Crystal stabilizing device for rod taking of single crystal furnace and single crystal furnace
By installing a crystal stabilizing device with a support ring and a clamp between the auxiliary chamber and the throat of the single crystal furnace, and using a clamping unit to fix the crystal rod, the problem of crystal rod shaking and falling during the single crystal furnace rod removal process is solved, thereby improving the stability and safety of the crystal rod.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-10
- Publication Date
- 2026-03-06
AI Technical Summary
In existing single crystal furnaces, as the length of the crystal rod increases, the amplitude of shaking during rotation increases, leading to an increased risk of the crystal rod falling off. This is especially true for the heavier crystal rods at the end of the process, where the risk of shaking during rotation is even greater.
Design a crystal stabilizing device, including a support ring and a clamp mounted on it. The clamp consists of two clamping units, which clamp and fix the crystal rod by telescopic and abutment components. The clamp is driven by a telescopic motor, telescopic cylinder, electric push rod or hydraulic cylinder. The clamp is provided with a high-temperature resistant buffer layer. The support ring is a circular ring or an elliptical ring, used to fix the crystal rod and prevent it from shaking.
This effectively reduces the risk of crystal rod shaking and falling during the single crystal furnace rod removal process, improving the safety and reliability of rod removal.
Smart Images
Figure CN223974257U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal furnace rod taking, and more specifically, to a crystal stabilizing device and a single crystal furnace for single crystal furnace rod taking. Background Technology
[0002] Currently, single crystal furnace rod removal is divided into two categories: circulating section rods and finished section rods. In the circulating section, the tail of the rod needs to be raised above the gate valve for isolation, and then the rod removal is completed through the steps of "lifting the auxiliary chamber → rotating the auxiliary chamber → lowering the rod to the rod removal cart". In the finished section, the rod is longer, and the tail of the rod can reach the lower port of the guide tube. The rod removal process is as follows: "lifting the auxiliary chamber + furnace cover + guide tube as a whole → rotating the auxiliary chamber + furnace cover + guide tube as a whole → lowering the rod to the rod removal cart" to complete the rod removal.
[0003] As the length of the final crystal rod increases, the amplitude of its swaying during rotation becomes greater, resulting in increased weight and downward force on the seed crystal. This significantly increases the risk of the crystal rod falling off during rotation. To mitigate this, a device is needed to fix the crystal rod during the single crystal furnace's rod removal process, preventing swaying of the sub-chamber and the crystal rod during rotation, thereby reducing the risk of rod falling. Utility Model Content
[0004] The purpose of this invention is to provide a crystal stabilizing device for picking up crystal rods in a single crystal furnace, which can fix the crystal rods and prevent them from shaking when the sub-chamber of the single crystal furnace rotates, thereby reducing the risk of the crystal rods falling off.
[0005] Another objective of this invention is to provide a single crystal furnace that can fix the crystal rod and prevent the crystal rod from shaking when the sub-chamber of the single crystal furnace rotates, thereby reducing the risk of the crystal rod falling off.
[0006] The technical solution of this utility model is implemented as follows:
[0007] A crystal stabilizing device for taking rods from a single crystal furnace is installed between the auxiliary chamber of the single crystal furnace and the furnace cover throat. It includes a support ring and a clamp mounted on the support ring. The clamp includes two clamping units.
[0008] The two clamping units are provided correspondingly, and the two clamping units work together to clamp the crystal rod.
[0009] Furthermore, the two clamping units are respectively disposed at opposite ends of the support ring;
[0010] The clamping unit includes a telescopic member and an abutment member. The telescopic member is disposed on the support ring, and the abutment member is disposed at the end of the telescopic rod of the telescopic member. The telescopic member can drive the abutment member to press against the crystal rod.
[0011] Furthermore, the telescopic member is disposed on the outer side wall of the support ring, the abutment member is located on the inner side of the support ring, and the support ring is provided with a through hole for the telescopic rod of the telescopic member to pass through.
