Anti-bulge crucible for heating czochralski silicon

Abstract

The utility model provides an anti-bulge crucible for heating czochralski silicon, which comprises a carbon-carbon crucible body and a quartz crucible body stacked in the carbon-carbon crucible body, and the quartz crucible body is connected with the carbon-carbon crucible body through a positioning structure. The carbon-carbon crucible body comprises a heat preservation cylinder and a circular bottom, a plurality of circles of transverse gas guide grooves and 2n vertical gas guide grooves are formed in the inner wall of the heat preservation cylinder, a plurality of circles of annular gas guide grooves and n radial gas guide grooves are formed in the inner wall of the circular bottom, and the two ends of each radial gas guide groove are communicated with the corresponding vertical gas guide grooves respectively. Air holes penetrating through the circular bottom in the axial direction are formed in the annular air guide grooves and the radial air guide grooves. The positioning structure comprises a positioning ring arranged on the top face of the quartz crucible body, a plurality of positioning holes are evenly distributed in the positioning ring, and positioning columns matched with the positioning holes are arranged on the top face of the heat preservation cylinder. According to the crucible, the probability that the quartz crucible body bulges can be effectively reduced, so that the quality of a czochralski silicon product can be improved in an auxiliary manner, and the safety of the product in the production process can also be improved.

Description

Technical Field

[0001] This utility model relates to the field of crucible technology, specifically to an anti-bulging crucible for heating Czochralski single crystal silicon. Background Technology

[0002] With the innovation and development of high-temperature material preparation technology, modern society has put forward higher requirements for crucibles in high-temperature environments. According to the raw materials, crucibles can be divided into three categories: ceramic crucibles, clay crucibles and metal crucibles. Among them, ceramic crucibles are widely used and can be used to smelt various steels, non-ferrous metals and their alloys. They have become one of the indispensable tools in modern metallurgical industry.

[0003] The crucible must not only have good high-temperature resistance, but also excellent vibration resistance and strong corrosion resistance. In the Czochralski process for preparing single-crystal silicon, carbon-carbon crucibles and quartz crucibles are the main auxiliary materials. During crystal pulling, SiO2 in the quartz crucible and C in the carbon-carbon crucible undergo a displacement reaction at a high temperature of 1500℃~1600℃, generating gases such as CO and CO2. However, the quartz crucible softens and deforms under high temperature. After softening, the quartz crucible adheres tightly to the inner wall of the carbon-carbon crucible, preventing the generated gases from escaping. This results in bulging of the softened quartz crucible, which seriously affects the thermal stability of the Czochralski single-crystal silicon, leading to phenomena such as wire breakage and high oxygen content. This severely affects yield and quality, and also poses significant safety hazards.

[0004] Therefore, to address these issues, it is necessary to modify the structure of conventional crucibles to meet the needs of actual production and experimentation. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides an anti-bulging crucible for heating Czochralski single crystal silicon. The crucible in this invention can effectively reduce the probability of bulging in the quartz crucible body, thereby helping to improve the quality of Czochralski single crystal silicon products and also improving the safety of the product manufacturing process.

[0006] To achieve the above objectives, the specific solution adopted by this utility model is as follows:

[0007] A crucible for heating Czochralski single crystal silicon to prevent bulging, comprising:

[0008] The carbon-carbon crucible body includes an insulated cylinder with openings at the top and bottom, and a circular bottom for sealing the opening at the bottom of the insulated cylinder. The inner wall of the insulated cylinder has several concentric transverse air guide grooves arranged in sequence along the axial direction and 2n vertical air guide grooves arranged in sequence along the circumferential direction. The transverse air guide grooves extend circumferentially along the inner wall of the insulated cylinder, and the vertical air guide grooves extend axially along the inner wall of the insulated cylinder. Each transverse air guide groove is connected to all the vertical air guide grooves. The inner wall of the circular bottom has several concentric annular air guide grooves and n radial air guide grooves passing through the center of each circle. The two ends of each radial air guide groove are connected to the corresponding vertical air guide groove. The annular and radial air guide grooves have vent holes that penetrate the circular bottom axially.

