Silicon nitride substrate production device

Abstract

The utility model relates to a silicon nitride substrate production device in the field of silicon nitride substrate production, the inside of a slurry box is divided into a feeding box and a discharging box by a partition plate, the bottoms of the two box bodies are communicated with each other through a horizontal culvert, and a gate mechanism is arranged on the horizontal culvert; the gate mechanism comprises a guide vertical shaft vertically connected to the upper wall of the horizontal culvert and a lifting gate arranged in the guide vertical shaft in a sliding mode, the scraper is of a hollow cavity structure provided with a casting opening, the scraper is connected with an elastic tension spring, and an adjusting mechanism is arranged between the scraper and the supporting table. The adjusting mechanism comprises a wedge-shaped block and a telescopic screw rod used for pushing the wedge-shaped block to move front and back. According to the device, the fluctuation influence on the casting blanking speed caused by overlarge liquid level height change in the slurry box and feeding impact of the slurry box is avoided, and the production quality of a silicon carbide substrate can be improved; in addition, the height of the scraper can be automatically adjusted more accurately, operation is easier and more convenient, and the adjusting and controlling precision is higher.

Description

Technical Field

[0001] This utility model belongs to the field of silicon nitride substrate production, and specifically relates to a silicon nitride substrate production apparatus. Background Technology

[0002] Silicon nitride is an important structural ceramic material with properties such as high hardness, wear resistance, good lubricity, oxidation resistance at high temperatures, and resistance to thermal shock. It is widely used in the manufacture of mechanical components such as bearings, turbine blades, mechanical seal rings, and permanent molds. Silicon nitride substrates are high-performance ceramic substrates with high flexibility, fracture strength, thermal shock resistance, and thermal conductivity, and are often used as substrate materials for electronic packaging. Common production methods for silicon nitride substrates include roll forming, hot pressing (sintering), and tape casting. Currently, the thickness of commercially available silicon nitride substrates is generally 0.3–0.6 mm. To achieve large-scale, rapid, and efficient production, tape casting is often used to prepare silicon nitride substrates.

[0003] The key production equipment used in the silicon nitride substrate casting process is the casting machine. The casting machine mainly consists of a baseband conveyor, a slurry tank, and a doctor blade. Existing casting machines have a relatively simple structure, but several problems exist in actual production. For example, changes in the slurry level in the tank cause fluctuations in the casting speed, and the impact force during slurry feeding also causes slight fluctuations in the casting speed. These fluctuations can lead to unevenness and flatness of the cast substrate surface. Furthermore, the doctor blade height adjustment in existing casting machines is mostly manual, which is inconvenient and lacks precision in controlling the thickness of the cast substrate. These problems all affect the quality of the produced silicon nitride ceramic substrates. Therefore, there is an urgent need to design a new silicon nitride substrate production device to improve upon the above-mentioned problems in the existing technology. Utility Model Content

[0004] In view of the above situation, this utility model provides a silicon nitride substrate production apparatus, which can effectively solve the technical problems that affect the forming quality of ceramic substrates in the existing casting machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A silicon nitride substrate production apparatus includes a baseband conveyor, a slurry tank, and a scraper. The slurry tank is mounted on the frame of the baseband conveyor via a support platform. The interior of the slurry tank is divided into an inlet tank and an outlet tank by a partition plate, and the bottoms of the inlet tank and the outlet tank are connected to each other through a horizontal culvert. A feed pipe with a feed valve is provided at the top of the inlet tank, and an outlet pipe with a discharge valve is provided at the bottom of the outlet tank. A gate mechanism is provided above the horizontal culvert inside the inlet tank to control the disconnection or connection between the inlet tank and the outlet tank.

[0007] The gate mechanism includes a guide shaft vertically connected to the upper wall of the horizontal culvert, and a lifting gate slidably disposed in the guide shaft. The top of the lifting gate is rotatably hinged to a transmission link, and the upper end of the transmission link is rotatably hinged to a drive lever. The rear part of the drive lever extends through the partition plate into the discharge box, and the front part of the drive lever is rotatably hinged to the partition plate through a fulcrum seat. The rear end of the drive lever is movably hinged to a float ball, which floats above the slurry surface in the discharge box.

