamber-112, liquid outlet hole-113;
[0028] First exhaust passage -131, second exhaust passage -132;
[0029] Acidic exhaust channel-1311, neutral exhaust channel-1312, alkaline exhaust channel-1313. Detailed Implementation
[0030] To make the objectives, advantages, and features of this utility model clearer, the following detailed description of a cleaning head proposed by this utility model is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the explanation of the embodiments of this utility model.
[0031] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference, and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with qualifiers such as "first" and "second" may explicitly or implicitly include one or more of that feature.
[0032] like Figure 5 and Figure 6 As shown, this embodiment provides a cleaning head, including a connector 11 and a guide portion 12. The connector 11 has an inlet channel 111 and a dispensing chamber 112 inside. One end of the inlet channel 111 penetrates the upper surface or side surface of the connector 11, and the other end of the inlet channel 111 communicates with the dispensing chamber 112. The lower surface of the dispensing chamber 112 is provided with a plurality of outlet holes 113. The guide portion 12 is frustum-shaped. One end of the guide portion 12 is connected to the side surface and / or lower surface of the dispensing chamber 112, and the other end of the guide portion 12 extends away from the dispensing chamber 112. One end of the guide portion 12 is disposed inside the area formed by the plurality of outlet holes 113.
[0033] This embodiment provides a cleaning head, which includes a connector 11 and a guide portion 12. The upper end of the connector 11 can be connected to an external liquid inlet pipe. The liquid solution delivered by the liquid inlet pipe can be sprayed in a circular manner onto the crystal edge through the liquid inlet channel 111, the liquid distribution chamber 112, the liquid outlet 113, and the outer surface of the guide portion 12, thereby cleaning the crystal edge. Due to the guiding and hydrophobic effect of the guide portion 12, the liquid solution is sprayed only onto the crystal edge that needs cleaning, and will not spray onto the inner side of the crystal edge, preventing the areas of the wafer 3 that do not need cleaning from being corroded by the liquid solution, thus improving cleaning efficiency and product yield. An unexpected effect of this product is that it can effectively control the spray range of the liquid solution, allowing the liquid solution to be sprayed only onto the crystal edge that needs cleaning, and not onto the inner side of the crystal edge.
[0034] Preferred, such as Figures 5-7As shown, the cleaning head also includes an exhaust block 13, which is mounted on the liquid distribution chamber 112 and located inside the guide portion 12. The exhaust block 13 has a first exhaust channel 131 that penetrates both its upper and lower surfaces. The connector 11 has a second exhaust channel 132, one end of which communicates with one end of the first exhaust channel 131, and the other end of which penetrates the upper or side surface of the connector 11. Some solutions require heating before use, and heated solutions easily evaporate and adhere to the surface of the wafer 3. The first and second exhaust channels 131 and 132 can promptly remove the evaporated solutions, preventing them from adhering to the surface of the wafer 3. The other end of the second exhaust channel 132 can be connected to a vacuum pump to improve the venting effect.
[0035] Preferred, such as Figure 6 As shown, one end of the liquid inlet channel 111 vertically penetrates the upper surface of the connector 11, and the other end of the second exhaust channel 132 vertically penetrates the side of the connector 11. The fact that one end of the liquid inlet channel 111 and the other end of the second exhaust channel 132 are located on two different surfaces of the connector 11 prevents interference between the liquid inlet channel 111 and the second exhaust channel 132, and facilitates connection of the liquid inlet channel 111 and the second exhaust channel 132 to other pipelines.
[0036] Preferred, such as Figure 6 and Figure 7 As shown, the number of first exhaust channels 131 and second exhaust channels 132 is equal, and there are multiple of each. Each first exhaust channel 131 and each second exhaust channel 132 corresponds one-to-one, and each first exhaust channel 131 is connected to its corresponding second exhaust channel 132. Multiple first exhaust channels 131 and multiple second exhaust channels 132 can be configured according to the properties of the gas. For example, the multiple first exhaust channels 131 may include an acidic exhaust channel 1311, a neutral exhaust channel 1312, and an alkaline exhaust channel 1313. The second exhaust channels 132 are of the same type as the corresponding first exhaust channels 131. Different gases are discharged through their respective channels to purify or reuse the recovered waste gas.
[0037] Preferred, such as Figure 6 and Figure 7 As shown, there are three first exhaust channels 131 and three second exhaust channels 132. Commonly used cleaning solutions for wafers are classified into three main categories: acidic, neutral, and alkaline. Therefore, the number of first exhaust channels 131 and two exhaust channels 132 can both be three. In other embodiments, the number of first exhaust channels 131 and two exhaust channels 132 can be reduced or increased as needed.
[0038] Preferred, such as Figure 5 and Figure 8 As shown, the cleaning head also includes a temperature probe 14, a temperature-controlled LED strip 15, and a temperature controller 16. The temperature probe 14 and the temperature-controlled LED strip 15 are respectively connected to the temperature controller 16. The temperature probe 14 is installed on the outer surface of the guide portion 12, and the temperature-controlled LED strip 15 and the temperature controller 16 are both installed on the inner surface of the guide portion 12. The temperature probe 14 can monitor the temperature of the liquid medicine on the outer surface of the guide portion 12 and send the monitored temperature to the temperature controller 16. The temperature controller 16 can send the received temperature to the temperature-controlled LED strip 15. The temperature-controlled LED strip 15 can display a corresponding color according to the received temperature so that the operator knows the temperature of the liquid medicine. The temperature controller 16 can also control the temperature-controlled LED strip 15 to heat the liquid medicine according to a preset temperature so that the liquid medicine is maintained within a preset temperature range.