[0009] Quartz crucible body, stacked inside carbon crucible body;

[0010] A positioning structure is used to movably connect the quartz crucible body and the carbon crucible body. The positioning structure includes a positioning ring on the top surface of the quartz crucible body, and a plurality of positioning holes are evenly distributed on the positioning ring. The top surface of the heat preservation cylinder is provided with positioning posts that cooperate with the positioning holes.

[0011] Furthermore, there is a gap between the bottom surface of the positioning ring and the top surface of the insulation cylinder. The positioning post includes a large-diameter cylindrical section located within the gap and a small-diameter cylindrical section that mates with the positioning hole. The bottom surface of the positioning ring abuts against the end face of the large-diameter cylindrical section.

[0012] Furthermore, the two ends of the vertical air guide groove extend to the corresponding ends of the heat preservation cylinder.

[0013] Furthermore, the top surface of the quartz crucible is higher than the top surface of the insulation cylinder.

[0014] Furthermore, the vertical air guide groove, the radial air guide groove, and the annular air guide groove have equal depths and are all less than the thickness of the carbon crucible body.

[0015] Furthermore, the cross-sectional width of the transverse air guide groove gradually decreases from the inner wall outwards.

[0016] Furthermore, the spacing between two adjacent annular air guide grooves is equal.

[0017] Beneficial effects:

[0018] (1) When the crucible in this utility model is in a high temperature environment, the quartz crucible body is prone to softening. However, under the traction and restriction of the positioning rod and positioning ring, the deformation of the quartz crucible body can be effectively reduced, thereby helping to reduce the tightness of the fit between the quartz crucible body and the carbon-carbon crucible body, facilitating the flow of gas. Furthermore, the contact surface between the carbon-carbon crucible body and the quartz crucible body is prone to generate corresponding gas due to high temperature. This gas can be quickly discharged through the vertical gas guide groove, horizontal gas guide groove, annular gas guide groove, radial gas guide groove and vent hole opened on the carbon-carbon crucible body, thereby effectively reducing the probability of bulging of the quartz crucible body and also helping to reduce the size of the bulging of the quartz crucible body. In turn, it can help improve the quality of Czochralski single crystal silicon products and also improve the safety of the product production process.

[0019] (2) The top surface of the quartz crucible is higher than the top surface of the insulation cylinder, which creates a gap between the positioning ring and the carbon crucible. The vertical gas guide groove extends to the corresponding ends of the insulation cylinder, which helps the gas to be discharged smoothly from the gap.

[0020] (3) The cross-sectional width of the transverse gas guide groove gradually decreases from the inner wall outwards, which can better guide the gas flow and reduce gas resistance. The equal spacing of the annular gas guide grooves ensures uniform gas distribution and makes the entire exhaust system work more stably. These structural designs effectively reduce the bulging phenomenon of the crucible during the heating process and extend the service life of the crucible. According to tests, the service life of the crucible of the present invention is extended by about 30% compared with the traditional crucible. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the crucible structure in this utility model.

[0022] Figure 2 This is a top view of the carbon crucible body in this utility model.

[0023] Figure 3 for Figure 1 Enlarged diagram of point A in the middle.

[0024] Figure 4 for Figure 1 Enlarged diagram of point B in the middle.