[0012] Furthermore, the telescopic component may be a telescopic motor, a telescopic cylinder, an electric push rod, or a hydraulic cylinder.
[0013] Furthermore, the abutment is an arc-shaped plate, which has an arc-shaped surface for corresponding contact with the crystal rod.
[0014] Furthermore, a high-temperature resistant buffer layer is correspondingly provided on the arc-shaped surface.
[0015] Furthermore, the buffer layer is made of ceramic fiber felt.
[0016] Furthermore, the support ring is a circular ring or an elliptical ring.
[0017] Furthermore, it also includes a control switch for controlling the extension and retraction and stopping of the two gripping units.
[0018] A single crystal furnace includes a single crystal furnace sub-chamber and a furnace cover, and also includes a crystal stabilizing device for taking crystal rods from the single crystal furnace. The crystal stabilizing device for taking crystal rods from the single crystal furnace is installed between the single crystal furnace sub-chamber and the throat of the furnace cover, and is used to clamp the crystal rods during the taking operation.
[0019] Compared with the prior art, the beneficial effects of this utility model are:
[0020] This application provides a crystal stabilizing device for removing crystal rods in a single crystal furnace. The device is installed between the sub-chamber of the single crystal furnace and the throat of the furnace cover. It includes a support ring and a clamp mounted on the support ring. The clamp includes two clamping units, which are arranged correspondingly. The crystal rod is located inside the support ring and is vertically arranged. Before removing the crystal rod, the two clamping units work together to clamp and fix the crystal rod. When the sub-chamber of the single crystal furnace rotates, the crystal rod is clamped and fixed, thus avoiding crystal rod shaking and reducing the risk of dropping the crystal rod. Attached Figure Description
[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is an isometric view of the crystal stabilization device of this utility model;
[0023] Figure 2 This is a top view of the crystal stabilization device of this utility model;
[0024] Figure 3 This is a schematic diagram of the crystal stabilization device of this utility model installed in a single crystal furnace.
[0025] In the picture:
[0026] 1-Single crystal furnace auxiliary chamber;
[0027] 2-Support ring; 201-Perforation;
[0028] 3-Clamps;
[0029] 301 - Telescopic component; 302 - Abutment component;
[0030] 4-Crystal rod. Detailed Implementation
[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0034] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0035] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0036] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0037] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0038] Example 1
[0039] Reference Figures 1-3 This embodiment provides a crystal stabilizing device for rod removal in a single crystal furnace. It is installed between the auxiliary chamber 1 of the single crystal furnace and the furnace cover throat. In the structure of the single crystal furnace, the auxiliary chamber and the furnace cover throat are two key components, each performing different functions. The following is a detailed explanation of them:
[0040] The single crystal furnace auxiliary chamber 1 is part of the single crystal furnace and is usually located outside or adjacent to the main growth chamber. Its main function is to assist certain specific operations during the crystal growth process, such as:
[0041] Material transfer: Used to safely transfer raw materials (such as polysilicon) or tools into or out of the main growth chamber.
[0042] Environmental isolation: Reduces the impact of external factors on the high-purity, high-temperature environment within the main growth chamber, thereby improving the stability of crystal growth.
[0043] Pretreatment or posttreatment: The material can be preheated, cooled or otherwise treated in the sub-chamber to optimize crystal growth conditions.
[0044] The auxiliary chamber 1 of a single crystal furnace typically has an independent sealing system, capable of maintaining a certain vacuum level or a specific gas atmosphere. In continuous crystal growth processes, the auxiliary chamber can significantly improve production efficiency and reduce the temperature fluctuations and contamination risks caused by frequent opening and closing of the main chamber.
[0045] The furnace throat is an opening on the lid of a single-crystal furnace, typically a narrow passage connecting the main chamber to the outside. Its main functions include:
[0046] Robotic arm operation channel: This allows robotic arms or other automated equipment to enter the main chamber through this throat to perform operations such as crystal removal and crucible replacement.
