Adjustable air inlet structure and vacuum coating equipment

Abstract

The utility model relates to the field of vacuum coating equipment, and provides an adjustable air inlet structure and vacuum coating equipment, a flexible connecting piece of the adjustable air inlet structure is elastically connected with a first flange and a second flange, the second flange is suitable for being connected with the vacuum coating equipment in a sealed mode, and a first pipeline is arranged on the first flange in a sealed mode; the first pipeline is suitable for entering the vacuum coating equipment, and the fixing screw is suitable for penetrating through the first flange and the second flange and adjusting the vertical position of the first pipeline through the fixing nut; the quick connecting piece is arranged at the tail end of the first pipeline and is quickly connected with the special gas inlet pipeline. The vacuum coating equipment comprises the adjustable air inlet structure. The vertical position of the first pipeline can be adjusted only by adjusting the distance between the first flange and the second flange through the fixing screw rod and the fixing nut, and then the vertical position of the special gas inlet pipeline is adjusted, so that process experiment requirements corresponding to different positions are met; and the tedious operation caused by frequently replacing the special gas inlet pipeline can be effectively solved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and further to an adjustable air intake structure and vacuum coating equipment. Background Technology

[0002] For vacuum coating process testing, the original special gas inlet pipeline is fixed and cannot be adjusted in any position. Once the position of the special gas needs to be changed for process testing, the special gas inlet pipeline in the new position can only be replaced to meet the process test requirements of the special gas inlet pipeline in the changed position. If the position is changed more often to meet different process tests, multiple special gas inlet pipelines in different positions are required to match the process tests. This not only makes the test operation cumbersome, but also wastes the time of frequent replacements and the cost of multiple special gas inlet pipelines in different positions.

[0003] Furthermore, if different process experiments need to be tested, it will require repeated replacement of the structure to adjust the air intake position (each replacement requires attention to the structural sealing) and then testing the process experiments at different positions. The more the test positions change, the greater the waste of time and cost of multiple structural components due to frequent replacements. Once the sealing of the installed structure is problematic, the process needs to be stopped, the equipment paused, and the structure disassembled and reassembled to check the cause of the sealing problem. Even if a leak test is performed after each installation and a problem is found, it still needs to be disassembled and reassembled. Utility Model Content

[0004] To address the aforementioned technical problems, the purpose of this utility model is to provide an adjustable air intake structure and vacuum coating equipment. By simply adjusting the distance between the first and second flanges using a fixing screw and a fixing nut, the vertical position of the first pipeline can be adjusted, thereby adjusting the vertical position of the special gas intake pipeline to meet the process experimental requirements corresponding to different positions. This effectively solves the cumbersome operation caused by frequently changing the special gas intake pipeline.

[0005] To achieve the above objectives, this utility model provides an adjustable air intake structure, including an adjustment component and a quick connector. The adjustment component includes a first flange, a second flange, a flexible connector, a fixing screw, and a fixing nut. The flexible connector elastically connects the first flange and the second flange. The second flange is adapted to seal and connect to a vacuum coating equipment. A first pipeline is sealed on the first flange. The first pipeline is adapted to pass through the flexible connector and the first flange and enter the interior of the vacuum coating equipment. The fixing screw is adapted to pass through and connect the first flange and the second flange, and the relative position of the first flange and the second flange is adjusted by the fixing nut, so that the vertical position of the first pipeline is adjustable.

[0006] The quick connector is located at the end of the first pipeline and quickly connects to the special gas intake pipeline.

[0007] In some embodiments, the quick connector includes a first connector, which includes a first fitting body, a first ferrule, and a first nut. The first nut is adapted to tighten the first ferrule so that the special gas intake pipe is sealed and fixed between the first ferrule and the first fitting body. After the first nut is loosened, the angle of the special gas intake pipe can be adjusted by rotating the special gas intake pipe.

