Adjustable correction plate mechanism for evaporation coating equipment

Abstract

The utility model discloses an adjustable correction plate mechanism for evaporation coating equipment. The adjustable correction plate mechanism comprises a driving assembly arranged outside a cavity of the evaporation coating equipment, and a rotating assembly, a height adjusting assembly and a correction plate which are arranged inside the cavity of the evaporation coating equipment, one end of the rotating assembly extends out of the cavity of the evaporation coating equipment and is connected with the output end of the driving assembly, the other end of the rotating assembly is connected with the correction plate, and when the driving assembly drives the rotating assembly, the rotating assembly drives the correction plate to rotate, so that the correction plate shields or is away from an evaporation source; one end of the height adjusting assembly is connected with the bottom of the cavity of the evaporation coating equipment, and the other end of the height adjusting assembly is connected with the correction plate so as to adjust the height difference between the correction plate and the evaporation source. The device has the advantages of being compact in structure, convenient and fast to operate, high in reliability and the like, the requirements of the same device for different evaporation distances and evaporation angles are met, and meanwhile the movement requirement of the correction plate and the installation convenience are met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and specifically to an adjustable correction plate mechanism for evaporation coating equipment. Background Technology

[0002] With the rapid development of industries such as microelectronics and semiconductors, the requirements for equipment capacity, automation level, and process quality are becoming increasingly stringent. Evaporation coating, due to its high coating rate, excellent film uniformity, and precise thickness control, can cover workpieces with complex shapes and is currently widely used in optics, electronics, medical, and aerospace fields. To meet the high uniformity requirements of different metal and non-metal film thicknesses in evaporation coating, the evaporation distance and angle are typically adjusted, and then a correction plate mechanism is designed and its shape adjusted based on these parameters. Therefore, the correction plate mechanisms commonly used in current evaporation coating equipment are only suitable for fixed evaporation angles and distances. If different evaporation distances or angles are required, the correction plate needs to be redesigned and replaced, which is both time-consuming and costly. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide an adjustable correction plate mechanism for evaporation coating equipment that is compact, easy to operate, and highly stable, in order to address the shortcomings of the existing technology.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] An adjustable correction plate mechanism for an evaporation coating equipment includes: a drive assembly disposed outside the cavity of the evaporation coating equipment, and a rotating assembly, a height adjustment assembly, and a correction plate disposed inside the cavity of the evaporation coating equipment; one end of the rotating assembly extends outside the cavity of the evaporation coating equipment and is connected to the output end of the drive assembly, and the other end of the rotating assembly is connected to the correction plate; when the drive assembly drives the rotating assembly, the rotating assembly drives the correction plate to rotate, so as to block or move the correction plate away from the evaporation source; one end of the height adjustment assembly is connected to the bottom of the cavity of the evaporation coating equipment, and the other end of the height adjustment assembly is connected to the correction plate, so as to adjust the height difference between the correction plate and the evaporation source.

[0006] As a further improvement of this utility model, the rotating assembly includes: a connecting rod, a first fixed mounting plate, a driving bevel gear, a driven bevel gear, a rotating shaft, a universal coupling, and a gear shaft; the bottom of the connecting rod is connected to the driving assembly, and the top of the connecting rod is provided with a driving bevel gear; one side of the first fixed mounting plate is rotatably connected to the connecting rod, and the other side of the first fixed mounting plate is rotatably connected to the gear shaft; one end of the gear shaft is provided with a driven bevel gear, and the other end of the gear shaft is connected to the universal coupling; one end of the rotating shaft is connected to the universal coupling, and the other end of the rotating shaft is connected to the correction plate; when the driving assembly drives the connecting rod to rotate, the driving bevel gear and the driven bevel gear mesh with each other, and the universal coupling drives the rotating shaft to rotate, so as to achieve the correction plate blocking or moving away from the evaporation source.

[0007] As a further improvement of this utility model, the rotating assembly further includes a second fixed mounting plate, an adjusting plate, and a connecting plate; the adjusting plate is fixed to the side of the first fixed mounting plate and faces the correction plate; one end of the second fixed mounting plate is rotatably connected to the rotating shaft; the other end of the second fixed mounting plate is fixedly connected to one end of the connecting plate; and the other end of the connecting plate is rotatably connected to the adjusting plate; the second fixed mounting plate, the adjusting plate, and the connecting plate are used to assist the correction plate in rotating.

