Bipolar output circuit for photoresist constant-temperature power supply

Abstract

The utility model relates to the technical field of power supply circuits, in particular to a bipolar output circuit for a photoresist constant-temperature power supply, which comprises a bipolar inverter circuit, a driving control circuit and an auxiliary power supply circuit. The isolation driving circuit uses a simple optical coupler device, a special digital driver or a high-speed driving optical coupler is not needed, an upper tube driving auxiliary power supply directly couples to generate two paths of driving power supplies through a mode of adding an auxiliary winding on an inductor of a conventional PWM converter, an additional independent auxiliary power supply is not needed, a bipolar voltage output function is realized, and the voltage output is realized. The circuit has the advantages of no physical contact, long service life, simple circuit and low cost.

Description

Technical Field

[0001] This utility model relates to a bipolar output circuit for a photoresist constant temperature power supply, and particularly to a bipolar output circuit for a photoresist constant temperature power supply applied in the field of power supply circuit technology. Background Technology

[0002] Currently, in photolithography, the temperature control of photoresist has a significant impact on exposure accuracy and yield. Traditional temperature-controlled power supplies mostly use mechanical relays or contactors to achieve bipolar voltage switching, but they have the following drawbacks: arcing is easily generated during polarity switching, resulting in short contact life; contact arcing generates strong electromagnetic interference, which can easily affect the operation of control circuits; relays are bulky when operating at high voltage and high current, making miniaturization impossible; and relays have an action delay of about ten milliseconds.

[0003] While existing technologies attempt to replace mechanical contacts with solid-state relays, the cost is high. Switching circuits can be built using discrete components, but the drive circuit usually requires an additional independent power supply and a dedicated drive chip or device, resulting in complex circuit design and excessive cost. A simpler and cheaper circuit solution is needed. Utility Model Content

[0004] The technical problem that this utility model aims to solve in view of the above-mentioned prior art is that the design is complex and the cost is too high.

[0005] To solve the above problems, this utility model provides a bipolar output circuit for a photoresist constant temperature power supply, including: a bipolar inverter circuit, a drive control circuit, and an auxiliary power supply circuit;

[0006] Both the drive control circuit and the auxiliary power supply circuit are electrically connected to the bipolar inverter circuit;

[0007] The bipolar inverter circuit includes: filter capacitor C1, fuse F1, MOSFET switches Q1, Q2, Q3, Q4, MOSFET drive discharge resistors R1, R2, R3, R4, and bipolar output interface J1.

[0008] The drive control circuit includes: optocouplers U1A, U2A, U3A, U4A; current-limiting resistors R1A, R2A, R3A, R4A; pull-up resistors R1B, R2B, R3B, R4B; drive resistors R1C, R2C, R3C, R4C; and a switch.

[0009] Transistors Q1A, Q2A, Q3A, Q4A; switch-driven pull-down resistors R1D, R2D, R3D, R4D; secondary-side pull-up resistors R1E, ​​R2E, R3E, R4E.

[0010] The auxiliary power supply circuit includes: filter resistor R7, filter capacitor C4, anti-reverse diode D3, PWM controller U5, freewheeling diode D4, output filter capacitor C5, dummy load resistor R8, and energy storage inductor L1.

[0011] The bipolar output circuit for photoresist constant temperature power supply described above does not require an additional independent auxiliary power supply and has the advantages of no physical contacts, long life, simple circuit and low cost.

[0012] As a further improvement of this application, one end of the filter capacitor C1 is electrically connected to the drive discharge resistor R1, the drive discharge resistor R4, the MOSFET switch Q1, and the MOSFET switch Q4.

[0013] The other end of the filter capacitor C1 is electrically connected to the fuse F1;

[0014] Fuse F1 is electrically connected to MOSFET switch Q2 and MOSFET switch Q3;

[0015] One output terminal of the bipolar output interface J1 is electrically connected to the drive discharge resistor R2, MOSFET switch Q1, and MOSFET switch Q2;

[0016] The other output terminal of the bipolar output interface J1 is electrically connected to the drive discharge resistor R3, MOSFET switch Q4, and MOSFET switch Q3.

[0017] As a further improvement to this application, MOSFET switch Q1 and MOSFET switch Q3 are a first pair of transistors, and MOSFET switch Q2 and MOSFET switch Q4 are a second pair of transistors.

[0018] When a positive voltage is output, the second pair of transistors is turned on by the drive circuit, while the first pair of transistors is turned off.

[0019] When a negative voltage is output, the first pair of transistors is turned on by the drive circuit, while the second pair of transistors is turned off.