[0008] In some embodiments, the quick connector further includes a second connector and a second pipeline. The second connector includes a second fitting body, a second ferrule, and a second nut. One end of the second fitting body is fixedly connected to the first pipeline, and the other end is detachably connected to the second pipeline. The second nut is adapted to tighten the second ferrule so that the second pipeline is sealed and fixed between the second ferrule and the second fitting body. After loosening the second nut, the front and rear positions of the special gas intake pipeline can be adjusted by replacing the second pipeline with different lengths.

[0009] In some embodiments, the first connector body has a main channel and two branch channels, the main channel being adapted to connect to the second pipeline or the first pipeline, and the branch channels being adapted to connect to the special gas inlet pipeline.

[0010] In some embodiments, a plug is provided at the end of the special gas inlet pipe away from the first connector.

[0011] In some embodiments, the adjustment assembly further includes a sealing ring that is sealed between the second flange and the vacuum coating equipment.

[0012] According to another aspect of this application, a vacuum coating apparatus is further provided, including any of the adjustable air inlet structures described in the preferred embodiments above.

[0013] Compared with the prior art, the adjustable air intake structure and vacuum coating equipment provided by this utility model have at least one of the following beneficial effects:

[0014] 1. The vertical position of the first pipeline can be adjusted by simply using the fixing screw and fixing nut to adjust the distance between the first and second flanges, thereby adjusting the vertical position of the special gas inlet pipeline to meet the process experiment requirements corresponding to different positions. This effectively solves the cumbersome operation caused by frequently changing the special gas inlet pipeline.

[0015] 2. The quick-connect fitting enables a rapid and sealed connection between the special gas intake pipe and the first pipe. This not only ensures the robustness and sealing of the connection between the intake pipe and the first pipe, but also provides flexibility in adjusting the angle of the special gas intake pipe. After loosening the first nut, the special gas intake pipe can rotate freely, and the operator can adjust its angle as needed to adapt to different installation requirements.

[0016] 3. By replacing the second pipe with one of different lengths, the distance between the special gas intake pipe and the first pipe can be adjusted, thus enabling the adjustment of the front and rear positions of the special gas intake pipe and further enhancing its flexibility and adaptability. Attached Figure Description

[0017] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0018] Figure 1 This is an overall diagram of an adjustable air intake structure.

[0019] Explanation of icon numbers:

[0020] Adjustment component 1, first flange 11, first pipeline 111, second flange 12, flexible connector 13, fixing screw 14, fixing nut 15, sealing ring 16, quick connector 2, first connector 21, second connector 22, second pipeline 23, special gas inlet pipeline 3, plug 31. Detailed Implementation

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0022] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0023] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0024] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0026] refer to Figure 1 This utility model provides an adjustable air intake structure, including an adjustment component 1 and a quick connector 2. The adjustment component 1 includes a first flange 11, a second flange 12, a flexible connector 13, a fixing screw 14, and a fixing nut 15. The flexible connector 13 elastically connects the first flange 11 and the second flange 12. The second flange 12 is suitable for sealingly connecting to a vacuum coating equipment. A first pipeline 111 is sealed on the first flange 11. The first pipeline 111 is suitable for passing through the flexible connector 13 and the first flange 11 and entering the interior of the vacuum coating equipment. The fixing screw 14 is suitable for penetrating and connecting the first flange 11 and the second flange 12, and the relative position of the first flange 11 and the second flange 12 is adjusted by the fixing nut 15, so that the vertical position of the first pipeline 111 is adjustable. The quick connector 2 is disposed at the end of the first pipeline 111 and quickly connects to the special gas intake pipeline 3.

[0027] In this embodiment, the distance between the first flange 11 and the second flange 12 can be adjusted by fixing the screw 14 and the nut 15, thereby adjusting the vertical position of the first pipeline 111 and the special gas inlet pipeline 3 to meet the process experiment requirements corresponding to different positions. This effectively solves the cumbersome operation caused by frequently replacing the special gas inlet pipeline 3.