[0008] As a further improvement of this utility model, the adjusting plate is provided with an oblong adjusting hole, the connecting plate is provided with a threaded hole, and the adjusting plate and the connecting plate are fixed by screws; the curvature and position of the oblong adjusting hole are part of the trajectory of the threaded hole on the connecting plate rotating around the center of the universal coupling.

[0009] As a further improvement of this utility model, a deep groove ball bearing is provided at the connection between the second fixed mounting plate and the rotating shaft, and an internal hexagonal nut is fitted on the rotating shaft to lock the deep groove ball bearing.

[0010] As a further improvement of this utility model, the end of the rotating shaft is connected to the fixed plate, and the correction plate is detachably mounted on the fixed plate.

[0011] As a further improvement of this utility model, the driving component includes a swing cylinder and a coaxial coupling; the input end of the coaxial coupling is connected to the swing cylinder, the output end of the coaxial coupling is connected to the vacuum magnetic fluid, and the central axis of the vacuum magnetic fluid passes through the cavity of the evaporation coating equipment and is connected to the connecting rod, so as to realize the swing cylinder driving the connecting rod to rotate.

[0012] As a further improvement of this utility model, the lower part of the connecting rod and the upper part of the central shaft of the vacuum magnetofluid are both provided with multiple threaded mounting holes to adjust the installation position between the connecting rod and the central shaft of the vacuum magnetofluid.

[0013] As a further improvement of this utility model, the height adjustment component includes a lower support rod and an upper support rod. The top of the upper support rod is connected and fixed to the bottom of the first fixed mounting plate, the bottom of the lower support rod is connected to the bottom of the evaporation coating equipment cavity, and the lower part of the upper support rod is detachably connected to the upper part of the lower support rod to adjust the height difference between the correction plate and the evaporation source.

[0014] As a further improvement of this utility model, the upper part of the lower support rod is provided with a sliding groove with a countersunk hole, and the lower part of the upper support rod is provided with multiple threaded mounting holes. When the upper support rod moves to a preset height in the sliding groove, fasteners are screwed into the threaded mounting holes and the countersunk holes of the sliding groove to achieve the connection and fixation of the lower support rod and the upper support rod.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] This utility model discloses an adjustable correction plate mechanism for an evaporation coating equipment. The driving component is located outside the cavity of the evaporation coating equipment, while the rotating component, height adjustment component, and correction plate are located inside the cavity. The rotating component is connected to both the driving component and the correction plate. When the driving component drives the rotating component, the rotating component causes the correction plate to rotate, thus blocking or moving it away from the evaporation source. Simultaneously, the height adjustment component is connected to both the bottom of the cavity and the correction plate, allowing for flexible adjustment of the height difference between the correction plate and the evaporation source. This correction plate mechanism features a simple structure, convenient maintenance, accurate positioning, and good repeatability. It enables quick and easy adjustment of the correction plate's installation height and blocking angle, effectively meeting the requirements of different processes for evaporation distance and angle, reducing equipment development costs, and achieving high uniformity in the evaporation coating layer. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the main structural principle of the adjustable correction plate mechanism for an evaporation coating equipment in a specific embodiment of this utility model;

[0018] Figure 2 This is a schematic diagram of the partial structural principle of the adjustable correction plate mechanism in a specific embodiment of this utility model;

[0019] Figure 3 This is a front cross-sectional schematic diagram of the adjustable correction plate mechanism in a specific embodiment of this utility model;

[0020] Figure 4 This is a schematic diagram of the isometric structure of the adjustable correction plate mechanism in a specific embodiment of this utility model.

