Automatic grabbing device for crystal crucible

Abstract

The utility model discloses an automatic grabbing device for a crystal crucible and belongs to the technical field of auxiliary tools in the semiconductor industry. The device comprises a main body frame, a holding and clamping control motor and a holding and clamping mechanism are arranged in the middle of the main body frame, the holding and clamping control motor is connected with the holding and clamping mechanism in a matched mode and controls the holding and clamping mechanism to conduct holding and clamping actions, a vacuum suction cup is connected to the middle bottom of the main body frame, and a quick-change disc is connected to the middle top of the main body frame. A lifting control motor and an anti-falling lifting mechanism are further arranged on the main body frame, the lifting control motor is matched with the anti-falling lifting mechanism, the anti-falling lifting mechanism is connected with an anti-falling swing rod mechanism, the anti-falling lifting mechanism drives the anti-falling swing rod mechanism to integrally ascend and descend, and a swing rod control motor is arranged on the anti-falling swing rod mechanism. The bottom of the anti-falling swing rod mechanism is connected with an anti-falling support. According to the utility model, the purposes of reducing the manual operation, reducing the safety risk in the production process, improving the production efficiency and shortening the production cycle can be achieved.

Description

Technical Field

[0001] This utility model belongs to the field of auxiliary tooling technology in the semiconductor industry, and specifically relates to an automatic crystal crucible gripping device. Background Technology

[0002] Currently, the number of single crystal furnaces producing in batches continues to grow, and the crystal size is shifting from 6 inches to 8 inches. Faster crystal growth and thicker crystals will also become the development trend.

[0003] As the number of devices increases, labor costs continue to rise. Larger crystal crucible sizes make manual crystal handling more difficult, posing significant safety hazards. Furthermore, the low consistency of manual operations affects crystal growth quality and significantly impacts the yield rate of mass-produced products. Utility Model Content

[0004] This invention addresses the aforementioned problems and overcomes the shortcomings of existing technologies by providing an automatic crystal crucible gripping device. This invention can reduce manual operation, lower safety risks in the production process, improve production efficiency, and shorten the production cycle.

[0005] To achieve the above objectives, the present invention adopts the following technical solution.

[0006] This utility model provides an automatic crystal crucible gripping device, including a main frame. The main frame is characterized by having a clamping control motor and a clamping mechanism in its center. The clamping control motor is connected to the clamping mechanism to control its clamping action. A vacuum suction cup is connected to the bottom of the main frame, and a quick-change plate is connected to the top center. The main frame also includes a lifting control motor and an anti-fall lifting mechanism. The lifting control motor cooperates with the anti-fall lifting mechanism, which is connected to an anti-fall swing arm mechanism. The anti-fall lifting mechanism drives the anti-fall swing arm mechanism to lift and lower as a whole. The anti-fall swing arm mechanism is equipped with a swing arm control motor, and an anti-fall support is connected to its bottom. The swing arm control motor drives the anti-fall swing arm mechanism to rotate, causing the anti-fall swing arm mechanism to rotate the anti-fall support.

[0007] Furthermore, the clamping mechanism includes a ball screw, a four-bar linkage, and clamping claws. The lead screw of the ball screw is connected to the output shaft of the clamping control motor, the nut of the ball screw is connected to the four-bar linkage, and there are two clamping claws, which are respectively connected to both sides of the four-bar linkage.

[0008] Furthermore, the gripper is provided with a limiting block made of graphite.

[0009] Furthermore, the anti-fall lifting mechanism includes a transmission gear, a transmission rack, and a guide shaft. The transmission gear is connected to the output shaft of the lifting control motor. The transmission rack meshes with the transmission gear and is fixedly connected to the anti-fall swing arm mechanism. The guide shaft is fixed to the main frame. The anti-fall swing arm mechanism passes through the guide shaft and moves up and down along the guide shaft.

[0010] Furthermore, the anti-fall swing arm mechanism includes a gantry-shaped lifting frame, synchronous pulleys, a synchronous belt, and a drive shaft. The gantry-shaped lifting frame is fixed to the transmission rack of the anti-fall lifting mechanism. The synchronous pulleys are located on both sides of the top of the gantry-shaped lifting frame. Both synchronous pulleys simultaneously mesh with the synchronous belt. The swing arm control motor is fixed on the gantry-shaped lifting frame. The output shaft of the swing arm control motor is connected to one of the synchronous pulleys. Each of the two synchronous pulleys is connected to a drive shaft. The two drive shafts are located on both sides of the gantry-shaped lifting frame. Each of the bottoms of the two drive shafts is connected to an anti-fall support.

