Liquid mixing device for producing and preparing etching liquid
By optimizing the mixing process of the etching solution through the design of multi-layer stirring blades and the heating and cooling system, the problems of uneven mixing and air bubbles in traditional devices are solved, thereby improving the quality and stability of the etching solution.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-14
- Publication Date
- 2026-03-06
AI Technical Summary
Traditional mixing devices suffer from uneven mixing, low efficiency, and are prone to generating bubbles, which affects the quality and stability of the etching solution.
The stirring blades feature a multi-layer design with each layer having a different angle. Equipped with needles, and combined with heating and cooling mechanisms, the stirring process is optimized through a PLC control system to ensure stable temperature.
It improves stirring efficiency, reduces bubble accumulation, and ensures uniform mixing and quality stability of the etching solution.
Smart Images
Figure CN223969834U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mixing device technology, specifically to a mixing device for producing and preparing etching solution. Background Technology
[0002] In semiconductor manufacturing, microelectronics processing, and other fields, etching solutions are essential chemical reagents whose performance directly affects the processing quality of products. The preparation of etching solutions requires mixing various chemical raw materials in a specific ratio and thorough stirring to ensure uniform mixing. Traditional mixing devices often employ simple stirrers, which suffer from problems such as uneven mixing, low efficiency, and the generation of air bubbles, thus affecting the quality and stability of the etching solution. Utility Model Content
[0003] The purpose of this invention is to address the shortcomings and deficiencies of existing technologies by providing a mixing device for the production and preparation of etching solutions.
[0004] To achieve the above objectives, the technical solution adopted by this utility model is: a mixing device for producing etching solution, comprising a mixing tank, wherein a feed inlet is provided at the top of the mixing tank and a discharge outlet is provided at the bottom, and a valve is provided on the discharge outlet. The innovation lies in that it also includes a stirring mechanism, a heating mechanism and a cooling mechanism; the stirring mechanism includes a stirring motor, a stirring shaft and stirring blades, wherein the stirring motor is located at the top of the mixing tank, the stirring shaft is located inside the mixing tank and is drivenly connected to the stirring motor, and the stirring blades are multi-layered, with each layer of stirring blades having a different angle, and each stirring blade is provided with needles in a matrix.
[0005] Furthermore, the heating mechanism includes a heating coil and a temperature sensor. The heating coil surrounds the outside of the mixing tank, and the temperature sensor is embedded inside the mixing tank for real-time monitoring of the temperature inside the mixing tank.
[0006] Furthermore, the cooling mechanism includes a cooling coil, a circulating pump, pipes, and a coolant storage tank filled with coolant. The cooling coil is located on the inner wall of the mixing tank, and the cooling coil is connected to the circulating pump and the coolant storage tank through pipes to form a circulating cooling system.
[0007] Furthermore, needles are provided on both the front and back sides of the stirring blade.
[0008] Furthermore, the needles have a divergent distribution.
[0009] Furthermore, it also includes a control system, which includes a PLC controller and a touch screen. The PLC controller receives data from the temperature sensor and controls the operation of the stirring mechanism, heating mechanism and cooling mechanism according to a preset program; the touch screen is used for human-machine interaction.
[0010] The beneficial effects of this utility model after adopting the above structure are as follows:
[0011] 1. This utility model expands the mixing range and improves the mixing efficiency by setting up a multi-layered mixing blade with different angles for each layer of mixing blades. At the same time, each mixing blade is matrix-set with needles, which can puncture the air bubbles formed during the mixing process, reduce the accumulation of air bubbles, and help disperse large air bubbles into smaller air bubbles, accelerating their dissolution or rise.
[0012] 2. This utility model ensures stable temperature inside the mixing tank by setting up a heating mechanism and a cooling mechanism, thereby improving the quality of the etching solution. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the structure of this utility model;
[0014] Figure 2 This is a schematic diagram of the structure of the stirring blade in this utility model.
[0015] Explanation of reference numerals in the attached figures:
[0016] 1 Mixing tank, 2 Inlet, 3 Outlet, 4 Valve, 5 Stirring mechanism, 51 Stirring motor, 52 Stirring shaft, 53 Stirring blade, 54 Needle, 6 Heating mechanism, 61 Heating coil, 62 Temperature sensor, 7 Cooling mechanism, 71 Cooling coil, 72 Circulating pump, 73 Pipeline, 74 Coolant storage tank. Detailed Implementation
[0017] The present invention will be further described below with reference to the accompanying drawings.
[0018] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model.