[0021] Figure 5This is a schematic diagram of the main structural principle when the correction plate is in a blocked state in a specific embodiment of this utility model;

[0022] Legend: 1. Swing cylinder; 2. Coaxial coupling; 3. Cylinder mounting plate; 4. Vacuum magnetohydrodynamic fluid; 5. Locating pin; 6. Lower support rod; 7. Correction plate; 8. Connecting rod; 9. Upper support rod; 10. First fixed mounting plate; 11. Fixing plate; 12. Second fixed mounting plate; 13. Driving bevel gear; 14. Driven bevel gear; 15. Shoulder; 16. Support seat; 17. Adjusting plate; 18. Waist-shaped adjusting hole; 19. Rotating shaft; 20. Hex socket nut; 21. Universal coupling; 22. Gear shaft; 23. Pin; 24. Deep groove ball bearing; 25. Threaded mounting hole; 26. Sliding groove; 27. Connecting plate. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0024] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0026] Example

[0027] like Figure 1 and Figure 2As shown, the adjustable correction plate mechanism for an evaporation coating equipment of this utility model includes: a drive assembly disposed outside the cavity of the evaporation coating equipment, and a rotating assembly, a height adjustment assembly, and a correction plate 7 disposed inside the cavity of the evaporation coating equipment. One end of the rotating assembly extends outside the cavity of the evaporation coating equipment and is connected to the output end of the drive assembly; the other end of the rotating assembly is connected to the correction plate 7. When the drive assembly drives the rotating assembly, the rotating assembly drives the correction plate 7 to rotate, so as to block or move the correction plate 7 away from the evaporation source. One end of the height adjustment assembly is connected to the bottom of the cavity of the evaporation coating equipment, and the other end of the height adjustment assembly is connected to the correction plate 7, for adjusting the height difference between the correction plate 7 and the evaporation source.

[0028] In this embodiment, the driving component is placed outside the cavity of the evaporation coating equipment, while the rotating component, height adjustment component, and correction plate 7 are placed inside the cavity. The rotating component is connected to both the driving component and the correction plate 7. When the driving component drives the rotating component, the rotating component causes the correction plate 7 to rotate, thus achieving the goal of the correction plate 7 blocking or moving away from the evaporation source. Simultaneously, the height adjustment component is connected to both the bottom of the evaporation coating equipment cavity and the correction plate 7, allowing for flexible adjustment of the height difference between the correction plate 7 and the evaporation source. This utility model's correction plate mechanism has a simple structure, is easy to maintain, has accurate positioning, and good repeatability. It can quickly and easily adjust the installation height and blocking angle of the correction plate, effectively meeting the requirements of different processes for evaporation distance and angle, reducing equipment development costs, and achieving the goal of high uniformity in the evaporation coating layer.

[0029] like Figure 1 and Figure 2 As shown, the rotating assembly includes: a connecting rod 8, a first fixed mounting plate 10, a driving bevel gear 13, a driven bevel gear 14, a rotating shaft 19, a universal coupling 21, and a gear shaft 22. The bottom of the connecting rod 8 is connected to the drive assembly, and the top of the connecting rod 8 is equipped with the driving bevel gear 13. One side of the first fixed mounting plate 10 is rotatably connected to the upper part of the connecting rod 8, and the other side of the first fixed mounting plate 10 is rotatably connected to the gear shaft 22. One end of the gear shaft 22 is equipped with the driven bevel gear 14, and the other end of the gear shaft 22 is connected to the universal coupling 21. One end of the rotating shaft 19 is connected to the universal coupling 21, and the other end of the rotating shaft 19 is connected to the correction plate 7. When the drive assembly drives the connecting rod 8 to rotate, the driving bevel gear 13 and the driven bevel gear 14 mesh with each other, and the universal coupling 21 drives the rotating shaft 19 to rotate, thereby enabling the correction plate 7 to block or move away from the evaporation source.

[0030] In this embodiment, the connecting rod 8 passes through the circular hole on the bottom surface of the first fixed mounting plate 10 and is connected and fixed to the driving bevel gear 13 by a flat key and a set screw. The axial direction of the driving bevel gear 13 is positioned by the shoulder 15 of the connecting rod 8. A deep groove ball bearing is installed in the stepped circular hole on the bottom surface of the first fixed mounting plate 10 to perform circumferential movement. The bearing is fixed by the positioning step of the connecting rod 8, the shoulder 15, and the hole using a snap ring. The driven bevel gear 14, which is paired with the driving bevel gear 13, is also fixed to one end of the gear shaft 22 by a flat key and a set screw, and is positioned axially by a corresponding shoulder. The other end of the gear shaft 22 passes through the stepped circular hole on the side of the first fixed mounting plate 10 and is connected and fixed to the universal coupling 21 by a flat key and a set screw. A deep groove ball bearing is also installed in the stepped circular hole on the side of the first fixed mounting plate 10 to ensure the circumferential movement of the shaft.

