Environment detection device

Abstract

The utility model provides an environment detection device. In one embodiment, the environment detection apparatus comprises: a first sensing device; a second sensing device in fluid communication with the first sensing device; and a spectrum analyzer electrically connected to the first sensing device and the second sensing device. The first sensing device includes a pair of first electrodes configured to provide a first alternating current electrical signal directly to a gas flowing into the first sensing device. The second sensing device includes a first filter configured to capture solids in the gas flowing into the second sensing device and a pair of second electrodes configured to provide a second alternating current electrical signal directly to the first filter if the solids are captured through the first filter.

Description

Technical Field

[0001] This utility model relates to an environmental monitoring device. Background Technology

[0002] In the semiconductor industry, the need for stricter regulations on exhaust emissions is increasing due to the requirement to achieve net-zero emissions. Net-zero emissions have become an important aspect of corporate social responsibility (CSR) for semiconductor companies. These exhaust gases have a high global warming potential and can remain in the atmosphere for a long time, contributing to climate change.

[0003] Achieving net-zero emissions has become a key CSR objective for semiconductor companies. By committing to net-zero emissions, these companies demonstrate their commitment to environmental sustainability and reducing their carbon footprint. This commitment involves not only complying with regulatory requirements but also actively seeking innovative solutions to minimize emissions throughout the manufacturing process. Furthermore, achieving net-zero emissions enhances a semiconductor company's reputation and competitiveness. As sustainability becomes a critical consideration for customers, investors, and other stakeholders, companies that prioritize environmental responsibility are more likely to attract business and investment opportunities. By aligning their CSR objectives with net-zero emissions, semiconductor companies can demonstrate their commitment to sustainable practices and differentiate themselves in the market.

[0004] Therefore, net-zero emissions have become an important aspect of CSR for semiconductor companies, as it demonstrates their commitment to environmental sustainability and contributes to the overall sustainability of the industry. By investing in advanced emission control technologies and adopting cleaner processes, semiconductor companies can reduce their environmental impact and enhance their reputation in the market.

[0005] However, there are currently no available systems or devices for real-time monitoring and analysis of exhaust emissions from semiconductor factories. Semiconductor manufacturers typically require complex and time-consuming analytical processes, such as ion chromatography (IC) analysis, to determine whether their exhaust emissions meet requirements. Utility Model Content

[0006] Embodiments of this utility model relate to an environmental detection device for detecting gases generated from semiconductor manufacturing, comprising: a first sensing device including a pair of first electrodes configured to directly supply a first alternating current signal to the gas flowing into the first sensing device; a second sensing device fluidly connected to the first sensing device and including a first filter configured to capture solids in the gas flowing into the second sensing device and a pair of second electrodes configured to directly supply a second alternating current signal to the first filter if the solids are captured by the first filter; and a spectrum analysis device electrically connected to the first sensing device and the second sensing device; wherein the gas includes acidic gases and alkaline gases, and wherein the solids include salt solids.

[0007] Embodiments of this utility model relate to an environmental detection device for detecting gases generated from semiconductor manufacturing, comprising: a first device configured to apply a first alternating current signal to obtain a first response associated with the gas flowing through the first device, wherein the first device does not have a sensing material capable of electrochemically reacting with the gas flowing through the first device; a second device configured to apply a second alternating current signal to obtain a second response associated with a solid in the gas flowing through the second device, wherein the second device does not have a sensing material capable of electrochemically reacting with the solid in the gas flowing through the second device; and an analyzer configured to receive the first response and the second response and generate at least one impedance spectrum based on the first response and the second response; wherein the gas includes acidic gases and alkaline gases, and wherein the solid includes salt solids.

[0008] Embodiments of this utility model relate to a method for detecting the characteristics of a gas generated from semiconductor manufacturing, comprising: providing the gas flowing into a first device; directly applying a first alternating current signal to the gas in the first device to obtain a first response; providing the gas flowing from the first device into a second device; directly applying a second alternating current signal to a first filter placed in the second device and configured to collect solids from the gas in the second device to obtain a second response; and generating at least one impedance spectrum based on the first response and the second response; wherein the gas includes acidic gases and alkaline gases, and wherein the solids include salt solids. Attached Figure Description

[0009] When read in conjunction with the accompanying drawings, the following detailed description is the best way to understand aspects of this disclosure. It should be noted that, in accordance with standard industry practice, the various structures are not drawn to scale. In fact, the dimensions of the various structures can be arbitrarily increased or decreased for clarity of illustration.

[0010] Figure 1 This is a schematic diagram of an environmental detection device according to an embodiment of the present disclosure.

[0011] Figure 2 This is a block diagram of an environmental detection apparatus according to an embodiment of the present disclosure.

[0012] Figure 3A This is a schematic illustration of an embodiment of a gas sensing device in an environmental detection apparatus according to an embodiment of the present disclosure.

[0013] Figure 3B This is a schematic illustration of another embodiment of the gas sensing device of an environmental detection apparatus according to embodiments of the present disclosure.

[0014] Figure 3C This is a schematic illustration of another embodiment of the gas sensing device of an environmental detection apparatus according to embodiments of the present disclosure.

[0015] Figure 4A This is a schematic illustration of an embodiment of a solid-state sensing device for an environmental detection apparatus according to an embodiment of the present disclosure.

[0016] Figure 4B This is a schematic illustration of another embodiment of a solid-state sensing device for an environmental detection apparatus according to embodiments of the present disclosure.

[0017] Figure 5 This is a flowchart illustrating a method for an operating environment detection apparatus according to an embodiment of the present disclosure.

[0018] Figure 6 This describes the usage status of the environmental monitoring device according to an embodiment of the present disclosure.

[0019] Figure 7 This describes another usage state of the environmental monitoring device according to an embodiment of the present disclosure.

[0020] Figure 8 This describes another usage state of the environmental monitoring device according to an embodiment of the present disclosure. Detailed Implementation

[0021] The following disclosure provides numerous different embodiments or examples of various components for implementing the provided subject matter. Specific examples of components and arrangements are described below to simplify this disclosure. These are, of course, merely examples and are not intended to be limiting. For example, embodiments in the following description where a first component is formed above or on a second component may include instances where the first and second components are formed to be in direct contact, and embodiments where additional components may be formed between the first and second components such that the first and second components are not in direct contact. Additionally, element symbols and / or letters may be repeated in various instances in this disclosure. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0022] This description of illustrative embodiments is intended to be read in conjunction with the accompanying drawings, which are considered an integral part of the entire written description. Any references to direction or orientation in the description of the embodiments disclosed herein are intended only for ease of description and are in no way intended to limit the scope of this disclosure. Relative terms such as “down,” “up,” “horizontal,” “vertical,” “above,” “below,” “top,” “bottom,” and their derivatives (e.g., “horizontally,” “downward,” “upward,” etc.) should be interpreted as referring to an orientation as described subsequently or as shown in the figures discussed. These relative terms are for ease of description only and do not require the device to be constructed or operated in a particular orientation. Unless otherwise explicitly stated, terms such as “attach,” “attach,” “connect,” and “interconnect” refer to a relationship in which the structures are directly or indirectly fixed or attached to each other through an intermediate structure, and both movable or rigid attachment or relationship. Furthermore, the features and advantages of this disclosure are illustrated by reference to embodiments. Therefore, this disclosure is not expressly intended to be limited to these embodiments that illustrate some possible non-limiting combinations of features that may exist alone or in other combinations of features; the scope of this disclosure is defined by the claims appended to it.

