Drying and annealing integrated equipment

Abstract

The utility model discloses drying and annealing integrated equipment, which comprises an accommodating cavity, a vacuum interface, a bearing platform, a thermocouple TC and a radiation light source, the vacuum interface is communicated with the accommodating cavity, and the vacuum interface is connected with a vacuumizing device, so that the vacuumizing device can vacuumize the accommodating cavity; the bearing table is arranged in the containing cavity and used for supporting a target component. The thermocouple TC is arranged on the bearing table and is used for monitoring the temperature uniformity of a target component; the radiation light source is arranged in the containing cavity, located on the side, used for supporting a target component, of the bearing table and used for generating radiation light rays irradiating the target component so as to conduct radiation annealing on the target component. According to the drying and annealing integrated equipment disclosed by the utility model, annealing treatment and vacuum drying treatment can be carried out in one equipment.

Description

Technical Field

[0001] This utility model relates to drying and annealing technology, and more particularly to an integrated drying and annealing device. Background Technology

[0002] In the fields of chip manufacturing, display manufacturing, solar cell manufacturing, or lithium battery manufacturing, a liquid film needs to be coated and formed on a substrate. The liquid film and the substrate together constitute the target component. This target component requires further drying and annealing to allow the liquid film to form the desired layer structure.

[0003] The existing process requires a vacuum drying unit and an annealing unit. The target component is first placed in the vacuum drying unit for vacuum drying, and then removed from the vacuum drying unit and placed in the annealing unit for annealing. This method requires two devices to perform vacuum drying and annealing in separate steps, which takes up a lot of space and is costly. Furthermore, performing vacuum drying and annealing in separate steps affects the continuity of the process, thus affecting the overall experimental and production cycle time. Utility Model Content

[0004] The purpose of this invention is to provide an integrated drying and annealing device for performing annealing and vacuum drying in one device.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] An integrated drying and annealing equipment, comprising:

[0007] Receiving cavity;

[0008] A vacuum interface is connected to the receiving cavity, and the vacuum interface is connected to a vacuum pumping device so that the vacuum pumping device can evacuate the receiving cavity;

[0009] A support platform is disposed within the receiving cavity, and the support platform is used to support the target component;

[0010] A radiation source is disposed within the receiving cavity, and the radiation source is located on the side of the support platform used to support the target component. The radiation source is used to generate radiation rays that irradiate towards the target component to perform radiation annealing on the target component.

[0011] Preferably, the cavity contains a gas dispersion plate with multiple evenly distributed flow equalization ports, and the gas dispersion plate is located between the vacuum interface and the radiation source. The gas at the support stage flows out of the vacuum interface through the flow equalization ports of the gas dispersion plate.

[0012] Preferably, the device includes an upper shell and a middle frame, with the vacuum interface disposed on the upper shell and the gas dispersion plate disposed on the middle frame, and the upper shell and the middle frame being detachably connected.

[0013] Preferably, the radiation source is installed on the middle frame, and multiple radiation sources are provided. The multiple radiation sources are evenly distributed and work together to generate radiation rays that irradiate towards the target component.

[0014] And / or, the upper shell is snapped into the middle frame.

[0015] Preferably, it also includes a lower shell, wherein the upper shell, the middle frame, and the lower shell are connected in sequence and together form the receiving cavity, and the support platform is located inside the lower shell.

[0016] Preferably, the lower shell includes a main shell with an opening and an opening / closing door for sealing the opening. The opening / closing door seals or opens the opening to separate or connect the receiving cavity with the outside world, and the target component moves out of or into the receiving cavity from the opening.

[0017] Preferably, the main body shell is provided with a third locking part, and the opening and closing door is provided with a fourth locking part; when the opening and closing door blocks the opening, the third locking part and the fourth locking part engage, so that the opening and closing door is fixed to the main body shell.

[0018] Preferably, the support platform is slidably engaged with the lower shell so that the support platform can be moved out of or into the receiving cavity from the opening.

[0019] Preferably, the lower shell is provided with a first sliding part, the support platform is connected to a support frame, the support frame is provided with a second sliding part that is slidably connected to the first sliding part, and the support platform is slidably connected to the lower shell through the support frame.