[0011] Furthermore, the anti-fall support has an arc-shaped structure, with the inner arc surfaces of the two anti-fall supports arranged opposite each other.

[0012] The beneficial effects of this utility model.

[0013] This invention enables automated and precise handling of crystal crucibles; it can also meet the production needs of crystal crucibles of different specifications; it significantly improves production efficiency, reduces labor costs; and it enhances the crystal growth quality of crystal crucibles. Attached Figure Description

[0014] To make the technical problems solved, the technical solutions, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0016] Figure 2 This is a side view of the structure of this utility model.

[0017] The markings in the diagram are as follows: 1 is the main frame, 2 is the clamp control motor, 3 is the vacuum suction cup, 4 is the quick-change plate, 5 is the lifting control motor, 6 is the swing arm control motor, 7 is the anti-fall support, 8 is the ball screw, 9 is the four-bar linkage, 10 is the gripper, 11 is the limit block, 12 is the transmission gear, 13 is the transmission rack, 14 is the guide shaft, 15 is the gantry lifting frame, 16 is the synchronous pulley, 17 is the synchronous belt, and 18 is the transmission shaft. Detailed Implementation

[0018] As shown in the accompanying drawings, this embodiment provides an automatic crystal crucible gripping device, including a main frame 1. A clamping control motor 2 and a clamping mechanism are arranged in the middle of the main frame 1. The clamping control motor 2 is connected to the clamping mechanism to control the clamping mechanism to perform clamping actions.

[0019] The clamping mechanism includes a ball screw 8, a four-bar linkage 9, and clamping claws 10. The lead screw of the ball screw 8 is connected to the output shaft of the clamping control motor 2, and the nut of the ball screw 8 is connected to the four-bar linkage 9. The four-bar linkage 9 is a conventional four-bar linkage, which can drive the lead screw to rotate through the rotation of the clamping control motor 2. The linear motion of the nut causes the two sides of the four-bar linkage 9 to open and close. There are two clamping claws 10, which are respectively located on both sides of the lower end of the four-bar linkage 9. When the two sides of the four-bar linkage 9 open and close, they can drive the two clamping claws 10 to move closer or separate, realizing automatic clamping of the crucible.

[0020] A graphite limiting block 11 is provided on the inner side of the gripper 10 to limit the clamping of the crucible, and the graphite material avoids damage to the outer surface of the crystal crucible.

[0021] The bottom of the main frame 1 is connected to a vacuum chuck 3. The vacuum chuck 3, in conjunction with an electronically controlled vacuum pump, can perform the suction action of the crystal crucible.

[0022] The top of the main frame 1 is connected to a quick-change plate 4, which can quickly connect with the external robot's main quick-change plate to complete the power supply operation.

[0023] The main frame 1 is also equipped with a lifting control motor 5 and an anti-fall lifting mechanism. The lifting control motor 5 cooperates with the anti-fall lifting mechanism. The anti-fall lifting mechanism includes a transmission gear 12, a transmission rack 13, and a guide shaft 14. The transmission gear 12 is connected to the output shaft of the lifting control motor 5. The transmission rack 13 meshes with the transmission gear 12. The transmission rack 13 is connected and fixed to the anti-fall swing arm mechanism. The guide shaft 14 is fixed to the main frame 1. The anti-fall swing arm mechanism passes through the guide shaft 14 and moves up and down along the guide shaft 14 to meet the production needs of crystal crucibles of different sizes and specifications.

[0024] The anti-fall lifting mechanism is connected to an anti-fall swing arm mechanism, which includes a gantry lifting frame 15, synchronous pulleys 16, synchronous belts 17, and drive shafts 18. The gantry lifting frame 15 is fixed to the transmission rack 13 of the anti-fall lifting mechanism. The synchronous pulleys 16 are located on both sides of the top of the gantry lifting frame 15. Both synchronous pulleys 16 mesh with the synchronous belt 17 simultaneously. The swing arm control motor 6 is fixed on the gantry lifting frame 15. The output shaft of the swing arm control motor 6 is connected to one of the synchronous pulleys 16. Each of the two synchronous pulleys 16 is connected to a drive shaft 18. The two drive shafts 18 are located on both sides of the gantry lifting frame 15. Each of the two drive shafts 18 is connected to an anti-fall support 7 at its bottom.