[0023] This disclosure provides an environmental monitoring device for detecting and identifying the characteristics of exhaust gases generated from semiconductor manufacturing. Examples of this disclosure include an environmental monitoring device and method for detecting impedance quantities in gases. Impedance can be obtained via electrochemical impedance spectroscopy. Electrochemical impedance spectroscopy (e.g., EIS) is an electrochemical technique that can incorporate sinusoidal electrochemical perturbations (e.g., voltage or current) applied to a sample covering a wide range of frequencies. This multi-frequency excitation allows for the measurement of electrochemical reactions occurring therein at different rates and with the capacitance of the corresponding electrodes.

[0024] Figure 1 This is a schematic diagram of an environmental monitoring device 10 according to some embodiments of the present disclosure. In some embodiments of the present disclosure, the environmental monitoring device may include a power device 11, a gas sensing device 2, a solid sensing device 3, a spectrum analyzer 4, a power device 11, a display 12, a DAQ device 13, and a controller 14.

[0025] like Figure 1 As shown, the environmental monitoring device 10 may include an air inlet 101 and an air outlet 102. Waste gas generated from semiconductor manufacturing can be introduced into the environmental monitoring device 10 through the air inlet 101 and discharged from the environmental monitoring device 10 through the air outlet 102. (Reference) Figure 1Pump 1 can be connected to air inlet 101 and configured to introduce exhaust gas from outside the environmental monitoring device 10 into the interior of the environmental monitoring device 10. In use, the environmental monitoring device 10 can be connected to the exhaust equipment (e.g., a chimney) of a semiconductor manufacturing plant via a sampling port to collect exhaust gas. However, the interior of the exhaust equipment may be under negative pressure, and the exhaust gas cannot flow into the environmental monitoring device 10 on its own. Therefore, pump 1 is needed to draw the exhaust gas from the sampling port of the exhaust equipment into the environmental monitoring device 10.

[0026] refer to Figure 1 Pump 1 can be connected to gas sensing device 2, which can be considered as a first sensing device or a first device. Pump 1 can be in fluid communication with gas sensing device 2. Gas sensing device 2 is configured to detect the impedance spectrum of exhaust gas flowing into gas sensing device 2. In some embodiments of this disclosure, gas sensing device 2 includes at least two electrodes to which AC (alternating current) signals of different frequencies can be applied. Current and voltage responses between these electrodes can be transmitted to and recorded in spectrum analyzer 4. Spectrum analyzer 4 can calculate complex impedance values ​​based on these responses and perform these measurements at different frequencies, thereby forming an impedance spectrum over a frequency range. That is, the impedance spectrum of exhaust gas can be detected by gas sensing device 2.

[0027] A solid-state sensing device 3 can be connected to a gas sensing device 2. The gas sensing device 2 can be in fluid communication with the solid-state sensing device 3. That is, exhaust gas can flow from the gas sensing device 2 into the solid-state sensing device 3. The gas sensing device 2 is configured to detect the impedance spectrum of solids in the exhaust gas flowing into the solid-state sensing device 3. In some embodiments of this disclosure, the exhaust gas may contain acidic and alkaline gases. The acidic and alkaline gases may contain salt solids. That is, the solid-state sensing device 3 can be used to detect the impedance spectrum of these salt solids.

[0028] In some embodiments of this disclosure, the solid-state sensing device may include at least two electrodes and a filter between the electrodes. When exhaust gas flows into the solid-state sensing device 3, solids in the exhaust gas can be collected by the filter and remain on the filter. AC (alternating current) signals of different frequencies can be applied to the electrodes. The current and voltage responses between these electrodes can be transmitted to and recorded in a spectrum analyzer 4. The spectrum analyzer 4 can calculate complex impedance values ​​based on these responses and perform these measurements at different frequencies, thereby forming an impedance spectrum over a frequency range. That is, the impedance spectrum of solids in the exhaust gas can be detected by the solid-state sensing device 3.

[0029] The spectrum analyzer 4 can receive and record the current and voltage responses between the electrodes in the gas sensing device 2 and / or between the electrodes in the solid-state sensing device 3. Based on these responses, the spectrum analyzer 4 can calculate complex impedance values ​​and generate an impedance spectrum. That is, the spectrum analyzer 4 is configured to obtain the impedance spectrum detected by the gas sensing device 2 and the impedance spectrum detected by the solid-state sensing device. By analyzing the impedance spectrum generated by the spectrum analyzer 4, a user can infer or identify the characteristics of the exhaust gas, such as its composition and concentration. In some embodiments of this disclosure, the spectrum analyzer 4 may include a model comprising exhaust gas data and information. When the spectrum analyzer 4 generates an impedance spectrum, the generated impedance spectrum can be matched with the model to directly identify the characteristics of the exhaust gas. That is, the spectrum analyzer 4 can identify the characteristics of the exhaust gas based on the impedance spectrum detected by the gas sensing device 2 and / or the impedance spectrum detected by the solid-state sensing device 3.

[0030] The power device 11 may include a power supply. The power device 11 is configured to provide power to the pump 1, the gas sensing device 2, the solid-state sensing device 3, the spectrum analyzer 4, the display 12, the DAQ device 13, and / or the controller 14.

[0031] Display 12 is configured to provide information to a user. In some embodiments of this disclosure, display 12 may provide results of an impedance spectrum generated by spectrum analyzer 4. For example, display 12 may display an electrochemical impedance spectrum. In some embodiments of this disclosure, the electrochemical impedance spectrum may include a Nyquist plot and a Bode plot. In some embodiments of this disclosure, display 12 may display the characteristics of exhaust gases. For example, display 12 may display the composition and concentration of exhaust gases.

[0032] In some embodiments of this disclosure, the DAQ device 13 is configured to receive and record current and voltage responses from the gas sensing device 2. In some embodiments of this disclosure, the DAQ device 13 is configured to receive and record current and voltage responses from the solid-state sensing device 3. In some embodiments of this disclosure, the DAQ device 13 is configured to receive and record current and voltage responses from the gas sensing device 2 and / or from the solid-state sensing device 3 via a spectrum analyzer 4. In some embodiments of this disclosure, the DAQ device 13 is configured to receive and record impedance spectra generated from the spectrum analyzer 4. The DAQ device 13 may include (but is not limited to) an analog-to-digital converter (ADC), a data logger, a signal conditioning circuitry, a multiplexer, and a time-to-digital converter (TDC).

