Shielding cover with folding door assembly and wafer detection device

Abstract

The utility model provides a shielding case with a folding door assembly and a wafer detection device, the shielding case comprises a shell and the folding door assembly, the shell is enclosed to form an accommodating space, the shell is provided with an opening communicated with the accommodating space, the opening is provided with a first slide rail and a second slide rail along two ends of a first direction, the first slide rail and the second slide rail extend along a second direction, and the folding door assembly is arranged in the accommodating space. The folding door assembly comprises a first door plate and a second door plate which are rotationally connected, the end, away from the second door plate, of the first door plate is rotationally connected with the shell, and the end, away from the first door plate, of the second door plate is slidably connected with a first sliding rail and a second sliding rail correspondingly. The second door plate slides along the end away from the first door plate to close the opening and slides along the end close to the first door plate to open the opening. When a worker opens the shielding case, the folding door assembly does not block the display assemblies on the two sides of the shielding case, the worker can watch the display assemblies while debugging the probe station, and the working efficiency of the worker is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of shielding cases, in particular to a shielding case with a folding door assembly and a wafer detection device. BACKGROUND

[0002] The wafer detection device includes a shielding case, so that the wafer detection device can detect certain specific wafers in a light-shielded and electromagnetic interference shielded environment. In the related art, a double-door structure is provided on the shielding case to facilitate a worker to open the double-door structure and debug a probe station and other structural components inside the shielding case. However, after the double-door structure is rotated and opened, the display assembly on the two sides of the shielding case is blocked, and the worker cannot watch the display assembly while debugging the probe station, which affects the work efficiency of the worker. CONTENT OF THE UTILITY MODEL

[0003] The present application aims to provide a shielding case with a folding door assembly and a wafer detection device to solve the technical problem that in the related art, a worker cannot watch a display assembly while debugging a probe station in a wafer detection device.

[0004] In a first aspect, the present application provides a shielding case with a folding door assembly, comprising:

[0005] A housing forms an accommodation space, and an opening communicating with the accommodation space is provided on the housing. The opening is provided with a first sliding rail and a second sliding rail at both ends in a first direction. The first sliding rail and the second sliding rail extend in a second direction, and the second direction is perpendicular to the first direction.

[0006] A folding door assembly includes a first door panel and a second door panel connected by rotation. One end of the first door panel away from the second door panel is rotationally connected to the housing. One end of the second door panel away from the first door panel is slidingly connected to the first sliding rail and the second sliding rail, respectively. The second door panel slides along the end away from the first door panel to close the opening. The second door panel slides along the end close to the first door panel to open the opening.

[0007] The shielding cover provided in the application, the shell forms an accommodation space, the shell is provided with an opening communicating with the accommodation space, the opening is provided with a first sliding rail and a second sliding rail at two ends along a first direction, the first sliding rail and the second sliding rail extend along a second direction, the second direction is perpendicular to the first direction, the folding door assembly comprises a first door plate and a second door plate connected in rotation, one end of the first door plate away from the second door plate is connected to the shell in rotation, and the other end of the second door plate away from the first door plate is connected to the first sliding rail and the second sliding rail in sliding, wherein the second door plate slides along the end away from the first door plate to close the opening, and the second door plate slides along the end close to the first door plate to open the opening. When the worker opens the folding door assembly, the end of the second door plate away from the first door plate slides towards the end of the first door plate away from the second door plate, and neither the second door plate nor the first door plate blocks the display assembly on both sides of the shielding cover, so that the worker can watch the display assembly while debugging the probe table, and the work efficiency of the worker is improved.

[0008] The shell comprises a top plate, a first side plate, a second side plate, a back plate and a connecting plate, the first side plate, the second side plate and the back plate are arranged on the top plate, the connecting plate is connected to the first side plate and the second side plate respectively and is arranged spaced apart from the top plate, the connecting plate, the first side plate, the second side plate and the top plate form the opening, and the first door plate is connected to the first side plate in rotation.

[0009] The first sliding rail is arranged on one side of the top plate facing the opening, and the second sliding rail is arranged on one side of the connecting plate away from the opening.