[0008] The scraper is a hollow cavity structure with a higher front and lower rear, and a closed front end. A casting port is provided on the lower side of the rear end of the scraper. Behind the casting port is a scraper part that is fixedly connected to the upper wall of the scraper. A feeding port is provided on the upper front wall of the scraper. The feeding port is connected to the lower end of the discharge valve through a feeding hose. The front end of the scraper is rotatably connected to the support platform through a hinge. An elastic tension spring is connected between the rear part of the scraper and the support platform. An adjustment mechanism is provided between the scraper and the support platform.

[0009] The adjustment mechanism includes a wedge block and a telescopic screw for pushing the wedge block to move back and forth. The lower wedge-shaped surface of the wedge block slides against the upper surface of the scraper. The upper surface of the wedge block is slidably connected to a linear guide rail fixed to the lower surface of the support platform via a linear slider. The rear side of the wedge block is rotatably connected to the front end of the telescopic screw. The rear part of the telescopic screw passes through the middle of a nut sleeve rotatably connected to the rear side wall of the support platform. The nut sleeve is driven by a power mechanism for driving the nut sleeve to rotate via a transmission mechanism.

[0010] Preferably, the power mechanism is a servo motor, which is fixedly installed on the rear side wall of the support platform. The transmission mechanism includes a driving wheel installed on the output shaft of the servo motor and a driven wheel coaxially fixed to the rear end of the nut sleeve, as well as a synchronous belt that drives between the driving and driven wheels.

[0011] Preferably, the front end of the telescopic screw is rotatably connected to the rear side of the wedge block via a bearing, and the front and rear ends of the nut sleeve are rotatably connected to the rear side wall of the support platform via bearings.

[0012] Preferably, a distance measuring sensor 1 for detecting the height of the slurry level in the feed box is installed on the top of the feed box; a distance measuring sensor 2 for detecting the height of the slurry level in the discharge box is installed on the top of the discharge box; and a distance measuring sensor 3 for detecting the thickness of the silicon carbide substrate for casting is fixedly installed on the rear side wall of the support platform.

[0013] Preferably, both the feed valve and the discharge valve are electrically controlled valves; an electrical control box is provided on the outer wall of the slurry tank, and the servo motor, the feed valve, the discharge valve, and each ranging sensor are all electrically connected to the electrical control box.

[0014] Preferably, a drying device is also provided above the rear of the baseband conveyor for rapidly drying the cast silicon carbide substrate conveyed on the baseband conveyor.

[0015] This utility model also includes other components that enable its normal use, all of which are conventional means in the field. In addition, devices or components not limited in this utility model, such as baseband conveyors, electric control valves, distance sensors, electrical control boxes and their internal circuit settings, all adopt existing technologies in the field.

[0016] The beneficial effects of this utility model are as follows:

[0017] The silicon nitride substrate production apparatus provided by this utility model, by dividing the slurry tank into relatively independent feed tank and discharge tank, and connecting the horizontal culvert and gate mechanism at the bottom of the two tanks, can realize automatic communication and replenishment between the discharge tank and the feed tank. This effectively avoids the fluctuations in the casting speed caused by excessive changes in the liquid level in the slurry tank and the impact of the slurry tank feeding, which is conducive to ensuring the surface flatness of the cast silicon carbide substrate and improving the production quality of the silicon carbide substrate. In addition, by using a servo motor to drive the telescopic screw to push and pull the sliding wedge block adjustment mechanism, more precise automatic adjustment of the scraper height can be achieved. Compared with the manual adjustment in the prior art, the operation is simpler and more convenient, and the control accuracy is higher. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the silicon nitride substrate production apparatus of this utility model.

[0019] Figure 2 for Figure 1 Enlarged structural diagram of the gate mechanism in section A.

[0020] Figure 3 for Figure 1 A magnified schematic diagram of the adjustment mechanism in section B. Detailed Implementation

[0021] The technical solution of this utility model will be clearly and completely described below with reference to specific embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments.

[0022] It should be noted that the terms "upper," "lower," "front," "back," "inner," and "outer," which indicate direction or positional relationship, are based on the attached drawings and are used only for ease of description.