[0031] like Figure 2 As shown, the rotating assembly also includes a second fixed mounting plate 12, an adjusting plate 17, and a connecting plate 27. The adjusting plate 17 is fixed to the side of the first fixed mounting plate 10 and faces the correction plate 7. One end of the second fixed mounting plate 12 is rotatably connected to the rotating shaft 19, and the other end of the second fixed mounting plate 12 is fixedly connected to one end of the connecting plate 27. The other end of the connecting plate 27 is rotatably connected to the adjusting plate 17. The second fixed mounting plate 12, the adjusting plate 17, and the connecting plate 27 are used to assist the correction plate 7 in rotating, thereby improving the accuracy and safety of the correction plate 7's rotation.

[0032] Furthermore, the adjusting plate 17 is provided with an oblong adjusting hole 18, and the connecting plate 27 is provided with a threaded hole. The adjusting plate 17 and the connecting plate 27 are fixed by screws. The curvature and position of the oblong adjusting hole 18 are part of the trajectory of the threaded hole on the connecting plate 27 rotating around the center of the universal coupling 21. It can be used in conjunction with the universal coupling 21 to adjust the blocking angle of the correction plate 7, thereby adapting to different evaporation angles and improving the uniformity of the film layer.

[0033] Specifically, when the evaporation angle changes, the shading angle of the correction plate 7 needs to be adjusted (it needs to be perpendicular to the evaporation line). First, loosen the fixing screws of the adjusting plate 17 and the connecting plate 27, then adjust the angle of the universal coupling 21. The second fixed mounting plate 12 rotates along the center of the universal coupling 21, driving the connecting plate 27 to rotate. The fixed position of the adjusting plate 17 and the connecting plate 27 moves along the direction of the waist-shaped adjusting hole 18. After the shading angle is adjusted, tighten the fixing screws of the adjusting plate 17 and the connecting plate 27 to match the adjustment of the evaporation angle.

[0034] like Figure 2 and Figure 3 As shown, a deep groove ball bearing 24 is provided at the connection between the second fixed mounting plate 12 and the rotating shaft 19, and an internal hexagonal nut 20 is fitted on the rotating shaft 19 to lock the deep groove ball bearing 24.

[0035] like Figure 3 As shown, the end of the rotating shaft 19 is connected to the fixed plate 11, and the correction plate 7 is detachably installed on the fixed plate 11 so as to quickly replace the correction plate 7 according to the actual process requirements.

[0036] In this embodiment, one end of the rotating shaft 19 passes through the round hole of the second fixed mounting plate 12 and is connected to the universal coupling 21. The other end of the rotating shaft 19 is mounted on the fixed plate 11 using screws and positioning pins. The rotating shaft 19 is designed with threads, and the deep groove ball bearing 24 in the round hole of the second fixed mounting plate 12 is fixed by using an internal hex nut 26 in conjunction with the shaft shoulder. This achieves the connection, fixation and stable transmission between the rotating shaft 19 and the correction plate 7.

[0037] like Figure 3 and Figure 4 As shown, the drive assembly includes a swing cylinder 1, a coaxial coupling 2, and a vacuum magnetic fluid 4. The swing cylinder 1 is connected to a cylinder mounting plate 3 and fixed to the bottom plate of the evaporation coating equipment chamber with screws. The input end of the coaxial coupling 2 is connected to the cylinder shaft of the swing cylinder 1, and the output end of the coaxial coupling 2 is connected to the lower shaft of the vacuum magnetic fluid 4. The flange of the vacuum magnetic fluid 4 is fixed to the bottom plate of the evaporation coating equipment chamber with screws and sealed with a sealing ring. The central shaft of the vacuum magnetic fluid 4 passes through the cavity of the evaporation coating equipment and is connected to the connecting rod 8, so as to realize the swing cylinder 1 driving the connecting rod 8 to rotate.

