Distance-variable tooth jacking device for silicon wafers

Abstract

The utility model relates to the technical field of semiconductors, in particular to a silicon wafer variable-spacing top tooth device which mainly comprises a connecting frame, a supporting plate is mounted on one side of the top end of the connecting frame, an air cylinder is mounted on the other side of the top end of the connecting frame, a variable-spacing limiting assembly comprises a movable plate, a protective pad is arranged on the inner side of the movable plate, and the protective pad is arranged on the inner side of the movable plate. A tooth column is arranged at the top end of the movable plate, a limiting column is arranged on the inner side of the protection pad, the adjusting and mounting assembly is arranged at the top end of the supporting plate and comprises a sliding adjusting groove, and a U-shaped clamping sliding frame is arranged on the inner side of the sliding adjusting groove. According to the silicon wafer variable-interval tooth ejecting device, the fixed supporting plate is arranged, the movable plate capable of being adjusted in a sliding mode is arranged, the tooth column contact portions at the top end can be used in an attached mode, the original supporting position is multiplied, the utilization rate of the ejecting machining space is increased, and then the product transferring efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a silicon wafer variable pitch tooth device. Background Technology

[0002] With the development of technology, the requirements for the production quality of silicon wafers are becoming more and more stringent. In the production process of silicon wafers, a set of top teeth composed of multiple top teeth is used to push the silicon wafer out of the groove of the quartz boat or the groove of the basket, so that it can be transported to the next production unit for processing. When it is necessary to push the silicon wafer out, the edge of the top teeth is prone to bumping and damaging the silicon wafer.

[0003] Chinese patent CN214848570U discloses a silicon wafer ejector device. This prior art sets the end teeth in the shape of plates and provides a clearance part on the side of the end teeth away from the top teeth. When performing a partial ejection operation on silicon wafers in a quartz boat or basket, the end teeth are less likely to accidentally hit the silicon wafers that need to be retained next to the end teeth, thus ensuring higher product quality and higher work efficiency.

[0004] The aforementioned equipment consists of a single top tooth mechanism. Flower baskets typically have 100 or 120 slots, while quartz boats, although also having 100 or 120 slots, have different slot spacing. The slot spacing of the quartz boat is half that of the flower basket. Therefore, in the existing technology, the silicon wafers can only be lifted by half a flower basket when being placed and removed from the flower basket and quartz boat, resulting in low space utilization and making it difficult to increase production capacity. Optimization and improvement are needed. Utility Model Content

[0005] The purpose of this invention is to provide a silicon wafer variable pitch toothed device to solve the problems of low space utilization and difficulty in improving equipment transfer efficiency of the existing pitch toothed devices mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a silicon wafer variable pitch toothed device, comprising: a connecting frame, a support plate mounted on one side of the top end of the connecting frame, and a cylinder mounted on the other side of the top end of the connecting frame; and further comprising a variable pitch limiting component and an adjusting mounting component.

[0007] The variable spacing limiting component is located at the top of the cylinder and includes a movable plate. A protective pad is provided on the inner side of the movable plate, and a toothed column is provided at the top of the movable plate. A limiting post is provided on the inner side of the protective pad. The variable spacing limiting component is used for adjusting the position of two adjacent sets of toothed columns. The adjustment and installation component is located at the top of the support plate and includes a sliding adjustment groove. A U-shaped snap-fit ​​sliding frame is provided on the inner side of the sliding adjustment groove. The adjustment and installation component is used for the adjustable installation of the toothed column.

[0008] Preferably, the movable plate is fixedly installed on the top of the cylinder, and the top structure of the movable plate is the same as that of the support plate.

[0009] Preferably, the inner side of the support plate is connected to a fixed connecting plate, and the upper and lower ends of the inner side of the fixed connecting plate are both connected to limit posts.

[0010] Preferably, a guide cylinder is provided in the middle of the inner side of the fixed connecting plate, and an elastic buffer rod is connected to the inner side of the guide cylinder.

[0011] Preferably, the sliding adjustment groove is located at the inner top of the support plate, and the U-shaped snap-fit ​​sliding frame is internally connected with a positioning screw.

[0012] Preferably, the top of the support plate is connected to a connecting fixing plate, and both sides of the connecting fixing plate are provided with snap-fit ​​grooves. A positioning connecting plate is installed at the front end of the connecting fixing plate, and a docking baffle is provided on the inner side of the snap-fit ​​groove.

[0013] Preferably, the sliding adjustment groove and the U-shaped snap-fit ​​sliding frame are slidably connected, and the U-shaped snap-fit ​​sliding frame and the positioning screw are threadedly connected.

