Laser cutting clamp adaptable to wafers of different sizes

Abstract

The utility model discloses a laser cutting fixture adaptable to wafers of different sizes, and relates to the technical field of wafers, the laser cutting fixture comprises a base, the top of the base is provided with a switching seat, the top of the switching seat is fixedly connected with a plurality of fixtures, the top of the switching seat is provided with a plurality of cross-shaped grooves, the cross-shaped grooves are internally provided with cross-shaped plates in a sliding manner, and the cross-shaped plates are fixedly connected with the switching seat. A fixing block is fixedly connected to the top end of the cross plate, a sliding column block is fixedly connected to the bottom end of the cross plate, a connecting column is fixedly connected to the bottom of the switching seat, and a rotating structure is arranged between the connecting column and the base. And under the condition that the turntable rotates, the plurality of sliding column blocks slide in the plurality of arc-shaped grooves respectively, the plurality of cross plates slide in the cross-shaped grooves respectively, and the plurality of cross plates drive the plurality of fixing blocks to move in opposite directions respectively, so that a plurality of wafers can be fixed in the plurality of clamps, and the practicability of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer technical field, concretely is laser cutting clamp of different size wafer's adaptability. BACKGROUND

[0002] Wafer laser cutting is a kind of high-energy laser beam is used to the precision machining of semiconductor wafer, is widely used in integrated circuit (IC), sensor, power device etc. semiconductor manufacturing field, with the development of optoelectronic industry, the demand of highly integrated semiconductor wafer is increasing, and wafer tends to be thinner and lighter, and the traditional processing mode is no longer applicable, and laser cutting is gradually introduced into semiconductor wafer cutting. Wafer laser cutting is a kind of non-contact cutting technology, and a cutting path is formed on the wafer by high-energy laser beam, which is the development trend in modern wafer cutting technology.

[0003] In the prior art, although the clamp can be fixed for different size wafers, when multiple wafers are processed each time, only one wafer can be fixed at a time, and the fixing of multiple wafers cannot be satisfied, thereby reducing the practicability of the device. UTILITY MODEL CONTENT

[0004] The utility model aims at providing laser cutting clamp of different size wafer's adaptability to solve the problem that the clamp can be fixed for different size wafers in the prior art, but when multiple wafers are processed each time, only one wafer can be fixed at a time, and the fixing of multiple wafers cannot be satisfied.

[0005] To achieve the above object, the utility model provides the following technical scheme: laser cutting clamp of different size wafer's adaptability, including base, the base top is equipped with switching seat, the switching seat top is fixedly connected with a plurality of clamps, the switching seat top is equipped with a plurality of cross slots, a plurality of cross slots are slidably provided with cross plate in, the cross plate top is fixedly connected with fixed block, the cross plate bottom is fixedly connected with slide column block, the switching seat bottom is fixedly connected with connecting column, the connecting column is equipped with rotating structure between base, the connecting column outside is rotatably connected with carousel, the carousel top is equipped with a plurality of arc grooves, the slide column block is arranged in the arc groove and is slidably connected with carousel, the carousel bottom is equipped with operating structure.

[0006] Preferably, a plurality of the clamp inside is equipped with antiskid protection pad one, the shape of clamp and antiskid protection pad one is V-shaped, and the clamp is designed as V-shaped, so that multiple different size wafers can be positioned.

[0007] Preferably, a plurality of the fixed block one side is equipped with antiskid protection pad two, and a plurality of the fixed block other side is equipped with antiskid protection pad three.

[0008] Preferably, the rotating structure includes a rotating seat, which is rotatably connected to the top of the base. The bottom end of the connecting column is fixedly connected to the rotating seat. An external gear ring is meshed with the outer side of the rotating seat, and a gear is meshed with the outer side of the external gear ring.

[0009] Preferably, the rotating structure further includes a motor, which is disposed at the bottom of the gear and fixedly connected to the top of the base, and the output end of the motor is fixedly connected to the gear.

[0010] Preferably, the operating structure includes a connecting cylinder, which is sleeved on the outside of a connecting post, with its top end fixedly connected to a turntable, and a worm gear fixedly connected to the outside of the connecting cylinder.

[0011] Preferably, the operating structure further includes a worm gear, which is meshed with the outside of the worm wheel. Both ends of the worm gear are equipped with handwheels, which facilitates the operation of the worm gear by personnel.

