Bearing device

Abstract

The utility model provides a bearing device which comprises a base, a movable assembly, a clamping piece and a sliding driving assembly, the movable assembly comprises a first driving mechanism and a movable seat, and the movable seat is provided with a sample placing area; the clamping piece can be arranged on the movable seat in a sliding manner, and the clamping piece is provided with a clamping part and an abutting part; the sliding driving assembly comprises a second driving mechanism and a driving piece, and a driving part is arranged on the driving piece; when the bearing device is in a clamping state, the clamping part clamps a sample, and the driving part and the abutting part are arranged in a staggered mode in the moving direction of the movable base. When the bearing device is in the release state, the driving part abuts against the side, close to the sample placing area, of the abutting part, and the clamping part is located outside the sample placing area. The clamping piece and the sliding driving assembly are arranged on the movable seat and the base correspondingly, the clamping piece is separated from the sliding driving assembly when clamping the sample, and therefore the sliding driving assembly does not need to be driven to move together through the movable seat.

Description

Technical Field

[0001] This application relates to the field of optical inspection, and in particular to a carrier device. Background Technology

[0002] In semiconductor manufacturing, defect detection is required at every stage of the process to ensure the quality of semiconductor devices. For example, wafer defect detection checks for defects such as grooves, particles, and scratches, as well as their locations. During the detection process, the sample is placed on a support device. Because the sample needs to be rotated or translated at high speed, especially when the support device only supports the edge of the sample, the edge of the sample needs to be clamped by the support device to ensure the stability of the sample.

[0003] In existing sample-holding devices, to improve sample clamping efficiency, the clamping components are often driven by motors or cylinders to grip the sample edges. However, during sample rotation or translation, the driving components need to move along with the sample, which increases the load on the sample-holding device and reduces its stability. Utility Model Content

[0004] This application provides a support device that aims to solve the problem that existing support devices require the drive components that hold the sample to move together during the rotation or translation of the sample, which increases the load on the support device and reduces its stability.

[0005] According to some embodiments of this application, one aspect of this application provides a carrier device, including:

[0006] Base

[0007] An active component is disposed on the base. The active component includes a first driving mechanism and an active seat. The first driving mechanism is used to drive the active seat to move relative to the base. The active seat has a sample placement area for placing a sample.

[0008] A clamping member is slidably disposed on the movable seat. The clamping member has a clamping part at one end near the sample placement area and an abutting part at one end away from the sample placement area.

[0009] A sliding drive assembly is disposed on the base. The sliding drive assembly includes a second drive mechanism and a drive member. The second drive mechanism is used to drive the drive member to move relative to the base. The drive member is provided with a drive part, which is used to abut against the abutment part to cause the drive member to drive the clamping member to translate.

[0010] When the bearing device is in the clamping state, the clamping member is located in the clamping position, the clamping part clamps the sample, and the driving part and the abutting part are staggered in the moving direction of the movable seat;

[0011] When the carrier is in the released state, the driving member is in the abutting position, the clamping member is in the released position, the driving part abuts against the side of the abutting part near the sample placement area, and the clamping part is located outside the sample placement area.

[0012] In some embodiments, an elastic reset member is provided between the movable seat and the clamping member, the elastic reset member being used to slide the clamping member back to the clamping position.

[0013] In some embodiments, the movable seat and the clamping member are respectively provided with a first connecting rod and a second connecting rod, and the first connecting rod and the second connecting rod are respectively connected to the two ends of the elastic reset member in the sliding direction of the clamping member.

[0014] In some embodiments, a guide rail slider mechanism is provided between the movable seat and the clamping member. The guide rail slider mechanism includes a guide rail and a slider that are slidably engaged in the sliding direction of the clamping member. The guide rail is disposed on the movable seat, and the slider is disposed on the clamping member.

[0015] In some embodiments, the clamping member includes: a connecting plate movably disposed on the movable seat, and a contact plate fixedly connected to the connecting plate, wherein the abutment portion is disposed on the contact plate.

[0016] In some embodiments, a sliding limiting mechanism is provided between the movable seat and the clamping member, the sliding limiting mechanism being used to slide and limit the clamping member.

[0017] In some embodiments, the sliding limiting mechanism includes:

[0018] The first limiting member is disposed on the movable seat;

[0019] The second limiting member is disposed on the clamping member and is located on the side of the first limiting member away from the sample placement area.

[0020] When the clamping member is in the clamping position, the second limiting member abuts against the side of the first limiting member away from the sample placement area.