[0039] Preferred, such as Figure 5 As shown, the temperature-controlled light strip 15 is evenly arranged on the inner surface of the guide portion 12, which can improve the heating effect of the temperature-controlled light strip 15 on the liquid medicine.
[0040] Preferred, such as Figure 5 and Figure 6 As shown, multiple liquid outlet holes 113 are arranged in a circular pattern on the liquid distribution chamber 112, which makes the liquid distribution on the outer surface of the guide portion 12 more uniform.
[0041] Preferred, such as Figure 5 and Figure 6 As shown, a plurality of liquid outlet holes 113 are arranged on the curve where the side and lower surfaces of the liquid distribution chamber 112 intersect. This arrangement allows the liquid in the liquid distribution chamber 112 to be sprayed onto the outer surface of the guide portion 12 from the curve position in an inclined direction rather than a vertical direction, so as to prevent the liquid from splashing onto the outer surface of the guide portion 12.
[0042] Preferred, such as Figure 5 and Figure 6 As shown, the center of the circle formed by the plurality of liquid outlet holes 113 is on the axis of the guide portion 12. This arrangement can make the liquid distribution on the outer surface of the guide portion 12 more uniform.
[0043] In summary, this utility model provides a cleaning head, which includes a connector 11 and a guide portion 12. The upper end of the connector 11 can be connected to an external liquid inlet pipe. The liquid solution delivered by the liquid inlet pipe can be sprayed in a circular manner onto the crystal edge through the liquid inlet channel 111, the liquid distribution chamber 112, the liquid outlet 113, and the outer surface of the guide portion 12, thereby cleaning the crystal edge. Due to the guiding and hydrophobic effect of the guide portion 12, the liquid solution is sprayed only onto the crystal edge that needs cleaning, and will not spray onto the inner side of the crystal edge, preventing the areas of the wafer 3 that do not need cleaning from being corroded by the liquid solution, thus improving cleaning efficiency and product yield. An unexpected effect of this product is that it can effectively control the spray range of the liquid solution, ensuring that the liquid solution is sprayed only onto the crystal edge that needs cleaning, and not onto the inner side of the crystal edge.
[0044] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.
Claims
1. A cleaning head characterized by, The connecting head is internally provided with a liquid inlet channel and a liquid distribution cavity, one end of the liquid inlet channel penetrates the upper surface or side surface of the connecting head, and the other end of the liquid inlet channel communicates with the liquid distribution cavity; the side surface and / or lower surface of the liquid distribution cavity is provided with a plurality of liquid outlet holes; The guide part is in the shape of a circular truncated cone, one end of the guide part is connected to the lower surface of the liquid distribution cavity, and the other end of the guide part extends away from the liquid distribution cavity; One end of the guide part is arranged on the inner side of the area enclosed by the plurality of liquid outlet holes.
2. A cleaning head as claimed in claim 1, wherein The cleaning head further comprises an exhaust block mounted on the liquid distribution cavity and located on the inner side of the guide part; the exhaust block is provided with a first exhaust channel penetrating the upper surface and lower surface of the exhaust block; the connecting head is provided with a second exhaust channel, one end of the second exhaust channel communicates with one end of the first exhaust channel, and the other end of the second exhaust channel penetrates the upper surface or side surface of the connecting head.
3. A cleaning head as claimed in claim 2, wherein the cleaning head is formed from a single piece of material. One end of the liquid inlet channel penetrates the upper surface of the connecting head vertically, and the other end of the second exhaust channel penetrates the side surface of the connecting head vertically.
4. A cleaning head as claimed in claim 2, wherein The number of the first exhaust channels and the second exhaust channels is equal and both are multiple, the first exhaust channels and the second exhaust channels one-to-one correspond, and each first exhaust channel communicates with the corresponding second exhaust channel.
5. A cleaning head as claimed in claim 4, wherein the cleaning head is formed from a single piece of material. The number of the first exhaust channels and the second exhaust channels is 3.
6. A cleaning head as claimed in claim 1, wherein The cleaning head further comprises a temperature probe, a temperature control light strip and a temperature controller; the temperature probe and the temperature control light strip are connected with the temperature controller respectively; the temperature probe is installed on the outer surface of the guide part, and the temperature control light strip and the temperature controller are installed on the inner surface of the guide part.
7. A cleaning head as claimed in claim 6, wherein the cleaning head is formed from a single piece of material. The temperature control light strip is uniformly arranged on the inner surface of the guide part.
8. A cleaning head as claimed in claim 1, wherein A plurality of liquid outlet holes are arranged on the liquid distribution cavity in a circular shape.
9. A cleaning head as claimed in claim 8, wherein the cleaning head is formed from a single piece of material. A plurality of liquid outlet holes are arranged on the intersection curve of the side surface and the lower surface of the liquid distribution cavity.
10. A cleaning head as claimed in claim 8, wherein the cleaning head is formed from a single piece of material. The center of the circle enclosed by the plurality of liquid outlet holes is on the axis of the guide part.