[0020] As a further improvement of this application, one side of the optocoupler U1A is electrically connected to the current limiting resistor R1A and the switching transistor Q1A, the other side of the optocoupler U1A is electrically connected to the secondary side pull-up resistor R1E, ​​the switching transistor Q1A is electrically connected to the switching transistor drive pull-down resistor R1D and the drive resistor R1C, and the pull-up resistor R1B is electrically connected to the current limiting resistor R1A and the drive resistor R1C.

[0021] One side of optocoupler U2A is electrically connected to current limiting resistor R2A and switching transistor Q2A, and the other side of optocoupler U2A is electrically connected to secondary pull-up resistor R2E. Switching transistor Q2A is electrically connected to switching transistor drive pull-down resistor R2D and drive resistor R2C. Pull-up resistor R2B is electrically connected to current limiting resistor R2A and drive resistor R2C.

[0022] One side of optocoupler U3A is electrically connected to current limiting resistor R3A and switching transistor Q3A, and the other side of optocoupler U3A is electrically connected to secondary pull-up resistor R3E. Switching transistor Q3A is electrically connected to switching transistor drive pull-down resistor R3D and drive resistor R3C. Pull-up resistor R3B is electrically connected to current limiting resistor R3A and drive resistor R3C.

[0023] One side of optocoupler U4A is electrically connected to current limiting resistor R4A and switching transistor Q4A, and the other side of optocoupler U4A is electrically connected to secondary pull-up resistor R4E. Switching transistor Q4A is electrically connected to switching transistor drive pull-down resistor R4D and drive resistor R4C. Pull-up resistor R4B is electrically connected to current limiting resistor R4A and drive resistor R4C.

[0024] As a further improvement to this application, optocouplers U1A, U2A, U3A, and U4A are electrical isolation devices;

[0025] By controlling the primary side of the optocoupler to turn on and off, the low-level and high-level outputs of the secondary side drive signal of the optocoupler are realized. Based on the low-level and high-level outputs, the switching transistors Q1, Q2, Q3, and Q4 in the bipolar output circuit are turned on and off.

[0026] As a further improvement of this application, the filter capacitor C4, the anti-reverse diode D3, the freewheeling diode D4, the output filter capacitor C5, and the energy storage inductor L1 are all electrically connected to the PWM controller U5.

[0027] The filter resistor R7 is electrically connected to the anti-reverse diode D3;

[0028] The dummy load resistor R8 is electrically connected to the output filter capacitor C5.

[0029] As a further improvement of this application, the energy storage inductor L1 includes three winding inductors, namely winding inductor L1A, winding inductor L1B and winding inductor L1C.

[0030] The winding inductor L1B is connected to rectifier diode D1, filter capacitor C2 and discharge resistor R5;

[0031] The winding inductor L1C is connected to the rectifier diode D2, the filter capacitor C3, and the discharge resistor R6.

[0032] As a further improvement to this application, the filter capacitor C4, the PWM controller U5, the freewheeling diode D4, the winding inductor L1A and the output filter capacitor C5 constitute a basic PWM voltage converter.

[0033] Winding inductors L1B and L1C obtain proportional voltages by directly coupling with winding L1A, and power the drive of MOSFET switches Q2 and Q3 in the bipolar output circuit.

[0034] In summary, this application achieves bipolar voltage output function through bipolar inverter and simple isolation drive circuit, combined with a concise auxiliary power supply circuit. The isolation drive circuit uses simple optocoupler devices, eliminating the need for dedicated digital drivers or high-speed drive optocouplers. The upper transistor drive auxiliary power supply directly couples to generate two drive power supplies by adding an auxiliary winding to the inductor of a conventional PWM converter, without requiring an additional independent auxiliary power supply. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the overall circuit module according to an embodiment of this application;

[0036] Figure 2 This is a diagram of a bipolar inverter circuit according to an embodiment of this application;

[0037] Figure 3 This is a driving control circuit diagram of an embodiment of this application;

[0038] Figure 4 This is an auxiliary power supply circuit diagram for an embodiment of this application. Detailed Implementation

[0039] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0040] Implementation method:

[0041] like Figure 1 As shown, a bipolar output circuit for a photoresist constant temperature power supply includes: a bipolar inverter circuit, a drive control circuit, and an auxiliary power supply circuit.

[0042] Both the drive control circuit and the auxiliary power supply circuit are electrically connected to the bipolar inverter circuit;

[0043] like Figure 2 As shown, the bipolar inverter circuit includes: filter capacitor C1, fuse F1, MOSFET switches Q1, Q2, Q3, Q4, MOSFET drive discharge resistors R1, R2, R3, R4, and bipolar output interface J1.