[0025] In the figure: 1. Carbon crucible body, 101. Insulation cylinder, 102. Circular bottom, 2. Quartz crucible body, 3. Vertical air guide groove, 4. Horizontal air guide groove, 5. Positioning ring, 6. Positioning rod, 7. Vent hole, 8. Annular air guide groove, 9. Radial air guide groove. Detailed Implementation

[0026] The technical solution of this utility model will be clearly and completely described below with reference to specific embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0028] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0029] This invention provides an anti-bulging crucible for heating Czochralski single-crystal silicon, such as... Figures 1 to 4 As shown, the crucible includes a carbon-carbon crucible body 1 and a quartz crucible body 2 stacked inside the carbon-carbon crucible body 1. The quartz crucible body 2 is movably connected to the carbon-carbon crucible body 1 through a positioning structure. The carbon crucible body 1 includes a heat-insulating cylinder 101 with openings at the top and bottom, and a circular bottom 102 for sealing the opening at the bottom of the heat-insulating cylinder 101. The inner wall of the heat-insulating cylinder 101 is provided with several concentric rings of transverse air guide grooves 4 arranged in sequence along the axial direction and 2n vertical air guide grooves 3 arranged in sequence along the circumferential direction. The transverse air guide grooves 4 extend along the inner wall of the heat-insulating cylinder 101 in the circumferential direction, and the vertical air guide grooves 3 extend along the inner wall of the heat-insulating cylinder 101 in the axial direction. Each transverse air guide groove 4 is connected to all the vertical air guide grooves 3. The inner wall of the circular bottom 102 is provided with several concentric rings of annular air guide grooves 8 and n radial air guide grooves 9 passing through the center of the rings. The two ends of the radial air guide grooves 9 are respectively connected to the corresponding vertical air guide grooves 3. The annular air guide grooves 8 and the radial air guide grooves 9 are provided with vent holes 7 that penetrate the circular bottom 102 along the axial direction. The positioning structure includes a positioning ring 5 on the top surface of the quartz crucible body 2, and a plurality of positioning holes are evenly distributed on the positioning ring 5. The top surface of the heat preservation cylinder 101 is provided with positioning posts 6 that cooperate with the positioning holes.

[0030] In this invention, the quartz crucible 2 is first placed inside the carbon crucible 1, and the positioning hole of the positioning ring 5 is aligned with the positioning rod 6. Then, the positioning rod 6 can be smoothly inserted into the corresponding positioning hole, ensuring the stability of the quartz crucible 2 when placed inside the carbon crucible 1. In addition, there is a gap between the lower surface of the positioning ring 5 and the upper surface of the carbon crucible 1 to help improve the gas discharge effect. During the production of Czochralski single-crystal silicon, the crucible is exposed to a high-temperature environment, which can cause the quartz crucible body 2 to soften. However, the traction and restraint of the positioning rod 6 and positioning ring 5 can effectively reduce the deformation of the quartz crucible body 2, thereby helping to reduce the tightness of the fit between the quartz crucible body 2 and the carbon-carbon crucible body 1, facilitating gas flow. Furthermore, the contact surface between the carbon-carbon crucible body 1 and the quartz crucible body 2 is prone to generating corresponding gases due to high temperatures. These gases can be quickly discharged through the vertical gas guide groove 3, the horizontal gas guide groove 4, the annular gas guide groove 8, the radial gas guide groove 9, and the vent hole 7 on the carbon-carbon crucible body 1. This can effectively reduce the probability of bulging in the quartz crucible body 2 and also help reduce the size of the bulge, thereby helping to improve the quality of the Czochralski single-crystal silicon product and also improve the safety of the product production process.

[0031] Example 1

[0032] The carbon-carbon crucible body 1 includes an insulation cylinder 101 and a circular bottom 102. The inner wall of the insulation cylinder 101 is provided with four vertical air guide grooves 3, and the inner wall of the circular bottom 102 is provided with two radial air guide grooves 9. One of the radial air guide grooves 9 is connected to the corresponding two vertical air guide grooves 3 to form a U-shaped air guide channel. The two U-shaped air guide channels intersect in a cross shape. At the same time, both ends of the vertical air guide grooves 3 are connected to the upper surface of the carbon-carbon crucible body 1.

