Observation device of vacuum magnetron sputtering coating machine

Abstract

The utility model relates to the technical field of observation equipment for a vacuum magnetron sputtering coating machine, and provides an observation device for a vacuum magnetron sputtering coating machine, which comprises a vacuum magnetron sputtering coating machine side plate, the outer wall of the vacuum magnetron sputtering coating machine side plate is fixedly connected with a turnover mechanism, and the turnover mechanism is fixedly connected with the vacuum magnetron sputtering coating machine side plate. The overturning mechanism comprises a supporting block fixedly installed on one side of a side plate of the vacuum magnetron sputtering coating machine, a movable groove is formed in the supporting block, a T-shaped movable rod is movably connected into the movable groove, the outer wall of the T-shaped movable rod is movably connected with a threaded block, and the threaded block is fixedly connected with the supporting block. The turnover mechanism further comprises a rotating rod which is movably arranged on the outer wall of the side plate of the vacuum magnetron sputtering coating machine. By rotating the threaded block, the threaded block can move along the T-shaped movable rod and relieve extrusion on the outer wall of the limiting plate, the limiting plate is pulled, the observation window frame can be turned over and opened along the side plate of the vacuum magnetron sputtering coating machine, and the effect of conveniently cleaning the inner wall of laminated glass is achieved.

Description

Technical Field

[0001] This utility model relates to the technical field of observation equipment for vacuum magnetron sputtering coating machines, and in particular to an observation device for a vacuum magnetron sputtering coating machine. Background Technology

[0002] Vacuum magnetron sputtering coating is a thin film preparation technology that uses a magnetic field to confine plasma and achieve atomic sputtering deposition of target materials. It is widely used in optical devices, electronic chips, new energy batteries, decorative coatings and other fields. The observation device of the vacuum magnetron sputtering coating machine is a key component in the equipment used to monitor the coating process, plasma state and substrate surface condition in real time. Its core function is to provide a clear observation window for operators or testing instruments while maintaining the airtightness of the vacuum chamber.

[0003] Existing observation devices for vacuum magnetron sputtering coating machines are inconvenient to clean the inner wall of the observation window periodically. This makes it easy for target particles (such as metal atoms and droplets) generated during sputtering to deposit on the glass surface of the observation port, resulting in decreased light transmittance and blurred images. Summary of the Invention

[0004] The purpose of this invention is to provide an observation device for a vacuum magnetron sputtering coating machine, which solves the problem that existing observation devices are inconvenient to clean the inner wall of the observation window periodically.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: an observation device for a vacuum magnetron sputtering coating machine, including a side plate of the vacuum magnetron sputtering coating machine;

[0006] A flipping mechanism is fixedly connected to the outer wall of the side plate of the vacuum magnetron sputtering coating machine.

[0007] The flipping mechanism includes a support block fixedly installed on one side of the side plate of the vacuum magnetron sputtering coating machine. The support block has a movable groove inside, and a T-shaped movable rod is movably connected inside the movable groove. A threaded block is movably connected to the outer wall of the T-shaped movable rod. The flipping mechanism also includes a rotating rod movably installed on the outer wall of the side plate of the vacuum magnetron sputtering coating machine. An observation window frame is fixedly connected to the outer wall of the rotating rod, and a limit plate is fixedly connected to the outer wall of the observation window frame.

[0008] Preferably, a sealing ring is fixedly connected to one side of the observation window frame, and a sealing groove is provided inside the side plate of the vacuum magnetron sputtering coating machine.

[0009] Preferably, the support block forms a rotating structure with the T-shaped movable rod through the movable groove. The T-shaped movable rod is engaged with the limiting plate, which allows the T-shaped movable rod to rotate along the support block and be engaged in the slot opened inside the limiting plate.

[0010] Preferably, the outer wall of the T-shaped movable rod is provided with threads, and the T-shaped movable rod is threadedly connected to the threaded block, so that the threaded block can be rotated to move along the T-shaped movable rod.

[0011] Preferably, the side plate of the vacuum magnetron sputtering coating machine forms a rotating structure with the observation window frame via a rotating rod, and the sealing ring is engaged with the side plate of the vacuum magnetron sputtering coating machine via a sealing groove, which allows the observation window frame to be flipped open along the side plate of the vacuum magnetron sputtering coating machine.

[0012] Preferably, an assembly mechanism is installed inside the observation window frame. The assembly mechanism includes a mating groove inside the observation window frame, and laminated glass is installed inside the mating groove. The assembly mechanism also includes a threaded groove inside the observation window frame, and a threaded ring is movably connected inside the threaded groove. A baffle is fixedly connected to one side of the threaded ring.