[0021] In some embodiments, one of the first limiting member and the second limiting member is provided with a threaded hole through it, and an adjusting screw is installed at the threaded hole so that when the clamping member is in the clamping position, the adjusting screw abuts against the other of the first limiting member and the second limiting member.

[0022] In some embodiments, the abutment portion is located on the side of the drive portion away from the sample placement area.

[0023] In some embodiments, multiple clamping members and sliding drive components are provided at circumferential intervals along the movable seat and in a one-to-one correspondence.

[0024] In some embodiments, the first driving mechanism is used to drive the movable seat to rotate relative to the base. The first driving mechanism is located on the periphery of the movable seat away from the sample placement area, and the movable seat and the clamping member expose the back side of the sample. The first driving mechanism is an arc motor.

[0025] The technical solution provided in this application has at least the following advantages:

[0026] The bearing device of this application clamps the edge of the sample by a clamping member and drives the clamping member by a sliding drive assembly. The clamping member and the sliding drive assembly are respectively set on the movable seat and the base. When the clamping member clamps the sample, it separates from the sliding drive assembly. Thus, during the rotation or translation of the sample, it is not necessary to drive the sliding drive assembly to move together through the movable seat. Attached Figure Description

[0027] One or more embodiments are illustrated by way of example with corresponding pictures in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Unless otherwise stated, the pictures in the accompanying drawings do not constitute a limitation on scale. In order to more clearly illustrate the technical solutions in the embodiments of this application or in the conventional technology, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the structure of the support device provided in the embodiments of this application;

[0029] Figure 2 for Figure 1 Top view of the load-bearing device;

[0030] Figure 3 for Figure 1 Side view of the load-bearing device;

[0031] Figure 4 for Figure 1 A schematic diagram of the structure after the movable seat has been rotated;

[0032] Figure 5 for Figure 1 A schematic diagram of the structure at the clamping part. Detailed Implementation

[0033] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0034] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0035] In the description of the embodiments of this application, technical terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0036] In the description of the embodiments of this application, when a component "includes" another component, other components are not excluded unless otherwise stated, and other components may be further included.

[0037] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A exists, A and B exist simultaneously, and B exists. In addition, the character " / " in this document generally indicates that the related objects before and after it have an "or" relationship.

[0038] The terminology used in the description of the various embodiments herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used in the description of the various embodiments and the appended claims, the term "component" is also intended to include the plural form unless the context clearly indicates otherwise.

[0039] The embodiments of this application will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of this application to facilitate a better understanding of the application. However, the technical solutions claimed in this application can be implemented even without these technical details and various variations and modifications based on the following embodiments.

[0040] This application provides a support device that can be used in a detection system to hold the sample during the detection process. Figures 1 to 5 A preferred embodiment of the carrier device provided in this application is shown.

[0041] Please see Figures 1 to 5 In this embodiment, the supporting device 100 includes a base 1, a movable component 2, a clamping member 3, and a sliding drive component 4. The movable component 2 is disposed on the base 1 and includes a first drive mechanism 21 and a movable seat 22. The first drive mechanism 21 is used to drive the movable seat 22 to move relative to the base 1. The movable seat 22 has a sample placement area for placing a sample 200. The clamping member 3 is slidably disposed on the movable seat 22. A clamping part 31 is provided at one end of the clamping member 3 near the sample placement area, and an abutment part 32 is provided at the other end of the clamping member 3 away from the sample placement area. The sliding drive component 4 is disposed on the base 1 and includes a second drive mechanism 4. 1 and driving member 42, the second driving mechanism 41 is used to drive the driving member 42 to move relative to the base 1. The driving member 42 is provided with a driving part 43, which is used to abut against the abutment part 32 so that the driving member 42 drives the clamping member 3 to translate. When the carrying device 100 is in the clamping state, the clamping member 3 is located in the clamping position, the clamping part 31 clamps the sample 200, and the driving part 43 and the abutment part 32 are staggered in the moving direction of the movable seat 22. When the carrying device 100 is in the release state, the driving member 42 is located in the abutment position, the clamping member 3 is located in the release position, the driving part 43 abuts against the side of the abutment part 32 near the sample placement area, and the clamping part 31 is located outside the sample placement area.