[0010] The shielding cover further comprises a first connecting piece and a second connecting piece, the first connecting piece is connected to the first sliding rail in sliding, the first connecting piece is used for connecting one end of the first sliding rail and the second door plate, the second connecting piece is connected to the second sliding rail in sliding, and the second connecting piece is used for connecting the other end of the second sliding rail and the second door plate.

[0011] The shell is provided with a first surrounding edge structure, the first surrounding edge structure is arranged around the top plate, the first side plate, the connecting plate and the second side plate, and the first surrounding edge structure is used for abutting against the first door plate and the second door plate to block the gap between the first door plate, the second door plate and the shell.

[0012] One side of the first door plate facing the second door plate is provided with a first magnetic piece and a second magnetic piece, the first magnetic piece and the second magnetic piece are arranged at two ends of the first door plate along the first direction respectively, and the first magnetic piece and the second magnetic piece are used for being magnetically attracted to the first surrounding edge structure to make the first door plate closely adhere to the first surrounding edge structure.

[0013] Alternatively, the second door panel is provided with a third magnetic element and a fourth magnetic element on the side facing the first door panel. The third magnetic element and the fourth magnetic element are respectively provided at both ends of the second door panel along the first direction. The third magnetic element and the fourth magnetic element are used to magnetically attract with the first edge structure so that the second door panel is tightly attached to the first edge structure.

[0014] The shielding cover also includes a sensor, which is disposed on the first perimeter structure and on the side of the first perimeter structure near the second side panel. The sensor is used to sense whether the first door panel and the second door panel are closing or opening the opening.

[0015] The shielding cover also includes an inner display screen and a fixing component. The fixing component is fixed to the top plate and is connected to the top plate and the inner display screen respectively, so as to fix the inner display screen within the receiving space.

[0016] The shielding cover further includes a first lighting component and a second lighting component, which are disposed on the top plate and spaced apart at both ends of the top plate.

[0017] The shielding cover also includes an alarm component, which is located on the top plate.

[0018] The first side plate and the second side plate are also provided with wire passage holes and protective covers, the protective covers covering the wire passage holes;

[0019] The first side plate is provided with a first mounting port, and the second side plate is provided with a second mounting port. The shielding cover also includes a first quick-release door and a second quick-release door, with the first quick-release door located on the first mounting port and the second quick-release door located on the second mounting port.

[0020] Secondly, this application provides a wafer inspection device, which includes a probe station and the shielding cover, wherein a display component is provided on the side of the probe station away from the first door panel.

[0021] In the wafer inspection device provided in this application, a housing encloses a receiving space. The housing has an opening communicating with the receiving space. A first slide rail and a second slide rail are respectively provided at both ends of the opening along a first direction. The first and second slide rails extend along a second direction, which is perpendicular to the first direction. The folding door assembly includes a first door panel and a second door panel that are rotatably connected. The end of the first door panel away from the second door panel is rotatably connected to the housing. The end of the second door panel away from the first door panel is slidably connected to the first and second slide rails. The second door panel slides along the end away from the first door panel to close the opening, and slides along the end close to the first door panel to open the opening. When the operator opens the shielding cover, the end of the second door panel away from the first door panel slides towards the end of the first door panel away from the second door panel. Neither the second nor the first door panel obstructs the display components on both sides of the shielding cover, allowing the operator to view the display components while adjusting the probe station, thus improving the operator's work efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a wafer inspection device provided in an embodiment of this application;

[0024] Figure 2 This is a schematic diagram of a shielding cover in a closed state according to an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of a shielding cover in an open state according to an embodiment of this application;

[0026] Figure 4 This is a bottom view of the shielding structure provided in an embodiment of this application;

[0027] Figure 5 yes Figure 4 Enlarged structural diagram of region A in the middle;

[0028] Figure 6 yes Figure 4 A magnified structural diagram of region B in the middle;

[0029] Figure 7 This is a schematic diagram of the structure of a shielding cover exposing the first door panel according to an embodiment of this application;

[0030] Figure 8This is a schematic diagram of the structure of a shielding cover including a sensing element provided in an embodiment of this application;

[0031] Figure 9 This is a schematic diagram of the internal structure of a shielding cover provided in an embodiment of this application;

[0032] Figure 10 This is an exploded structural diagram of a shield provided in an embodiment of this application.