[0033] The controller 14 may include a programmable logic controller (PLC). In some embodiments of this disclosure, the controller 14 is configured to control the pump 1, the gas sensing device 2, the solid-state sensing device 3, the spectrum analyzer 4, the power device 11, the display 12, and / or the DAQ device 13.

[0034] Figure 2 This is a block diagram of an environmental detection device 10 according to some embodiments. For example... Figure 2 As shown, the gas sensing device 2 can be electrically connected to the spectrum analyzer 4. When an AC electrical signal is applied to the electrodes in the gas sensing device 2, the current and voltage responses between these electrodes can be transmitted from the gas sensing device 2 to the spectrum analyzer 4. When the spectrum analyzer 4 receives the response from the gas sensing device 2, it can record the response. Furthermore, the spectrum analyzer 4 can calculate complex impedance values ​​and generate an impedance spectrum based on these responses.

[0035] The solid-state sensing device 3 can also be electrically connected to the spectrum analyzer 4. When an AC electrical signal is applied to the electrodes in the solid-state sensing device 3, the current and voltage responses between these electrodes can be transmitted from the gas sensing device 2 to the spectrum analyzer 4. When the spectrum analyzer 4 receives the response from the solid-state sensing device 3, it can record the response. Furthermore, the spectrum analyzer 4 can calculate complex impedance values ​​and generate an impedance spectrum based on these responses.

[0036] Furthermore, the display 12 can be electrically connected to the spectrum analyzer 4. That is, the impedance spectrum generated by the spectrum analyzer 4 can be displayed on the display 12. In some embodiments of this disclosure, the impedance spectrum generated by the spectrum analyzer 4 can be converted into a Nyquist plot and a Bode plot for display on the display 12. In some embodiments of this disclosure, the spectrum analyzer 4 may include a model comprising exhaust gas data and information. When the spectrum analyzer 4 generates an impedance spectrum, the generated impedance spectrum can be matched with the model to directly identify the characteristics of the exhaust gas. Therefore, the display 12 can display the characteristics of the exhaust gas, such as its composition and concentration.

[0037] DAQ device 13 can be electrically connected to gas sensing device 2, solid-state sensing device 3, and / or spectrum analyzer 4. That is, DAQ device 13 can receive and record the current and voltage responses from gas sensing device 2. DAQ device 13 can receive and record the current and voltage responses from solid-state sensing device 3. DAQ device 13 can receive and record the current and voltage responses from gas sensing device 2 and / or solid-state sensing device 3 via spectrum analyzer 4. DAQ device 13 can receive and record the impedance spectrum generated from spectrum analyzer 4.

[0038] refer to Figure 2Gas sensing device 2, solid-state sensing device 3, spectrum analyzer 4, display 12, and DAQ device 13 can together form a subsystem of environmental monitoring device 10. For example... Figure 2 As shown, power device 11 is electrically connected to a subsystem of environmental monitoring device 10. That is, power device 11 can provide power to gas sensing device 2, solid-state sensing device 3, spectrum analyzer 4, display 12, and / or DAQ device 13. Controller 14 is electrically connected to a subsystem of environmental monitoring device 10. That is, gas sensing device 2, solid-state sensing device 3, spectrum analyzer 4, display 12, and / or DAQ device 13 can be controlled by controller 14. Additionally, pump 1 can be electrically connected to power device 11, and therefore power device 11 can provide power to pump 1. Furthermore, pump 1 can be electrically connected to controller 14. That is, pump 1 can be controlled by controller 14.

[0039] Figure 3A This is a schematic diagram illustrating an embodiment of the gas sensing device 2 of the environmental detection apparatus 10 according to an embodiment of the present disclosure. Figure 3A As shown, the gas sensing device 2 may include an inlet 2-11 and an outlet 2-12, where the inlet 2-11 can be considered as a first inlet and the outlet 2-12 as a first outlet. The inlet 2-11 of the gas sensing device 2 can be connected to the pump 1. Therefore, exhaust gas 9 can be introduced into the gas sensing device 2 from the pump 1 through the inlet 2-11. Furthermore, the outlet 2-12 of the gas sensing device 2 can be connected to the solid-state sensing device 3. Therefore, exhaust gas 9 can be discharged from the gas sensing device 2 and flow into the solid-state sensing device 3 through the outlet 2-12. (Reference) Figure 3A Exhaust gas 9 can be introduced into the gas sensing device 2 through the inlet 2-11 and can flow through the gas sensing device 2, and then flow out of the gas sensing device 2 through the outlet 2-12, thereby forming a gas flow path 2-10 in the gas sensing device 2. That is, the gas flow path 2-10 can extend from the inlet 2-11 to the outlet 2-12.

[0040] The gas sensing device 2 may include multiple electrodes 2-13 and 2-15, and electrodes 2-13 and 2-15 can be considered as the first electrode. For example... Figure 3AAs shown, electrode 2-13 can be arranged along gas flow path 2-10 and on one side of gas flow path 2-10, and electrode 2-15 can be arranged along gas flow path 2-10 and on the opposite side of gas flow path 2-10. In some embodiments of this disclosure, electrodes 2-13 and 2-15 can be placed substantially in pairs, and gas flow path 2-10 can extend between the paired electrodes 2-13 and 2-15. That is, exhaust gas 9 flowing through gas flow path 2-10 of gas sensing device 2 can flow between the paired electrodes 2-13 and 2-15. In some embodiments of this disclosure, electrodes 2-13 and 2-15 can include electrode sheets, and the electrode sheets can be positioned substantially parallel to the direction of extension of gas flow path 2-10. That is, electrodes 2-13 and 2-15 can be substantially parallel to the direction extending from inlet 2-11 toward outlet 2-12.

[0041] As exhaust gas 9 flows through gas sensing device 2, a series of AC (alternating current) electrical signals can be applied to electrodes 2-13 and 2-15. These AC signals may include sinusoidal signals. The current and voltage responses between electrodes 2-13 and 2-15 to the AC signals at each frequency can then be acquired. This response can be considered to relate to the response of exhaust gas 9 flowing into gas sensing device 2. The acquired response can be transmitted to spectrum analyzer 4, which measures the response and generates an impedance spectrum of exhaust gas 9 in gas sensing device 2. These impedance spectra provide information about the characteristics of exhaust gas 9 in gas sensing device 2.