[0038] like Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the height adjustment assembly includes a lower support rod 6 and an upper support rod 9, which are parallel to the connecting rod 8. The top of the upper support rod 9 is connected and fixed to the bottom of the first fixed mounting plate 10 via a support base 16 and a pin 23. The bottom of the lower support rod 6 is connected to the bottom of the evaporation coating equipment cavity via a positioning pin 5. The lower part of the upper support rod 9 is detachably connected to the upper part of the lower support rod 6 to adjust the height difference between the correction plate 7 and the evaporation source.

[0039] like Figure 4 As shown, the lower support rod 6 has a sliding groove 26 with a countersunk hole on its upper part, and the upper support rod 9 has multiple threaded mounting holes 25 on its lower part. When the upper support rod 9 moves to a preset height within the sliding groove 26, fastening screws are screwed into the threaded mounting holes 25 and the countersunk holes of the sliding groove 26 to achieve the connection and fixation of the lower support rod 6 and the upper support rod 9.

[0040] In this embodiment, the bottom of the first fixed mounting plate 10 is connected and fixed to the bottom of the vapor deposition chamber by the lower support rod 6 and the upper support rod 9. A support base 16 is installed on the top side of the upper support rod 9 to improve strength and stability. Countersunk holes and threaded holes of different heights are designed on the mounting surfaces of the upper and lower support rods, and the two are fixed by screws. A sliding groove 26 is designed on the side of the lower support rod 9 to facilitate the up and down movement of the upper support rod 9, so as to adjust the installation height of the correction plate 7 in conjunction with the connecting rod 8 to meet the requirements of the workpiece obstruction position.

[0041] Furthermore, the lower part of the connecting rod 8 and the upper part of the central shaft of the vacuum magnetic fluid 4 are provided with multiple threaded mounting holes 25 of different heights to adjust the installation position between the connecting rod 8 and the central shaft of the vacuum magnetic fluid 4, so as to ensure that the overall height between the connecting rod 8 and the central shaft of the vacuum magnetic fluid 4 matches the overall height of the lower support rod 6 and the upper support rod 9, and the active bevel gear 13 and the driven bevel gear 14 provide stable transmission to achieve matching different evaporation distances.

[0042] The correction plate mechanism is crucial for adjusting the coating uniformity and has certain design requirements. When it moves to the blocking position, the correction plate 7 needs to be tangent to the evaporation source plane and completely block the evaporation angle range from the evaporation source to the workpiece stage. Therefore, its installation height and the blocking angle are closely related to the evaporation distance and evaporation angle. In this embodiment, the correction plate mechanism adjusts the angle of the correction plate 7 by adjusting the angle of the universal coupling 21 and the installation position of the connecting plate 27 on the adjusting plate 17, and adjusts the height of the correction plate 7 by adjusting the installation positions of the upper support rod 9 and the connecting rod 8. This satisfies different evaporation distance and evaporation angle requirements, thereby improving the uniformity of the evaporation coating.

[0043] In this embodiment, the main structure is placed inside the vapor deposition vacuum chamber, the drive assembly is placed in the atmosphere, and the correction plate 7 is in the open state with the correction plate 7 vertically downward. The motion principle of the correction plate mechanism is as follows: the program controls the swing cylinder 1 to perform a fixed angle (180°) rotational motion, which drives the central shaft of the vacuum magnetic fluid 4 to rotate through the coaxial coupling 2. The connecting rod 8 is fixed on the central shaft of the vacuum magnetic fluid 4 and moves in a circular motion together with the vacuum magnetic fluid 4. Then, it is transmitted to the gear shaft 22 of the opposite axis through the mutually perpendicular bevel gear pair, and finally to the rotating shaft 19 through the universal coupling 21, which drives the correction plate 7 to rotate 180° to the blocking position.