[0033] Label Explanation:

[0034] The wafer inspection device 1000, shielding cover 100, housing 10, top plate 11, first side plate 12, second side plate 13, back plate 14, connecting plate 15, first surrounding structure 16, folding door assembly 20, first door panel 21, second door panel 22, first magnetic component 23, second magnetic component 24, opening 30, first slide rail 41, second slide rail 42, first connector 51, second connector 52, sensing component 61, inner display screen 71, fixing component 72, first lighting assembly 81, second lighting assembly 82, alarm component 91, wire hole 92, protective cover 93, first quick-release door 94, second quick-release door 95, probe station 200, and display assembly 300. Detailed Implementation

[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0036] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0037] In this specification, for convenience, terms such as "middle," "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer" are used to indicate orientation or positional relationships in conjunction with the accompanying drawings. This is solely for the purpose of facilitating the description and simplification, and does not imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this disclosure. The positional relationships of the constituent elements may be appropriately varied depending on the orientation of the constituent elements being described. Therefore, the use of terms not limited to those described in the specification may be appropriately replaced as needed.

[0038] In this specification, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection via an intermediate component, or a connection within two components. Those skilled in the art will understand the meaning of these terms in this disclosure as appropriate.

[0039] The wafer inspection device includes a shielding cover, enabling it to inspect specific wafers in a light-proof and electromagnetic interference-proof environment. In related technologies, the shielding cover has a double-door structure, which allows operators to open the double-door structure and adjust the probe station and other structural components inside the shielding cover. However, when display components are installed on both sides of the shielding cover, the double-door structure will block the display components after it is rotated open. Operators cannot view the display components while adjusting the probe station, which affects their work efficiency.

[0040] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the structure of a wafer inspection device provided in an embodiment of this application.

[0041] This application provides a shield 100 with a folding door assembly 20 and a wafer inspection device 1000 to solve the technical problem in related technologies where operators cannot view the display components while debugging the probe station.

[0042] The wafer inspection device 1000 includes a probe station 200 and a shield 100, and a display component 300 is provided on one side of the probe station 200.

[0043] The probe station 200 is used for wafer inspection. A shielding cover 100 is disposed on the probe station 200 and covers it, enabling the probe station 200 to inspect specific wafers in a light-shielding and electromagnetic interference-shielded environment, thereby improving the efficiency and accuracy of wafer inspection. The display component 300 is electrically connected to the probe station 200 and can display device information such as probe voltage and temperature, allowing operators to debug or perform other operations on the probe station 200 based on this information.

[0044] It should be noted that this application provides a shielding cover 100. In one embodiment, the shielding cover 100 is applied in the wafer inspection device 1000 and covers the probe station 200. In other embodiments, the shielding cover 100 can also be applied to other related devices that require light shielding, electromagnetic interference shielding, etc., and this application does not limit this application.

[0045] Please refer to Figures 1 to 3 , Figure 2 This is a schematic diagram of a shielding cover in a closed state according to an embodiment of this application. Figure 3 This is a schematic diagram of a shielding cover in an open state, provided in an embodiment of this application.

[0046] The shielding cover 100 includes a housing 10 and a folding door assembly 20. The housing 10 encloses a receiving space, and an opening 30 communicating with the receiving space is provided on the housing 10. The housing 10 is enclosed and has only one opening 30, ensuring that the shielding cover 100 can effectively shield against electromagnetic and light interference, preventing external electromagnetic and light sources from affecting the wafer inspection performance of the probe station 200 within the housing 10. Furthermore, the opening 30 on the housing 10 communicating with the receiving space allows operators to easily adjust the probes and other structures of the probe station 200 through the opening 30, thereby improving the practical performance of the shielding cover 100.