[0042] The gas sensing device 2 may not contain any sensing material capable of electrochemically reacting with the gas. That is, the AC electrical signal from electrodes 2-13 and 2-15 can be directly applied to the exhaust gas 9 in the gas sensing device 2. Therefore, when an AC electrical signal is provided, an electrochemical reaction may not occur within the gas sensing device 2.

[0043] Figure 3B This is a schematic illustration of another embodiment of the gas sensing device 2 of an environmental detection apparatus according to embodiments of the present disclosure. Figure 3B As shown, the gas sensing device 2 may include an inlet 2-21 and an outlet 2-22, where the inlet 2-21 can be considered a first inlet and the outlet 2-22 can be considered a first outlet. The inlet 2-21 of the gas sensing device 2 can be connected to the pump 1. Therefore, exhaust gas 9 can be introduced into the gas sensing device 2 from the pump 1 through the inlet 2-21. Furthermore, the outlet 2-22 of the gas sensing device 2 can be connected to the solid-state sensing device 3. Therefore, exhaust gas 9 can be discharged from the gas sensing device 2 and flow into the solid-state sensing device 3 through the outlet 2-22. (Reference) Figure 3BExhaust gas 9 can be introduced into the gas sensing device 2 through the inlet 2-21 and can flow through the gas sensing device 2, and then flow out of the gas sensing device 2 through the outlet 2-22, thereby forming a gas flow path 2-20 in the gas sensing device 2. That is, the gas flow path 2-20 can extend from the inlet 2-21 to the outlet 2-22.

[0044] The gas sensing device 2 may include multiple electrodes 2-23 and 2-25, and electrodes 2-23 and 2-25 can be considered as the first electrode. For example... Figure 3B As shown, electrode 2-23 can be arranged along gas flow path 2-20 and on one side of gas flow path 2-20, and electrode 2-25 can be arranged along gas flow path 2-20 and on the opposite side of gas flow path 2-20. In some embodiments of this disclosure, electrodes 2-23 and 2-25 can be placed substantially in pairs, and gas flow path 2-20 can extend between the paired electrodes 2-23 and 2-25. That is, exhaust gas 9 flowing through gas flow path 2-20 of gas sensing device 2 can flow between the paired electrodes 2-23 and 2-25. In some embodiments of this disclosure, electrodes 2-23 and 2-25 can comprise electrode sheets, and the electrode sheets can be positioned substantially parallel to the direction of extension of gas flow path 2-20. That is, electrodes 2-23 and 2-25 can be substantially parallel to the direction extending from inlet 2-21 toward outlet 2-22.

[0045] The gas sensing device 2 may include multiple filters 2-27. Filters 2-27 can be considered as a second filter of the first sensing device or a first filter of the first device. Filters 2-27 may be arranged along the direction extending from the gas flow path 2-20. Filters 2-27 may be arranged within the gas flow path 2-20. Filters 2-27 may be arranged between electrodes 2-23 and 2-25. That is, when exhaust gas 9 flows through the gas sensing device 2, exhaust gas 9 can pass through filters 2-27. In some embodiments of this disclosure, filters 2-27 may be substantially parallel to the direction extending from the gas flow path 2-20. That is, filters 2-27 may be substantially parallel to the direction extending from the inlet 2-21 towards the outlet 2-22. Even if filters 2-27 are arranged in this manner, exhaust gas 9 can still pass through filters 2-27. In some embodiments of this disclosure, the pore size of filters 2-27 may be large enough to allow solids in the exhaust gas 9 to pass through. As mentioned above, exhaust gas 9 may contain acidic and alkaline gases, and said acidic and alkaline gases may contain salt solids. The pore size of filter 2-27 may not be sufficient to collect the salt solids, which may pass through the pores of filter 2-27 along with exhaust gas 9.

[0046] As exhaust gas 9 flows into gas sensing device 2 and passes through filters 2-27, a series of AC (alternating current) electrical signals can be applied to electrodes 2-23 and 2-25. These AC signals may include sinusoidal signals. The current and voltage responses to the AC signals at each frequency caused by the exhaust gas 9 passing through filters 2-27 and / or multiple filters 2-27 can then be acquired. This response can be considered to relate to the response of exhaust gas 9 passing through filters 2-27 in gas sensing device 2. The acquired response can be transmitted to a spectrum analyzer 4, which measures the response and generates an impedance spectrum of the exhaust gas 9 passing through filters 2-27 in gas sensing device 2. These impedance spectra provide information about the characteristics of the exhaust gas 9 in gas sensing device 2.

[0047] The gas sensing device 2 may not contain any sensing material capable of electrochemically reacting with the gas. That is, the AC electrical signal from electrodes 2-23 and 2-25 can be directly applied to the exhaust gas 9 passing through filters 2-27 and / or several filters 2-27. Therefore, when an AC electrical signal is provided, an electrochemical reaction may not occur within the gas sensing device 2.

[0048] Figure 3C This is a schematic illustration of another embodiment of the gas sensing device 2 of an environmental detection apparatus according to embodiments of the present disclosure. Figure 3C As shown, the gas sensing device 2 may include an inlet 2-31 and an outlet 2-32, where the inlet 2-31 can be considered a first inlet and the outlet 2-32 can be considered a first outlet. The inlet 2-31 of the gas sensing device 2 can be connected to the pump 1. Therefore, exhaust gas 9 can be introduced into the gas sensing device 2 from the pump 1 through the inlet 2-31. Furthermore, the outlet 2-32 of the gas sensing device 2 can be connected to the solid-state sensing device 3. Therefore, exhaust gas 9 can be discharged from the gas sensing device 2 and flow into the solid-state sensing device 3 through the outlet 2-32. (Reference) Figure 3C Exhaust gas 9 can be introduced into gas sensing device 2 through inlet 2-31 and flow through gas sensing device 3, and then flow out of gas sensing device 2 through outlet 2-32, thereby forming gas flow path 2-30 in gas sensing device 2. That is, gas flow path 2-30 can extend from inlet 2-31 to outlet 2-32.

[0049] The gas sensing device 2 may include multiple electrodes 2-33 and 2-35, and electrodes 2-33 and 2-35 can be considered as the first electrode. For example... Figure 3CAs shown, electrode 2-33 can be arranged along gas flow path 2-30 and on one side of gas flow path 2-30, and electrode 2-35 can be arranged along gas flow path 2-30 and on the opposite side of gas flow path 2-30. In some embodiments of this disclosure, electrodes 2-33 and 2-35 can be placed substantially in pairs, and gas flow path 2-30 can extend between the paired electrodes 2-33 and 2-35. That is, exhaust gas 9 flowing through gas flow path 2-30 of gas sensing device 2 can flow between the paired electrodes 2-33 and 2-35. In some embodiments of this disclosure, electrodes 2-33 and 2-35 can include electrode sheets, and the electrode sheets can be positioned substantially parallel to the direction of extension of gas flow path 2-30. That is, electrodes 2-33 and 2-35 can be substantially parallel to the direction extending from inlet 2-31 toward outlet 2-32.

