Protection device of transmission ventilation pipeline and physical vapor deposition machine table

Abstract

The utility model relates to the technical field of semiconductors, and discloses a protection device of a transmission ventilation pipeline and a physical vapor deposition machine table, the protection device comprises a protection shell, an accommodating space is arranged in the protection shell, and a treading surface is arranged at the top of the protection shell; the first fixing part is arranged on the side portion of the protection shell, the first fixing part is provided with an extending part parallel to the gate valve platform and a hooking and folding part perpendicular to the extending part, and the hooking and folding part is clamped and sleeved on the side portion of the gate valve platform; and the second fixing part is arranged at the bottom of the protective shell, the second fixing part is in an L shape, and the second fixing part is detachably fixed to the gate valve platform. The low-temperature gate valve and the ventilation pipeline are both contained below the protection device, a large treading plane is provided, on one hand, the pipeline is protected, and on the other hand, the problem of breakage during treading is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a protection device for transmission ventilation pipelines and a physical vapor deposition machine. Specifically, it can be applied to logic elements, mixed-signal elements, embedded memory, BCD (bipolar-complementary metal-oxide-semiconductor-double-diffused metal-oxide-semiconductor), trench transistors (trench MOSFETs), and high-voltage components (such as power management integrated circuits) and related products and processes. Background Technology

[0002] Physical vapor deposition (PVD) is a vacuum thin film deposition technique. PVD uses low-voltage, high-current arc discharge technology. Under vacuum conditions, gas discharge is used to evaporate the target material and ionize both the evaporated material and the gas. The electric field accelerates the vaporized material and its reaction products, causing them to be deposited on the wafer to form a thin film.

[0003] In the piping design of physical vapor deposition (PVD) equipment, the chamber venting line and the chamber vacuum gauge line are welded together. Because the vacuum gauge is positioned higher than the cryogenic gate valve, the venting line, after installation, is also higher than the gate valve's plane. When engineers perform routine maintenance or handle equipment malfunctions, they may step on the cryogenic gate valve to climb onto the equipment platform. At this time, the venting line is located to the side of the gate valve and above its plane. This poses a high risk of the line cracking. If the line cracks, it will cause vacuum abnormalities, which will then affect the product.

[0004] Therefore, there is a need to improve the protection devices for transmission ventilation pipelines in the existing technology. Utility Model Content

[0005] In view of this, the purpose of this utility model embodiment is to provide a protection device for the transmission ventilation pipeline and a physical vapor deposition machine, which accommodates the cryogenic gate valve and the ventilation pipeline under the main platform to avoid breakage when stepped on.

[0006] To achieve the above objectives, this utility model provides a protection device for a transmission ventilation pipeline, comprising:

[0007] The protective housing has an internal storage space, and the top of the protective housing is designed as a stepable surface.

[0008] The first fixing part is disposed on the side of the protective housing. The first fixing part has an extension parallel to the gate valve platform and a hook-and-fold part perpendicular to the extension. The hook-and-fold part is fitted onto the side of the gate valve platform.

[0009] The second fixing part is located at the bottom of the protective housing. The second fixing part is L-shaped and can be detachably fixed to the gate valve platform.

[0010] In some implementations, the protective housing is a semi-open housing, with at least one side being open.

[0011] In some embodiments, the protective housing includes a welded top surface, a first side surface, and a second side surface, with the connection between the top surface and the first and second side surfaces being rounded.

[0012] In some embodiments, the protective housing is provided with multiple supports inside to provide vertical support for the top of the protective housing.

[0013] In some embodiments, the second fixing part is detachably fixed to the gate valve platform by means of bolts.

[0014] In some embodiments, the protective shell, the first fixing part, and the second fixing part are integrally formed.

[0015] In some implementations, the width of the hook is the same as the thickness of the gate valve platform.

[0016] In some implementations, the top of the protective housing has a double-layer structure, and the two layers are connected by a hinge.

[0017] In some embodiments, a groove is provided on the side of the protective housing where it contacts the gate valve platform.

[0018] In another aspect, this utility model also provides a physical vapor deposition (PVD) machine, wherein the ventilation pipeline and gate valve of the machine are provided with the protective device described above.