[0042] Specifically, sample 200 can be a wafer, etc. The following description will use a wafer as an example. A sample placement area is formed on the movable seat 22. The shape and size of the sample placement area are usually adapted to the shape and size of sample 200, allowing sample 200 to be placed within the sample placement area of ​​the movable seat 22. Since the movable seat 22 is movably mounted on the base 1, when sample 200 is placed within the sample placement area of ​​the movable seat 22, the movable seat 22 can move sample 200 together. The movement of the movable seat 22 can be rotation or translation, allowing the movable seat 22 to move sample 200 by rotation. The following description will use rotation as the movement mode, i.e., the movable seat 22 can be rotatably mounted on the base 1. The rotation axis of the movable seat 22 is perpendicular or approximately perpendicular to the sample placement area. The direction of the rotation axis of the movable seat 22 is defined as vertical, and the orientation of the sample placement area is defined as upward. When sample 200 is placed face up in the sample placement area of ​​movable seat 22, movable seat 22 can drive sample 200 to rotate together along the vertical axis. The base 1 can be plate-shaped or similar.

[0043] The clamping member 3 is disposed on the movable seat 22, allowing the movable seat 22 to rotate the clamping member 3 together. The clamping member 3 is at least partially located outside the sample placement area. One end of the clamping member 3 facing the sample placement area has a clamping portion 31, while the other end has an abutment portion 32. The clamping member 3 can slide relative to the movable seat 22 in both directions towards and away from the sample placement area, thus having a clamping position and a release position. When the clamping member 3 is in the clamping position, the end of the clamping member 3 with the abutment portion 32 is outside the sample placement area, while the clamping portion 31 extends into the sample placement area, allowing the clamping portion 31 to clamp the edge of the sample 200 located within the sample placement area, thereby clamping and fixing the sample 200 within the sample placement area of ​​the movable seat 22. When the clamping member 3 is in the release position, the clamping part 31 of the clamping member 3 retracts outside the sample placement area, the clamping part 31 separates from the sample 200, so that the clamping member 3 releases the sample 200, thereby enabling the sample 200 to be taken out from the sample placement area.

[0044] The sliding drive assembly 4, mounted on the base 1, can drive the clamping member 3, located in the clamping position, to slide to the release position. The sliding drive assembly 4 includes a second drive mechanism 41 and a drive member 42. The second drive mechanism 41 drives the drive member 42 to move relative to the base 1, giving the drive member 42 a standby position and an abutment position. The drive member 42 is provided with a drive part 43 corresponding to the abutment part 32 of the clamping member 3. When the drive member 42 is in the standby position, the clamping member 3 is in the clamping position, and the drive member 42 is separated from the clamping member 3. The drive part 43 of the drive member 42 and the abutment part 32 of the clamping member 3 are offset in the movement direction of the movable seat 22, so that the movable seat 22 can normally drive the clamping member 3, located in the clamping position, to rotate. When the clamping member 3 and the driving member 42 are opposite each other in the direction of movement of the driving member 42, if the driving member 42 in the standby position is driven to move to the abutting position by the sliding driving assembly 4, the driving part 43 of the driving member 42 will abut against the abutting part 32 of the clamping member 3, thereby the driving member 42 can pull the clamping member 3 in the clamping position to slide to the release position.

[0045] The support device 100 is equipped with a clamping member 3 that can be separated from the sliding drive assembly 4. When the clamping member 3 clamps the sample 200, it separates from the sliding drive assembly 4, thereby eliminating the need for the sliding drive assembly 4 to rotate during the rotation of the sample 200. Thus, the support device 100 has a clamping state and a released state. When the support device 100 is in the released state, the drive member 42 is in the abutting position, and the drive part 43 of the drive member 42 abuts against the abutting part 32 of the clamping member 3 on the side near the sample placement area, so that the clamping member 3 can be held in the released position. At this time, the sample 200 can be placed in the sample placement area of ​​the movable seat 22, so that the end of the clamping member 3 near the sample placement area abuts against the lower side of the edge of the sample 200, thereby supporting the edge of the sample 200 by the end of the clamping member 3 near the sample placement area. After the sample 200 is placed in the sample placement area, the second driving mechanism 41 drives the driving component 42 to move to the standby position. The driving component 42 separates from the clamping component 3. At this time, the clamping component 3 can slide to the clamping position, so that the clamping component 3 clamps the edge of the sample 200 located in the sample placement area. In this way, the sample 200 can be rotated by the movable seat 22 and the clamping component 3.