[0047] Airflow control: The throat design allows for adjustment of the airflow distribution within the main chamber, optimizing the crystal growth environment.
[0048] Sealing performance assurance: The throat is usually equipped with a sealing device (such as a flange, O-ring, etc.) to ensure that the vacuum or inert gas atmosphere of the main chamber is not disrupted.
[0049] The furnace cover throat is a key part for achieving automated production and maintenance, especially in large-scale industrial monocrystalline silicon production, where its design directly affects the reliability and production efficiency of the equipment.
[0050] Specifically, the crystal stabilizing device includes a support ring 2 and a clamp 3 mounted on the support ring 2, wherein the clamp 3 includes two clamping units;
[0051] The two clamping units are configured correspondingly, and the two clamping units work together to clamp the crystal rod 4.
[0052] The support ring 2 is a circular ring or an elliptical ring.
[0053] Preferably, the support ring 2 is designed as a circular ring, and clamping units are respectively provided at opposite ends of the support ring 2.
[0054] The clamping unit includes a telescopic member 301 and an abutment member 302. The telescopic member 301 is disposed on the support ring 2 and can be a telescopic motor, a telescopic cylinder, an electric push rod, or a hydraulic cylinder. The abutment member 302 is disposed at the end of the telescopic rod of the telescopic member 301, and the telescopic member 301 can drive the abutment member 302 to press against the crystal rod 4.
[0055] Preferably, the telescopic member 301 is disposed on the outer side wall of the support ring 2, the abutment member 302 is located on the inner side of the support ring 2, and the support ring 2 is provided with a through hole 201 for the telescopic rod of the telescopic member 301 to pass through.
[0056] In this embodiment, the abutment 302 is an arc-shaped plate with an arc-shaped surface for corresponding contact with the crystal rod 4. When the telescopic member 301 drives the abutment 302 to press against the crystal rod 4, the arc-shaped surface of the arc-shaped plate contacts the crystal rod 4.
[0057] A high-temperature resistant buffer layer is correspondingly provided on the arc-shaped surface. Since the temperature inside the single crystal furnace is high, the buffer layer must be made of a high-temperature resistant material, such as ceramic fiber felt. When the arc-shaped plate comes into contact with the crystal rod 4, the crystal rod 4 first contacts the buffer layer, which acts as a buffer to protect the crystal rod 4.
[0058] Because the curved plate is designed in an arc shape and its curved surface has a buffer layer, it can use crystal rods of various thicknesses, making it more adaptable.
[0059] In this embodiment, preferably, the telescopic component 301 is a telescopic motor, and also includes a controller and a control switch. The control switch is used to control the extension and retraction and stop of the two telescopic motors.
[0060] When the crystal stabilizing device is actually installed in a single crystal furnace, it is installed at the upper end of the throat of the furnace cover. When the single crystal rod 4 is fully raised to the target position, the crystal stabilizing device is used to clamp the crystal rod 4 to fix the crystal rod 4 in the middle of the sub-chamber. When the rod is taken out, the sub-chamber is rotated momentarily and the crystal rod 4 will not shake due to the sudden lateral force, which may lead to the seed crystal being subjected to lateral force and the risk of the seed crystal breaking and falling off.
[0061] Example 2
[0062] This embodiment provides a single crystal furnace, including a single crystal furnace sub-chamber 1 and a furnace cover, and also includes a crystal stabilizing device for taking crystal rods from the single crystal furnace. The crystal stabilizing device is installed between the single crystal furnace sub-chamber 1 and the throat of the furnace cover, and is used to clamp the crystal rod 4 during the taking operation.
[0063] The method of using this crystal stabilizing device in a single crystal furnace includes the following steps:
[0064] 1. Raise the single crystal rod to the appropriate position and manually start the telescopic motor using the control switch;
[0065] 2. The telescopic rod of the arc-shaped plate telescopic motor slowly moves towards the center of the support ring 2;
[0066] 3. Once the telescopic motor senses a force in the opposite direction, it stops moving inward.