[0020] Preferably, at least one thermocouple TC is provided on the bearing platform and / or the support frame, the thermocouple TC being used to monitor or control the temperature of the target component.

[0021] Preferably, one end of the opening / closing door is hinged to the lower shell via a hinge shaft, and the opening / closing door rotates around the hinge shaft to block or open the opening.

[0022] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0023] By setting up a vacuum interface connected to the vacuum pumping device, vacuum drying of the target component located on the support platform can be achieved; by setting up a radiation source, radiation annealing of the target component can be achieved; through the cooperation of the vacuum interface and the radiation source, vacuum drying and annealing of the target component can be carried out in one device, reducing the number of devices and thus effectively reducing costs and required floor space; furthermore, during vacuum drying and annealing, it is not necessary to transfer the target component from a separate vacuum drying device to a separate annealing device, and vacuum drying and annealing can be carried out continuously, effectively improving experimental and production efficiency;

[0024] By setting a thermocouple TC as a temperature sensor, the temperature of the target component can be monitored or controlled in real time, and the surface temperature of the target component can be monitored. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the drying and annealing integrated equipment according to an embodiment of the present invention;

[0026] Figure 2 This is an exploded view of the drying and annealing integrated equipment according to an embodiment of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the drying and annealing integrated equipment in this utility model when the support platform is extended;

[0028] Figure 4 This is a cross-sectional view of the drying and annealing integrated equipment according to an embodiment of this utility model;

[0029] Figure 5 This is a partial structural schematic diagram of the drying and annealing integrated equipment according to an embodiment of this utility model.

[0030] In the figure: 1. Receiving cavity; 2. Vacuum interface; 3. Support platform; 31. Support frame; 311. Second sliding part; 312. Thermocouple TC; 4. Radiation source; 41. Connecting plate; 5. Gas dispersion plate; 51. Flow equalization port; 6. Upper shell; 61. First snap-fit ​​part; 611. First hook; 7. Middle frame; 71. Second snap-fit ​​part; 711. Second hook; 8. Lower shell; 81. Opening; 82. Opening and closing door; 821. Fourth snap-fit ​​part; 83. Main shell; 831. Third snap-fit ​​part; 84. First sliding part. Detailed Implementation

[0031] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0032] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0033] like Figures 1 to 5 As shown, this utility model provides an integrated drying and annealing device, including a receiving cavity 1, a support platform 3 housed in the receiving cavity 1, a radiation source 4, and a vacuum interface 2 communicating with the receiving cavity 1. In addition, it may also include a gas dispersion plate 5.

[0034] Reference Figure 1 and Figure 2 The receiving cavity 1 is enclosed by the shell of the integrated drying and annealing equipment. The shell of the integrated drying and annealing equipment includes an upper shell 6, a middle frame 7, and a lower shell 8. The upper shell 6, middle frame 7, and lower shell 8 are connected sequentially, and together they enclose the receiving cavity 1. The connection between the middle frame 7 and the upper shell 6 and lower shell 8 can abut and form a sealing structure, so that the upper shell 6, middle frame 7, and lower shell 8 can together form a sealed receiving cavity 1. By sealing the receiving cavity 1 to isolate it from the outside environment, the influence of dust and other particulate matter in the external environment on the receiving cavity 1 can be avoided, the content of dust and other particulate matter in the receiving cavity 1 can be reduced, thereby reducing or avoiding the influence of dust and other particulate matter on the target component and improving the drying and annealing quality.

[0035] The upper shell 6 and the middle frame 7 are detachably connected. Specifically, the upper shell 6 is provided with a first snap-fit ​​part 61, and the middle frame 7 is provided with a second snap-fit ​​part 71. The first snap-fit ​​part 61 and the second snap-fit ​​part 71 can be snapped together or separated, so that the upper shell 6 and the middle frame 7 can be detachably connected. When the first snap-fit ​​part 61 and the second snap-fit ​​part 71 are snapped together, the upper shell 6 and the middle frame 7 abut against each other without gaps, and the connection between the upper shell 6 and the middle frame 7 is sealed. The first snap-fit ​​part 61 is rotatably connected to the upper shell 6 via a rotating shaft, and the first snap-fit ​​part 61 is provided with a first hook 611, and the second snap-fit ​​part 71 is provided with a second hook 711 adapted to the first hook 611. When the first snap-fit ​​part 61 and the second snap-fit ​​part 71 are snapped together, the first hook 611 and the second hook 711 are snapped together. By rotating the first engaging portion 61, the first hook 611 can rotate toward the second hook 711 to engage with the second latch, or the first hook 611 can rotate away from the second hook 711 to separate from the second hook 711. In other embodiments, the first engaging portion 61 and the second engaging portion 71 may also employ other engaging structures.