[0028] Specifically, the first flange 11 is a circular metal disc with a through hole at its center. A first pipe 111 is sealed inside the through hole. The first pipe 111 is suitable for entering the interior of the vacuum coating equipment to guide special gas into the vacuum coating equipment. Multiple bolt holes are evenly distributed along the edge of the first flange 11 for connecting with the fixing screw 14. The fixing nuts 15 are preferably locked at both axial ends of the first flange 11. The second flange 12 is used to seal the connection to the vacuum coating equipment, ensuring the sealing between the adjusting assembly 1 and the vacuum coating equipment and preventing air leakage. The second flange 12 can be fixed to the vacuum coating equipment either by the fixing screw 14 passing through the second flange 12 or by other fasteners; this application does not further limit this. A flexible connector 13 elastically connects the first flange 11 and the second flange 12, forming an adjustable connection system. The elastic deformation capability of the flexible connector 13 ensures the smoothness and reliability of the adjustment process. The flexible connector 13 is typically made of bellows or other elastic metal or non-metal materials. During initial installation, the first flange 11 and the second flange 12 are connected by fixing screws 14 and fixing nuts 15. A flexible connector 13 is installed between the first flange 11 and the second flange 12. The first pipeline 111 is sealed and installed on the first flange 11, passing through the flexible connector 13 and the second flange 12 before entering the vacuum coating equipment. The end of the first pipeline 111 is quickly connected to the special gas inlet pipeline 3 via a quick connector 2. Adjusting the position of the first flange 11 adjusts the vertical position of the first pipeline 111 and the special gas inlet pipeline 3. The adjustment assembly 1 also includes a sealing ring 16, which is sealed between the second flange 12 and the vacuum coating equipment.

[0029] Preferably, the fixing screw 14 passes through the first flange 11 and is threadedly connected to the second flange 12. Both axial ends of the first flange 11 are provided with fixing nuts 15, which cooperate with the fixing screw 14 to fix the position of the first flange 11. Loosening the fixing nuts 15 allows the first flange 11 to move up and down on the fixing screw 14, thereby achieving precise adjustment of the position of the special gas inlet pipeline 3. When the position of the first flange 11 needs adjustment, the operator can loosen the fixing nuts 15. After loosening the fixing nuts 15, the first flange 11 is no longer constrained by the nuts and can move freely on the fixing screw 14. At this time, the operator can manually move the first flange 11 downwards or upwards as needed to achieve vertical position adjustment of the special gas inlet pipeline 3. This not only improves the flexibility of installation and adjustment of the special gas inlet pipeline 3 but also simplifies the operation process. By loosening the fixing nuts 15 and moving the first flange 11, the operator can easily adjust the special gas inlet pipeline 3 to the required position, ensuring its precise vertical movement within the vacuum coating equipment. Furthermore, this structure also possesses high stability and reliability, maintaining the stable position of the special gas inlet pipe 3 during the operation of the vacuum coating equipment, thereby ensuring the continuity and stability of the gas supply. The adjusting assembly 1 is preferably a bellows assembly, and the fixing screws 14 are preferably four in number. When adjusting the vertical position of the special gas inlet pipe 3, first loosen all the fixing nuts 15, then shorten (i.e., compress the bellows) the distance between the first flange 11 and the second flange 12. This allows the special gas inlet pipe 3 to be adjusted downwards, and vice versa.

[0030] Furthermore, the quick connector 2 includes a first connector 21, which includes a first connector body, a first ferrule, and a first nut. The first nut is adapted to tighten the first ferrule so that the special gas inlet pipe 3 is sealed and fixed between the first ferrule and the first connector body. After loosening the first nut, the angle of the special gas inlet pipe 3 can be adjusted by rotating the special gas inlet pipe 3.