[0050] The gas sensing device 2 may include a plurality of through holes 2-370. The through holes 2-370 may be arranged in the gas flow path 2-30. The through holes 2-370 may be arranged between electrodes 2-33 and 2-35. That is, when exhaust gas 9 flows through the gas sensing device 2, the exhaust gas 9 can pass through the through holes 2-370. In some embodiments of this disclosure, the through holes 2-370 may be large enough to allow solids in the exhaust gas 9 to pass through. As mentioned above, the exhaust gas 9 may contain acidic and alkaline gases, and the acidic and alkaline gases may contain salt solids. The size of the through holes 2-370 may not obstruct salt solids, and the salt solids may pass through the through holes 2-370 together with the exhaust gas 9.

[0051] As exhaust gas 9 flows into gas sensing device 2 and through through-hole 2-370, a series of AC (alternating current) electrical signals can be applied to electrodes 2-33 and 2-35. These AC signals may include sinusoidal signals. The current and voltage responses to the AC signals at each frequency caused by exhaust gas 9 and / or through-hole 2-370 can then be acquired. This response can be considered to relate to the response of exhaust gas 9 through through-hole 2-370 in gas sensing device 2. The acquired response can be transmitted to spectrum analyzer 4, which measures the response and generates an impedance spectrum of exhaust gas 9 through through-hole 2-370 in gas sensing device 2. These impedance spectra provide information about the characteristics of exhaust gas 9 in gas sensing device 2.

[0052] The gas sensing device 2 may not contain any sensing material capable of electrochemically reacting with the gas. That is, the AC electrical signal from electrodes 2-33 and 2-35 can be directly applied to the exhaust gas 9 passing through the through-hole 2-370 and / or the through-hole 2-370. Therefore, when an AC electrical signal is provided, an electrochemical reaction may not occur within the gas sensing device 2.

[0053] Figure 4A This is a schematic illustration of an embodiment of the solid-state sensing device 3 of the environmental detection apparatus 10 according to an embodiment of the present disclosure. The solid-state sensing device 3 can be regarded as a second sensing device or a second device. Figure 4A As shown, the solid-state sensor 3 may include an inlet 3-11 and an outlet 3-12, where the inlet 3-11 can be considered a second inlet and the outlet 3-12 can be considered a second outlet. The inlet 3-11 of the solid-state sensor 3 may be connected to the outlet 2-11 or 2-21 of the gas sensor 2. Therefore, exhaust gas 9 can flow out of the gas sensor 2 and then flow into the solid-state sensor 3 through the inlet 3-11. In some embodiments of this disclosure, the outlet 3-12 of the solid-state sensor 3 may be connected to the outlet 102 of the environmental detection device 10. In some embodiments of this disclosure, the outlet 3-12 of the solid-state sensor 3 may include the outlet 102 of the environmental detection device 10. That is, when exhaust gas 9 flows through the outlet 3-12 of the solid-state sensor 3, exhaust gas 9 can be discharged from the environmental detection device 10. (See reference...) Figure 4A Exhaust gas 9 can be introduced into solid-state sensing device 3 through inlet 3-11 and can flow through solid-state sensing device 3, and then flow out of solid-state sensing device 3 through outlet 3-12, thereby forming gas flow path 3-10 in solid-state sensing device 3. That is, gas flow path 3-10 can extend from inlet 3-11 to outlet 3-12.

[0054] The solid-state sensing device 3 may include multiple electrodes 3-13 and 3-15, and electrodes 3-13 and 3-15 can be considered as second electrodes. For example... Figure 4A As shown, electrode 3-13 can be arranged along gas flow path 3-10 and on one side of gas flow path 3-10, and electrode 3-15 can be arranged along gas flow path 3-10 and on the opposite side of gas flow path 3-10. In some embodiments of this disclosure, electrodes 3-13 and 3-15 can be placed substantially in pairs, and gas flow path 3-10 can extend between the paired electrodes 3-13 and 3-15. That is, exhaust gas 9 flowing through gas flow path 3-10 of solid-state sensing device 3 can flow between the paired electrodes 3-13 and 3-15. In some embodiments of this disclosure, electrodes 3-13 and 3-15 can include electrode sheets, and the electrode sheets can be positioned substantially parallel to the direction of extension of gas flow path 3-10. That is, electrodes 3-13 and 3-15 can be substantially parallel to the direction extending from inlet 3-11 toward outlet 3-12.

[0055] The solid-state sensing device 3 may include multiple filters 3-17. Filters 3-17 can be considered as a first filter of a second sensing device or a second filter of a second device. Filters 3-17 may be arranged between paired electrodes 3-13 and 3-15. Furthermore, a gas flow path 3-10 can pass through filters 3-17. Therefore, exhaust gas 9 flowing in the gas flow path 3-10 can pass through filters 3-17. In some embodiments of this disclosure, filters 3-17 may be substantially perpendicular to the direction in which the gas flow path 3-10 extends. That is, filters 3-17 may be substantially perpendicular to the direction extending from the inlet 3-11 toward the outlet 3-12. In some embodiments of this disclosure, the pore size of filters 3-17 is sufficient to block solids in the exhaust gas 9 from passing through. As mentioned above, the exhaust gas 9 may contain acidic and alkaline gases, and the acidic and alkaline gases may contain salt solids. When the exhaust gas 9 passes through filters 3-17, filters 3-17 can collect and retain the salt solids on filters 3-17.

[0056] As exhaust gas 9 flows into solid-state sensing device 3 and passes through filter 3-17, leaving solids 91 from the exhaust gas 9 on filter 3-17, a series of AC (alternating current) electrical signals can be applied to electrodes 3-13 and 3-15. These AC signals may include sinusoidal signals. The current and voltage responses to the AC signals at each frequency caused by the solids 91 on filter 3-17 can then be acquired. This response can be considered to relate to the response of the solids 91 in the exhaust gas 9 within solid-state sensing device 3. The acquired response can be transmitted to spectrum analyzer 4, which measures the response and generates an impedance spectrum of the exhaust gas 9 (of solids 91) passing through filter 3-17 in solid-state sensing device 3. These impedance spectra provide information about the characteristics of the exhaust gas 9 within solid-state sensing device 3.

[0057] Furthermore, while solids 91 in the exhaust gas 9 are blocked by filter 3-17, the exhaust gas 9 can still pass through filter 3-17 simultaneously. Therefore, when a series of AC (alternating current) signals are applied to electrodes 3-13 and 3-15, the current and voltage responses to AC signals at each frequency caused by the exhaust gas 9 passing through filter 3-17 can be acquired. This response can be considered to relate to the response of the exhaust gas 9 passing through filter 3-17 in the solid-state sensing device 3. The acquired response can be transmitted to a spectrum analyzer 4, which measures the response and generates an impedance spectrum of the exhaust gas 9 passing through filter 3-17 in the solid-state sensing device 3. These impedance spectra provide information about the characteristics of the exhaust gas 9 in the solid-state sensing device 3.