[0036] The middle frame 7 and the lower shell 8 can be a single integrated structure. For example, the middle frame 7 and the lower shell 8 can be manufactured as a single piece, or the middle frame 7 and the lower shell 8 can be manufactured separately and then formed into an inseparable structure by welding or other methods, thus forming a single integrated structure. Alternatively, the middle frame 7 and the lower shell 8 can be fixedly connected by a fastening structure, such as screws, clips, rivets, or clamps. When the middle frame 7 and the lower shell 8 are fixedly connected, they abut against each other without any gap, resulting in a sealed connection between them.

[0037] To facilitate the placement and removal of the target component from the receiving cavity 1, the lower shell 8 includes a main shell 83 with an opening 81 and an opening / closing door 82 for sealing the opening 81. The opening / closing door 82 can be used to seal the opening 81 to isolate the receiving cavity 1 from the outside and keep it in a sealed state. Alternatively, the opening / closing door 82 can leave the opening 81 open, allowing the receiving cavity 1 to communicate with the outside through the opening 81, and the target component can be moved out of or into the receiving cavity 1 through the opening 81.

[0038] To facilitate the opening and closing of the door 82, one end of the door 82 is hinged to the main housing 83 via a hinge shaft, allowing the door 82 to rotate around this hinge shaft. Specifically, the lower end of the door 82 is hinged to the main housing 83 via a hinge shaft. The door 82 can rotate around the hinge shaft in a direction away from the opening 81, allowing the opening 81 to communicate with the outside, at which point the target component can be moved in or out. Alternatively, the door 82 can rotate around the hinge shaft in a direction toward the opening 81, allowing it to rotate to block the opening 81. In this case, the receiving cavity 1 is sealed, allowing for vacuum drying and annealing treatment.

[0039] When the opening / closing door 82 blocks the opening 81, to ensure the position of the opening / closing door 82 is fixed so that the receiving cavity 1 can remain sealed during vacuum drying and annealing, the opening / closing door 82 can be engaged with the main body shell 83. Specifically, the opening / closing door 82 can be provided with a fourth engaging part 821, and the main body shell 83 can be provided with a third engaging part 831. When the opening / closing door 82 blocks the opening 81, the third engaging part 831 and the fourth engaging part 821 can engage to fix the opening / closing door 82 to the main body shell 83; when it is necessary to open the opening 81, the third engaging part 831 and the fourth engaging part 821 can be separated, at which time the opening / closing door 82 can rotate around the hinge axis. The third snap-fit ​​part 831 and the fourth snap-fit ​​part 821 are mating parts that can snap into each other. They can be similar to the snap-fit ​​method of the first snap-fit ​​part 61 and the second snap-fit ​​part 71. Alternatively, the third snap-fit ​​part 831 and the fourth snap-fit ​​part 821 can also be other existing snap-fit ​​methods, which will not be described in detail here.

[0040] Vacuum interface 2 is connected to the receiving cavity 1, and vacuum interface 2 can be connected to a vacuum pumping device. The vacuum pumping device can evacuate the receiving cavity 1 through vacuum interface 2. Specifically, the vacuum pumping device can be a vacuum pump, and vacuum interface 2 can be located on the upper shell 6, for example, at the center of the top of the upper shell 6. Vacuum interface 2 has a connection port that penetrates the upper shell 6 so that vacuum interface 2 is connected to the receiving cavity 1.

[0041] To facilitate monitoring of the vacuum level within the containment cavity 1, the integrated drying and annealing equipment is also equipped with a vacuum gauge, which is used to monitor the vacuum level within the containment cavity 1.