[0044] One end of the filter capacitor C1 is electrically connected to the drive discharge resistor R1, the drive discharge resistor R4, the MOSFET switch Q1, and the MOSFET switch Q4.

[0045] The other end of the filter capacitor C1 is electrically connected to the fuse F1;

[0046] Fuse F1 is electrically connected to MOSFET switch Q2 and MOSFET switch Q3;

[0047] One output terminal of the bipolar output interface J1 is electrically connected to the drive discharge resistor R2, MOSFET switch Q1, and MOSFET switch Q2;

[0048] The other output terminal of the bipolar output interface J1 is electrically connected to the drive discharge resistor R3, MOSFET switch Q4, and MOSFET switch Q3.

[0049] MOSFET switch Q1 and MOSFET switch Q3 are the first pair of transistors, and MOSFET switch Q2 and MOSFET switch Q4 are the second pair of transistors.

[0050] When a positive voltage is output, the second pair of transistors is turned on by the drive circuit, while the first pair of transistors is turned off.

[0051] When a negative voltage is output, the first pair of transistors is turned on by the drive circuit, while the second pair of transistors is turned off.

[0052] Discharge resistors R1, R2, R3, and R4 are connected in parallel to the gate and source of MOSFET switches Q1, Q2, Q3, and Q4. This prevents the MOSFETs from accumulating charge when they are floating, which could lead to false turn-on and improves the stability of the circuit.

[0053] Fuse F1 can blow when the switching transistor is damaged or a short circuit occurs in the output, thus preventing the fault from spreading.

[0054] like Figure 3 As shown, the drive control circuit includes: optocouplers U1A, U2A, U3A, U4A; current limiting resistors R1A, R2A, R3A, R4A; pull-up resistors R1B, R2B, R3B, R4B; drive resistors R1C, R2C, R3C, R4C; switching transistors Q1A, Q2A, Q3A, Q4A; switch drive pull-down resistors R1D, R2D, R3D, R4D; and secondary side pull-up resistors R1E, ​​R2E, R3E, R4E.

[0055] One side of optocoupler U1A is electrically connected to current limiting resistor R1A and switching transistor Q1A, and the other side of optocoupler U1A is electrically connected to secondary pull-up resistor R1E. Switching transistor Q1A is electrically connected to switching transistor drive pull-down resistor R1D and drive resistor R1C. Pull-up resistor R1B is electrically connected to current limiting resistor R1A and drive resistor R1C.

[0056] One side of optocoupler U2A is electrically connected to current limiting resistor R2A and switching transistor Q2A, and the other side of optocoupler U2A is electrically connected to secondary pull-up resistor R2E. Switching transistor Q2A is electrically connected to switching transistor drive pull-down resistor R2D and drive resistor R2C. Pull-up resistor R2B is electrically connected to current limiting resistor R2A and drive resistor R2C.

[0057] One side of optocoupler U3A is electrically connected to current limiting resistor R3A and switching transistor Q3A, and the other side of optocoupler U3A is electrically connected to secondary pull-up resistor R3E. Switching transistor Q3A is electrically connected to switching transistor drive pull-down resistor R3D and drive resistor R3C. Pull-up resistor R3B is electrically connected to current limiting resistor R3A and drive resistor R3C.

[0058] One side of optocoupler U4A is electrically connected to current limiting resistor R4A and switching transistor Q4A, and the other side of optocoupler U4A is electrically connected to secondary pull-up resistor R4E. Switching transistor Q4A is electrically connected to switching transistor drive pull-down resistor R4D and drive resistor R4C. Pull-up resistor R4B is electrically connected to current limiting resistor R4A and drive resistor R4C.

[0059] Optocouplers U1A, U2A, U3A, and U4A are electrical isolation devices;

[0060] By controlling the primary side of the optocoupler to turn on and off, the low-level and high-level outputs of the secondary side drive signal of the optocoupler are realized. Based on the low-level and high-level outputs, the switching transistors Q1, Q2, Q3, and Q4 in the bipolar output circuit are turned on and off.

[0061] Taking the drive signal G1 of MOSFET switch Q1 as an example, when the drive control signal NEGTIVE is high, the drive current drives the transistor Q1A to conduct through the drive resistor R1C. At this time, the primary diode of optocoupler U1A flows through the current, which can be adjusted by the current limiting resistor R1A. At this time, the secondary transistor of optocoupler also conducts, thereby driving G1 to be pulled low, and the corresponding inverter switch Q1 is turned off.