[0033] The inner wall of the circular bottom 102 is provided with several annular air guide grooves 8 at equal radial intervals. The depth of the annular air guide grooves 8 is equal to the depth of the U-shaped air guide channel. Multiple sets of annular air guide grooves 8 of different sizes are combined together in a concentric circle distribution. For example... Figure 1 and Figure 2 The equally spaced annular gas guide grooves 8 can effectively reduce the probability of bulging at the bottom of the quartz crucible 2, and also help to reduce the size of the bulge at the bottom of the quartz crucible 2, thereby reducing the impact of the bulge on the Czochralski single crystal silicon pulling process.

[0034] The U-shaped air guide channel and the annular air guide groove 8 are connected, and multiple sets of air vents 7 are opened at the bottom of both the radial air guide groove 9 and the bottom of the annular air guide groove 8, such as Figure 1 , Figure 2 and Figure 4 The opening of the vent hole 7 allows the gas generated at the bottom of the inner cavity of the carbon crucible 1 to be discharged quickly, thereby helping to reduce the probability of bulging at the bottom of the quartz crucible 2.

[0035] A plurality of transverse air guide grooves 4 are provided in parallel and equidistantly along the vertical direction on the inner cavity side surface of the carbon-carbon crucible body 1, and the plurality of transverse air guide grooves 4 are all in an annular structure, and the cross-sectional width of the transverse air guide groove 4 gradually decreases along the direction from the inner wall to the outside (for example, the axial section is designed into a "convex" shape structure). As Figure 1 , Figure 2 and Figure 3 , the provision of the transverse air guide groove 4 can effectively reduce the probability of bulging on the side surface of the quartz crucible body 2, and the structural setting of the transverse air guide groove 4 can also effectively reduce the probability of the transverse air guide groove 4 being completely blocked, thereby ensuring the anti-bulging effect of the whole crucible.

[0036] The provision of the two U-shaped air guide channels enables the transverse air guide grooves 4 and the annular air guide grooves 8 on the inner surface of the carbon-carbon crucible body 1 to communicate with each other, thereby assisting in enhancing the exhaust effect of the inner surface of the carbon-carbon crucible body 1 and reducing the probability of bulging of the quartz crucible body 2 during use.

[0037] A plurality of positioning rods 6 are fixedly connected in a circumferential and equidistant manner on the upper surface of the heat preservation cylinder 101, and the positioning rods 6 are in an overall stepped cylindrical structure, including a large-diameter cylindrical section located at the lower part and a small-diameter cylindrical section located at the upper part. As Figure 1 , Figure 2 and Figure 3 , the large-diameter cylindrical section at the lower part of the positioning rod 6 can effectively separate the upper surface of the carbon-carbon crucible body 1 and the lower surface of the positioning ring 5, and can also reduce the probability of the air outlet of the vertical air guide groove 3 being blocked when the main body of the quartz crucible body 2 and the positioning ring 5 are softened due to high temperature, so that the vertical air guide groove 3 provided on the inner surface of the carbon-carbon crucible body 1 can communicate with the outside smoothly, improving the exhaust effect of the whole crucible.

[0038] The positioning ring 5 fixedly connected to the upper surface of the quartz crucible body 2 is in an annular structure, the outer diameter of the positioning ring 5 is equal to the outer diameter of the carbon-carbon crucible body 1, the positioning holes provided on the surface of the positioning ring 5 are adapted to the small-diameter cylindrical section at the upper part of the positioning rod 6, and at the same time, the lower surface of the positioning ring 5 is in contact with the upper surface of the large-diameter cylindrical section in the positioning rod 6, and there is a gap between the upper surface of the carbon-carbon crucible body 1 and the lower surface of the positioning ring 5. As Figure 1 , Figure 2 and Figure 3 , the positioning holes are adapted to the dimensions of the small-diameter cylindrical section at the upper part of the positioning rod 6, which can then assist in enhancing the stability of the connection between the positioning rod 6 and the positioning ring 5. Furthermore, when the main body of the quartz crucible body 2 and the positioning ring 5 are softened due to high temperature, it can effectively reduce the probability of deformation of the quartz crucible body 2, thereby assisting in reducing the degree of fit between the contact surfaces of the carbon-carbon crucible body 1 and the quartz crucible body 2, ensuring that gas can be discharged smoothly.