[0013] Preferably, the observation window frame is connected to the laminated glass via a mating groove, and the observation window frame is connected to the threaded ring via a threaded groove, which facilitates the installation and positioning of the laminated glass.

[0014] The observation device for a vacuum magnetron sputtering coating machine provided by this utility model has the following advantages:

[0015] Through the set flipping mechanism, sealing ring, sealing groove and laminated glass, by rotating the threaded block, the threaded block can be moved along the T-shaped movable rod and the compression on the outer wall of the limiting plate can be released. Pulling the limiting plate can make the observation window frame flip open along the side plate of the vacuum magnetron sputtering coating machine, which facilitates the cleaning of the inner wall of the laminated glass and prevents the target particles generated during the sputtering process from depositing on the inner wall of the laminated glass.

[0016] Furthermore, since the limiting plate has a slotted design, the T-shaped movable rod can be inserted into the limiting plate, which further improves the stability of the observation window frame closing limit;

[0017] Furthermore, the combined effect of the sealing ring and the sealing groove can improve the sealing performance when the observation window frame is closed, thus maintaining a vacuum inside the magnetron sputtering coating machine;

[0018] By using the observation window frame and assembly mechanism, the laminated glass is moved to be installed in the mating groove inside the observation window frame. Then, the baffle is moved so that the threaded ring is mated to one side of the inner wall of the threaded groove and rotated. This allows the threaded ring to be inserted into the threaded groove, and the baffle blocks the laminated glass, thus facilitating the installation of the laminated glass.

[0019] Furthermore, since the baffle is movably connected to the laminated glass, it can evenly block one side of the laminated glass when rotating. This is different from direct bolt tightening, which can cause air leakage and damage to the vacuum structure of the coating machine due to uneven tightening. This further improves the sealing performance of the laminated glass during installation. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a front view schematic diagram of the present utility model;

[0022] Figure 3 This is a disassembled schematic diagram of the T-shaped movable rod structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the assembly mechanism of this utility model disassembled;

[0024] Figure 5 This is a perspective view of the baffle of this utility model.

[0025] The following are the annotations in the figure: 1. Side plate of vacuum magnetron sputtering coating machine; 2. Tilting mechanism; 21. Support block; 22. Movable groove; 23. T-shaped movable rod; 24. Threaded block; 25. Rotating rod; 26. Observation window frame; 27. Limiting plate; 3. Sealing ring; 4. Sealing groove; 5. Assembly mechanism; 51. Butt joint groove; 52. Laminated glass; 53. Threaded groove; 54. Threaded ring; 55. Baffle. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-5 The present invention provides an observation device for a vacuum magnetron sputtering coating machine, including a side plate 1 of the vacuum magnetron sputtering coating machine.

[0028] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, a flipping mechanism 2 is fixedly connected to the outer wall of the side plate 1 of the vacuum magnetron sputtering coating machine. The flipping mechanism 2 includes a support block 21 fixedly installed on one side of the side plate 1 of the vacuum magnetron sputtering coating machine. The support block 21 has a movable groove 22 inside, and a T-shaped movable rod 23 is movably connected inside the movable groove 22. A threaded block 24 is movably connected to the outer wall of the T-shaped movable rod 23. The flipping mechanism 2 also includes a rotating rod 25 movably installed on the outer wall of the side plate 1 of the vacuum magnetron sputtering coating machine. An observation window frame 26 is fixedly connected to the outer wall of the rotating rod 25. A screw thread block 24 is fixedly connected to the outer wall of the observation window frame 26. A sealing ring 3 is fixedly connected to one side of the positioning plate 27 and the observation window frame 26. A sealing groove 4 is opened inside the side plate 1 of the vacuum magnetron sputtering coating machine. The support block 21 forms a rotating structure with the T-shaped movable rod 23 through the movable groove 22. The T-shaped movable rod 23 is engaged with the limiting plate 27. The outer wall of the T-shaped movable rod 23 is provided with threads. The T-shaped movable rod 23 is threadedly connected with the threaded block 24. The side plate 1 of the vacuum magnetron sputtering coating machine forms a rotating structure with the observation window frame 26 through the rotating rod 25. The sealing ring 3 is engaged with the side plate 1 of the vacuum magnetron sputtering coating machine through the sealing groove 4.