[0023] Example 1

[0024] like Figure 1-3 As shown, a silicon nitride substrate production apparatus includes a baseband conveyor 1, a slurry tank 2, and a scraper 3. The slurry tank is mounted on the frame of the baseband conveyor via a support platform 4. The interior of the slurry tank is divided into two parts, a feed tank 2-1 and a discharge tank 2-2, by a partition plate 5. The bottoms of the feed tank and the discharge tank are connected to each other through a horizontal culvert 2-3. A feed pipe is provided at the top of the feed tank, and a feed valve 6 is provided on the feed pipe. A discharge pipe is provided at the bottom of the discharge tank, and a discharge valve 7 is provided on the discharge pipe. A gate mechanism is provided above the horizontal culvert inside the feed tank.

[0025] When the liquid level in the discharge tank is high enough, the gate mechanism automatically closes, and the discharge pipe smoothly discharges material. Simultaneously, the discharge speed is unaffected by the impact of material entering the feed tank, ensuring that the liquid level in the feed tank remains higher than that in the discharge tank. When the liquid level in the discharge tank drops to a certain height, the gate mechanism slowly and automatically opens, connecting the bottoms of the feed and discharge tanks. Due to the height difference between the two tanks and the principle of communicating vessels, the feed tank can automatically replenish material to the discharge tank through a horizontal culvert until the liquid levels in both tanks are equal. This replenishment process is relatively slow and stable, causing minimal fluctuations in the discharge speed.

[0026] The gate mechanism includes a guide shaft 8 vertically connected to the upper wall of the horizontal culvert, and a lifting gate 9 slidably disposed in the guide shaft. The top of the lifting gate is rotatably hinged to a transmission link 10, and the upper end of the transmission link is rotatably hinged to a drive lever 11. The rear part of the drive lever extends through the partition plate into the discharge box, and the front part of the drive lever is rotatably hinged to the partition plate through a fulcrum seat 12. The rear end of the drive lever is movably hinged to a float ball 13, which floats above the slurry surface in the discharge box.

[0027] The scraper is a hollow cavity structure with a higher front and lower rear, and a closed front end. A casting port 3-1 is provided on the lower side of the rear end of the scraper. Behind the casting port, a scraper part 3-2 is provided and is fixedly connected to the upper wall of the scraper. A feeding port 3-3 is provided on the upper wall of the front part of the scraper. The feeding port is connected to the lower end of the discharge valve through a feeding hose 3-4. The front end of the scraper is rotatably connected to the support platform through a hinge part 3-5. An elastic tension spring 3-6 is connected between the rear part of the scraper and the support platform. A filter screen 3-7 is also provided in the middle of the hollow cavity of the scraper. An adjustment mechanism is provided between the scraper and the support platform.

[0028] The adjustment mechanism includes a wedge block 14 and a telescopic screw 15 for pushing the wedge block to move back and forth. The lower wedge-shaped surface of the wedge block slides against the upper surface of the scraper. The upper surface of the wedge block is slidably connected to a linear guide rail 17 fixed on the lower surface of the support platform via a linear slider 16. The rear side of the wedge block is rotatably connected to the front end of the telescopic screw via a bearing 18. The rear part of the telescopic screw passes through the middle of a nut sleeve 19 connected to the rear side wall of the support platform. The front and rear ends of the nut sleeve are rotatably connected to the rear side wall of the support platform via bearings 20. The nut sleeve is driven by a power mechanism 26 for driving the rotation of the nut sleeve via a transmission mechanism.

[0029] The power mechanism is a servo motor, which is fixedly installed on the rear side wall of the support platform. The transmission mechanism includes a driving wheel installed on the output shaft of the servo motor and a driven wheel coaxially fixed to the rear end of the nut sleeve, as well as a synchronous belt 21 that drives the driving and driven wheels.

[0030] A distance measuring sensor 22 is installed on the top of the feed box to detect the height of the slurry level in the feed box; a distance measuring sensor 23 is installed on the top of the discharge box to detect the height of the slurry level in the discharge box; a distance measuring sensor 24 is fixedly installed on the rear side wall of the support platform to detect the thickness of the cast silicon carbide substrate. The difference between the measured height of the upper surface of the silicon carbide substrate and the initial value of the conveyor belt is the thickness of the cast silicon carbide substrate.

[0031] Both the feed valve and the discharge valve are electrically controlled valves; an electrical control box 25 is provided on the outer wall of the slurry tank, and the servo motor, the feed valve, the discharge valve and each ranging sensor are all electrically connected to the electrical control box. A servo controller for cooperating in controlling the servo motor is provided inside the electrical control box.

