Device for measuring temperature of metal in closed space

Abstract

The utility model discloses a device for measuring the temperature of metal in a closed space, and relates to the technical field of temperature measuring devices. Comprising a development board which is in contact with a sample table in an electron microscope sample cabin; the output end of the power module is provided with a power switch, and the output end of the power switch is electrically connected with the input end of the development board; the A / D converter is electrically connected with the storage; the to-be-tested metal block is arranged on the development board; the measuring end of the temperature sensor is in contact with the metal block to be measured, and the output end of the temperature sensor is electrically connected with the A / D converter; and the optical fiber laser is used for emitting laser to the to-be-detected metal block, so that the temperature sensor performs temperature detection on the to-be-detected metal block irradiated by the laser. According to the device for measuring the temperature of the metal in the closed space, the temperature of the metal block to be measured is measured through the temperature sensor, so that the measurement of the temperature generated by laser irradiation is realized.

Description

Technical Field

[0001] This utility model relates to the field of temperature measuring device technology, and more specifically to a device for measuring the temperature of metal in a confined space. Background Technology

[0002] Introducing a laser irradiation system into the sample chamber of a scanning electron microscope (SEM) can be used to study changes in materials under high temperatures. Measuring the temperature generated by laser irradiation is crucial for precise research. However, the sample chamber of an electron microscope is a sealed vacuum environment. Therefore, providing a device capable of measuring the temperature generated by laser irradiation in a vacuum environment is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0003] In view of this, the present invention provides a device for measuring the temperature of a metal in a confined space, capable of measuring the temperature of a metal block to be tested inside an electron microscope sample chamber, thereby achieving the measurement of the temperature generated by laser radiation. To achieve the above objective, the present invention adopts the following technical solution:

[0004] This invention provides a device for determining the temperature of a metal in a confined space, used to measure the temperature of a metal block to be tested inside an electron microscope sample chamber, comprising:

[0005] A development board that is in contact with the sample stage inside the electron microscope sample chamber;

[0006] A power module is provided at one end of the development board. The power module has a power switch at its output end, and the output end of the power switch is electrically connected to the input end of the development board.

[0007] An ARM-type microcontroller is connected to the end of the development board away from the power module. The ARM-type microcontroller includes an A / D converter and a memory. The input terminals of the A / D converter and the memory are both electrically connected to the output terminal of the development board. The A / D converter is electrically connected to the memory.

[0008] The metal block to be tested is placed on the development board between the power module and the ARM microcontroller.

[0009] A temperature sensor is fixed on the development board, with its measuring end in contact with the metal block under test and its output end electrically connected to the A / D converter.

[0010] A fiber laser is used to emit a laser beam onto the metal block under test, so that the temperature sensor can detect the temperature of the metal block under laser irradiation.

[0011] Furthermore, a signal amplifier is provided between the temperature sensor and the A / D converter. The signal amplifier is electrically connected to both the temperature sensor and the A / D converter, fixed on the development board, and electrically connected to the power module.

[0012] Furthermore, a ceramic base is provided at the end of the development board away from the sample stage, and the ceramic base is in contact with the metal block to be tested.

[0013] Furthermore, the development board is provided with multiple fixing holes, through which the metal block to be tested is fixed to the development board.

[0014] Furthermore, the temperature sensor is a thermocouple temperature sensor.

[0015] Furthermore, the power module is equipped with a lithium battery, which is electrically connected to the A / D converter, the storage device, and the signal amplifier.

[0016] Furthermore, it also includes a reset switch, which is electrically connected to the ARM-type microcontroller.

[0017] As can be seen from the above technical solution, compared with the prior art, this utility model discloses a device for measuring the temperature of metal in a confined space. It emits a laser beam to the metal to be tested through a fiber laser to increase the temperature of the metal block to be tested. The temperature on the metal block to be tested is measured by a temperature sensor. The temperature sensor transmits the electrical signal to an A / D converter. The A / D converter converts the electrical signal into a digital signal and stores it in the memory, thereby realizing the recording of the temperature of the metal block to be tested. This enables the measurement of the temperature generated by laser irradiation and the accurate study of the changes of materials under high temperature. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the electron microscope sample chamber provided by this utility model;

[0020] Figure 2 A front view of the device for measuring the temperature of a metal in a confined space provided by this utility model;

[0021] Figure 3The reverse view of the device provided by this utility model for measuring the temperature of metal in a confined space.

[0022] In the diagram: 1. Power module; 2. Power switch; 3. Reset switch; 4. ARM microcontroller; 5. Memory; 6. A / D converter; 7. Signal amplifier; 8. Mounting hole; 9. Ceramic base; 10. Temperature sensor; 11. Fiber laser. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] See Figure 1-3 This utility model discloses a device for measuring the temperature of a metal in a confined space, used to measure the temperature of a metal block to be tested inside an electron microscope sample chamber, comprising:

[0025] The development board is in contact with the sample stage inside the electron microscope sample chamber.

[0026] Power module 1 is located at one end of the development board. Power switch 2 is provided at the output end of power module 1. The output end of power switch 2 is electrically connected to the input end of the development board.

[0027] An ARM-type microcontroller 4 is connected to the end of the development board away from the power module 1. The ARM-type microcontroller 4 includes an A / D converter 6 and a memory 5. The input terminals of both the A / D converter 6 and the memory 5 are electrically connected to the output terminals of the development board. The A / D converter 6 is electrically connected to the memory 5.

