Photomask turnover device and cleaning equipment

Abstract

The utility model belongs to the technical field of semiconductor production equipment manufacturing, and particularly relates to a photomask turnover device and cleaning equipment. The device comprises two sliding rails which are oppositely arranged, and sliding seats are arranged on the sliding rails in a sliding mode; a rotating air cylinder is installed on the sliding base, and an overturning clamp is installed at the movable end of the rotating air cylinder. Wherein the overturning clamp is in a U shape, and clamping slopes are arranged on the two sides of the opening end of the overturning clamp correspondingly; and the sliding seat slides along the sliding rail so as to drive the overturning clamp to be close to or away from the sliding rail, so that the overturning clamp clamps the diagonal edges of the photomask through the V-shaped groove. And the rotating cylinder drives the photomask to turn over to be horizontal or vertical. The U-shaped overturning clamp is arranged, and the clamping inclined surface is arranged at the opening of the overturning clamp, so that the opposite angle edges of the photomask are clamped, and the photomask overturning clamp is suitable for photomasks with different sizes. By arranging the sliding seat, the overturning clamp can horizontally convey the photomask.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a photomask flipping device and a cleaning device. Background Technology

[0002] In semiconductor manufacturing, photolithography, etching, and oxidation are key technologies. Photolithography, in particular, uses light to "print" circuit patterns onto a photomask, with the coating, exposure, and development of photoresist being crucial steps. The photomask, as an important component of the exposure equipment, is used in various sizes during semiconductor chip and panel manufacturing. During the "printing" process, a high degree of cleanliness is required for the photomask. After a period of use, fine dust accumulates on the photomask, necessitating a cleaning process.

[0003] In related technologies, photomask cleaning equipment usually consists of loading and unloading modules, cleaning modules, and drying modules. To further improve the quality of photomask cleaning, the photomask needs to be placed vertically in the cleaning tank. However, in the subsequent spin-drying process, the photomask needs to be placed horizontally. But due to the thin and brittle nature of the photomask, there is currently no highly efficient photomask flipping equipment.

[0004] Therefore, there is an urgent need to design a photomask flipping device and a cleaning equipment to solve the aforementioned technical problem of not being able to efficiently flip the photomask from a vertical to a horizontal state.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore may include information that does not constitute prior art. Utility Model Content

[0006] This disclosure provides at least one photomask flipping device and a cleaning device.

[0007] In a first aspect, embodiments of this disclosure provide a photomask flipping device, comprising: two slide rails arranged opposite to each other, and a sliding seat slidably disposed on the slide rails;

[0008] A rotary cylinder is installed on the sliding seat, and a flipping clamp is installed on the movable end of the rotary cylinder;

[0009] The flipping clamp is U-shaped, and the two sides of the open end of the flipping clamp have clamping slopes respectively;

[0010] In addition, the sliding seat slides along the slide rail to move closer to or away from the flipping fixture, so that the flipping fixture can clamp the diagonal side of the photomask through the clamping ramp;

[0011] The rotary cylinder drives the photomask to flip to a horizontal or vertical position.

[0012] In one alternative embodiment, a V-groove is provided on the clamping inclined surface.

[0013] In one alternative embodiment, the slide rail has a drive chain on one side, and a driver is installed at the end of the slide rail. The movable end of the driver is connected to one end of the drive chain, and the other end of the drive chain is connected to the sliding seat.

[0014] In one alternative embodiment, a fixing plate is mounted on the bottom of the slide rail, and one side of the fixing plate has reinforcing ribs.

[0015] Secondly, this disclosure also provides a cleaning device, including the photomask flipping device as described above, and the cleaning device further includes a spin-drying device, which includes a support plate, a spin-drying box, a lifting assembly and two spin-drying clamps.

[0016] The support plate is installed on one side of the slide rail, the spin-drying box is installed on the support plate, the lifting assembly is located at the bottom of the spin-drying box, and the movable end of the lifting assembly is aligned with the height direction of the spin-drying box.

[0017] The two spin-drying clamps are rotatably mounted inside the spin-drying box and correspond to the lifting assembly;

[0018] The lifting assembly is adapted to move up and down along the height direction of the spin-drying box to horizontally pick up the light cover. After the lifting assembly carries the light cover into the spin-drying box, the two spin-drying clamps hold the light cover diagonally.

[0019] In one alternative embodiment, the spin dryer also has an exhaust pipe, one end of which is connected to the interior of the spin dryer.

[0020] In one alternative embodiment, the cleaning equipment further includes a conveyor track and a main manipulator slidably disposed on the conveyor track;

[0021] The main manipulator includes a movable long arm and a short arm, and the gripping ends of both the long arm and the short arm are equipped with main hand grippers.