[0047] The folding door assembly 20 is provided corresponding to the opening 30, and the folding door assembly 20 can be used to close or open the opening 30. Specifically, the folding door assembly 20 includes an open state and a closed state. When the probe station 200 inside the housing 10 is inspecting the wafer, the folding door assembly 20 moves to the closed state, and the folding door assembly 20 can close the opening 30 to prevent electromagnetic and light interference from the external environment from affecting the wafer inspection effect of the probe station 200 inside the housing 10. When the operator needs to debug or perform other operations on the probe station 200, the folding door assembly 20 moves to the open state, and the folding door assembly 20 can open the opening 30. In other words, the folding door assembly 20 allows the opening 30 to be exposed, so that the opening 30 is connected to the external environment. The operator can enter the receiving space through the opening 30 and operate the probe station 200 or other structures in the receiving space.

[0048] Further, please refer to Figures 1 to 3The housing 10 includes a top plate 11, a first side plate 12, a second side plate 13, a back plate 14, and a connecting plate 15. The first side plate 12, the second side plate 13, and the back plate 14 surround the top plate 11. The connecting plate 15 connects the first side plate 12 and the second side plate 13 respectively and is spaced apart from the top plate 11. The connecting plate 15, the first side plate 12, the second side plate 13, and the top plate 11 together form the opening 30.

[0049] Optionally, the materials of the housing 10 and the folding door assembly 20 include, but are not limited to, stainless steel, iron alloy, aluminum alloy, and other materials with good electromagnetic shielding performance.

[0050] Please refer to Figures 1 to 4 , Figure 4 This is a bottom view of the shielding structure provided in the embodiments of this application.

[0051] The opening 30 is provided with a first slide rail 41 and a second slide rail 42 at its two ends along the first direction. The first slide rail 41 and the second slide rail 42 extend along the second direction, which is perpendicular to the first direction. The top plate 11 and the connecting plate 15 are spaced apart along the first direction. In other words, the first slide rail 41 is provided on the top plate 11, and the second slide rail 42 is provided on the connecting plate 15.

[0052] The folding door assembly 20 includes a first door panel 21 and a second door panel 22 rotatably connected. The end of the first door panel 21 away from the second door panel 22 is rotatably connected to the housing 10. The end of the second door panel 22 away from the first door panel 21 is slidably connected to the first slide rail 41 and the second slide rail 42, respectively. The second door panel 22 slides along the end away from the first door panel 21 to close the opening 30, and slides along the end close to the first door panel 21 to open the opening 30.

[0053] Specifically, the first door panel 21 is rotatably connected to the first side panel 12 at the end away from the second door panel 22. The second door panel 22 slides along the end away from the first door panel 21 to gradually close the opening 30, and when the second door panel 22 abuts against the second side panel 13 of the housing 10, the first door panel 21 and the second door panel 22 completely close the opening 30.

[0054] More specifically, the first door panel 21 includes a first end and a second end disposed opposite to each other, and the second door panel 22 includes a third end and a fourth end disposed opposite to each other. The first end of the first door panel 21 is rotatably connected to the housing 10, the second end is rotatably connected to the third end, and the fourth end of the second door panel 22 is slidably connected to the first slide rail 41 and the second slide rail 42. The fourth end is slidably connected to the first slide rail 41 and the second slide rail 42, and the fourth end can move along the second direction via the first slide rail 41 and the second slide rail 42 to move the fourth end away from or closer to the first end.

[0055] Furthermore, when the fourth end moves away from the first end, the second end rotates relative to the third end, the included angle between the first door panel 21 and the second door panel 22 gradually increases, and the first door panel 21 and the second door panel 22 gradually close the opening 30 until the fourth end abuts against the second side panel 13, and the first door panel 21 and the second door panel 22 (i.e., the folding door assembly 20) completely close the opening 30; when the fourth end moves closer to the first end, the second end rotates relative to the third end, the included angle between the first door panel 21 and the second door panel 22 gradually decreases, and the first door panel 21 and the second door panel 22 gradually open the opening 30.

[0056] It should be noted that when the fourth end moves in a direction close to the first end, the second end and the third end move in a direction away from the receiving space, that is, the second end and the third end are located outside the receiving space, so as to avoid interference between the folding door assembly 20 and the probe station 200 or other structural components in the receiving space when the folding door assembly 20 is folded.