[0046] The bearing device 100 of this application clamps the edge of the sample 200 by clamping member 3 and drives the clamping member 3 by sliding drive component 4. The clamping member 3 and the sliding drive component 4 are respectively disposed on the movable seat 22 and the base 1. When clamping the sample 200, the clamping member 3 separates from the sliding drive component 4. Thus, during the rotation or translation of the sample 200, it is not necessary to drive the sliding drive component 4 to move together through the movable seat 22.

[0047] The movable seat 22 can be used to support the sample 200. The specific shape and style of the movable seat 22 can be set according to the actual situation. For example, the movable seat 22 can be a support plate, a support platform, or a support ring, etc. Optionally, please refer to Figures 1 to 4 In this embodiment, the movable seat 22 is a support ring.

[0048] Specifically, the movable seat 22 is arranged in a ring shape and can rotate relative to the base 1 along the central axis of the movable seat 22. When the sample 200 is placed in the sample placement area of ​​the movable seat 22, the middle part of the sample 200 is vertically aligned with the inner area of ​​the movable seat 22, thereby exposing the front and back sides of the sample 200.

[0049] Sample 200 is placed within the sample placement area of ​​the support ring. Sample 200 can be placed on the upper side of the support ring, meaning the sample placement area is located on the upper surface of the support ring; or sample 200 can be placed on the inner side of the support ring, meaning the sample placement area is located on the inner side of the support ring. Optionally, please refer to... Figures 1 to 4 In this embodiment, the clamping member 3 has one end with the abutment portion 32 located inside the support ring to form a sample placement area inside the support ring.

[0050] The first drive mechanism 21 is used to drive the movable seat 22 to rotate relative to the base 1. The specific configuration of the first drive mechanism 21 is not particularly limited. For example, the first drive mechanism 21 may include a motor, which is connected to the movable seat 22 via a pulley transmission mechanism or a gear transmission mechanism. Optionally, please refer to [link to relevant documentation]. Figure 1 , Figure 2 and Figure 4 In this embodiment, the first drive mechanism 21 is located on the periphery of the movable seat 22 away from the sample placement area. The movable seat 22 and the clamping member 3 expose the back side of the sample 200. The first drive mechanism 21 is an arc-shaped motor. This arrangement of the first drive mechanism 21 is relatively simple.

[0051] The clamping member 3 can slide horizontally relative to the movable seat 22, and the specific sliding direction of the clamping member 3 can be set according to the actual situation. Optionally, please refer to Figures 1 to 4 In this embodiment, the clamping member 3 is arranged on the movable seat 22 in a radial manner that allows it to slide along the movable seat 22.

[0052] Specifically, the sliding drive assembly 4 drives the clamping member 3 to slide radially along the movable seat 22. The clamping member 3 has a clamping portion 31 at one end radially closer to the sample placement area and an abutment portion 32 at the other end radially away from the sample placement area. When the clamping member 3 is in the released position, after the sample 200 is placed in the sample placement area of ​​the movable seat 22, the end of the clamping member 3 near the sample placement area abuts against the lower side of the edge of the sample 200, thereby supporting the edge of the sample 200 by the end of the clamping member 3 near the sample placement area. Then, the clamping member 3, which is in the released position, slides to the clamping position, and the clamping portion 31 of the clamping member 3 forms an abutment limit on the sample 200 in the radial direction, thereby clamping the edge of the sample 200 by the clamping member 3. The following description will take the example of the clamping member 3 being able to slide radially along the movable seat 22.

[0053] The specific shape of the end of the clamping member 3 with the clamping part 31 can be set according to the actual situation. For example, the end of the clamping member 3 with the clamping part 31 can be forked, strip-shaped, or plate-shaped. Similarly, the specific arrangement of the clamping part 31 can also be set according to the actual situation. For example, the clamping part 31 can be an abutment surface or a protrusion.

[0054] Optionally, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4 In this embodiment, a rubber block is provided at one end of the clamping member 3 near the sample placement area, and the rubber block serves as the clamping part 31. By using the rubber block as the clamping part 31, damage to the sample 200 can be avoided when the edge of the sample 200 is clamped by the clamping member 3.

[0055] The number of clamping parts 31 provided on each clamping member 3 can be one or multiple clamping parts spaced apart along the circumference of the movable seat 22. Optionally, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 In this embodiment, the end of the clamping member 3 near the sample placement area is forked and has two fork teeth. There are two clamping parts 31, which are respectively disposed on the two fork teeth of the clamping member 3.