[0028] The metal block to be tested is set on the development board between power module 1 and ARM microcontroller 4.

[0029] Temperature sensor 10 is fixed on the development board. The measuring end of temperature sensor 10 is in contact with the metal block to be measured. The output end of temperature sensor 10 is electrically connected to A / D converter 6.

[0030] Fiber laser 11 is used to emit laser light onto the metal block to be tested, so that temperature sensor 10 can detect the temperature of the metal block under laser irradiation.

[0031] In some embodiments, the fiber laser 11 is incident into the electron microscope through a glass window, and finally focused onto the metal block under test on the development board of the scanning electron microscope by two mirrors.

[0032] The development board and the ARM microcontroller 4 are powered by power module 1, and the current in power module 1 is controlled by power switch 2 to control whether the current enters the ARM microcontroller 4.

[0033] A fiber laser emits a laser beam onto a metal block under test, raising its temperature. A temperature sensor 10 measures this temperature and transmits the electrical signal to an A / D converter 6. The A / D converter 6 converts the electrical signal into a digital signal and stores it in a memory 5. The data stored in the memory 5 is read via a computer terminal, recording the temperature of the metal block under test, thus recording the temperature generated by the laser radiation. By comparing the temperature data recorded in the memory with images generated by a scanning electron microscope, the state of the metal block under test at different temperatures can be observed, enabling precise research on the changes in materials under high temperatures.

[0034] In some embodiments, a signal amplifier 7 is provided between the temperature sensor 10 and the A / D converter 6. The signal amplifier 7 is electrically connected to the temperature sensor 10 and the A / D converter 6, fixed on the development board, and electrically connected to the power module 1.

[0035] The signal amplifier 7 amplifies the electrical signal emitted by the temperature sensor 10, ensuring that the A / D converter 6 can receive the electrical signal emitted by the temperature sensor 10, thereby ensuring that the storage device 5 accurately records the temperature generated by the laser radiation.

[0036] In some embodiments, a ceramic base 9 is provided at the end of the development board away from the sample stage. The ceramic base 9 is in contact with the metal block to be tested, and the material of the ceramic base 9 is high-temperature resistant ceramic.

[0037] The metal to be tested is placed on the ceramic base 9, and the heat insulation of the high-temperature resistant ceramic prevents the high-temperature metal block from damaging the development board.

[0038] In some embodiments, the development board is provided with a plurality of fixing holes 8, through which the metal block to be tested is fixed to the development board.

[0039] The metal block to be tested is fixed on the development board through the fixing hole 8 to ensure the stability of the metal block during the study and the accuracy of the research results.

[0040] In some embodiments, the temperature sensor 10 is a thermocouple temperature sensor.

[0041] In some embodiments, the power module 1 is provided with a lithium battery, which is electrically connected to the A / D converter 6, the memory 5 and the signal amplifier 7.

[0042] The development board, A / D converter 6, memory 5, and signal amplifier 7 are powered by a lithium battery.

[0043] In some embodiments, a reset switch 3 is also included, which is electrically connected to the ARM microcontroller 4.

[0044] The ARM microcontroller 4 is restarted by resetting switch 3.

[0045] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0046] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for measuring the temperature of a metal in a closed space, for measuring the temperature of a metal block to be measured in a sample chamber of an electron microscope, characterized in that, The utility model relates to a kind of temperature detection device for electron microscope, including: Development board, the development board is contacted with the sample stage in the electron microscope sample cabin; Power module, the power module is arranged at one end of the development board, and the output end of the power module is provided with power switch, and the output end of the power switch is electrically connected with the input end of the development board; ARM type single-chip microcomputer, the ARM type single-chip microcomputer is connected on the development board, and one end away from the power module, and the ARM type single-chip microcomputer includes A / D converter and memory, and the input end of the A / D converter and memory is electrically connected with the output end of the development board, and the A / D converter is electrically connected with the memory; Metal block to be measured, arranged on the development board between the power module and ARM type single-chip microcomputer; Temperature sensor, the temperature sensor is fixed on the development board, and the measurement end of the temperature sensor is contacted with the metal block to be measured, and the output end of the temperature sensor is electrically connected with the A / D converter; Fiber laser, for emitting laser to the metal block to be measured, so that the temperature sensor detects the temperature of the metal block to be measured under laser irradiation.

2. The device for measuring the temperature of a metal in a closed space according to claim 1, characterized in that, Signal amplifier is arranged between the temperature sensor and the A / D converter, and the signal amplifier is electrically connected with the temperature sensor and A / D converter, and the signal amplifier is fixed on the development board, and the signal amplifier is electrically connected with the power module.

3. The device for measuring the temperature of a metal within an enclosed space of claim 1, wherein, The development board is provided with ceramic base at one end away from the sample stage, and the ceramic base is contacted with the metal block to be measured.

4. The device for measuring the temperature of a metal within an enclosed space of claim 1, wherein, A plurality of fixing holes are arranged on the development board, and the metal block to be measured is fixed on the development board through the fixing holes.

5. The device for measuring the temperature of a metal within an enclosed space of claim 1, wherein, The temperature sensor is thermocouple temperature sensor.

6. The device for measuring the temperature of a metal within an enclosed space of claim 2, wherein, Lithium battery is arranged in the power module, and the lithium battery is electrically connected with the A / D converter, memory and signal amplifier.

7. The device for measuring the temperature of a metal within an enclosed space of claim 1, wherein, Reset switch is further included, and the reset switch is electrically connected with the ARM type single-chip microcomputer.

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