[0019] See Figure 1-2A mixing device for producing etching solution includes a mixing tank 1, with an inlet 2 at the top and an outlet 3 at the bottom. A valve 4 is installed on the outlet 3. The device also includes a stirring mechanism 5, a heating mechanism 6, and a cooling mechanism 7. The stirring mechanism 5 includes a stirring motor 51, a stirring shaft 52, and stirring blades 53. The stirring motor 52 is located at the top of the mixing tank 1, and the stirring shaft 52 is located inside the mixing tank 1 and is connected to the stirring motor 52. The stirring blades 53 are multi-layered, with each layer of stirring blades having a different angle, and each stirring blade is provided with a matrix of needles 54. Specifically, the mixing tank has a cylindrical structure with a conical bottom for easy liquid discharge; the inner wall of the mixing tank is coated with a corrosion-resistant material to adapt to the chemical properties of the etching solution; the stirring motor 51 is located at the top of the mixing tank 1 and drives the stirring blades 53 to rotate via the stirring shaft 52; the stirring blades have a multi-layer design with different angles for each layer to achieve a comprehensive mixing effect and improve stirring efficiency; at the same time, each stirring blade 53 is equipped with a matrix of needles 54, which can puncture the air bubbles formed during stirring, reduce air bubble accumulation, and help disperse large air bubbles into smaller air bubbles, accelerating their dissolution or rise; the heating mechanism 6 and the cooling mechanism 7 ensure stable temperature inside the mixing tank, thereby improving the quality of the etching solution; the stirring blades 53 include straight or curved structures.
[0020] In this embodiment, the heating mechanism 6 includes a heating coil 61 and a temperature sensor 62. The heating coil 61 surrounds the outside of the mixing tank 1, and the temperature sensor 62 is embedded inside the mixing tank 1 to monitor the temperature inside the mixing tank in real time. The heating coil 61 surrounds the outer wall of the mixing tank 1 and heats the liquid inside the mixing tank by electric heating; the temperature sensor 62 monitors the temperature inside the mixing tank in real time and feeds the data back to the control system.
[0021] In this embodiment, the cooling mechanism 7 includes a cooling coil 71, a circulating pump 72, a pipe 73, and a coolant storage tank 74 filled with coolant. The cooling coil 71 is located on the inner wall of the mixing tank and is connected to the circulating pump and the coolant storage tank through the pipe to form a circulating cooling system. The cooling coil 71 is located on the inner wall of the mixing tank and is fixed with bolts. The circulating coolant generated by the circulating pump 72, the pipe 73, and the coolant storage tank 74 cools the liquid in the mixing tank.
[0022] In this embodiment, needles 54 are provided on both sides of the stirring blade 54 to ensure that the stirring blade 54 can puncture air bubbles when rotating in both directions.
[0023] In this embodiment, the needles 54 are distributed in a divergent pattern to increase the contact area and thus improve efficiency.
[0024] In this embodiment, a control system is also included, which includes a PLC controller and a touch screen. The PLC controller receives data from the temperature sensor and controls the operation of the stirring mechanism, heating mechanism and cooling mechanism according to a preset program. The touch screen is used for human-machine interaction, and operators can set parameters and monitor the operating status of the equipment through the touch screen.
[0025] The above description is only used to illustrate the technical solution of this utility model and is not intended to limit it. Any other modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model, as long as they do not depart from the spirit and scope of the technical solution of this utility model, should be covered within the scope of the claims of this utility model.
Claims
1. A mixing apparatus for producing etching solution, comprising a mixing tank, wherein a feed inlet is provided at the top of the mixing tank and a discharge outlet is provided at the bottom, and a valve is provided on the discharge outlet, characterized in that: It also includes stirring mechanism, heating mechanism and cooling mechanism; the stirring mechanism includes stirring motor, stirring shaft and stirring blade, the stirring motor is located at the top of the mixing tank, the stirring shaft is located inside the mixing tank and is in transmission connection with the stirring motor, the stirring blade is designed in multiple layers, the angle of each layer is different, and needles are arranged on each stirring blade in matrix.
2. The mixed solution device for producing an etching solution according to claim 1, wherein: The heating mechanism includes heating coil and temperature sensor, the heating coil is surrounded outside the mixing tank, and the temperature sensor is embedded inside the mixing tank for real-time monitoring of the temperature in the mixing tank.
3. The mixed solution device for producing an etching solution according to claim 1, wherein: The cooling mechanism includes cooling coil, circulating pump, pipeline and cooling liquid storage tank filled with cooling liquid, the cooling coil is located on the inner wall of the mixing tank, the cooling coil is connected with the circulating pump and the cooling liquid storage tank through the pipeline to form a circulating cooling system.
4. The mixed solution device for producing an etching solution according to claim 1, wherein: The needles are arranged on both sides of the stirring blade.
5. The mixed solution device for producing an etching solution according to claim 1 or 4, wherein the mixed solution device is used for producing an etching solution for dry etching of a silicon substrate. The needles are distributed in a divergent manner.
6. The mixed solution device for producing an etching solution according to claim 1, wherein: It also includes a control system, which includes PLC controller and touch screen, the PLC controller receives data of the temperature sensor and controls the work of the stirring mechanism, heating mechanism and cooling mechanism according to preset program; the touch screen is used for man-machine interaction.