[0042] A support platform 3 is disposed within the receiving cavity 1 and is used to support the target component. When the target component is placed on the support platform 3 and located within the receiving cavity 1, a vacuum device can evacuate the receiving cavity 1 to perform vacuum drying on the target component located within the receiving cavity 1. Specifically, the support platform 3 can be disposed within the lower shell 8, so that the target component can be placed on the support platform 3 through the opening 81 of the lower shell 8 or removed from the support platform 3.

[0043] Reference Figure 3 and Figure 4 To facilitate the removal of the target component from the support platform 3 or the placement of the target component on the support platform 3, the support platform 3 can slide in conjunction with the lower shell 8. When the opening 81 is open, the support platform 3 can slide out of the receiving cavity 1. At this time, at least a part of the support platform 3 is located outside, allowing the user to easily remove the target component from the support platform 3 or place the target component on the support platform 3. Furthermore, the support platform 3 can also slide back into the receiving cavity 1, so that the target component located on the support platform 3 remains within the receiving cavity 1.

[0044] Specifically, the support platform 3 can be connected to a support frame 31, and the support frame 31 is provided with a second sliding part 311. The lower shell 8 is provided with a first sliding part 84. The first sliding part 84 of the lower shell 8 and the second sliding part 311 of the support frame 31 can be slidably engaged, so that the support frame 31 can slide relative to the lower shell 8, thereby allowing the support platform 3 connected to the support frame 31 to slide relative to the lower shell 8. Specifically, the first sliding part 84 is disposed within the main shell 83 of the lower shell 8. The support frame 31 can be used to support the support platform 3, and the support frame 31 can also be slidably engaged with the support platform 3. The support frame 31 applies a vertical supporting force to the support platform 3, and the sliding direction of the support frame 31 relative to the lower shell 8 and the sliding direction of the support platform 3 relative to the support frame 31 are both horizontal. In this embodiment, one of the first sliding part 84 and the second sliding part 311 is a slide rail, and the other is a slider that engages with the slide rail. One or more first sliding parts 84 and second sliding parts 311 may be provided respectively, and each first sliding part 84 may slide in cooperation with a second sliding part 311.

[0045] Reference Figure 4 and Figure 5 A radiation source 4 is disposed within the receiving cavity 1 and positioned on one side of the support platform 3 that supports the target component, specifically above the support platform 3. When the target component is placed on the support platform 3, the radiation source 4 generates radiation rays that irradiate towards the target component. These radiation rays serve as an energy source for radiation annealing of the target component. Specifically, the target component may include a substrate and a liquid film attached to the substrate. The substrate may be a glass substrate, and the liquid film may be a perovskite liquid film formed by liquid coating of a perovskite precursor. The radiation rays specifically anneal the liquid film within the target component. When the target component is placed on the support platform 3, the substrate within the target component contacts the support platform 3, and the liquid film faces the radiation source 4, allowing the radiation rays generated by the radiation source 4 to irradiate the liquid film. The liquid film absorbs the energy of the radiation rays to achieve the annealing process.

[0046] To facilitate temperature monitoring and control of the target component, at least one of the support platform 3 and the support frame 31 is equipped with a thermocouple TC (Thermo Couple) 312. Preferably, both the support platform 3 and the support frame 31 are equipped with thermocouples TC312. Multiple thermocouples TC312 can be evenly distributed on the support platform 3, for example, in a rectangular array. In this embodiment, the support platform 3 can specifically have nine thermocouples TC312, arranged in three rows and three columns, with the spacing between adjacent rows of thermocouples TC312 being the same or approximately the same as the spacing between adjacent columns. In other embodiments, the number of thermocouples TC312 on the support platform 3 can also be three, six, twelve, fourteen, etc.

[0047] A plurality of thermocouples TC312 can be evenly arranged on the support frame 31. The support frame 31 may include a bottom wall, side walls extending upward from the bottom wall, and a top wall connected to the side walls. The top wall of the support frame 31 is located above the target component, with a portion of the top wall of the support frame 31 located above the left side of the target component and another portion located above the right side of the target component. The thermocouples TC312 on the support frame 31 can be arranged on the top wall of the support frame 31; specifically, in this embodiment, the thermocouples TC312 on the support frame 31 are arranged in two rows, each row may include 3 thermocouples TC312, with one row of thermocouples TC312 located above the left side of the target component and the other row located above the right side of the target component. The spacing between adjacent thermocouples TC312 in the same row on the support frame 31 may be the same as or substantially the same as the spacing between adjacent thermocouples TC312 in the same row on the support platform 3. In other embodiments, each row of thermocouples TC312 on the support frame 31 can contain 1, 2, 4, or other thermocouples.

