Semiconductor photoetching photomask box

Abstract

The utility model relates to the technical field of photomask boxes, in particular to a semiconductor photoetching photomask box which comprises a box body, a box cover lapped at the top end of the box body, a positioning plate mounted at one end of the top of the box body, a positioning groove in sliding connection with the positioning plate formed in one end of the bottom of the box cover, and a threaded hole formed in one side of the outer wall of the box cover and extending into the positioning plate. A threaded hole is formed in the box body, the inner side of the threaded hole is in threaded connection with a bolt, a clamping protection mechanism is installed on the inner side of the box body and comprises a clamping locking assembly and a positioning protection assembly, the clamping locking assembly is used for driving the positioning protection assembly to move, and the positioning protection assembly is used for conducting protection clamping on the mask plate; the mask clamping device is simple in structure and convenient to operate, the mask can be rapidly clamped and positioned, the operation time is obviously saved, the labor amount is reduced, and the working efficiency and the practicability are further improved.

Description

Technical Field

[0001] This utility model relates to the field of photomask technology, specifically to a semiconductor photolithography photomask. Background Technology

[0002] The circuit element patterns on semiconductor silicon wafers all originate from the layout. Therefore, the quality of the photomask plays a crucial role in the photolithography process. The photomask is the benchmark and blueprint for photolithographic pattern replication. Any defects on the photomask will have a serious impact on the accuracy of the final pattern. Therefore, the photomask must be kept "perfect" during use and storage. The photomask needs to be used in the use and turnover process. However, the photomask in the existing technology only protects the photomask through elastic support and snap-fit ​​components. As a result, it cannot limit and protect photomasks of different sizes when placing them, thus limiting its application range. To address this, we propose a photolithography photomask.

[0003] To address the aforementioned technical problems, Chinese Patent No. CN220085235U discloses a photolithography mask box, comprising: a lower photolithography mask housing, an upper photolithography mask housing connected to the top surface of the lower photolithography mask housing by a hinge, bolts on both sides of the lower photolithography mask housing, threaded holes on both sides of the lower photolithography mask housing, threaded connections between the threaded holes and the bolts, and a movable plate on one end of the bolts; and a protective component.

[0004] While the aforementioned existing technical solutions can limit and protect photomasks of different sizes, increasing their applicability, the process of limiting and protecting photomasks requires operators to rotate each set of bolts one by one to adjust the position of the moving plate and the fixed plate. This process is cumbersome and time-consuming, affecting the efficiency of clamping and positioning, and thus its practicality is somewhat lacking. Summary of the Invention

[0005] (1) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a semiconductor photomask box. This photomask box aims to solve the technical problem that existing photomask boxes require operators to manually rotate each set of bolts one by one to adjust the position of the moving plate and the fixed plate when limiting and protecting the photomask. This operation is cumbersome and time-consuming, affecting the efficiency of clamping and positioning, and thus lacking practicality.

[0007] (2) Technical solution

[0008] To solve the above-mentioned technical problems, this utility model provides a semiconductor photomask box, including a box body, a box cover overlapping the top of the box body, a positioning plate installed at one end of the top of the box body, a positioning groove slidably connected to the positioning plate at one end of the bottom of the box cover, a threaded hole extending into the interior of the positioning plate on one side of the outer wall of the box cover, a bolt threadedly connected to the inner side of the threaded hole, and a clamping and protective mechanism installed on the inner side of the box body. The clamping and protective mechanism includes a clamping and locking component and a positioning and protective component. The clamping and locking component is used to drive the positioning and protective component to move, and the positioning and protective component is used to protect and clamp the photomask.

[0009] When using a semiconductor lithography mask box according to this solution, the box cover can be removed first, and then the mask can be placed inside the box. At this time, press the push plate and move it along the push groove towards the locking seat. As the push plate moves, the horizontal plate will also move, which will drive the inclined plate to deflect. When the inclined plate deflects, it will also pull the connecting plate to move. At this time, the two sets of support plates will also drive the rubber pad to stick to the outer wall of the mask. According to the different sizes of mask fixing frames, the two sets of deformation springs can be squeezed to retract to different degrees. At the same time, the limit rod also slides inside the support plate to ensure the stability of the fixing frame during movement. The structure is simple and easy to operate. It can quickly clamp and position the mask, which significantly saves operation time, reduces labor, and further improves work efficiency and practicality.