[0056] The number of clamping members 3 can be one or multiple members spaced apart along the circumference of the movable seat 22. Optionally, please refer to... Figure 1 , Figure 2 and Figure 4In this embodiment, multiple clamping members 3 and sliding drive components 4 are arranged at intervals and correspondingly along the circumference of the movable seat 22. This allows the sample 200 to be held more stably by multiple clamping members 3, improving the stability of the support device 100. For example, two clamping members 3 are provided, arranged at 180°, so that the clamping portions 31 of the two clamping members 3 are radially opposite each other.

[0057] Optionally, please refer to Figure 5 In this embodiment, an elastic reset member 5 is provided between the movable seat 22 and the clamping member 3. The elastic reset member 5 is used to slide the clamping member 3 back to the clamping position.

[0058] Specifically, the elastic reset element 5 can be a spring or a silicone component, etc. The following description will use a spring as an example. The elastic reset element 5 is arranged along the sliding direction of the clamping element 3, and is located between the movable seat 22 and the clamping element 3. Both ends of the elastic reset element 5 are connected to the movable seat 22 and the clamping element 3, respectively. When the sliding drive assembly 4 drives the clamping element 3, located in the clamping position, to the release position, the elastic reset element 5 is stretched or compressed. At this time, the bearing device 100 is in the released state, allowing the sample 200 to be placed in the sample placement area of ​​the movable seat 22, so that the end of the clamping element 3 near the sample placement area abuts against the lower side of the edge of the sample 200, thereby supporting the edge of the sample 200 through the end of the clamping element 3 near the sample placement area. After the sample 200 is placed, the second drive mechanism 41 drives the drive member 42, which is located in the contact position, to move to the standby position. The drive member 42 separates from the clamping member 3. At this time, the elastic reset member 5, which is stretched or compressed, can drive the clamping member 3, which is located in the release position, to automatically slide to the clamping position, so that the clamping member 3 automatically clamps the edge of the sample 200, and the bearing device 100 switches from the release state to the clamping state.

[0059] Optionally, please refer to Figure 5 In this embodiment, the movable seat 22 and the clamping member 3 are respectively provided with a first connecting rod and a second connecting rod, which are respectively connected to the two ends of the elastic reset member 5 in the sliding direction of the clamping member 3.

[0060] Specifically, the movable seat 22 and the clamping member 3 are fixedly connected to the elastic reset member 5 through the first connecting rod and the second connecting rod, respectively. By setting the first connecting rod and the second connecting rod, it is easy to fix the elastic reset member 5 between the movable seat 22 and the clamping member 3.

[0061] Optionally, please refer to Figure 5 In this embodiment, the movable seat 22 and / or the clamping member 3 are provided with a receiving groove for accommodating the elastic reset member 5.

[0062] Specifically, there is a receiving groove between the movable seat 22 and the clamping member 3, and the elastic reset member 5 is located in the receiving groove. This not only enables the elastic reset member 5 to be installed and positioned between the movable seat 22 and the clamping member 3, but also makes the sliding connection structure between the movable seat 22 and the clamping member 3 more compact.

[0063] Optionally, please refer to Figure 5 In this embodiment, a guide rail slider mechanism is provided between the movable seat 22 and the clamping member 3.

[0064] Specifically, the guide rail slider mechanism includes a guide rail and a slider that are slidably engaged in the sliding direction of the clamping member 3. One of the movable seat 22 and the clamping member 3 is provided with a guide rail, and the other with a slider. For example, the guide rail can be provided on the movable seat 22, and the slider can be provided on the clamping member 3. Thus, by forming a sliding guide engagement between the slider and the guide rail in the sliding direction of the clamping member 3, the guide rail slider mechanism can provide a sliding guide for the clamping member 3.

[0065] A sliding connection structure is provided between the movable seat 22 and the clamping member 3. The sliding connection structure may include at least one of the above-mentioned first connecting rod, second connecting rod, elastic reset member 5, receiving groove, guide rail slider mechanism, etc. The sliding connection structure may be directly provided between the movable seat 22 and the clamping member 3; or the sliding connection structure may be provided between an independent component on the movable seat 22 and the clamping member 3.

[0066] Optionally, please refer to Figure 1 and Figure 5 In this embodiment, a mounting plate 23 is provided on the movable seat 22 corresponding to the clamping member 3, and the clamping member 3 is disposed on the mounting plate 23. By providing the mounting plate 23, a sliding connection structure can be disposed between the mounting plate 23 and the clamping member 3, thereby facilitating the provision of a sliding connection structure between the movable seat 22 and the clamping member 3.