[0012] Preferably, both ends of the worm are rotatably connected to support blocks, and both support blocks are fixedly connected to the rotating seat. The two support blocks are symmetrically distributed with respect to the vertical center line of the rotating seat. The arrangement of the two support blocks can improve the stability of the worm rotation.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This application uses a worm gear and a worm wheel to mesh. The worm wheel drives the turntable to rotate outside the connecting column through the connecting cylinder. When the turntable rotates, multiple sliding blocks slide in multiple arc grooves, and multiple cross plates slide inside the cross grooves. The multiple cross plates drive multiple fixing blocks to move in opposite directions, thereby fixing multiple wafers in multiple fixtures and improving the practicality of the device.

[0015] 2. This application uses the motor output to drive the gear to rotate. The gear meshes with the external gear ring, and the external gear ring drives the switching seat on the top of the connecting column to rotate through the rotating seat. Therefore, the positions of multiple wafers can be switched for laser cutting processing. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the laser cutting fixture of this utility model, which can be adapted to wafers of different sizes.

[0017] Figure 2 This is a cross-sectional view of the switching seat of the laser cutting fixture that can be adapted to wafers of different sizes according to this utility model;

[0018] Figure 3 This is a schematic diagram of the turntable structure of the laser cutting fixture of this utility model, which can be adapted to wafers of different sizes.

[0019] Figure 4 This is a schematic diagram of the rotating structure of the laser cutting fixture of this utility model, which can be adapted to wafers of different sizes.

[0020] The following are the labels in the diagram: 1. Base; 2. Switching seat; 200. Cross groove; 3. Connecting column; 4. Clamp; 400. Anti-slip protective pad one; 5. Cross plate; 6. Fixing block; 601. Anti-slip protective pad two; 602. Anti-slip protective pad three; 7. Sliding column block; 8. Turntable; 9. Arc groove; 10. Connecting cylinder column; 11. Worm gear; 12. Worm; 13. Support block; 14. Handwheel; 15. Rotating seat; 16. External gear ring; 17. Gear; 18. Motor. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example: Figure 1 - Figure 4 As shown, this utility model provides a technical solution for a laser cutting fixture adaptable to wafers of different sizes. It includes a base 1, a switching seat 2 on the top of the base 1, and multiple clamps 4 fixedly connected to the top of the switching seat 2. Each clamp 4 has an anti-slip protective pad 400 installed on its inner side. The clamps 4 and the anti-slip protective pad 400 are V-shaped. Multiple cross grooves 200 are opened on the top of the switching seat 2, and cross plates 5 are slidably arranged inside each cross groove 200. A fixing block 6 is fixedly connected to the top of the cross plate 5. Anti-slip protective pads 601 are installed on one side of each fixing block 6, and anti-slip protective pads 602 are installed on the other side. A sliding column block 7 is fixedly connected to the bottom of the cross plate 5. A connecting column 3 is fixedly connected to the bottom of the switching seat 2. A rotating structure is provided between the connecting column 3 and the base 1. A turntable 8 is rotatably connected to the outside of the connecting column 3. Multiple arc-shaped grooves 9 are opened on the top of the turntable 8. The sliding column block 7 is disposed inside the arc-shaped grooves 9 and slidably connected to the turntable 8. An operating structure is provided at the bottom of the turntable 8.

[0023] The operating structure includes a connecting cylinder 10, which is sleeved on the outside of the connecting column 3. The top of the connecting cylinder 10 is fixedly connected to the turntable 8. A worm gear 11 is fixedly connected to the outside of the connecting cylinder 10. The operating structure also includes a worm 12, which is meshed with the outside of the worm gear 11. Handwheels 14 are installed at both ends of the worm 12. Support blocks 13 are rotatably connected to both ends of the outside of the worm 12. Both support blocks 13 are fixedly connected to the rotating seat 15. The two support blocks 13 are symmetrically distributed with respect to the vertical center line of the rotating seat 15.

[0024] Specifically, multiple wafers are placed inside multiple clamps 4. Then, the handwheel 14 is turned, and the worm gear 12 meshes with the worm wheel 11. The worm wheel 11 drives the turntable 8 to rotate outside the connecting column 3 through the connecting cylinder 10. When the turntable 8 rotates, multiple sliding blocks 7 slide in multiple arc grooves 9, while multiple cross plates 5 slide inside the cross grooves 200. The multiple cross plates 5 drive multiple fixing blocks 6 to move in opposite directions, thereby fixing multiple wafers in multiple clamps 4 and improving the practicality of the device.