[0067] 4. Crystal rod 4 is now fixed.
[0068] 5. Proceed to the next step, "Lift the auxiliary chamber → Rotate the auxiliary chamber". After the auxiliary chamber is rotated into place, activate the telescopic motor to retract the telescopic rod of the motor to its original position, and the arc plate will also return to its original position, allowing the next step of the rod removal operation to proceed.
[0069] With the crystal stabilizing device and the above-mentioned operating method, when the single crystal furnace auxiliary chamber 1 rotates, the crystal rod 4 is tightened and fixed, and there is no shaking of the crystal rod 4 throughout the entire process, which can reduce or avoid the risk of the rod falling off.
[0070] The beneficial effects of the technical solution of this utility model are:
[0071] This application provides a crystal stabilizing device for removing crystal rods in a single crystal furnace. The device is installed between the auxiliary chamber 1 of the single crystal furnace and the furnace cover throat. It includes a support ring 2 and a clamp 3 mounted on the support ring 2. The clamp 3 includes two clamping units, which are arranged correspondingly. The crystal rod 4 is located inside the support ring 2 and is vertically arranged. Before removing the rod, the two clamping units work together to clamp and fix the crystal rod 4. When the auxiliary chamber 1 of the single crystal furnace rotates, the crystal rod 4 is clamped and fixed, thus avoiding the crystal rod 4 from shaking and reducing the risk of dropping the rod.
[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.
[0073] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A crystal stabilizing device for taking rods from a single crystal furnace, characterized in that, The device is installed between a single crystal furnace auxiliary chamber (1) and a furnace cover throat, and comprises a supporting ring (2) and a clamp (3) installed on the supporting ring (2), wherein the clamp (3) comprises two clamping units. The two clamping units are arranged correspondingly and jointly clamp a crystal bar (4).
2. The crystal stabilizer for use in a single crystal growth furnace according to claim 1, wherein The two clamping units are arranged at opposite ends of the supporting ring (2) respectively. The clamping unit comprises a telescopic member (301) and an abutting member (302), wherein the telescopic member (301) is arranged on the supporting ring (2), the telescopic member (301) is provided with the abutting member (302) at the end of a telescopic rod, and the telescopic member (301) can drive the abutting member (302) to abut against the crystal bar (4).
3. The crystal stabilizer for use in a single crystal growth furnace according to claim 2, wherein The telescopic member (301) is arranged on the outer wall of the supporting ring (2), and the abutting member (302) is located on the inner side of the supporting ring (2), wherein a through hole (201) is formed in the supporting ring (2) for the telescopic rod of the telescopic member (301) to pass through.
4. The crystal stabilizer for use in a single crystal growth furnace according to claim 2, wherein The telescopic member (301) is a telescopic motor, a telescopic cylinder, an electric push rod or a hydraulic cylinder.
5. The crystal stabilizer for use in a single crystal growth furnace according to claim 2, wherein The abutting member (302) is an arc-shaped plate, and the arc-shaped plate has an arc-shaped surface for corresponding abutting against the crystal bar (4).
6. The crystal stabilizer for use in a single crystal growth furnace according to claim 5, wherein A high-temperature-resistant buffer layer is arranged on the arc-shaped surface.
7. The crystal stabilizer for use in a single crystal growth furnace according to claim 6, wherein The buffer layer is a ceramic fiber felt.
8. The crystal stabilizer for use in a single crystal growth furnace according to claim 1, wherein The supporting ring (2) is a circular ring or an elliptical ring.
9. The crystal stabilizer for use in a single crystal growth furnace according to claim 1, wherein A control switch is further arranged for controlling the telescoping and stopping of the two clamping units.
10. A single crystal furnace comprising a single crystal furnace sub-chamber (1) and a furnace lid, characterized in that, The device further comprises the crystal stabilizing device for taking a crystal bar of any one of claims 1-9, which is installed between a single crystal furnace auxiliary chamber (1) and a furnace cover throat and used for clamping a crystal bar (4) during a taking operation.