[0032] Example 2

[0033] Based on Example 1, a drying device 27 is also provided above the rear of the baseband conveyor for rapidly drying the cast silicon carbide substrate conveyed on the baseband conveyor.

[0034] The technical solution of this utility model is not limited to the specific embodiments described above. Without departing from the scope and spirit of the described embodiments, many modifications and changes will be obvious to those skilled in the art. Any technical modifications made within the spirit and principles of this utility model shall fall within the protection scope of this utility model.

Claims

1. A silicon nitride substrate production apparatus comprising a base tape conveyor, a slurry tank, and a doctor blade, the slurry tank being disposed above a frame of the base tape conveyor by a support stand, characterized in that: The inside of the slurry tank is divided into a feeding tank and a discharging tank by a partition plate, and the bottom of the feeding tank and the discharging tank is communicated with each other through a horizontal culvert, the top of the feeding tank is provided with a feeding pipe, the feeding pipe is provided with a feeding valve, the bottom of the discharging tank is provided with a discharging pipe, the discharging pipe is provided with a discharging valve, and the horizontal culvert in the feeding tank is provided with a gate mechanism above. The gate mechanism comprises a guide vertical shaft connected to the upper wall of the horizontal culvert and a lifting gate slidingly arranged in the guide vertical shaft, the top of the lifting gate is rotatably connected with a transmission connecting rod, the upper end of the transmission connecting rod is rotatably connected with a driving lever, the rear part of the driving lever extends into the discharging tank through the partition plate, and the front part of the driving lever is rotatably connected with the partition plate through a fulcrum seat, and the rear end of the driving lever is movably connected with a floating ball. The scraper is a hollow cavity structure with a front high and rear low inclination and a closed front end, the rear end of the scraper is provided with a flow port, the rear of the flow port is provided with a scraper part fixedly connected with the upper wall of the scraper, the upper wall of the front part of the scraper is provided with a feeding port, the feeding port is connected with the lower end of the discharging valve through a feeding hose, the front end of the scraper is rotatably connected with the support table through a hinge part, the rear part of the scraper is connected with the support table through a elastic tension spring, and the scraper and the support table are provided with an adjusting mechanism. The adjusting mechanism comprises a wedge-shaped block and a telescopic screw rod for pushing the wedge-shaped block to move forward and backward, the wedge-shaped lower surface of the wedge-shaped block is in sliding contact with the upper surface of the scraper, the upper surface of the wedge-shaped block is slidingly connected with a linear guide rail fixed to the lower surface of the support table through a linear sliding block, the rear side of the wedge-shaped block is rotatably connected with the front end of the telescopic screw rod, the rear part of the telescopic screw rod passes through the middle of a nut sleeve rotatably connected to the rear side wall of the support table, and the nut sleeve is drivingly connected with a power mechanism for driving the nut sleeve to rotate through a transmission mechanism.

2. The apparatus according to claim 1, wherein: The power mechanism is a servo motor, the servo motor is fixedly installed on the rear side wall of the support table, the transmission mechanism comprises a driving wheel installed on the output shaft of the servo motor, a driven wheel coaxially fixed to the rear end of the nut sleeve, and a synchronous belt drivingly connected between the driving wheel and the driven wheel.

3. The apparatus according to claim 1, wherein: The front end of the telescopic screw rod is rotatably connected with the rear side of the wedge-shaped block through bearing one, and the front and rear ends of the nut sleeve are rotatably connected with the rear side wall of the support table through bearing two.

4. The apparatus according to claim 2, wherein: A distance measuring sensor one is installed on the top of the feeding tank for detecting the liquid level of the slurry in the feeding tank.

5. The apparatus according to claim 4, wherein: A distance measuring sensor two is installed on the top of the discharging tank for detecting the liquid level of the slurry in the discharging tank.

6. The apparatus according to claim 5, wherein: A distance measuring sensor three is installed on the rear side wall of the support table for detecting the thickness of the flow-formed silicon carbide substrate.

7. The apparatus according to claim 6, wherein: The feeding valve and the discharging valve are both electrically controlled valves.

8. The apparatus according to claim 7, wherein: An electric control box is arranged outside the slurry tank, and the servo motor, the feeding valve, the discharging valve and the distance measuring sensors are electrically connected with the electric control box.

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