[0019] This utility model has at least the following beneficial technical effects:

[0020] The main platform is located above the ventilation pipe, which can directly prevent technicians from stepping on the ventilation pipe when climbing the equipment platform. This avoids the possibility of the pipe being cracked due to being stepped on, thus greatly reducing the possibility of vacuum abnormalities caused by pipe damage. It ensures the normal operation of the equipment and the stability of the production process, and reduces the risk of adverse effects on the product due to equipment failure. The entire protective device has a simple and ingenious structural design, is easy to install, and improves the safety of technicians during operation. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0022] Figure 1 A schematic diagram of an embodiment of the installation state of the protection device for the transmission and ventilation pipeline provided by this utility model;

[0023] Figure 2 This is a schematic diagram of an embodiment of the protective device for the transmission and ventilation pipeline provided by this utility model in an uninstalled state.

[0024] Explanation of reference numerals in the attached figures:

[0025] 10. Gate valve platform; 20. Ventilation pipe; 30. Protective device; 31. Protective housing; 311. Top surface; 312. First side surface; 313. Second side surface; 32. Step surface; 33. Groove; 34. First fixing part; 35. Second fixing part; 341. Extension part; 342. Hook and bend part. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be further described in detail below with reference to specific examples and accompanying drawings.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. For example, terms such as “length,” “width,” “upper,” “lower,” “left,” “right,” “front,” “rear,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer” indicate orientations or positions based on the orientations or positions shown in the accompanying drawings and are merely for ease of description and should not be construed as limiting the invention.

[0028] The terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this utility model are intended to cover non-exclusive inclusion; the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish different objects, not to describe a specific order. "A plurality of" means two or more, unless otherwise explicitly specified.

[0029] In the description, claims, and accompanying drawings of this utility model, when an element is referred to as "fixed to," "mounted to," "set on," or "connected to" another element, it can be directly or indirectly located on that other element. For example, when an element is referred to as "connected to" another element, it can be directly or indirectly connected to that other element.

[0030] Furthermore, the reference to "embodiment" herein means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0031] In the piping design of physical vapor deposition (PVD) equipment, the chamber venting line and the chamber vacuum gauge line are welded together. Because the vacuum gauge is positioned higher than the cryogenic gate valve, the venting line, after installation, is also higher than the gate valve's plane. When engineers perform routine maintenance or handle equipment malfunctions, they may step on the cryogenic gate valve to climb onto the equipment platform. At this time, the venting line is located to the side of the gate valve and above its plane. This poses a high risk of the line cracking. If the line cracks, it will cause vacuum abnormalities, which will then affect the product.

[0032] To address the problems existing in the current technology, such as Figures 1-2 The diagram shown is a schematic representation of an embodiment of the protection device for the transmission venting pipeline provided by this utility model. The venting pipeline 20 is slightly higher than the gate valve platform 10, and the protection device 30 is positioned above the gate valve platform 20 to protect the venting pipeline 20. The protection device 30 specifically includes:

[0033] The protective housing 31 has an internal space and the top of the protective housing 31 is provided as a stepable surface 32.

[0034] The first fixing part 34 is disposed on the side of the protective housing 31. The first fixing part 34 has an extension 341 parallel to the gate valve platform 10 and a hook 342 perpendicular to the extension 341. The hook 342 is fitted onto the side of the gate valve platform 10.

[0035] The second fixing part 35 is disposed at the bottom of the protective housing 31. The second fixing part 35 is L-shaped and is detachably fixed to the gate valve platform 10.

[0036] Furthermore, the protective housing 31 is a semi-open housing, with at least one side being open. The open design allows for better adjustment of the position of the cryogenic gate valve and the venting pipeline below the protective housing.

[0037] Furthermore, such as Figure 2 As shown, the protective housing 31 includes a top surface 311, a first side surface 312, and a second side surface 313 that are welded together, and the connection between the top surface 311 and the first side surface 312 and the second side surface 313 is set as a transition fillet.

[0038] Furthermore, the protective housing 31 is internally provided with multiple support portions to provide vertical support for the top of the protective housing. In some embodiments, the support portions can be located in the middle portion of the housing, and additionally, support portions can be provided at the edges of the protective housing, with the density or size of the support portions appropriately increased. In many cases, the top edge of the housing is susceptible to bending moments caused by the weight of personnel stepping on it. Therefore, in a protective housing, larger support portions can be provided at the four corners and the midpoints of the four sides to enhance the edge support capacity and prevent deformation or damage to the top edge of the housing. By providing vertical support through multiple support portions, the load borne by the top of the protective housing can be effectively distributed, and the structural stability can be enhanced.