[0062] Conversely, when the drive control signal NEGTIVE is low, the drive transistor Q1A is turned off, the primary diode of the optocoupler has no current, and therefore the secondary transistor of the optocoupler is not turned on. As a result, the drive signal G1 is pulled up to the auxiliary power supply voltage VCC under the action of the pull-up resistor R1E, ​​and the corresponding inverter switch Q1 turns on.

[0063] The function of the pull-down resistor R1D is to pull down the base and emitter of the transistor Q1A to prevent the transistor from malfunctioning when it is interfered with.

[0064] The primary-side pull-up resistor R1B is used to keep the transistor Q1A in the conducting state when the drive signal NEGTIVE is not connected or is floating, thus preventing the corresponding inverter switch Q1 from being mis-activated.

[0065] like Figure 4 As shown, the auxiliary power supply circuit includes: filter resistor R7, filter capacitor C4, anti-reverse diode D3, PWM controller U5, freewheeling diode D4, output filter capacitor C5, dummy load resistor R8, and energy storage inductor L1.

[0066] The filter capacitor C4, the anti-reverse diode D3, the freewheeling diode D4, the output filter capacitor C5, and the energy storage inductor L1 are all electrically connected to the PWM controller U5.

[0067] The filter resistor R7 is electrically connected to the anti-reverse diode D3;

[0068] The dummy load resistor R8 is electrically connected to the output filter capacitor C5.

[0069] The energy storage inductor L1 includes three winding inductors: winding inductor L1A, winding inductor L1B, and winding inductor L1C.

[0070] The winding inductor L1B is connected to rectifier diode D1, filter capacitor C2 and discharge resistor R5;

[0071] The winding inductor L1C is connected to the rectifier diode D2, the filter capacitor C3, and the discharge resistor R6.

[0072] The basic PWM voltage converter consists of filter capacitor C4, PWM controller U5, freewheeling diode D4, winding inductor L1A, and output filter capacitor C5.

[0073] Winding inductors L1B and L1C obtain proportional voltages by directly coupling with winding L1A, and power the drive of MOSFET switches Q2 and Q3 in the bipolar output circuit.

[0074] The input filter resistor R7 and filter capacitor C4 are used for low-pass filtering to prevent transient voltage spikes from damaging the auxiliary power supply circuit components. The reverse protection diode D3 is used to prevent the auxiliary power supply circuit components from being damaged due to reverse connection of the input terminal.

[0075] The purpose of the dummy load resistor R8 is to ensure that the auxiliary power supply always has a certain load current, thereby increasing the energy stored in the inductor L1 and stabilizing the voltage of the auxiliary power supply VCC2 and VCC3.

[0076] The function of discharge resistors R5 and R6 is to prevent the voltage from being too high due to an excessively light auxiliary power supply load, thereby improving the stability of the auxiliary power supply.

[0077] In light of current practical needs, the above-described embodiments adopted in this application are not limited to these. Any changes made within the scope of knowledge possessed by those skilled in the art without departing from the concept of this application still fall within the protection scope of this utility model.

Claims

1. A bipolar output circuit for a photoresist constant temperature power supply, characterized by: Comprise: Bipolar inverter circuit, drive control circuit and auxiliary power supply circuit; The drive control circuit and auxiliary power supply circuit are electrically connected with the bipolar inverter circuit; The bipolar inverter circuit comprises: filter capacitor C1, fuse F1, MOSFET switch tube Q1, Q2, Q3, Q4, MOSFET drive discharge resistor R1, R2, R3, R4, bipolar output interface J1; The drive control circuit comprises: optocoupler U1A, U2A, U3A, U4A, current limiting resistor R1A, R2A, R3A, R4A, pull-up resistor R1B, R2B, R3B, R4B, drive resistor R1C, R2C, R3C, R4C, switch tube Q1A, Q2A, Q3A, Q4A, switch tube drive pull-down resistor R1D, R2D, R3D, R4D, secondary side pull-up resistor R1E, R2E, R3E, R4E; The auxiliary power supply circuit comprises: filter resistor R7, filter capacitor C4, anti-reverse diode D3, PWM controller U5, freewheeling diode D4, output filter capacitor C5, dummy load resistor R8, energy storage inductor L1.