[0010] Preferably, the clamping and locking assembly includes a base installed inside the box body, a sliding groove is provided at one top end of the base, the sliding groove has a T-shaped cross section, a sliding plate is slidably connected to the inside of the sliding groove, a horizontal plate is installed at one end of the sliding plate, and inclined plates are rotatably connected to both ends of the horizontal plate.

[0011] Furthermore, a connecting plate is rotatably connected to one side of the other end of the inclined plate, and a sliding groove is provided at the other end of the top of the base. A sliding column is slidably connected to the inner side of the sliding groove. The cross-section of both the sliding column and the sliding groove is T-shaped, and the other end of the sliding column is fixedly connected to one side of the connecting plate.

[0012] Furthermore, an extension block is installed on the side of the push plate away from the horizontal plate, and a locking seat is installed on one end of the outer wall of the base. An extension groove is opened on one side of the locking seat, and the extension groove and the extension block are slidably connected. A pressing groove is opened on both sides of the extension groove inside the locking seat. A pressing block is slidably connected inside the pressing groove. Two sets of pressing springs are arranged and installed between one side of the pressing block and the inner wall of the pressing groove.

[0013] Furthermore, a pull rod is installed on one side of the pressing block between two sets of pressing springs. The pull rod has an L-shaped cross-section. The top of the locking seat has a movable groove. Both ends of the movable groove inside the locking seat have drag grooves. The drag grooves are slidably connected to the pull rod. A pull ring is rotatably connected to one end of the pull rod that extends into the movable groove. The contact ends of the pressing block and the extension block have corresponding bevels.

[0014] Furthermore, the positioning and protection assembly includes two sets of support plates respectively installed on the opposite sides of the two sets of connecting plates. Both ends of the support plates are slidably connected to limit rods, and deformation springs are installed on the opposite sides of the two sets of support plates below the limit rods.

[0015] Furthermore, an air cushion is embedded in the center of the pallet, and a fixing frame is installed at the other end of the two sets of limit rods. A rubber pad is embedded in the inner side of the fixing frame, and the other end of the deformation spring is fixedly connected to one side of the fixing frame.

[0016] (3) Beneficial effects

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0018] 1. In this utility model, the clamping and locking component drives the positioning and protection component to move. The positioning and protection component protects and clamps the mask plate. The structure is simple and easy to operate. It can quickly clamp and position the mask plate, which significantly saves operation time, reduces labor, and further improves work efficiency and practicality.

[0019] 2. In this utility model, when the box is impacted, the rubber pad can absorb the transmitted vibration. If the shaking is large and the fixed frame is also squeezed and deformed by the spring, the rubber pad will contact the air cushion, and the air cushion can deform to provide further buffering and shock absorption, thereby achieving the protection effect of the mask plate. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the lid separation structure of this utility model;

[0022] Figure 3 This is a three-dimensional structural diagram of the base of this utility model;

[0023] Figure 4 This is a partial three-dimensional structural diagram of the pallet and inclined surface of this utility model;

[0024] Figure 5 This is a partial three-dimensional structural diagram of the locking seat and base of this utility model;

[0025] Figure 6 This is a partial cross-sectional view of the locking seat of this utility model.