[0031] In this embodiment, the quick connector 2 enables a quick and sealed connection between the special gas intake pipe 3 and the first pipe 111. This not only ensures the firmness and sealing of the connection between the intake pipe and the first pipe 111, but also provides flexibility in adjusting the angle of the special gas intake pipe 3. After loosening the first nut, the special gas intake pipe 3 can rotate freely, and the operator can adjust its angle as needed to adapt to different installation requirements.

[0032] Specifically, the first connector body mates with the first ferrule and the first nut to ensure that the special gas intake pipe 3 is securely fixed to the first connector body and achieves a seal. The first connector body is the basic component of the quick connector 2, typically a hollow cylindrical structure. One end connects to the first pipe 111, and the other end connects to the special gas intake pipe 3. The first connector body has internal threads or an internal conical surface for mates with the first ferrule. The first ferrule is a ring-shaped metal component with teeth or an inner blade on its inner side for cutting into the outer wall of the special gas intake pipe 3. The inner teeth of the first ferrule cut into the outer wall of the special gas intake pipe 3, forming a tight metal-to-metal contact, ensuring a tight seal and preventing gas leakage. The outer side of the first ferrule has external threads for mates with the first nut. When the first nut is tightened, the inner teeth of the first ferrule cut into the outer wall of the special gas intake pipe 3, forming a seal and fixation. This not only ensures the strength of the connection but also enhances the sealing performance through the cutting action of the teeth. The first nut, when tightened onto the first ferrule, applies pressure, causing the inner teeth of the first ferrule to engage with the outer wall of the special gas intake pipe 3, thereby sealing and securing the special gas intake pipe 3. After loosening the first nut, the special gas intake pipe 3 can rotate freely, allowing for angle adjustment. Tightening or loosening the first nut enables quick connection and disassembly of the special gas intake pipe 3, improving installation and maintenance efficiency.

[0033] It is worth noting that the quick connector 2, through the cooperation of the first connector body, the first ferrule, and the first nut, achieves quick connection, sealing, and angle adjustment of the special gas inlet pipe 3. When connecting the special gas inlet pipe 3, first insert the special gas inlet pipe 3 into the first ferrule, and then tighten the first nut onto the first ferrule. As the first nut is tightened, the inner teeth of the first ferrule gradually cut into the outer wall of the special gas inlet pipe 3. This cutting action not only fixes the special gas inlet pipe 3, but also forms a seal through the tight contact between the metals, ensuring that the gas will not leak. The internal thread or inner conical surface of the first connector body mates with the external thread of the first ferrule, further enhancing the stability and sealing of the connection. In some cases, the special gas inlet pipe 3 may need to be angled according to the installation position or interface direction of the equipment. To achieve angle adjustment, the operator can loosen the first nut. After loosening the first nut, the fixing effect of the first ferrule on the special gas inlet pipe 3 is released, and the special gas inlet pipe 3 can rotate freely. The operator can rotate the special gas inlet pipe 3 as needed to adjust its angle so that it aligns with the equipment interface or other pipes. After adjusting to the appropriate angle, tighten the first nut again, and the inner teeth of the first ferrule will re-engage into the outer wall of the special gas inlet pipe 3 to achieve sealing and fixation.

[0034] Furthermore, the quick connector 2 also includes a second connector 22 and a second pipe 23. The second connector 22 includes a second fitting body, a second ferrule, and a second nut. One end of the second fitting body is fixedly connected to the first pipe 111, and the other end is detachably connected to the second pipe 23. The second nut is adapted to tighten the second ferrule so that the second pipe 23 is sealed and fixed between the second ferrule and the second fitting body. After loosening the second nut, the front and rear positions of the special gas intake pipe 3 can be adjusted by replacing the second pipe 23 with different lengths.

[0035] In this embodiment, by replacing the second pipe 23 with one of different lengths, the distance between the special gas intake pipe 3 and the first pipe 111 can be adjusted, thereby realizing the adjustment of the front and rear positions of the special gas intake pipe 3 and further enhancing the flexibility and adaptability of the special gas intake pipe 3.