[0044] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. An adjustable correction plate mechanism for an evaporation coating apparatus, characterized in that The application relates to a rotary assembly of an evaporation coating device. The rotary assembly comprises a connecting rod (8), a first fixed mounting plate (10), a driving bevel gear (13), a driven bevel gear (14), a rotary shaft (19), a universal coupling (21) and a gear shaft (22); the bottom of the connecting rod (8) is connected with a driving assembly, the top of the connecting rod (8) is provided with the driving bevel gear (13), one side of the first fixed mounting plate (10) is rotationally connected with the upper portion of the connecting rod (8), the other side of the first fixed mounting plate (10) is rotationally connected with the gear shaft (22), one end of the gear shaft (22) is provided with the driven bevel gear (14), the other end of the gear shaft (22) is connected with the universal coupling (21), one end of the rotary shaft (19) is connected with the universal coupling (21), the other end of the rotary shaft (19) is connected with a correction plate (7); when the driving assembly drives the connecting rod (8) to rotate, the driving bevel gear (13) and the driven bevel gear (14) are meshed with each other, the universal coupling (21) drives the rotary shaft (19) to rotate, so that the correction plate (7) is shielded or far away from an evaporation source.

2. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 1, characterized in that The rotary assembly further comprises a second fixed mounting plate (12), an adjusting plate (17) and a connecting plate (27); the adjusting plate (17) is fixed on the side of the first fixed mounting plate (10) and faces the correction plate (7), one end of the second fixed mounting plate (12) is rotationally connected with the rotary shaft (19), the other end of the second fixed mounting plate (12) is fixedly connected with one end of the connecting plate (27), the other end of the connecting plate (27) is rotationally connected with the adjusting plate (17); the second fixed mounting plate (12), the adjusting plate (17) and the connecting plate (27) are used for assisting the rotation of the correction plate (7).

3. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 2, characterized in that The adjusting plate (17) is provided with a waist-shaped adjusting hole (18), the connecting plate (27) is provided with a threaded hole, and the adjusting plate (17) and the connecting plate (27) are fixed through screws; the arc and position of the waist-shaped adjusting hole (18) are part of the track of the threaded hole on the connecting plate (27) rotating around the center of the universal coupling (21).

4. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 3, characterized in that The connection between the second fixed mounting plate (12) and the rotary shaft (19) is provided with a deep groove ball bearing (24), and a inner hexagon nut (20) is sleeved on the rotary shaft (19), so that the deep groove ball bearing (24) is locked.

5. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 3, wherein The end of the rotary shaft (19) is connected with a fixed plate (11), and the correction plate (7) is detachably mounted on the fixed plate (11).

6. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 5, characterized in that ​ 7. An adjustable shadow mask mechanism for an evaporation coating apparatus according to any one of claims 2 to 6, characterized in that The driving assembly comprises a swing cylinder (1), a coaxial shaft coupling (2) and a vacuum magnetic fluid (4); the input end of the coaxial shaft coupling (2) is connected with the swing cylinder (1), the output end of the coaxial shaft coupling (2) is connected with the vacuum magnetic fluid (4), the central shaft of the vacuum magnetic fluid (4) penetrates through the cavity of the evaporation film coating equipment and is connected with a connecting rod (8) to realize the rotation of the swing cylinder (1) to drive the connecting rod (8).

8. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 7, characterized in that The lower part of the connecting rod (8) and the upper part of the central shaft of the vacuum magnetic fluid (4) are both provided with a plurality of threaded mounting holes (25) to adjust the mounting position between the connecting rod (8) and the central shaft of the vacuum magnetic fluid (4).

9. An adjustable shadow mask mechanism for an evaporation coating apparatus according to any one of claims 2 to 6, characterized in that The height adjusting assembly comprises a lower support rod (6) and an upper support rod (9), the top of the upper support rod (9) is connected and fixed with the bottom of a first fixed mounting plate (10), the bottom of the lower support rod (6) is connected with the bottom of the cavity of the evaporation film coating equipment, and the lower part of the upper support rod (9) is detachably connected with the upper part of the lower support rod (6) to realize the adjustment of the height difference between the correction plate (7) and the evaporation source.

10. The adjustable shadow mask mechanism for an evaporation coating apparatus according to claim 9, characterized in that The upper part of the lower support rod (6) is provided with a sliding groove (26) with a countersunk hole, and the lower part of the upper support rod (9) is provided with a plurality of threaded mounting holes (25); when the upper support rod (9) moves to a preset height in the sliding groove (26), a fastener is screwed into the threaded mounting hole (25) and the countersunk hole of the sliding groove (26) to realize the connection and fixation of the lower support rod (6) and the upper support rod (9).

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