[0026] In the diagram: 1. Box body; 2. Box lid; 3. Positioning plate; 4. Base; 5. Push plate; 6. Horizontal plate; 7. Sloping plate; 8. Connecting plate; 9. Sliding column; 10. Extension block; 11. Locking seat; 12. Pressing block; 13. Pressing spring; 14. Pull rod; 15. Pull ring; 16. Bolt; 17. Sloping surface; 18. Support plate; 19. Limiting rod; 20. Deformation spring; 21. Air cushion; 22. Rubber pad; 23. Fixing frame. Detailed Implementation

[0027] This specific embodiment is a semiconductor photolithography mask box, the structural schematic diagram of which is shown below. Figure 1-6 As shown, a semiconductor photomask box includes a box body 1, a box cover 2 overlapping the top of the box body 1, a positioning plate 3 installed at one top end of the box body 1, a positioning groove slidably connected to the positioning plate 3 at one bottom end of the box cover 2, a threaded hole extending into the interior of the positioning plate 3 on one side of the outer wall of the box cover 2, and a bolt 16 threadedly connected to the inner side of the threaded hole. A clamping and protective mechanism is installed inside the box body 1. The clamping and protective mechanism includes a clamping and locking component and a positioning and protective component. The clamping and locking component is used to drive the positioning and protective component to move, and the positioning and protective component is used to protect and clamp the photomask. In use, the device can drive the positioning and protective component to move through the clamping and locking component, and the positioning and protective component protects and clamps the photomask. The structure is simple and easy to operate, and it can quickly clamp and position the photomask, significantly saving operation time, reducing labor, and further improving work efficiency and practicality.

[0028] In this embodiment, the clamping and locking assembly includes a base 4 installed inside the box body 1. A sliding groove is provided at one end of the top of the base 4. The sliding groove has a T-shaped cross section. A sliding plate 5 is slidably connected inside the sliding groove. A horizontal plate 6 is installed at one end of the sliding plate 5. Both ends of the horizontal plate 6 are rotatably connected to inclined plates 7. The box cover 2 can be removed first, and then the mask plate can be placed inside the box body 1. At this time, the sliding plate 5 is pressed and moved along the sliding groove towards the locking seat 11. While the sliding plate 5 moves, the horizontal plate 6 will also move, and at the same time, the inclined plate 7 will be deflected. When the inclined plate 7 deflects, it will also pull the connecting plate 8 to move.

[0029] Secondly, in this embodiment, a connecting plate 8 is rotatably connected to one side of the other end of the inclined plate 7, and a sliding groove is provided at the other end of the top of the base 4. A sliding column 9 is slidably connected to the inner side of the sliding groove. Both the sliding column 9 and the sliding groove have T-shaped cross sections. The other end of the sliding column 9 is fixedly connected to one side of the connecting plate 8. An extension block 10 is installed on the side of the push plate 5 away from the horizontal plate 6. A locking seat 11 is installed at one end of the outer wall of the base 4. An extension groove is provided on one side of the locking seat 11. The extension groove and the extension block 10 are slidably connected. 1. A pressing groove is provided on both sides of the extension groove inside the 1. A pressing block 12 is slidably connected to the inside of the pressing groove. Two sets of pressing springs 13 are arranged and installed between one side of the pressing block 12 and the inner wall of the pressing groove. A pull rod 14 is installed between the two sets of pressing springs 13 on one side of the pressing block 12. The pull rod 14 has an L-shaped cross-section. A movable groove is provided at the top of the locking seat 11. Both ends of the movable groove inside the locking seat 11 are provided with drag grooves. The drag grooves are slidably connected to the pull rod 14. The pull rod 14 extends into the inside of the movable groove. One end is rotatably connected to a pull ring 15. The contact ends of the pressing block 12 and the extension block 10 are both provided with corresponding inclined surfaces 17. When the connecting plate 8 moves, the sliding column 9 also slides inside the sliding groove to ensure the stability of the connecting plate 8 during movement. When the extension block 10 slides into the extension groove, it will abut against the pressing block 12. When the two sets of inclined surfaces 17 contact and press, they also play a guiding role, forcing the pressing block 12 to slide into the pressing groove under pressure and press the two sets of pressing springs 13 to retract until one end of the extension block 10 abuts against the inner wall of the extension groove. Afterwards, the resistance at the ends of the two sets of crimping blocks 12 disappears, and then the two sets of crimping springs 13 drive the crimping blocks 12 to pop out and abut against the other side of the two protruding ends of the extension block 10 for locking. To separate the extension block 10, simply use two fingers of one hand to press against the two sets of pull rings 15 and move them in opposite directions, causing the pull rod 14 to slide inside the drag groove, so that the two sets of crimping blocks 12 actively retract to the inside of the crimping groove. At this time, the other hand can drag the push plate 5 to the other end to bring out the extension block 10, thereby making the two sets of connecting plates 8 move away from each other.