[0058] The solid-state sensing device 3 may not contain any sensing material capable of electrochemically reacting with the filter 3-17 and / or the solid 91 on the filter 3-17 and / or the exhaust gas 9 passing through the filter 3-17. That is, the AC electrical signal from the electrodes 3-13 and 3-15 can be directly applied to the filter 3-17 and / or the solid 91 on the filter 3-17 and / or the exhaust gas 9 passing through the filter 3-17. Therefore, when an AC electrical signal is provided, an electrochemical reaction may not occur within the solid-state sensing device 3.

[0059] Figure 4B This is a schematic illustration of another embodiment of the solid-state sensing device 3 of the environmental detection apparatus 10 according to embodiments of the present disclosure. Figure 4B As shown, the solid-state sensor 3 may include an inlet 3-21 and an outlet 3-22, where the inlet 3-21 can be considered a second inlet and the outlet 3-22 can be considered a second outlet. The inlet 3-21 of the solid-state sensor 3 may be connected to the outlet 2-11 or 2-21 of the gas sensor 2. Therefore, exhaust gas 9 can flow out of the gas sensor 2 and then flow into the solid-state sensor 3 through the inlet 3-11. In some embodiments of this disclosure, the outlet 3-22 of the solid-state sensor 3 may be connected to the outlet 102 of the environmental monitoring device 10. In some embodiments of this disclosure, the outlet 3-22 of the solid-state sensor 3 may include the outlet 102 of the environmental monitoring device 10. That is, when exhaust gas 9 flows through the outlet 3-22 of the solid-state sensor 3, exhaust gas 9 can be discharged from the environmental monitoring device 10. (See reference...) Figure 4B Exhaust gas 9 can be introduced into solid-state sensing device 3 through inlet 3-21 and can flow through solid-state sensing device 3, and then flow out of solid-state sensing device 3 through outlet 3-22, thereby forming gas flow path 3-20 in solid-state sensing device 3. That is, gas flow path 3-20 can extend from inlet 3-21 to outlet 3-22.

[0060] The solid-state sensing device 3 may include a pair of electrodes 3-23 and 3-25, which can be considered as a second electrode. For example... Figure 4BAs shown, electrode 3-23 can be arranged adjacent to the air inlet 3-21 of the solid-state sensing device 3, and electrode 3-25 can be arranged adjacent to the air outlet 3-22 of the solid-state sensing device 3. That is, electrodes 3-23 and 3-25 are respectively arranged at two opposite ends of the gas flow path 3-20. In some embodiments of this disclosure, electrodes 3-23 and 3-25 can be substantially perpendicular to the direction in which the gas flow path 3-20 extends. That is, electrodes 3-23 and 3-25 can be substantially perpendicular to the direction extending from the air inlet 3-21 toward the air outlet 3-22. In some embodiments of this disclosure, electrode 3-23 can include a through hole 3-230. Exhaust gas 9 flowing through the air inlet 3-21 can pass through the through hole 3-230 of electrode 3-23 and flow into the gas flow path 3-20. In some embodiments of this disclosure, electrode 3-25 can include a through hole 3-250. The exhaust gas 9 can flow out of the solid sensing device 3 through the through hole 3-250 of the electrode 3-25 and the outlet 3-22.

[0061] The solid-state sensing device 3 may include multiple filters 3-27. Filters 3-27 can be considered as a first filter of a second sensing device or a second filter of a second device. Filters 3-27 may be arranged between the pair of electrodes 3-23 and 3-25. Furthermore, a gas flow path 3-20 can pass through filters 3-27. Therefore, exhaust gas 9 flowing in the gas flow path 3-20 can pass through filters 3-27. In some embodiments of this disclosure, filters 3-27 may be substantially perpendicular to the direction in which the gas flow path 3-20 extends. That is, filters 3-27 may be substantially perpendicular to the direction extending from the inlet 3-21 toward the outlet 3-22. In some embodiments of this disclosure, the pore size of filters 3-27 is sufficient to block solids in the exhaust gas 9 from passing through. As mentioned above, the exhaust gas 9 may contain acidic and alkaline gases, and the acidic and alkaline gases may contain salt solids. When the exhaust gas 9 passes through filters 3-27, filters 3-27 can collect and retain the salt solids on filters 3-27.

[0062] As exhaust gas 9 flows into solid-state sensing device 3 and passes through filter 3-27, leaving solids 91 from the exhaust gas 9 on filter 3-27, a series of AC (alternating current) electrical signals can be applied to electrodes 3-23 and 3-25. These AC signals may include sinusoidal signals. The current and voltage responses to the AC signals at each frequency caused by the solids 91 on filter 3-27 can then be acquired. This response can be considered to relate to the response of the solids 91 in the exhaust gas 9 within solid-state sensing device 3. The acquired response can be transmitted to spectrum analyzer 4, which measures the response and generates an impedance spectrum of the exhaust gas 9 (of solids 91) passing through filter 3-27 in solid-state sensing device 3. These impedance spectra provide information about the characteristics of the exhaust gas 9 within solid-state sensing device 3.

[0063] Furthermore, while solids 91 in the exhaust gas 9 are blocked by filter 3-27, the exhaust gas 9 can still pass through filter 3-27 simultaneously. Therefore, when a series of AC (alternating current) signals are applied to electrodes 3-23 and 3-25, the current and voltage responses to AC signals at each frequency caused by the exhaust gas 9 passing through filter 3-27 can be acquired. This response can be considered to relate to the response of the exhaust gas 9 passing through filter 3-27 in the solid-state sensing device 3. The acquired response can be transmitted to spectrum analyzer 4, which measures the response and generates an impedance spectrum of the exhaust gas 9 passing through filter 3-27 in the solid-state sensing device 3. These impedance spectra provide information about the characteristics of the exhaust gas 9 in the solid-state sensing device 3.

[0064] The solid-state sensing device 3 may not contain any sensing material capable of electrochemically reacting with the filter 3-27 and / or the solid 91 on the filter 3-27 and / or the exhaust gas 9 passing through the filter 3-27. That is, the AC electrical signal from the electrodes 3-23 and 3-25 can be directly applied to the filter 3-27 and / or the solid 91 on the filter 3-27 and / or the exhaust gas 9 passing through the filter 3-27. Therefore, when an AC electrical signal is provided, an electrochemical reaction may not occur within the solid-state sensing device 3.

[0065] Figure 5 This is a flowchart illustrating a method for an operating environment detection apparatus according to an embodiment of the present disclosure.