[0067] Optionally, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 In this embodiment, the clamping member 3 includes: a connecting plate 33 movably disposed on the movable seat 22, and a contact plate 34 fixedly connected to the connecting plate 33, with an abutment portion 32 disposed on the contact plate 34.

[0068] Specifically, the clamping member 3 includes a connecting plate 33 and a contact plate 34. The connecting plate 33 is slidably disposed on the mounting plate 23 of the movable seat 22, and the contact plate 34 is fixedly disposed on the connecting plate 33. A sliding connection structure is disposed between the connecting plate 33 and the mounting plate 23. Thus, the clamping member 3 is composed of the connecting plate 33 and the contact plate 34. The sliding connection structure and the abutment part 32 are respectively provided on the connecting plate 33 and the contact plate 34, which helps to reduce the processing difficulty of the clamping member 3.

[0069] Optionally, please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 In this embodiment, a sliding limiting mechanism 6 is provided between the movable seat 22 and the clamping member 3. The sliding limiting mechanism 6 is used to slide and limit the clamping member 3.

[0070] Specifically, the sliding limit mechanism 6 can limit the clamping member 3 within the sliding stroke of the clamping member 3. So, during the process of the elastic reset member 5 driving the clamping member 3 to automatically slide back to the clamping position, the sliding limit mechanism 6 can slide and position the clamping member 3 located in the clamping position.

[0071] The specific configuration of the sliding limit mechanism 6 can be set according to the actual situation. Optionally, please refer to [the relevant documentation]. Figure 1 and Figure 5 In this embodiment, the sliding limiting mechanism 6 includes a first limiting member 61 and a second limiting member 62. The first limiting member 61 is disposed on the movable seat 22; the second limiting member 62 is disposed on the clamping member 3, and the second limiting member 62 is located on the side of the first limiting member 61 away from the sample placement area; when the clamping member 3 is in the clamping position, the second limiting member 62 abuts against the side of the first limiting member 61 away from the sample placement area.

[0072] Specifically, the first limiting member 61 can be disposed on other parts of the mounting plate 23 or movable seat 22 near the clamping member 3, while the second limiting member 62 can be disposed on the connecting plate 33, contact plate 34, or other parts of the clamping member 3 corresponding to the first limiting member 61, so that the clamping member 3 can drive the second limiting member 62 to slide together. The second limiting member 62 is located on the side of the first limiting member 61 away from the sample placement area in the sliding direction of the clamping member 3. When the clamping member 3 is in the released position, the second limiting member 62 and the first limiting member 61 are spaced apart. When the elastic reset member 5 causes the clamping member 3, which is in the release position, to automatically slide to the clamping position, the clamping member 3 causes the second limiting member 62 to gradually move closer to the first limiting member 61 until the clamping member 3 slides to the clamping position, at which point the second limiting member 62 abuts against the first limiting member 61. In this way, through the cooperation of the second limiting member 62 and the first limiting member 61, the maximum sliding distance of the clamping member 3 under the restoring force of the elastic reset member 5 is limited, thereby realizing the sliding positioning of the clamping member 3 in the clamping position.

[0073] Further, please refer to Figure 1 and Figure 5 In this embodiment, one of the first limiting member 61 and the second limiting member 62 is provided with a threaded hole, and an adjusting screw 63 is installed at the threaded hole so that when the clamping member 3 is in the clamping position, the adjusting screw 63 abuts against the other of the first limiting member 61 and the second limiting member 62.

[0074] Specifically, the adjusting screw 63 is arranged along the sliding direction of the clamping member 3. The adjusting screw 63 can be installed on the first limiting member 61, i.e., the first limiting member 61 is provided with a threaded hole; the adjusting screw 63 can also be installed on the second limiting member 62, i.e., the second limiting member 62 is provided with a threaded hole. The following description will take the installation of the adjusting screw 63 on the first limiting member 61 as an example. The second limiting member 62 is provided with a threaded hole that runs through the clamping member 3 along the sliding direction. The tail of the adjusting screw 63 is screwed into the threaded hole from the side of the second limiting member 62 away from the first limiting member 61, and the tail of the adjusting screw 63 protrudes from the second limiting member 62 towards the first limiting member 61. Thus, when the clamping member 3 is in the clamping position, the second limiting member 62 abuts against the side of the first limiting member 61 away from the sample placement area through the tail of the adjusting screw 63. By rotating the adjusting screw 63 so that the tail protrudes beyond the second limiting member 62, the travel of the second limiting member 62 relative to the first limiting member 61 can be adjusted, so that the adjusting screw 63 can limit the maximum sliding distance of the clamping member 3 under the restoring force of the elastic reset member 5.