[0022] In one alternative embodiment, the cleaning equipment further includes a secondary robotic arm equipped with a secondary gripper.

[0023] In one alternative embodiment, the cleaning equipment further includes a cleaning tank.

[0024] In one alternative embodiment, the cleaning device further includes a device frame.

[0025] The beneficial effects of this utility model are that, by setting a U-shaped flipping clamp and providing a clamping inclined surface at the opening of the flipping clamp, it can clamp the diagonal side of the photomask and adapt to photomasks of different sizes. A sliding mechanism is provided to allow the flipping clamp to transport the photomask horizontally.

[0026] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description, claims, and drawings.

[0027] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 A perspective view of a cleaning device provided in an embodiment of this disclosure;

[0030] Figure 2 A front view of a flipping device provided in an embodiment of this disclosure;

[0031] Figure 3 This is a schematic diagram of the structure of a flipping fixture provided in an embodiment of the present disclosure;

[0032] Figure 4 This is a schematic diagram of the structure of a spin-drying device provided in an embodiment of the present disclosure;

[0033] Figure 5 This is a top view of a spin-drying device provided in an embodiment of the present disclosure;

[0034] Figure 6 This is a schematic diagram of the structure of a cleaning tank provided in an embodiment of the present disclosure;

[0035] Figure 7 This is a schematic diagram of the structure of a main robotic arm provided in an embodiment of the present disclosure;

[0036] Figure 8 This is a schematic diagram of the structure of a secondary robotic arm provided in an embodiment of this disclosure.

[0037] In the picture:

[0038] 1. Slide rail; 11. Sliding seat; 12. Rotary cylinder; 13. Drive chain; 14. Driver; 15. Fixing plate; 16. Reinforcing rib;

[0039] 2. Flipping fixture; 21. Clamping ramp; 22. V-groove;

[0040] 3. Spin-drying device; 31. Support plate; 32. Spin-drying box; 33. Lifting assembly; 34. Spin-drying clamp; 35. Air extraction pipe;

[0041] 4. Conveyor track; 5. Main robotic arm; 51. Long arm; 52. Short arm; 53. Main gripper fixture;

[0042] 6. Secondary robotic arm; 61. Secondary gripper fixture; 7. Cleaning tank; 8. Equipment frame; 9. Photomask. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0044] Research has found that photomask cleaning equipment typically consists of loading and unloading modules, cleaning modules, and drying modules. To further improve the quality of photomask cleaning, the photomask needs to be placed vertically in the cleaning tank. However, in the subsequent spin-drying process, the photomask needs to be placed horizontally. But due to the thin and brittle nature of the photomask, there is currently no highly efficient photomask flipping equipment.

[0045] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure below should be considered as the inventor's contribution to this disclosure.

[0046] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the embodiments and features described below can be combined with each other. Furthermore, in the accompanying drawings, the thickness of components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0047] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0048] Based on the above research, and referring to Figure 2This disclosure provides a photomask 9 flipping device, comprising: two slide rails 1 arranged opposite to each other, with sliding seats 11 slidably mounted on each slide rail 1, and a rotary cylinder 12 mounted on each sliding seat 11. A flipping clamp 2 is mounted on the movable end of the rotary cylinder 12. Upon activation, the two sliding seats 11, carrying the flipping clamp 2, synchronously move closer to or away from each other along the slide rails 1. More specifically, synchronously approaching the flipping clamp 2 clamps the photomask 9, and synchronously moving away releases the photomask 9.

[0049] Reference Figure 3 In at least one embodiment, the flipping clamp 2 is U-shaped, and each side of the open end of the flipping clamp 2 has a clamping inclined surface 21. It should be noted that the photomask 9 is square, and the inclination angle of the clamping inclined surface 21 is 45°. Therefore, one flipping clamp 2 can clamp two adjacent sides of a right angle of the photomask 9, and two flipping clamps 2 can clamp corresponding adjacent sides of a pair of opposite corners of the photomask 9. This configuration allows for precise clamping of photomasks 9 of different sizes when the photomask 9 remains square, by clamping adjacent sides of the right angle with two flipping clamps 2, thus accommodating square photomasks 9 of different sizes. After the flipping clamp 2 clamps the photomask 9, the rotary cylinder 12 can drive the flipping clamp 2 to rotate, thereby flipping the photomask to a horizontal or vertical position.