[0066] In operation 51, exhaust gas 9 generated from semiconductor manufacturing may be introduced into environmental monitoring device 10. In some embodiments of this disclosure, exhaust gas 9 may contain acidic and alkaline gases. In some embodiments of this disclosure, exhaust gas 9 may be introduced into environmental monitoring device 10 via pump 1. In some embodiments of this disclosure, exhaust gas 9 may be introduced from a local scrubbing tower system. In some embodiments of this disclosure, exhaust gas 9 may be introduced from a central scrubbing tower system. In some embodiments of this disclosure, exhaust gas 9 may be introduced from a factory chimney.

[0067] In operation 52, exhaust gas 9 may be introduced into gas sensing device 2. In some embodiments of this disclosure, pump 1 may introduce exhaust gas 9 into gas sensing device 2.

[0068] In operation 53, when exhaust gas 9 flows into gas sensing device 2, a series of AC (alternating current) electrical signals can be applied to electrodes 2-13, 2-15, 2-23, and 2-25 in gas sensing device 2. In some embodiments of this disclosure, exhaust gas 9 can flow directly between electrodes 2-13 and 2-15, and a first response of current and voltage between electrodes 2-13 and 2-15 can be obtained when AC electrical signals are applied to electrodes 2-13 and 2-15. In some embodiments of this disclosure, exhaust gas 9 can pass through filter 2-27 between electrodes 2-23 and 2-25, and a first response of current and voltage caused by filter 2-27 can be obtained when AC electrical signals are applied to electrodes 2-23 and 2-25. That is, a first response regarding exhaust gas 9 in gas sensing device 2 can be obtained after applying AC electrical signals. In some embodiments of this disclosure, the obtained first response can be transmitted from gas sensing device to spectrum analyzer 4.

[0069] In operation 54, exhaust gas 9 can flow out of gas sensing device 2 and into solid sensing device 3.

[0070] In operation 55, when exhaust gas 9 flows into solid-state sensing device 3, a series of AC (alternating current) electrical signals can be applied to electrodes 3-13, 3-15, 3-23, and 3-25 in solid-state sensing device 3. In some embodiments of this disclosure, solids 91 in the exhaust gas 9 flowing into solid-state sensing device 3 can be collected by filters 3-17 and 3-27, and a second response of current and voltage caused by filters 3-17 and 3-27 can be obtained when AC electrical signals are applied to electrodes 3-13, 3-15, 3-23, and 3-25. That is, a second response regarding solids 91 in exhaust gas 9 in solid-state sensing device 3 can be obtained after applying AC electrical signals. In some embodiments of this disclosure, exhaust gas 9 flowing into solid-state sensing device 3 can pass through filters 3-17 and 3-27, and a third response of current and voltage caused by filters 3-17 and 3-27 can be obtained when AC electrical signals are applied to electrodes 3-13, 3-15, 3-23, and 3-25. That is, a third response regarding the exhaust gas 9 in the solid-state sensing device 3 can be obtained after applying an AC electrical signal. In some embodiments of this disclosure, the obtained response can be transmitted from the solid-state sensing device 3 to the spectrum analyzer 4.

[0071] In operation 56, the spectrum analyzer 4 can measure the response and generate an impedance spectrum. In some embodiments of this disclosure, the spectrum analyzer 4 can measure the response from the gas sensing device 2 and generate an impedance spectrum of the exhaust gas 9 in the gas sensing device 2. In some embodiments of this disclosure, the spectrum analyzer 4 can measure the response from the solid-state sensing device 3 and generate an impedance spectrum of the solid 91 in the exhaust gas 9 in the solid-state sensing device 3 and / or an impedance spectrum of the exhaust gas 9 in the solid-state sensing device 3. The user can identify the characteristics of the exhaust gas 9 based on the impedance spectrum generated by the spectrum analyzer 4.

[0072] In operation 57, exhaust gas 9 may be discharged from environmental monitoring device 10. In some embodiments of this disclosure, exhaust gas 9 discharged from environmental monitoring device 10 may be collected again.

[0073] Figure 6 The usage status of the environmental monitoring device 10 according to an embodiment of this disclosure is described. For example... Figure 6 As shown, the environmental monitoring device 10 can be located at the local scrubbing tower system 6. In some embodiments of this disclosure, the environmental monitoring device 10 can be connected to the wafer fab exhaust port of the local scrubbing tower system 6 and pumped exhaust gas that has passed through the scrubbing tower 61 into the environmental monitoring device 10. Users can use the environmental monitoring device 10 to understand the characteristics of the exhaust gas emitted by the local scrubbing tower system 6. In addition, the processing efficiency of the local scrubbing tower system 6 can be determined.

[0074] Figure 7 This describes another usage state of the environmental monitoring device 10 according to an embodiment of the present disclosure. For example... Figure 7 As shown, the environmental monitoring device 10 can be located at the central scrubbing tower system 7. In some embodiments of this disclosure, the environmental monitoring device 10 can be connected to the wafer fab exhaust port of the central scrubbing tower system 7 and pumped with exhaust gas that has passed through scrubbing tower 71 into the environmental monitoring device 10. Users can use the environmental monitoring device 10 to understand the characteristics of the exhaust gas emitted by the central scrubbing tower system 7. In addition, the processing efficiency of the local scrubbing tower system 7 can be determined.

[0075] Figure 8 This describes another usage state of the environmental monitoring device 10 according to an embodiment of the present disclosure. For example... Figure 8 As shown, the environmental monitoring device 10 can be positioned at the chimney platform 8. In some embodiments of this disclosure, the environmental monitoring device 10 can be connected to the chimney 81 of the chimney platform 8 and the exhaust gas from the chimney 81 can be pumped into the environmental monitoring device 10. Users can use the environmental monitoring device 10 to understand the characteristics of the exhaust gas emitted from the chimney 81 and determine whether the exhaust gas emitted from the chimney 81 meets the requirements.

[0076] It should be understood that the aforementioned apparatus can detect and / or identify waste gases generated from semiconductor manufacturing in real time. Users can use detection applications to monitor emissions from semiconductor manufacturing tools and / or semiconductor manufacturing plants and infer or identify the characteristics of the emissions in real time, such as their composition and concentration. That is, users can determine the treatment efficiency of local or central scrubbing tower systems and understand whether the emissions meet net-zero emission requirements.

[0077] According to one embodiment of this disclosure, an environmental monitoring device includes: a first sensing device; a second sensing device in fluid communication with the first sensing device; and a spectrum analyzer electrically connected to the first sensing device and the second sensing device. The first sensing device includes a pair of first electrodes configured to directly provide a first alternating current signal to gas flowing into the first sensing device. The second sensing device includes a first filter configured to capture solids in the gas flowing into the second sensing device and a pair of second electrodes configured to directly provide a second alternating current signal to the first filter if the solids are captured by the first filter.