[0025] When fixing a larger wafer, the multiple fixing blocks 6 are adjusted to be in an unfolded state, and the wafer is placed between the multiple fixing blocks 6, that is, at the top of the switching seat 2. Then the multiple fixing blocks 6 are adjusted and moved in opposite directions to fix the larger wafer.

[0026] The installation of multiple anti-slip protective pads 400, 601, and 602 in the device can improve the stability of wafer fixation and even protect the outer surface of the wafer.

[0027] Example: Figure 1 , Figure 3 and Figure 4 As shown, the rotating structure includes a rotating seat 15, which is rotatably connected to the top of the base 1. The bottom end of the connecting column 3 is fixedly connected to the rotating seat 15. An external gear ring 16 is meshed with the outside of the rotating seat 15, and a gear 17 is meshed with the outside of the external gear ring 16. The rotating structure also includes a motor 18, which is located at the bottom of the gear 17 and is fixedly connected to the top of the base 1. The output end of the motor 18 is fixedly connected to the gear 17.

[0028] Specifically, the motor 18 is started. The specific model of the motor 18 is not limited, but depends on the compatible equipment. The output end of the motor 18 drives the gear 17 to rotate. The gear 17 meshes with the outer gear ring 16. The outer gear ring 16 drives the switching seat 2 on the top of the connecting column 3 to rotate through the rotating seat 15. Therefore, the positions of multiple wafers can be switched for laser cutting processing.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A laser cutting jig capable of adapting to different sizes of wafers, characterized in that: The utility model relates to a switching seat (2) top fixedly connected with a plurality of clamps (4), the switching seat (2) top is equipped with a plurality of cross slots (200), a plurality of cross slots (200) are slidably provided with cross plates (5) inside, the cross plate (5) top fixedly connected with fixed block (6), the cross plate (5) bottom fixedly connected with slide post block (7), the switching seat (2) bottom fixedly connected with connecting column (3), the connecting column (3) with bottom seat (1) between being equipped with rotating structure, the connecting column (3) outside rotatably connected with carousel (8), carousel (8) top is equipped with a plurality of arc grooves (9), the slide post block (7) is arranged in the arc groove (9) inside and is slidably connected with carousel (8), and carousel (8) bottom is equipped with operating structure.

2. The laser cutting jig of claim 1, wherein: A plurality of clamps (4) are slidably provided with anti-skid protection pad one (400) inside, and the shapes of the clamps (4) and the anti-skid protection pad one (400) are V-shaped.

3. The laser cutting jig of claim 1, wherein: A plurality of fixed blocks (6) are slidably provided with anti-skid protection pad two (601) on one side, and a plurality of fixed blocks (6) are slidably provided with anti-skid protection pad three (602) on the other side.

4. The laser cutting jig of claim 1, wherein: The rotating structure includes a rotating seat (15) rotatably connected to the top of the base (1), the bottom end of the connecting column (3) is fixedly connected with the rotating seat (15), the outer side of the rotating seat (15) is engagedly connected with an outer gear ring (16), and the outer side of the outer gear ring (16) is engagedly connected with a gear (17).

5. The laser cutting jig of claim 4, wherein: The rotating structure further includes a motor (18) arranged at the bottom of the gear (17), the motor (18) is fixedly connected to the top of the base (1), and the output end of the motor (18) is fixedly connected with the gear (17).

6. The laser cutting jig of claim 4, wherein: The operating structure includes a connecting cylinder column (10) sleeved outside the connecting column (3), the top end of the connecting cylinder column (10) is fixedly connected with the carousel (8), and the outer side of the connecting cylinder column (10) is fixedly connected with a worm wheel (11).

7. The laser cutting jig of claim 6, wherein: The operating structure further includes a worm (12) engagedly connected outside the worm wheel (11), and the both ends of the worm (12) are provided with hand wheels (14).

8. The laser cutting jig of claim 7, wherein: The outer sides of both ends of the worm (12) are rotatably connected with support blocks (13), and the two support blocks (13) are fixedly connected with the rotating seat (15) and vertically symmetrically distributed relative to the vertical center line of the rotating seat (15).

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