[0029] By rotating the threaded block 24, which is threadedly connected to the T-shaped movable rod 23, the threaded block 24 can move along the T-shaped movable rod 23 and release the pressure on the outer wall of the limiting plate 27. Pulling the T-shaped movable rod 23, under the action of the movable groove 22, allows the T-shaped movable rod 23 to rotate along the support block 21 and move out of the slot inside the limiting plate 27. Pulling the limiting plate 27, under the action of the rotating rod 25, allows the observation window frame 26 to flip open along the side plate 1 of the vacuum magnetron sputtering coating machine, causing the sealing ring 3 to move out of the sealing groove 4, which can clean the inner wall of the laminated glass 52.

[0030] Reference Figure 2 , Figure 4 and Figure 5 As shown, an assembly mechanism 5 is installed inside the observation window frame 26. The assembly mechanism 5 includes a mating groove 51 opened inside the observation window frame 26. Laminated glass 52 is installed inside the mating groove 51. The assembly mechanism 5 also includes a threaded groove 53 opened inside the observation window frame 26. A threaded ring 54 is movably connected inside the threaded groove 53. A baffle 55 is fixedly connected to one side of the threaded ring 54. The observation window frame 26 is engaged with the laminated glass 52 through the mating groove 51. The observation window frame 26 is threadedly connected to the threaded ring 54 through the threaded groove 53.

[0031] By moving the laminated glass 52, it is installed in the mating groove 51 inside the observation window frame 26. Then, the baffle 55 is moved so that the threaded ring 54 is mated to one side of the inner wall of the threaded groove 53 and rotated. Since the observation window frame 26 is threadedly connected to the threaded ring 54 through the threaded groove 53, the baffle 55 can rotate and drive the threaded ring 54 to rotate along the threaded groove 53 and insert into the threaded groove 53. This causes the baffle 55 to block the laminated glass 52, so that the laminated glass 52 is installed inside the observation window frame 26.

[0032] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An observation device of a vacuum magnetron sputtering coating machine, comprising a vacuum magnetron sputtering coating machine side plate (1); Characterized in that: The outer wall of the vacuum magnetron sputtering coating machine side plate (1) is fixedly connected with a turnover mechanism (2); The turnover mechanism (2) comprises a support block (21) fixedly installed on one side of the vacuum magnetron sputtering coating machine side plate (1), an active slot (22) is formed in the inside of the support block (21), a T-shaped movable rod (23) is movably connected in the inside of the active slot (22), a threaded block (24) is movably connected to the outer wall of the T-shaped movable rod (23), and the turnover mechanism (2) further comprises a rotating rod (25) movably installed on the outer wall of the vacuum magnetron sputtering coating machine side plate (1), an observation window frame (26) is fixedly connected to the outer wall of the rotating rod (25), and a limiting plate (27) is fixedly connected to the outer wall of the observation window frame (26).

2. The vacuum magnetron sputtering coating machine observation device according to claim 1, characterized in that: One side of the observation window frame (26) is fixedly connected with a sealing snap ring (3), and a sealing groove (4) is formed in the inside of the vacuum magnetron sputtering coating machine side plate (1).

3. The vacuum magnetron sputtering coating machine observation device according to claim 1, characterized in that: The support block (21) and the T-shaped movable rod (23) constitute a rotating structure through the active slot (22), and the T-shaped movable rod (23) is connected with the limiting plate (27) in a clamped manner.

4. The vacuum magnetron sputtering coating machine observation device according to claim 1, characterized in that: The outer wall of the T-shaped movable rod (23) is provided with threads, and the T-shaped movable rod (23) is threadedly connected with the threaded block (24).

5. The vacuum magnetron sputtering coating machine observation device according to claim 2, characterized in that: The vacuum magnetron sputtering coating machine side plate (1) and the observation window frame (26) constitute a rotating structure through the rotating rod (25), and the sealing snap ring (3) is connected with the vacuum magnetron sputtering coating machine side plate (1) in a clamped manner through the sealing groove (4).

6. The vacuum magnetron sputtering coater of claim 1, wherein: An assembly mechanism (5) is installed in the inside of the observation window frame (26), the assembly mechanism (5) comprises a butt joint groove (51) formed in the inside of the observation window frame (26), a laminated glass (52) is installed in the inside of the butt joint groove (51), the assembly mechanism (5) further comprises a threaded groove (53) formed in the inside of the observation window frame (26), a threaded ring (54) is movably connected in the inside of the threaded groove (53), and a baffle (55) is fixedly connected to one side of the threaded ring (54).

7. The vacuum magnetron sputtering coating machine observation device according to claim 6, characterized in that: The observation window frame (26) is connected with the laminated glass (52) in a clamped manner through the butt joint groove (51), and the observation window frame (26) is threadedly connected with the threaded ring (54) through the threaded groove (53).

Images