[0039] Furthermore, the second fixing part 35 is detachably fixed to the gate valve platform 10 by bolts. When either the second fixing part 35 or the gate valve platform 10 is damaged, the detachable bolt structure allows for easy separation. For example, if the second fixing part 35 wears down, maintenance personnel can easily unscrew the bolts to remove it for repair or replacement. Compared to fixing methods such as welding, this detachable connection significantly shortens maintenance time and reduces equipment downtime.

[0040] Furthermore, the protective shell 31, the first fixing part 34, and the second fixing part 35 are integrally formed structures.

[0041] Furthermore, the width of the hook 342 is consistent with the thickness of the gate valve platform 10, so that the hook 342 can be precisely locked onto the side of the gate valve platform for a more stable fixation.

[0042] Furthermore, the top of the protective housing 31 has a double-layer structure, with the two layers connected by a hinge. The double-layer structure can be smoothly opened 180 degrees along the hinge, doubling the top surface area and providing more foot space, making it suitable for larger technicians.

[0043] Furthermore, a groove 33 is provided on the side of the protective housing 31 where it contacts the gate valve platform 10, through which the protruding part of the gate valve can pass, thus achieving a reasonable overall structural design.

[0044] In another aspect, this utility model also provides a physical vapor deposition (PVD) machine, wherein the above-mentioned protective device is provided outside the machine's ventilation pipeline and gate valve.

[0045] The above are exemplary embodiments disclosed in this utility model. However, it should be noted that various changes and modifications can be made without departing from the scope of the embodiments of this utility model as defined by the claims. The functions, steps, and / or actions of the methods according to the disclosed embodiments described herein do not need to be performed in any particular order. Furthermore, although the elements disclosed in the embodiments of this utility model may be described or claimed individually, they may be understood as multiple unless explicitly limited to a singular number.

[0046] It should be understood that, as used herein, the singular form “a” is intended to include the plural form as well, unless the context clearly supports an exception. It should also be understood that, as used herein, “and / or” refers to any and all possible combinations of one or more of the associated listed items.

[0047] The embodiment numbers disclosed in the above-described embodiments of the present utility model are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0048] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the framework of the present invention, technical features of the above embodiments or different embodiments can also be combined, and many other variations of different aspects of the present invention exist, which are not provided in the details for the sake of brevity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A protection device for a transport ventilation line, characterized in that The protection device is arranged above the gate valve platform and comprises: a protection shell having a containing space inside, a top of the protection shell being arranged as a treadable surface; a first fixing part arranged at a side of the protection shell, the first fixing part having an extension part parallel to the gate valve platform and a hooking part perpendicular to the extension part, the hooking part being sleeved on a side of the gate valve platform; a second fixing part arranged at a bottom of the protection shell, the second fixing part being L-shaped and detachably fixed to the gate valve platform.

2. The protection device for transport ventilation lines according to claim 1, characterized in that, The protection shell is a semi-open shell, at least one side of which is arranged as open.

3. The protection device for transport ventilation lines according to claim 1, characterized in that, The protection shell comprises a top surface, a first side surface and a second side surface which are connected by welding, and a transition round corner is arranged at a connection between the top surface and the first side surface and the second side surface.

4. The protection device for transport ventilation lines according to claim 1, characterized in that, A plurality of supporting parts are arranged inside the protection shell to provide supporting force for the top of the protection shell in a vertical direction.

5. The protection device for transport ventilation lines according to claim 1, characterized in that, The second fixing part is detachably fixed to the gate valve platform by a bolt structure.

6. The protection device for transport ventilation lines according to claim 1, characterized in that, The protection shell and the first and second fixing parts are integrally formed.

7. The protection device for transport ventilation lines according to claim 1, characterized in that, The width of the hooking part is consistent with the thickness of the gate valve platform.

8. The protection device for transport ventilation lines according to claim 1, characterized in that, The top of the protection shell is a double-layer structure, and the double-layer structure is connected by a twisting shaft.

9. The protection device for transport ventilation lines according to claim 1, characterized in that, A groove is arranged at a position where the side of the protection shell contacts the gate valve platform.

10. A physical vapor deposition machine, characterized by, The protection device is arranged on the air supply pipeline and the gate valve of the machine platform.

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