[0014] Preferably, the fixed connecting plate and the guide cylinder are fixedly connected, and the guide cylinder and the elastic buffer rod are elastically connected.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This utility model sets up a fixed support plate and a sliding and adjustable movable plate, and the contact part of the toothed column at the top can be used in close contact, which multiplies the original support position, improves the utilization rate of the ejection processing space, and thus improves the product transfer efficiency.

[0017] During the positioning and installation process between the connecting plate and the support plate, an adjustable U-shaped clip frame is used to slide and adjust the installation position of the connecting plate within a certain range on the inner side of the support plate. This adjustment can be made according to actual needs, thereby improving the efficiency of the equipment. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 2 This is a partial cross-sectional three-dimensional structural diagram of the variable spacing limiting component of this utility model;

[0020] Figure 3 This is a three-dimensional schematic diagram of the toothed column mounting guide structure of this utility model;

[0021] Figure 4This is a schematic diagram of the partially separated three-dimensional structure of the adjustment and installation components of this utility model.

[0022] In the diagram: 1. Connecting frame; 2. Support plate; 3. Cylinder; 4. Movable plate; 5. Connecting and fixing plate; 6. Tooth column; 7. Protective pad; 8. Fixed connecting plate; 9. Limiting column; 10. Guide cylinder; 11. Elastic buffer rod; 12. Positioning connecting plate; 13. Snap-fit ​​groove; 14. Docking baffle; 15. Sliding adjustment groove; 16. U-shaped snap-fit ​​sliding frame; 17. Positioning screw. Detailed Implementation

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0025] like Figure 1 - Figure 4 As shown, this application provides a silicon wafer variable pitch toothed device, including: a connecting frame 1, a support plate 2 installed on one side of the top end of the connecting frame 1, and a cylinder 3 installed on the other side of the top end of the connecting frame 1.

[0026] Specifically, such as Figure 1 As shown, the movable plate 4 is fixedly installed on the top of the cylinder 3. The movable plate 4 and the support plate 2 have the same top structure. The movable plate 4 is the moving end, and the support plate 2 is the fixed end. They can be used separately or together.

[0027] The variable spacing limit component is located at the top of the cylinder 3, and the variable spacing limit component includes a movable plate 4, a protective pad 7 is provided on the inner side of the movable plate 4, and a toothed column 6 is provided at the top of the movable plate 4. A limit post 9 is provided on the inner side of the protective pad 7. The variable spacing limit component is used for position adjustment of two adjacent sets of toothed columns 6.

[0028] Specifically, such as Figure 2As shown, a fixed connecting plate 8 is connected to the inner side of the support plate 2, and limit posts 9 are connected to both the upper and lower ends of the inner side of the fixed connecting plate 8. A guide cylinder 10 is provided in the middle of the inner side of the fixed connecting plate 8, and an elastic buffer rod 11 is connected to the inner side of the guide cylinder 10. The fixed connecting plate 8 and the guide cylinder 10 are fixedly connected, and the guide cylinder 10 and the elastic buffer rod 11 are elastically connected, so that when the cylinder 3 drives the movable plate 4 to move, the middle contact part is buffered and protected by the limit posts 9 and the elastic buffer rod 11.

[0029] Specifically, such as Figure 3 As shown, the top of the support plate 2 is connected to the connecting fixing plate 5, and both sides of the connecting fixing plate 5 are provided with snap-fit ​​grooves 13. The front end of the connecting fixing plate 5 is equipped with a positioning connecting plate 12, and the inner side of the snap-fit ​​groove 13 is provided with a docking baffle 14. The two adjacent connecting fixing plates 5 are close to each other, and the docking baffles 14 at the edges fit together and are positioned in the middle of the two toothed columns 6. At this time, the toothed columns 6 at the top of the support plate 2 and the movable plate 4 are combined, and two sets of top teeth can be pulled to increase production capacity.

[0030] The adjustment and installation assembly is located at the top of the support plate 2, and includes a sliding adjustment groove 15. A U-shaped snap-fit ​​sliding frame 16 is provided on the inner side of the sliding adjustment groove 15. The adjustment and installation assembly is used for the adjustable installation of the toothed column 6.