[0039] The crucible of this invention, through the combination of vertical gas guide groove 3, horizontal gas guide groove 4, annular gas guide groove 8, radial gas guide groove 9, vent hole 7, and gap, enables the crucible to quickly expel the generated gas during use, thereby effectively reducing the probability of bulging. It can also help reduce the probability of deformation of the main body of the quartz crucible 2 and the positioning ring 5 due to softening at high temperature, thus enhancing the overall anti-bulging effect of the crucible. At the same time, the overall structure of the crucible is simple and easy to process.

[0040] In summary, the crucible of this invention can effectively solve the bulging problem of traditional crucibles, improve the quality and efficiency of monocrystalline silicon production, and has significant economic benefits and practical value.

[0041] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model in any way. All equivalent modifications or alterations made based on the essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A crucible for heating Czochralski single crystal silicon to prevent bulging, characterized in that, include: The carbon-carbon crucible body (1) includes a heat-insulating cylinder (101) with openings at the top and bottom, and a circular bottom (102) for sealing the opening at the bottom of the heat-insulating cylinder (101). The inner wall of the heat-insulating cylinder (101) is provided with several transverse air-guiding grooves (4) arranged sequentially in the axial direction and 2n vertical air-guiding grooves (3) arranged sequentially in the circumferential direction. The transverse air-guiding grooves (4) extend circumferentially along the inner wall of the heat-insulating cylinder (101), and the vertical air-guiding grooves (3) extend axially along the inner wall of the heat-insulating cylinder (101). The inner wall of the heat-insulating cylinder (101) extends, and each horizontal air guide groove (4) is connected to all the vertical air guide grooves (3); the inner wall of the circular bottom (102) is provided with several concentric annular air guide grooves (8) and n radial air guide grooves (9) passing through the center of the circle. The two ends of the radial air guide grooves (9) are respectively connected to the corresponding vertical air guide grooves (3). The annular air guide grooves (8) and the radial air guide grooves (9) are provided with vent holes (7) that penetrate the circular bottom (102) along the axial direction. Quartz crucible (2) is stacked inside carbon crucible (1); A positioning structure is used to movably connect the quartz crucible body (2) and the carbon crucible body (1). The positioning structure includes a positioning ring (5) on the top surface of the quartz crucible body (2). Several positioning holes are evenly distributed on the positioning ring (5). A positioning post (6) that cooperates with the positioning hole is provided on the top surface of the heat preservation cylinder (101).

2. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 1, characterized in that, There is a gap between the bottom surface of the positioning ring (5) and the top surface of the insulation cylinder (101). The positioning column (6) includes a large-diameter cylindrical section located in the gap and a small-diameter cylindrical section that matches the positioning hole. The bottom surface of the positioning ring (5) abuts against the end face of the large-diameter cylindrical section.

3. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 2, characterized in that, The two ends of the vertical air guide groove (3) extend to the corresponding ends of the heat preservation cylinder (101).

4. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 2, characterized in that, The top surface of the quartz crucible (2) is higher than the top surface of the insulation cylinder (101).

5. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 1, characterized in that, The vertical air guide groove (3), the radial air guide groove (9) and the annular air guide groove (8) have the same depth and are all less than the thickness of the carbon crucible body (1).

6. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 1, characterized in that, The cross-sectional width of the transverse air guide groove (4) gradually decreases from the inner wall outward.

7. The anti-bulging crucible for heating Czochralski single crystal silicon according to claim 1, characterized in that, The spacing between two adjacent annular air guide grooves (8) is equal.

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