[0050] Reference Figure 3 In at least one embodiment, a V-groove 22 is provided on the clamping inclined surface 21. The width of the V-groove 22 is the same as the thickness of the photomask 9, or it can be slightly larger than the thickness of the photomask 9, so that when the photomask 9 is clamped, the right angle of the photomask 9 can be inserted into the V-groove 22, thereby limiting the photomask 9 and preventing the photomask 9 from slipping off the flipping fixture 2.

[0051] Reference Figure 2 In at least one embodiment, the slide rail 1 has a transmission chain 13 on one side, and a driver 14 is installed at the end of the slide rail 1. The movable end of the driver 14 is connected to one end of the transmission chain 13, and the other end of the transmission chain 13 is connected to the sliding seat 11. The driver 14 is a device that works with the transmission chain 13 to achieve transmission, such as a motor. The driver 14 drives the sliding seat 11 to slide along the slide rail 1 via the transmission chain 13, thereby controlling the horizontal position of the rotary cylinder 12 and the flipping clamp 2, thus realizing the action of clamping or releasing the photomask 9.

[0052] Reference Figure 2 In some embodiments, a fixing plate 15 is installed at the bottom of the slide rail 1, and a reinforcing rib 16 is provided on one side of the fixing plate 15. The fixing plate 15 is used to support the slide rail 1 and the sliding seat 11, while the reinforcing rib 16 is used to strengthen the fixing plate 15.

[0053] Reference Figure 1This disclosure also provides a cleaning device, including the photomask 9 flipping device as described above. The cleaning device further includes: a device frame 8, a conveyor track 4, a spin-drying device 3, a cleaning tank 7, a main robot arm 5, and a secondary robot arm 6. The device frame 8 serves as the outer casing of the cleaning device, used for encapsulation and providing protection for other mechanisms. The cleaning tank 7, the flipping mechanism, and the spin-drying device 3 are sequentially arranged along the conveyor track 4, and the main robot arm 5 is adapted to slide along the conveyor track 4. The main robot arm 5 is adapted to clamp and transport the photomask 9 to the cleaning tank 7. Then, the main robot arm 5 transfers the photomask 9 to the auxiliary robot arm 6 in a vertical position. The auxiliary robot arm 6 puts the photomask 9 into the cleaning tank 7 for cleaning. After cleaning, the auxiliary robot arm 6 transfers the photomask 9 back to the main robot arm 5. The main robot arm 5 continues to transport the photomask 9 along the conveyor track 4 to the flipping device. The flipping device flips the photomask 9 to a horizontal position. Then, the flipping device transfers the photomask 9 to the spin dryer. After the photomask 9 is spin-dried, it is transferred back to the flipping device. The flipping device flips the photomask 9 to a vertical position and then transfers it back to the main robot arm 5. The main robot arm 5 transports the spin-dried photomask 9 along the conveyor track 4 to the next process.

[0054] Reference Figure 7 In some embodiments, the main manipulator 5 includes a movable long arm 51 and a short arm 52, and a main gripper 53 is mounted on the gripping end of both the long arm 51 and the short arm 52. Both the long arm 51 and the short arm 52 can slide along the main manipulator 5, and the main gripper 53 also has inclined grippers for gripping the diagonal sides of the photomask 9. Similarly, with this configuration, the main gripper 53 can also be compatible with photomasks 9 of different sizes.

[0055] Reference Figure 8 In some embodiments, the cleaning device further includes a secondary robotic arm 6, on which a secondary gripper 61 is mounted. The secondary gripper 61 also has angled jaws for gripping the diagonal sides of the photomask 9. Similarly, with this configuration, the secondary gripper 61 can also be compatible with photomasks 9 of different sizes.

[0056] Reference Figure 6 In some embodiments, after the main robotic arm 5 transfers the photomask 9 to the auxiliary robotic arm 6, the auxiliary gripper 61 holds the photomask 9 and enters the cleaning tank 7. The auxiliary gripper 61 and the photomask 9 are simultaneously immersed in the cleaning tank 7 to achieve the cleaning of the photomask 9.