[0075] The sliding drive assembly 4 can drive the clamping member 3, located in the clamping position, to slide to the release position. The sliding drive assembly 4 includes a second drive mechanism 41 and a drive member 42. The second drive mechanism 41 can drive the drive member 42 to move relative to the base 1, thereby driving the clamping member 3, located in the clamping position, to slide to the release position. The specific movement mode of the drive member 42 can be set according to the actual situation. The movement mode of the drive member 42 can include at least one of rotation, up and down movement, and horizontal sliding, as long as it can achieve the engagement and disengagement of the drive member 42 and the clamping member 3.

[0076] Optionally, please refer to Figures 1 to 4 In this embodiment, the driving member 42 is slidably disposed relative to the base 1. The driving member 42 can slide horizontally relative to the base 1, thereby enabling the engagement and disengagement of the driving member 42 and the clamping member 3. This mode of movement of the driving member 42 is relatively simple. Furthermore, the sliding direction of the driving member 42 is typically radial to the movable seat 22. The following description will use an example where the driving member 42 can slide radially relative to the base 1 along the movable seat 22.

[0077] The second drive mechanism 41 can drive the drive member 42 to slide radially along the movable seat 22. The second drive mechanism 41 can be a motor or a cylinder, etc. When the bearing device 100 holds the sample 200, the second drive mechanism 41 drives the drive member 42, which is in the standby position, to slide away from the sample 200 towards the abutment position. Then, the drive part 43 on the drive member 42 will abut against the abutment part 32 on the clamping member 3, so that the drive member 42 pulls the clamping member 3, which is in the clamping position, to slide away from the sample 200 towards the release position, thereby releasing the sample 200. At this time, the elastic reset member 5 is stretched or compressed.

[0078] During the clamping of a new sample 200, the second drive mechanism 41 drives the drive member 42, located in the abutment position, to slide towards the sample 200 to the standby position. The drive member 42 then separates from the clamping member 3. At this time, the clamping member 3, located in the release position, slides towards the sample 200 to the clamping position under the restoring force of the elastic reset member 5, thereby clamping the sample 200. When the drive member 42 and the clamping member 3 separate, the first drive mechanism 21 drives the movable seat 22 to rotate the sample 200.

[0079] The clamping member 3 is provided with an abutment portion 32. The specific arrangement of the abutment portion 32 can be set according to the actual situation. For example, the abutment portion 32 can be an abutment surface or a protrusion, etc. Optionally, please refer to Figure 1 , Figure 4 and Figure 5In this embodiment, a first contact protrusion 32a is provided on the surface of the clamping member 3 near the movable seat 22. The first contact protrusion 32a is an abutment portion 32. Setting the abutment portion 32 as the first contact protrusion 32a is a relatively simple way of setting the abutment portion 32.

[0080] The driving component 42 is provided with a driving part 43. The specific arrangement of the driving part 43 can be set according to the actual situation. For example, the driving part 43 can be an abutment surface or a protrusion. Optionally, please refer to Figure 1 , Figure 4 and Figure 5 In this embodiment, a second contact protrusion 43a is provided on the surface of the driving member 42 near the clamping member 3. The second contact protrusion 43a is the driving part 43. Setting the driving member 42 as the second contact protrusion 43a is a relatively simple way of setting the driving member 42.

[0081] Optionally, please refer to Figures 1 to 4 In this embodiment, the driving part 43 is disposed at one end of the driving member 42 near the sample placement area.

[0082] Specifically, the driving member 42 is provided with a driving part 43 at one end near the sample placement area, while the driving member 42 is located on the outside of the clamping member 3 at the other end away from the sample placement area. By setting the driving member 42 in this way, when the driving member 42 is separated from the clamping member 3, interference of the driving member 42 with the rotation of the movable seat 22 and the clamping member 3 can be avoided.

[0083] Optionally, please refer to Figures 1 to 4 In this embodiment, the contact portion 32 is located on the side of the drive portion 43 away from the sample placement area.