[0036] Specifically, the second pipe 23 is an intermediate pipe used to connect the first pipe 111 and the special gas inlet pipe 3. It is typically a hollow cylindrical pipe with external threads or other connecting structures at both ends for mating with the second connector body and the first connector 21. By replacing the second pipe 23 with different lengths, the distance between the special gas inlet pipe 3 and the first pipe 111 can be adjusted, achieving front-to-back position adjustment of the special gas inlet pipe 3 to adapt to different installation requirements. This application not only achieves quick connection and sealing fixation of the special gas inlet pipe 3 but also provides angle adjustment and front-to-back position adjustment functions, enhancing the flexibility and adaptability of the special gas inlet pipe 3. The second connector 22 has a similar structure to the first connector 21. When the second nut is tightened, the inner teeth of the second ferrule cut into the outer wall of the second pipe 23, forming a seal and fixation. The second connector is preferably a right-angle ferrule.

[0037] Preferably, the first connector has a main channel and two branch channels. The main channel is suitable for connecting to the second pipe 23 or the first pipe 111, and the branch channels are suitable for connecting to the special gas inlet pipe 3. The main channel has a larger inner diameter to accommodate the second pipe 23. The main function of the main channel is to serve as the main channel for gas transmission, ensuring smooth gas flow between the second pipe 23 and the special gas inlet channel. The branch channels are two smaller hollow channels, usually located on either side or around the main channel. The branch channels have a smaller inner diameter, suitable for connecting to the special gas inlet pipe 3. The main function of the branch channels is to serve as the connection point for the special gas inlet pipe 3, ensuring that the special gas can enter the main channel from the external pipe and ultimately enter the vacuum coating equipment. It achieves gas distribution and transmission through its connection with the special gas inlet pipe 3. The first connector 21 is preferably a reducing ferrule tee.

[0038] When connecting the special gas inlet pipe 3, first insert the special gas inlet pipe 3 into the first retaining sleeve of the branch channel of the first connector 21, and then tighten the first nut so that the inner teeth of the first retaining sleeve cut into the outer wall of the special gas inlet pipe 3, forming a seal and fixation. Simultaneously, insert both ends of the second pipe 23 into the second retaining sleeve of the second connector 22 and the first retaining sleeve of the main channel of the first connector 21, respectively. Then tighten the second nut and the first nut so that the inner teeth of the second retaining sleeve and the first retaining sleeve cut into the outer wall of the second pipe 23, achieving a sealed connection between the second pipe 23 and the first pipe 111 on the second connector 22 and the special gas inlet pipe 3 on the first connector 21. After loosening the second nut of the second connector 22 and the first nut of the first connector 21, the second pipe 23 can be freely disassembled. By replacing the second pipe 23 with different lengths, the distance between the special gas inlet pipe 3 and the vacuum coating equipment can be adjusted, thereby achieving adjustment of the front and rear positions. After installing the second pipe 23 of the appropriate length, tighten the second nut and the first nut again. The inner teeth of the second ferrule and the first ferrule will re-cut into the outer wall of the second pipe 23 to achieve sealing and fixation.

[0039] Furthermore, a plug 31 is provided at the end of the special gas inlet pipe 3 away from the first connector 21. In this embodiment, the plug 31 at the end of the special gas inlet pipe 3 away from the first connector 21 not only enhances the sealing and protection of the system, but also improves the flexibility of maintenance and use.

[0040] Specifically, the plug 31 is suitable for sealing the end of the special gas inlet pipeline 3 to prevent gas leakage. Through a tight fit or the use of sealing elements, the plug 31 ensures the seal at the end of the pipeline. The sealing function of the plug 31 ensures the safety of the special gas inlet pipeline 3, especially when handling flammable, explosive, or toxic gases, effectively preventing gas leakage and protecting the safety of operators and equipment. At the same time, the plug 31 also prevents external impurities from entering the special gas inlet pipeline 3, protecting the cleanliness and purity of the pipeline interior, which is particularly important for the transmission of high-purity gases. The plug 31 can also be easily disassembled when needed for cleaning, inspection, or replacement of the pipeline. This flexibility makes maintenance and upkeep more convenient.