[0025] The anti-fall lifting mechanism drives the anti-fall swing arm mechanism to lift and lower as a whole. The output shaft of the lifting control motor 5 rotates, driving the transmission gear 12 to rotate. The transmission rack 13, which meshes with the transmission gear 12, drives the gantry lifting frame 15 to lift and lower. The swing arm control motor 6 drives one of the synchronous pulleys 16 to rotate, and the other synchronous pulley 16 rotates simultaneously through the synchronous belt 17. The two synchronous pulleys 16 simultaneously drive the transmission shafts 18 connected to them to rotate, which in turn drives the two anti-fall supports 7 to rotate. The anti-fall supports 7 have an arc-shaped structure, and the inner arc surfaces of the two anti-fall supports 7 are set opposite each other. The two arc-shaped anti-fall supports 7 work together to avoid the inner arm of the single crystal furnace.

[0026] During installation, the anti-fall lifting mechanism, anti-fall swing arm mechanism, clamping mechanism, and vacuum suction cup 3 are installed separately. After the installation of each individual mechanism is completed, it is necessary to manually verify whether the operation is smooth. If there are no problems, each individual mechanism is finally installed onto the main frame 1. The installation of the entire device is completed, and the power connection and trial operation are completed.

[0027] It is understood that the above specific description of this utility model is only used to illustrate this utility model and is not limited to the technical solutions described in the embodiments of this utility model. Those skilled in the art should understand that modifications or equivalent substitutions can still be made to this utility model to achieve the same technical effect; as long as the use needs are met, they are all within the protection scope of this utility model.

Claims

1. A crystal crucible automatic gripping device comprising a main frame (1), characterized in that, The middle part of the main frame (1) is provided with a clamping control motor (2) and a clamping mechanism, the clamping control motor (2) is connected with the clamping mechanism, the clamping mechanism is controlled to perform clamping action, the bottom of the main frame (1) is connected with a vacuum chuck (3), the top of the main frame (1) is connected with a quick-change disc (4), the main frame (1) is further provided with a lifting control motor (5) and an anti-falling lifting mechanism, the lifting control motor (5) is matched with the anti-falling lifting mechanism, the anti-falling lifting mechanism is connected with an anti-falling swing rod mechanism, the anti-falling lifting mechanism drives the anti-falling swing rod mechanism to lift as a whole, the anti-falling swing rod mechanism is provided with a swing rod control motor (6), the bottom of the anti-falling swing rod mechanism is connected with an anti-falling support (7), the swing rod control motor (6) drives the anti-falling swing rod mechanism to move, so that the anti-falling swing rod mechanism drives the anti-falling support (7) to rotate.

2. The automatic crystal crucible grabbing device according to claim 1, wherein, The clamping mechanism comprises a ball screw (8), a four-bar linkage (9) and a clamping jaw (10), the screw rod of the ball screw (8) is connected with the output shaft of the clamping control motor (2), the nut of the ball screw (8) is connected with the four-bar linkage (9), and the clamping jaw (10) is two and is connected to the two sides of the four-bar linkage (9) respectively.

3. The crystal crucible automatic gripping device according to claim 2, wherein The clamping jaw (10) is provided with a limiting block (11) made of graphite material.

4. The automatic crystal crucible grabbing device according to claim 1, wherein, The anti-falling lifting mechanism comprises a transmission gear (12), a transmission rack (13) and a guide shaft (14), the transmission gear (12) is connected with the output shaft of the lifting control motor (5), the transmission rack (13) is engaged with the transmission gear (12), the transmission rack (13) is fixedly connected with the anti-falling swing rod mechanism, and the guide shaft (14) is fixed with the main frame (1). The anti-falling swing rod mechanism passes through the guide shaft (14) and moves up and down along the guide shaft (14).

5. The crystal crucible automatic gripping device according to claim 4, wherein The anti-falling swing rod mechanism comprises a door type lifting frame (15), a synchronous wheel (16), a synchronous belt (17) and a transmission shaft (18), the door type lifting frame (15) is fixed with the transmission rack (13) of the anti-falling lifting mechanism, the synchronous wheel (16) is arranged at the top of the two sides of the door type lifting frame (15), the two synchronous wheels (16) are engaged with the synchronous belt (17) at the same time, the swing rod control motor (6) is fixed on the door type lifting frame (15), the output shaft of the swing rod control motor (6) is connected with one of the synchronous wheels (16), the two transmission shafts (18) are respectively connected with one of the anti-falling supports (7).

6. The automatic crystal crucible grabbing device according to claim 5, wherein, The anti-falling support (7) is in a circular arc structure, and the inner arc surfaces of the two anti-falling supports (7) are oppositely arranged.

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