[0030] Furthermore, in this embodiment, the positioning and protection assembly includes two sets of support plates 18 respectively installed on the opposite sides of the two sets of connecting plates 8. Both ends of the support plate 18 are slidably connected to limit rods 19. Deformation springs 20 are installed on the opposite sides of the two sets of support plates 18 below the limit rods 19. At this time, the two sets of support plates 18 also drive the rubber pads 22 to adhere to the outer wall of the mask plate. According to the different sizes of the mask plate fixing frame 23, the two sets of deformation springs 20 can be squeezed to retract to different degrees. At the same time, the limit rods 19 also slide inside the support plate 18 to ensure the stability of the fixing frame 23 when it moves.

[0031] Furthermore, in this embodiment, an air cushion 21 is embedded in the center of the tray 18, and a fixing frame 23 is installed at the other end of the two sets of limiting rods 19. A rubber pad 22 is embedded in the inner side of the fixing frame 23, and the other end of the deformation spring 20 is fixedly connected to one side of the fixing frame 23. When the box 1 is impacted, the rubber pad 22 can absorb the transmitted vibration. If the shaking is large and the fixing frame 23 also squeezes the deformation spring 20 and shakes, the rubber pad 22 contacts the air cushion 21, and the air cushion 21 can deform to provide further buffering and shock absorption, thereby achieving the protection effect of the mask plate.

[0032] When using a semiconductor photomask box according to this solution, the box cover 2 can be removed first, and then the mask plate can be placed inside the box body 1. At this time, press the push plate 5 and move it along the push groove towards the locking seat 11. While the push plate 5 moves, the horizontal plate 6 will also move, and at the same time, it will drive the inclined plate 7 to deflect. When the inclined plate 7 deflects, it will also pull the connecting plate 8 to move. When the connecting plate 8 moves, the sliding column 9 will also slide inside the sliding groove to ensure the stability of the connecting plate 8 during movement. When the extension block 10 slides into the extension groove, it will abut against the pressing block 12. When the two sets of inclined surfaces 17 contact and squeeze, they also play a guiding role, forcing the pressing block 12 to slide into the pressing groove under pressure and squeeze the two sets of pressing springs 13 to retract until one end of the extension block 10 abuts against the inner wall of the extension groove. Then the resistance at the ends of the two sets of pressing blocks 12 disappears, and then the two sets of pressing springs 13 drive the pressing block 12 to pop out and abut against the other side of the two protruding ends of the extension block 10 for locking. To separate the extension block At 10 o'clock, simply use two fingers of one hand to press against the two sets of pull rings 15 and move them in opposite directions, causing the pull rod 14 to slide inside the drag groove, allowing the two sets of pressing blocks 12 to actively retract to the inside of the pressing groove. At this time, the other hand can drag the push plate 5 to the other end to bring out the extension block 10, thereby making the two sets of connecting plates 8 move away. At this time, the two sets of support plates 18 also drive the rubber pads 22 to adhere to the outer wall of the mask plate. Depending on the size of the mask plate fixing frame 23, it can squeeze the two sets of deformation springs 20 to retract to different degrees. At the same time, the limit rod 19 also slides inside the support plate 18 to ensure the stability of the fixing frame 23 during movement. When the box 1 is hit, the rubber pads 22 can absorb the transmitted vibration. If the shaking is large and the fixing frame 23 also squeezes the deformation springs 20 and shakes, the rubber pads 22 contact the air cushion 21, and the air cushion 21 can deform to provide further cushioning and shock absorption, thereby achieving the protection effect of the mask plate.