[0031] Specifically, such as Figure 4 As shown, the sliding adjustment groove 15 is located at the inner top of the support plate 2. The U-shaped snap-fit ​​sliding frame 16 is internally connected to the positioning screw 17. The sliding adjustment groove 15 and the U-shaped snap-fit ​​sliding frame 16 are slidably connected, and the U-shaped snap-fit ​​sliding frame 16 and the positioning screw 17 are threadedly connected. The U-shaped snap-fit ​​sliding frame 16 slides inside the sliding adjustment groove 15, which facilitates the adjustment of the installation position of the connecting fixing plate 5 and the support plate 2. Then, it is fixed by the positioning screw 17, which improves the adjustment and installation efficiency of the connecting fixing plate 5.

[0032] In this embodiment: a fixed support plate 2 is set, and a sliding and adjustable movable plate 4 is set. The contact part of the toothed column 6 at the top can be used to fit together, which multiplies the original support position and improves the utilization rate of the ejection processing space. During the positioning and installation process between the fixed plate 5 and the support plate 2, the sliding and adjustable U-shaped snap-fit ​​sliding frame 16 is set to slide and adjust on the inner side of the support plate 2. The installation position of the fixed plate 5 can be adjusted within a certain range according to actual needs.

[0033] Specifically, this solution involves using a toothed mechanism to eject silicon wafers from the slots of a quartz boat or a basket. During this process, a cylinder 3 can push a movable plate 4 towards a support plate 2. Upon approach, a protective pad 7 first contacts an elastic buffer rod 11 for cushioning and compression, and then contacts a limiting post 9 for positioning and support. This ensures that the contact between the support plate 2 and the movable plate 4 has a buffering and protective effect. After contact, the connecting fixing plate 5 at the top also connects to the toothed post 6, and the mating baffles 14 on both sides combine to fill the space occupied by a single toothed post 6. This design increases the ejection space range of the toothed mechanism, improving space utilization and transfer efficiency.

[0034] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary; within the framework of this invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of this invention as described above, which are not provided in the details for the sake of brevity.

[0035] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A silicon wafer pitch changing top teeth device, comprising: The utility model provides a connecting frame (1), the top one side of connecting frame (1) is equipped with support plate (2), and the top other side of connecting frame (1) is equipped with cylinder (3), it is characterized by further include: Variable interval limiting assembly, the top of cylinder (3) is provided with movable plate (4), the inner side of movable plate (4) is provided with protective pad (7), and the top of movable plate (4) is provided with tooth column (6), the inner side of protective pad (7) is provided with limiting column (9), and the variable interval limiting assembly is used for the position adjustment of adjacent two groups of tooth column (6); Adjusting installation assembly, the top of support plate (2) is provided with sliding adjusting groove (15), the inner side of sliding adjusting groove (15) is provided with U-shaped clamping sliding frame (16), and the adjusting installation assembly is used for the adjustable installation of tooth column (6).

2. A silicon wafer variable-pitch top teeth device as claimed in claim 1, wherein, The movable plate (4) is fixedly installed at the top of the cylinder (3), and the movable plate (4) is identical in structure with the top of the support plate (2).

3. A device for varying the pitch of the top teeth of a silicon wafer as recited in claim 1, wherein, The inner side of the support plate (2) is connected with the fixed connecting plate (8), and the inner side of the fixed connecting plate (8) is connected with the limiting column (9) at the upper and lower ends.

4. A silicon wafer variable-pitch top teeth device as claimed in claim 3, wherein, The inner side of the fixed connecting plate (8) is provided with the guide cylinder (10) in the middle, and the inner side of the guide cylinder (10) is connected with the elastic buffer rod (11).

5. The device of claim 1, wherein the device is a silicon wafer variable-pitch top teeth device. The inner side of the sliding adjusting groove (15) is provided with the U-shaped clamping sliding frame (16) at the top of the support plate (2), and the inner side of the U-shaped clamping sliding frame (16) is connected with the positioning screw (17).

6. A silicon wafer variable-pitch top teeth device as claimed in claim 1, wherein, The top of the support plate (2) is connected with the connecting fixed plate (5), and the inner side of the connecting fixed plate (5) is provided with the clamping groove (13) on both sides, the front end of the connecting fixed plate (5) is provided with the positioning connecting plate (12), and the inner side of the clamping groove (13) is provided with the butt stop plate (14).

7. A silicon wafer variable-pitch top teeth device as claimed in claim 5, wherein, The sliding adjusting groove (15) and the U-shaped clamping sliding frame (16) are in sliding connection, and the U-shaped clamping sliding frame (16) and the positioning screw (17) are in threaded connection.

8. A silicon wafer variable-pitch top teeth device as claimed in claim 4, wherein, The fixed connecting plate (8) and the guide cylinder (10) are in fixed connection, and the guide cylinder (10) and the elastic buffer rod (11) are in elastic connection.

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