[0048] Thermocouple TC 312 can be set to either monitoring or control modes. When set as a control TC, it can set and adjust the radiation temperature to control the surface temperature of the target component. When set as a monitoring TC, it can only monitor the temperature, ensuring the heat required by the target component remains within a suitable range. Specifically, among multiple thermocouples TC 312, some are set as control TCs, while others are set as monitoring TCs.

[0049] In existing hot plate annealing processes, heat generated by the hot plate is first transferred to the substrate, which then transfers the heat to the liquid film for annealing. However, the high temperature of the hot plate during heating causes the substrate to deform and warp. This uneven contact area between the hot plate and the substrate results in uneven heat transfer to different parts of the substrate and to the liquid film, affecting the quality of annealing and crystallization. In this application, annealing is performed using a radiation light source 4 that generates radiant light. The radiant light directly irradiates the liquid film of the target component, eliminating the need for the substrate as an intermediate medium for heat transfer. This avoids uneven heat transfer caused by deformation of the intermediate medium. The radiation annealing method in this application provides more uniform heating and effectively improves the quality of annealing and crystallization.

[0050] The radiation source 4 can be mounted on the middle frame 7. For example, connecting plates 41 are connected to both ends of the radiation source 4, and the connecting plates 41 are connected to the middle frame 7, so that the radiation source 4 can be mounted on the middle frame 7 through the connecting plates 41. One or more radiation sources 4 can be provided. Preferably, multiple radiation sources 4 are provided, evenly distributed, and can jointly generate radiation light irradiating the target component, so that multiple radiation sources 4 can be used together to perform radiation annealing on the target component. Preferably, the multiple radiation sources 4 are evenly spaced. The even distribution of multiple radiation sources 4 ensures that when multiple radiation sources 4 jointly perform radiation annealing on the target component, the radiation light received by the target component is more uniform, improving the annealing crystallization quality of the liquid film in the target component. Specifically, the radiation source 4 can be an infrared lamp with adjustable radiation intensity, and the radiated light is infrared radiation. In other embodiments, the radiation source 4 can also be other devices capable of generating radiation light.

[0051] To ensure a relatively uniform vacuum level across the liquid film surface of the component to be dried when the vacuum device evacuates the receiving cavity 1, a gas dispersion plate 5 can be housed within the receiving cavity 1. The gas dispersion plate 5 has multiple uniformly distributed flow equalization ports 51, for example, arranged in a rectangular array. The spacing between adjacent flow equalization ports 51 in the same row and the spacing between adjacent flow equalization ports 51 in the same column can be the same. The gas dispersion plate 5 is positioned between the vacuum interface 2 and the radiation source 4, for example, above the radiation source 4. When the vacuum device evacuates, the gas near the support platform 3 flows through the flow equalization ports 51 of the gas dispersion plate 5 to the vacuum interface 2 and then flows out of the receiving cavity 1 from the vacuum interface 2. The gas dispersion plate 5 can be integrally formed with the middle frame 7, or it can be fixedly installed on the middle frame 7. The flow equalization ports 51 can be holes penetrating the gas dispersion plate 5.

[0052] The gas is uniformly distributed by the gas dispersion plate 5, so that the gas can be drawn evenly from all parts of the support platform 3. The vacuum degree of the support platform 3 is relatively uniform, and the vacuum degree of the target component on the support platform 3 is also relatively uniform. This ensures that the vacuum drying rate of the target component is the same and improves the vacuum drying quality.

[0053] When processing the target component, the target component is located on the support platform 3. The vacuum pumping device evacuates the cavity 1, and the vacuum gauge monitors the vacuum level in the cavity 1. When the vacuum level in the cavity 1 reaches the drying condition, the radiation source 4 is turned on. The radiation source 4 generates radiation light to anneal the target component. The annealing time is adjusted according to the power and temperature of the radiation source 4 to complete the vacuum drying and annealing operation.