[0033] The above embodiments are preferred implementations of this utility model. In addition, this utility model can also be implemented in other ways. Any obvious substitutions without departing from the concept of this technical solution are within the protection scope of this utility model.

Claims

1. A semiconductor lithography reticle cassette comprising a cassette body (1), characterized in that: The top end of the box body (1) is overlapped with a box cover (2), one end of the top of the box body (1) is provided with a positioning plate (3), one end of the bottom of the box cover (2) is provided with a positioning slot which is slidably connected with the positioning plate (3), one side of the outer wall of the box cover (2) is provided with a threaded hole which extends to the inside of the positioning plate (3), the inside of the threaded hole is threadedly connected with a bolt (16), the inside of the box body (1) is provided with a clamping protection mechanism, the clamping protection mechanism comprises a clamping locking assembly and a positioning protection assembly, the clamping locking assembly is used for driving the positioning protection assembly to move, and the positioning protection assembly is used for clamping and protecting the mask plate.

2. A semi-conductor photomask cassette according to claim 1, wherein: The clamping locking assembly comprises a base (4) which is mounted on the inside of the box body (1), one end of the top of the base (4) is provided with a pushing slot, the cross section of the pushing slot is T-shaped, the inside of the pushing slot is slidably connected with a pushing plate (5), one end of the pushing plate (5) is provided with a horizontal plate (6), and both ends of the horizontal plate (6) are rotatably connected with inclined plates (7).

3. A semi-conductor lithography reticle pod according to claim 2, wherein: The other end of the inclined plate (7) is rotatably connected with a connecting plate (8), the other end of the top of the base (4) is provided with a sliding slot, the inside of the sliding slot is slidably connected with a sliding column (9), the cross sections of the sliding column (9) and the sliding slot are T-shaped, and the other end of the sliding column (9) is fixedly connected with one side of the connecting plate (8).

4. A semi-conductor lithography reticle pod according to claim 3, wherein: The side, away from the horizontal plate (6), of the pushing plate (5) is provided with an extension block (10), one end of the outer wall of the base (4) is provided with a locking seat (11), one side of the locking seat (11) is provided with an extension slot, the extension slot is slidably connected with the extension block (10), the inside of the locking seat (11) is provided with pressure contact grooves on both sides of the extension slot, the inside of the pressure contact grooves is slidably connected with pressure contact blocks (12), and the side of the pressure contact block (12) is provided with two groups of pressure contact springs (13) which are arranged and mounted between the pressure contact block (12) and the inner wall of the pressure contact groove.

5. A semi-conductor lithography reticle pod according to claim 4, wherein: The side of the pressure contact block (12) is provided with a pull rod (14) which is mounted between the two groups of pressure contact springs (13), the cross section of the pull rod (14) is L-shaped, the top end of the locking seat (11) is provided with a movable slot, the inside of the locking seat (11) is provided with pull grooves on both ends of one side of the movable slot, the pull grooves are slidably connected with the pull rod (14), one end of the pull rod (14) which extends to the inside of the movable slot is rotatably connected with a pull ring (15), and the contact ends of the pressure contact block (12) and the extension block (10) are provided with inclined surfaces (17) which correspond to each other.

6. A semi-conductor lithography reticle pod according to claim 5, wherein: The positioning protection assembly comprises two groups of supporting plates (18) which are respectively mounted on the opposite sides of the two groups of connecting plates (8), the inside of each of the supporting plates (18) is slidably connected with a limiting rod (19), and the opposite sides of the two groups of supporting plates (18) are provided with shape change springs (20) which are arranged below the limiting rods (19).

7. A semi-conductor lithography reticle pod according to claim 6, wherein: The air cushion (21) is embeddedly installed at the center of the supporting plate (18), the other end of the two groups of limiting rods (19) is provided with a fixed frame (23), the inner side of the fixed frame (23) is embeddedly installed with a rubber pad (22), and the other end of the deformation spring (20) is fixedly connected with one side of the fixed frame (23).

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