[0084] Specifically, the driving member 42 and the clamping member 3 are located on the upper side of the movable seat 22. From top to bottom, one end of the driving member 42 with the driving part 43 is located between the end of the clamping member 3 with the abutment part 32 and the movable seat 22. The driving part 43 protrudes from the upper surface of the driving member 42, and the abutment part 32 protrudes from the lower surface of the clamping member 3. When the driving member 42 is in the standby position, the driving part 43 is located on the side of the abutment part 32 that is radially closer to the sample placement area, and a radial gap is reserved between the driving part 43 and the abutment part 32, causing them to be offset in the rotation direction of the movable seat 22. This achieves separation of the driving member 42 and the clamping member 3. This arrangement not only avoids interference from the driving member 42 in the rotation of the clamping member 3 driven by the movable seat 22, but also makes the structure between the driving member 42 and the clamping member 3 more compact.

[0085] Those skilled in the art will understand that the above-described embodiments are specific examples of implementing this application, and in practical applications, various changes can be made in form and detail without departing from the spirit and scope of the embodiments of this application. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the embodiments of this application; therefore, the scope of protection of the embodiments of this application should be determined by the scope defined in the claims.

Claims

1. A supporting device, characterized in that, include: Base An active component is disposed on the base. The active component includes a first driving mechanism and an active seat. The first driving mechanism is used to drive the active seat to move relative to the base. The active seat has a sample placement area for placing a sample. A clamping member is slidably disposed on the movable seat. The clamping member has a clamping part at one end near the sample placement area and an abutting part at one end away from the sample placement area. A sliding drive assembly is disposed on the base. The sliding drive assembly includes a second drive mechanism and a drive member. The second drive mechanism is used to drive the drive member to move relative to the base. The drive member is provided with a drive part, which is used to abut against the abutment part to cause the drive member to drive the clamping member to translate. When the bearing device is in the clamping state, the clamping member is located in the clamping position, the clamping part clamps the sample, and the driving part and the abutting part are staggered in the moving direction of the movable seat; When the carrier is in the released state, the driving member is in the abutting position, the clamping member is in the released position, the driving part abuts against the side of the abutting part near the sample placement area, and the clamping part is located outside the sample placement area.

2. The bearing device according to claim 1, characterized in that, An elastic reset member is provided between the movable seat and the clamping member, and the elastic reset member is used to slide the clamping member back to the clamping position.

3. The bearing device according to claim 2, characterized in that, The movable seat and the clamping member are respectively provided with a first connecting rod and a second connecting rod, and the first connecting rod and the second connecting rod are respectively connected to the two ends of the elastic reset member in the sliding direction of the clamping member.

4. The bearing device according to claim 1, characterized in that, A guide rail and slider mechanism is provided between the movable seat and the clamping member. The guide rail and slider mechanism includes a guide rail and a slider that are slidably engaged in the sliding direction of the clamping member. The guide rail is disposed on the movable seat, and the slider is disposed on the clamping member.

5. The bearing device according to claim 1, characterized in that, The clamping member includes: a connecting plate movably disposed on the movable seat, and a contact plate fixedly connected to the connecting plate, wherein the abutting part is disposed on the contact plate.

6. The bearing device according to any one of claims 1 to 5, characterized in that, A sliding limiting mechanism is provided between the movable seat and the clamping member, and the sliding limiting mechanism is used to slide and limit the clamping member.

7. The bearing device according to claim 6, characterized in that, The sliding limiting mechanism includes: The first limiting member is disposed on the movable seat; The second limiting member is disposed on the clamping member and is located on the side of the first limiting member away from the sample placement area. When the clamping member is in the clamping position, the second limiting member abuts against the side of the first limiting member away from the sample placement area.

8. The bearing device according to claim 7, characterized in that, One of the first limiting member and the second limiting member has a threaded hole through it, and an adjusting screw is installed at the threaded hole so that when the clamping member is in the clamping position, the adjusting screw abuts against the other of the first limiting member and the second limiting member.

9. The bearing device according to claim 1, characterized in that, The abutment portion is located on the side of the drive portion away from the sample placement area.

10. The bearing device according to claim 1, characterized in that, Multiple clamping members and sliding drive components are provided at intervals along the circumference of the movable seat and correspond to each other.

11. The bearing device according to claim 1, characterized in that, The first driving mechanism is used to drive the movable seat to rotate relative to the base. The first driving mechanism is located on the periphery of the movable seat away from the sample placement area. The movable seat and the clamping member expose the back side of the sample. The first drive mechanism is an arc-shaped motor.

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