[0054] By adopting the integrated drying and annealing equipment of this application, vacuum drying and annealing can be performed in one device, reducing the number of devices and thus effectively reducing costs and required floor space. Furthermore, during vacuum drying and annealing, it is not necessary to transfer the target component from a separate vacuum drying unit to a separate annealing unit; vacuum drying and annealing can be carried out continuously, effectively improving experimental and production efficiency.

[0055] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A dry annealing integrated plant, characterized by, The application relates to a vacuum radiation annealing device. The device comprises: a containing cavity (1); a vacuum interface (2) in communication with the containing cavity (1), the vacuum interface (2) being connected with a vacuumizing device so that the vacuumizing device can vacuumize the containing cavity (1); a bearing table (3) arranged in the containing cavity (1), the bearing table (3) being used for supporting a target component; 2. The dry annealing integrated apparatus according to claim 1, wherein a radiation light source (4) arranged in the containing cavity (1) and located at one side of the bearing table (3) used for supporting the target component, the radiation light source (4) being used for generating radiation light rays irradiated towards the target component to perform radiation annealing on the target component.

3. The dry annealing in-line apparatus according to claim 2, wherein The containing cavity (1) contains a gas dispersing plate (5), the gas dispersing plate (5) is provided with a plurality of uniformly distributed flow equalizing ports (51), and the gas dispersing plate (5) is located between the vacuum interface (2) and the radiation light source (4), and the gas at the bearing table (3) flows out from the vacuum interface (2) through the flow equalizing ports (51) of the gas dispersing plate (5).

4. The dry annealing in-line apparatus according to claim 3, wherein The device comprises an upper shell (6) and a middle frame (7), the vacuum interface (2) is arranged on the upper shell (6), the gas dispersing plate (5) is arranged on the middle frame (7), and the upper shell (6) and the middle frame (7) are detachably connected. The radiation light source (4) is mounted on the middle frame (7), a plurality of radiation light sources (4) are arranged, the plurality of radiation light sources (4) are uniformly distributed, and the plurality of radiation light sources (4) are used for generating radiation light rays irradiated towards the target component together; 5. The dry anneal in-line apparatus of claim 3, wherein, And / or, the upper shell (6) and the middle frame (7) are clamped.

6. The dry anneal in-line apparatus of claim 5, wherein, The device further comprises a lower shell (8), the upper shell (6), the middle frame (7) and the lower shell (8) are sequentially connected and jointly form the containing cavity (1), and the bearing table (3) is located in the lower shell (8).

7. The dry annealing in-line apparatus according to claim 6, characterized in that, The lower shell (8) comprises a main shell (83) provided with an opening (81) and an opening and closing door (82) used for plugging the opening (81), the opening and closing door (82) plugs or opens the opening (81) to separate or communicate the containing cavity (1) with the outside, and the target component moves out of or into the containing cavity (1) from the opening (81).

8. The dry annealing in-line apparatus of claim 6, wherein, The main shell (83) is provided with a third clamping part (831), the opening and closing door (82) is provided with a fourth clamping part (821), when the opening and closing door (82) plugs the opening (81), the third clamping part (831) and the fourth clamping part (821) are clamped to fix the opening and closing door (82) on the main shell (83).

9. The dry annealing in-line apparatus according to claim 8, characterized in that, The bearing table (3) is slidably connected with the lower shell (8) to enable the bearing table (3) to move out of or into the containing cavity (1) from the opening (81). The lower shell (8) is provided with a first sliding part (84), the bearing table (3) is connected with a support frame (31), the support frame (31) is provided with a second sliding part (311) slidably connected with the first sliding part (84), and the bearing table (3) is slidably connected with the lower shell (8) through the support frame (31).

10. The dry anneal in-line apparatus of claim 9, wherein, At least one thermocouple (312) is arranged on the bearing table (3) and / or the support frame (31), and is used for monitoring or controlling the temperature of the target component.

11. The dry anneal in-line apparatus of claim 6, wherein, One end of the opening and closing door (82) is hinged to the lower shell (8) through a hinge shaft, and the opening and closing door (82) rotates around the hinge shaft to block or open the opening (81).

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