[0078] According to another embodiment of this disclosure, an environmental monitoring device includes: a first device configured to apply a first alternating current signal to obtain a first response associated with a gas flowing through the first device, wherein the first device does not have a sensing material capable of electrochemically reacting with the gas flowing through the first device; a second device configured to apply a second alternating current signal to obtain a second response associated with a solid in the gas flowing through the second device, wherein the second device does not have a sensing material capable of electrochemically reacting with the solid in the gas flowing through the second device; and an analyzer configured to receive the first response and the second response and generate at least one impedance spectrum based on the first response and the second response.

[0079] According to one embodiment of this disclosure, a method for detecting the properties of a gas includes: providing the gas flowing into a first device; directly applying a first alternating current signal to the gas in the first device to obtain a first response; providing the gas flowing from the first device into a second device; directly applying a second alternating current signal to a first filter placed in the second device and configured to collect solids from the gas in the second device to obtain a second response; and generating at least one impedance spectrum based on the first response and the second response.

[0080] The foregoing outlines the features of several embodiments to enable those skilled in the art to better understand aspects of this disclosure. Those skilled in the art will understand that this disclosure can be readily used as a basis for designing or modifying other processes and structures to implement the same purposes and / or achieve the same advantages of the embodiments described herein. Those skilled in the art will also recognize that these equivalent constructions do not depart from the spirit and scope of this disclosure, and that various changes, substitutions, and modifications can be made herein without departing from the spirit and scope of this disclosure.

[0081] Symbol Explanation

[0082] 1: Pump

[0083] 2: Gas sensing devices

[0084] 2-10: Gas Flow Path

[0085] 2-11: Air Inlet

[0086] 2-12: Air vent

[0087] 2-13: Electrodes

[0088] 2-15: Electrodes

[0089] 2-20: Gas Flow Path

[0090] 2-21: Air Inlet

[0091] 2-22: Air vent

[0092] 2-23: Electrode

[0093] 2-25: Electrode

[0094] 2-27: Filter

[0095] 2-30: Gas Flow Path

[0096] 2-31: Air Inlet

[0097] 2-32: Air outlet

[0098] 2-33: Electrode

[0099] 2-35: Electrode

[0100] 2-370: Through hole

[0101] 3: Solid-state sensing devices

[0102] 3-10: Gas Flow Path

[0103] 3-11: Air Inlet

[0104] 3-12: Air vent

[0105] 3-13: Electrodes

[0106] 3-15: Electrodes

[0107] 3-17: Filter

[0108] 3-20: Gas Flow Path

[0109] 3-21: Air Inlet

[0110] 3-22: Air vent

[0111] 3-23: Electrode

[0112] 3-230: Through hole

[0113] 3-25: Electrodes

[0114] 3-250: Through hole

[0115] 3-27: Filter

[0116] 4: Spectrum Analyzer

[0117] 6: Local scrubbing tower system

[0118] 7: Central Scrubber Tower System

[0119] 8: Chimney Platform

[0120] 9: Exhaust gas

[0121] 10: Environmental monitoring device

[0122] 11: Electrical Devices

[0123] 12: Monitor

[0124] 13: DAQ devices

[0125] 14: Controller

[0126] 51: Operation

[0127] 52: Operation

[0128] 53: Operation

[0129] 54: Operation

[0130] 55: Operation

[0131] 56: Operation

[0132] 57: Operation

[0133] 61: Scrubber Tower

[0134] 71: Washing Tower

[0135] 81: Chimney

[0136] 91: Solid

[0137] 101: Air Intake

[0138] 102: Vent.

Claims

1. An environmental detection device for detecting gases generated from semiconductor manufacturing, characterized by It comprises: a first sensing device comprising a pair of first electrodes configured to directly supply a first alternating current electrical signal to the gas flowing into the first sensing device; a second sensing device in fluid communication with the first sensing device and comprising a first filter configured to capture a solid in the gas flowing into the second sensing device and a pair of second electrodes configured to directly supply a second alternating current electrical signal to the first filter if the solid is captured by the first filter; and a spectral analysis device electrically connected to the first sensing device and the second sensing device; wherein the gas comprises an acidic gas and a basic gas, and wherein the solid comprises a salt solid.

2. The environmental detection apparatus of claim 1, wherein The first sensing device comprises a first gas inlet and a first gas outlet and the second sensing device comprises a second gas inlet and a second gas outlet, and wherein the first gas inlet of the sensing device is configured to introduce the gas into the first sensing device, and wherein the first gas outlet of the first sensing device is connected to the second gas inlet of the second sensing device, and wherein the second gas outlet of the second sensing device is configured to release the gas from the second sensing device.

3. The environmental detection apparatus of claim 2, wherein The first sensing device comprises a second filter arranged between the pair of first electrodes and substantially parallel to a direction extending from the first gas inlet of the first sensing device towards the first gas outlet of the first sensing device, and wherein the first alternating current electrical signal is directly supplied to the filter and the gas passes through the second filter.

4. The environmental detection apparatus of claim 2, wherein The first filter is substantially perpendicular to a direction extending from the second gas inlet of the second sensing device towards the second gas outlet of the second sensing device and arranged between the pair of second electrodes.

5. The environmental detection apparatus of claim 4, wherein The pair of second electrodes is arranged substantially parallel to a direction extending from the second gas inlet of the second sensing device towards the second gas outlet of the second sensing device.

6. The environmental detection apparatus of claim 4, wherein The pair of second electrodes is arranged substantially perpendicular to a direction extending from the second gas inlet of the second sensing device towards the second gas outlet of the second sensing device.

7. An environmental detection device for detecting gases generated from semiconductor manufacturing, characterized by It comprises: a first device configured to apply a first alternating current electrical signal to obtain a first response associated with the gas flowing through the first device, wherein the first device does not have a sensing material capable of electrochemically reacting with the gas flowing through the first device; a second device configured to apply a second alternating current electrical signal to obtain a second response associated with a solid in the gas flowing through the second device, wherein the second device does not have a sensing material capable of electrochemically reacting with the solid in the gas flowing through the second device; and an analyzer configured to receive the first response and the second response and generate at least one impedance spectrum based on the first response and the second response; wherein the gas comprises an acidic gas and a basic gas, and wherein the solid comprises a salt solid.

8. The environmental detection apparatus of claim 7, wherein The first device is configured to acquire the first response associated with the gas passing through a first filter placed within the first device.

9. The environmental detection apparatus of claim 7, wherein The second device includes a second filter configured to collect the solid in the gas, and wherein the second device is configured to acquire the second response associated with the solid collected by the second filter.

10. The environmental detection apparatus of claim 9, wherein The second device is configured to acquire a third response regarding the gas flowing through the second filter, and wherein the analyzer is configured to receive the third response and generate the at least one impedance spectrum based on the first response, the second response, and the third response.

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