[0041] Furthermore, this application provides a vacuum coating equipment, including the adjustable air intake structure in any of the above embodiments. This application allows for very convenient adjustment of the vertical position (within the adjustable range) of the special gas intake pipe 3 without disassembling the mechanism (i.e., without repeatedly confirming the sealing performance of the mechanism); the vertical position of the mechanism can also be adjusted without disassembly, i.e., without stopping the equipment or breaking the air (this operation is confirmed not to affect the debugging process and is performed according to the equipment personnel's operating procedures). Adjusting the front-back position and rotation angle of the special gas intake pipe 3 requires breaking the air cavity. This application not only saves the time wasted by repeated disassembly and assembly in the prior art, but also reduces the increased costs caused by requiring multiple components to achieve functional adjustments. Specifically, only component 1 needs to be adjusted to adjust the vertical position of the special gas intake pipe 3; the angle of the special gas intake pipe 3 needs to be adjusted through the first connector 21; and the length of the second pipe 23 needs to be changed through the second connector 22 to adjust the front-back position of the special gas intake pipe 3. The above three position adjustments of the special gas intake pipe 3 can meet the process experiment requirements corresponding to different positions.

[0042] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An adjustable air intake structure, characterized by, The utility model relates to a kind of adjustable gas inlet structure, including: Adjustment assembly, the adjustment assembly includes first flange, second flange, flexible connecting piece, fixed screw and fixed nut, the flexible connecting piece elastically connects the first flange and the second flange, the second flange is suitable for sealing connection vacuum coating equipment, first pipeline is sealingly provided on the first flange, the first pipeline is suitable for entering inside vacuum coating equipment after passing through the flexible connecting piece and the first flange, the fixed screw is suitable for being connected through the first flange and the second flange and the relative position of the first flange and the second flange is adjusted by the fixed nut, so that the up-down position of the first pipeline can be adjusted; Quick connector, the quick connector is arranged at the end of the first pipeline and is quickly connected with special gas inlet pipeline.

2. The adjustable gas inlet structure according to claim 1, wherein: The quick connector includes a first connector, and the first connector includes a first connector body, a first sleeve and a first nut, the first nut is suitable for tightening the first sleeve, so that the special gas inlet pipeline is sealingly fixed between the first sleeve and the first connector body; after loosening the first nut, the angle of the special gas inlet pipeline is adjusted by rotating the special gas inlet pipeline.

3. The adjustable gas inlet structure according to claim 2, wherein: The quick connector further includes a second connector and a second pipeline, the second connector includes a second connector body, a second sleeve and a second nut, one end of the second connector body is fixedly connected with the first pipeline, the other end is detachably connected with the second pipeline, the second nut is suitable for tightening the second sleeve, so that the second pipeline is sealingly fixed between the second sleeve and the second connector body; after loosening the second nut, the front-back position of the special gas inlet pipeline is adjusted by replacing the second pipeline with different lengths.

4. The adjustable gas inlet structure according to claim 3, wherein: The first connector body has a main channel and two branch channels, the main channel is suitable for connecting the second pipeline or the first pipeline, and the branch channels are suitable for connecting the special gas inlet pipeline.

5. The adjustable gas inlet structure according to claim 4, wherein: The special gas inlet pipeline is further provided with a plug at the end away from the first connector.

6. The adjustable gas inlet structure according to claim 1, wherein: The adjustment assembly further includes a sealing ring, and the sealing ring is sealingly arranged between the second flange and the vacuum coating equipment.

7. A vacuum coating apparatus, characterized by The utility model relates to a kind of adjustable gas inlet structure, including any one of claims 1-6.

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