2. The bipolar output circuit for a photoresist thermostatic power supply according to claim 1, wherein: One end of the filter capacitor C1 is electrically connected with the drive discharge resistor R1, the drive discharge resistor R4, the MOSFET switch tube Q1 and the MOSFET switch tube Q4; The other end of the filter capacitor C1 is electrically connected with the fuse F1; The fuse F1 is electrically connected with the MOSFET switch tube Q2 and the MOSFET switch tube Q3; One output end of the bipolar output interface J1 is electrically connected with the drive discharge resistor R2, the MOSFET switch tube Q1 and the MOSFET switch tube Q2; The other output end of the bipolar output interface J1 is electrically connected with the drive discharge resistor R3, the MOSFET switch tube Q4 and the MOSFET switch tube Q3.

3. The bipolar output circuit for a photoresist thermostatic power supply according to claim 2, characterized in that: The MOSFET switch tube Q1 and the MOSFET switch tube Q3 are the first group of tubes, and the MOSFET switch tube Q2 and the MOSFET switch tube Q4 are the second group of tubes; When outputting positive polarity voltage, the second group of tubes is turned on through the drive circuit, and the first group of tubes is turned off at the same time; When outputting negative polarity voltage, the first group of tubes is turned on through the drive circuit, and the second group of tubes is turned off at the same time.

4. The bipolar output circuit for a photoresist thermostatic power supply according to claim 1, wherein: One side of the optocoupler U1A is electrically connected with the current limiting resistor R1A and the switch tube Q1A, the other side of the optocoupler U1A is electrically connected with the secondary side pull-up resistor R1E, the switch tube Q1A is electrically connected with the switch tube drive pull-down resistor R1D and the drive resistor R1C, and the pull-up resistor R1B is electrically connected with the current limiting resistor R1A and the drive resistor R1C; One side of the optocoupler U2A is electrically connected with the current limiting resistor R2A and the switch tube Q2A, the other side of the optocoupler U2A is electrically connected with the secondary side pull-up resistor R2E, the switch tube Q2A is electrically connected with the switch tube drive pull-down resistor R2D and the drive resistor R2C, and the pull-up resistor R2B is electrically connected with the current limiting resistor R2A and the drive resistor R2C; One side of the optocoupler U3A is electrically connected with the current limiting resistor R3A and the switch tube Q3A, the other side of the optocoupler U3A is electrically connected with the secondary side pull-up resistor R3E, the switch tube Q3A is electrically connected with the switch tube drive pull-down resistor R3D and the drive resistor R3C, the pull-up resistor R3B is electrically connected with the current limiting resistor R3A and the drive resistor R3C; One side of the optocoupler U4A is electrically connected with the current limiting resistor R4A and the switch tube Q4A, the other side of the optocoupler U4A is electrically connected with the secondary side pull-up resistor R4E, the switch tube Q4A is electrically connected with the switch tube drive pull-down resistor R4D and the drive resistor R4C, the pull-up resistor R4B is electrically connected with the current limiting resistor R4A and the drive resistor R4C.

5. The bipolar output circuit for a photoresist thermostatic power supply according to claim 4, wherein: The optocouplers U1A, U2A, U3A and U4A are electrical isolation devices; By controlling the conduction and cut-off of the primary side of the optocoupler, the low level output and high level output of the secondary side drive signal of the optocoupler are realized, and the turn-on and turn-off of the switch tubes Q1, Q2, Q3 and Q4 in the bipolar output circuit are controlled according to the low level output and high level output.

6. The bipolar output circuit for a photoresist thermostatic power supply according to claim 1, wherein: The filter capacitor C4, the anti-reverse diode D3, the freewheeling diode D4, the output filter capacitor C5 and the energy storage inductor L1 are electrically connected with the PWM controller U5; The filter resistor R7 is electrically connected with the anti-reverse diode D3. The dummy load resistor R8 is electrically connected with the output filter capacitor C5.

7. The bipolar output circuit for a photoresist thermostatic power supply according to claim 6, wherein: The energy storage inductor L1 includes three winding inductors, which are winding inductor L1A, winding inductor L1B and winding inductor L1C; The winding inductor L1B is connected with the rectifier diode D1, the filter capacitor C2 and the discharge resistor R5 in winding; The winding inductor L1C is connected with the rectifier diode D2, the filter capacitor C3 and the discharge resistor R6 in winding.

8. The bipolar output circuit for a photoresist thermostatic power supply according to claim 7, wherein: The filter capacitor C4, the PWM controller U5, the freewheeling diode D4, the winding inductor L1A and the output filter capacitor C5 constitute a basic PWM voltage converter; The winding inductor L1B and the winding inductor L1C obtain the same proportional voltage by directly coupling with the winding L1A, and supply power for the driving of the MOSFET switch tube Q2 and the MOSFET switch tube Q3 in the bipolar output circuit.

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