[0057] Reference Figure 4In some embodiments, the spin-drying device 3 is disposed below the flipping device. The spin-drying device 3 includes a support plate 31, a spin-drying box 32, a lifting assembly 33, and two spin-drying clamps 34. The support plate 31 is mounted on one side of the slide rail 1, the spin-drying box 32 is mounted on the support plate 31, and the lifting assembly 33 is disposed at the bottom of the spin-drying box 32, with the movable end of the lifting assembly 33 aligned with the height direction of the spin-drying box 32. The two spin-drying clamps 34 are rotatably disposed within the spin-drying box 32 and correspond to the lifting assembly 33. The lifting assembly 33 is adapted to move up and down along the height direction of the spin-drying box 32 to horizontally pick up the photomask 9. After the lifting assembly 33 carries the photomask into the spin-drying box 32, the two spin-drying clamps 34 clamp the photomask 9 diagonally. After the flipping device flips the photomask 9 to a horizontal position, the lifting assembly 33 rises below the photomask 9. Then, the flipping device releases the photomask 9, and the lifting assembly 33, carrying the photomask 9, descends between the two spin-drying clamps 34. The two spin-drying clamps 34 also have inclined grippers for holding the diagonal sides of the photomask 9. Similarly, with this configuration, the spin-drying clamps 34 can also accommodate photomasks 9 of different sizes. After the photomask 9 is spin-dried, the lifting assembly 33 rises, lifting the photomask 9 between the two flipping clamps 2 of the flipping device, so that the flipping clamps 2 can flip the photomask 9 to a vertical position again, so that the main robot arm 5 can hold the photomask 9 and transport it to the next process.

[0058] Reference Figure 5 In some embodiments, the spin-drying chamber 32 also has an exhaust pipe 35, one end of which is connected to the interior of the spin-drying chamber 32. The exhaust pipe 35 continuously extracts air to enhance the gas flow rate inside the spin-drying chamber and accelerate the drying efficiency of the photomask 9.

[0059] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Based on the above-described ideal embodiments of this utility model, and through the above description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification; its technical scope must be determined by the scope of the claims.

Claims

1. A reticle flipping device, characterized by, The utility model relates to a cleaning equipment, including: Two slide rails (1) are oppositely arranged, and a sliding seat (11) is slidably arranged on the slide rail (1); A rotary air cylinder (12) is installed on the sliding seat (11), and a turnover clamp (2) is installed on the movable end of the rotary air cylinder (12); Wherein, the turnover clamp (2) is U-shaped, and the opening end of the turnover clamp (2) is provided with clamping inclined surfaces (21) on both sides respectively; And the sliding seat (11) slides along the slide rail (1) to drive the turnover clamp (2) to approach or move away, so that the turnover clamp (2) clamps the diagonal edge of the mask (9) through the clamping inclined surface (21); The rotary air cylinder (12) drives the mask (9) to turn over to horizontal or vertical.

2. The mask turnover device according to claim 1, wherein: A V-shaped groove (22) is formed in the clamping inclined surface (21).

3. The mask turnover device according to claim 1, wherein: The slide rail (1) is provided with a transmission chain (13) on one side, and a driver (14) is installed at the end of the slide rail (1), the movable end of the driver (14) is connected with one end of the transmission chain (13), and the other end of the transmission chain (13) is connected with the sliding seat (11).

4. The mask turnover device according to claim 1, wherein: A fixed plate (15) is installed at the bottom of the slide rail (1), and the fixed plate (15) is provided with a reinforcing rib (16) on one side.

5. A cleaning apparatus characterized by, The cleaning equipment further comprises: A spin-drying device (3) comprising a support plate (31), a spin-drying box (32), a lifting assembly (33) and two spin-drying clamps (34); The support plate (31) is installed on one side of the slide rail (1), the spin-drying box (32) is installed on the support plate (31), the lifting assembly (33) is arranged at the bottom of the spin-drying box (32), and the movable end of the lifting assembly (33) is consistent with the height direction of the spin-drying box (32); The two spin-drying clamps (34) are rotatably arranged in the spin-drying box (32) and correspond to the lifting assembly (33); The lifting assembly (33) is adapted to lift along the height direction of the spin-drying box (32) to horizontally take the mask (9), and after the mask is carried into the spin-drying box (32) by the lifting assembly (33), the two spin-drying clamps (34) clamp the diagonal of the mask (9).

6. The cleaning equipment according to claim 5, wherein: The spin-drying box (32) further has an air extraction pipeline (35) which is in communication with the inside of the spin-drying box (32).

7. The cleaning equipment according to claim 5, wherein: The cleaning equipment further comprises a conveying track (4) and a main manipulator (5) slidably arranged on the conveying track (4); The main manipulator (5) comprises a long arm (51) and a short arm (52) movably arranged, and the clamping ends of the long arm (51) and the short arm (52) are both provided with a main hand clamp (53).

8. The cleaning equipment according to claim 5, wherein: The cleaning equipment further comprises a secondary manipulator (6), and the secondary manipulator (6) is provided with a secondary hand clamp (61).

9. The cleaning apparatus as claimed in claim 5, characterized in that the cleaning apparatus further comprises a cleaning tank (7).

10. The cleaning apparatus as claimed in claim 5, characterized in that the cleaning apparatus further comprises an apparatus frame (8).

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