[0057] When the shielding cover 100 of this application is disposed on the probe station 200, if the display component 300 extends from one side of the probe station 200, when the operator opens the folding door assembly 20, the fourth end of the second door panel 22 in the folding door assembly 20 moves along the first end near the first door panel 21. Neither the second door panel 22 nor the first door panel 21 will block the display component 300, allowing the operator to view the display component 300 while debugging the probe station 200, and to perform corresponding adjustments based on the display information of the display component 300, thereby improving the operator's work efficiency. Optionally, in this embodiment, the display component 300 is disposed on the probe station 200 and adjacent to the second side panel 13. In other embodiments, the display component 300 may also be disposed on the probe station 200 and adjacent to the second side panel 13. Furthermore, the display component 300 may also be disposed on the first side panel 12 or the second side panel 13 of the shielding cover 100. This application does not impose any restrictions on this.

[0058] In the shielding cover 100 provided in this application, the housing 10 encloses and forms a receiving space. The housing 10 is provided with an opening 30 communicating with the receiving space. The two ends of the opening 30 along a first direction are respectively provided with a first slide rail 41 and a second slide rail 42. The first slide rail 41 and the second slide rail 42 extend along a second direction, which is perpendicular to the first direction. The folding door assembly 20 includes a first door panel 21 and a second door panel 22 that are rotatably connected. The end of the first door panel 21 away from the second door panel 22 is rotatably connected to the housing 10. The end of the second door panel 22 away from the first door panel 21 is slidably connected to the first slide rail 41 and the second slide rail 42. The second door panel 22 slides along the end away from the first door panel 21 to close the opening 30, and the second door panel 22 slides along the end close to the first door panel 21 to open the opening 30. When the staff opens the folding door assembly 20, the end of the second door panel 22 away from the first door panel 21 slides toward the end of the first door panel 21 away from the second door panel 22. Neither the second door panel 22 nor the first door panel 21 will block the display components 300 on both sides of the shielding cover 100, allowing the staff to view the display components 300 while debugging the probe station 200, thus improving the staff's work efficiency.

[0059] In one embodiment, the first slide rail 41 is disposed on the side of the top plate 11 facing the opening 30, and the second slide rail 42 is disposed on the side of the connecting plate 15 away from the opening 30.

[0060] The second slide rail 42 is located on the side of the connecting plate 15 away from the opening 30. In other words, the second slide rail 42 is located on the side of the connecting plate 15 facing the placement surface (ground). The second slide rail 42 is positioned facing the placement surface, which can prevent the staff from frequently touching the second slide rail 42 and affecting the normal sliding of the second door panel 22. It can also prevent the oil film on the surface of the second slide rail 42 from being damaged by frequent contact, resulting in rust and other phenomena, thereby improving the service life of the second slide rail 42.

[0061] Please refer to Figures 1 to 6 , Figure 5 yes Figure 4 Enlarged structural diagram of region A in the middle. Figure 6 yes Figure 4 A magnified structural diagram of region B in the middle.

[0062] Furthermore, the shielding cover 100 also includes a first connector 51 and a second connector 52. The first connector 51 is slidably connected to the first slide rail 41 and is used to connect the first slide rail 41 and one end of the second door panel 22. The second connector 52 is slidably connected to the second slide rail 42 and is used to connect the second slide rail 42 and the other end of the second door panel 22.

[0063] Specifically, the upper end of the second door panel 22 is connected to the first connecting member 51, and the lower end of the second door panel 22 is connected to the second connecting member 52. That is, the first connecting member 51 and the second connecting member 52 are disposed at both ends of the second door panel 22 along the first direction. The first connecting member 51 and the second connecting member 52 can be used to drive both ends of the second door panel 22 to move along the second direction, so as to improve the stability of the second door panel 22 during the movement process.

[0064] In one embodiment, the housing 10 is provided with a first perimeter structure 16, which surrounds the top plate 11, the first side plate 12, the connecting plate 15 and the second side plate 13. The first perimeter structure 16 is used to abut against the first door plate 21 and the second door plate 22 to block the gap between the first door plate 21 and the second door plate 22 and the housing 10, thereby preventing light and electrical signals from the external environment from entering the housing space through the gap and affecting the wafer detection effect.

[0065] Specifically, the first surrounding structure 16 encloses and forms the opening 30, and the area of ​​the first door panel 21 and the second door panel 22 is larger than the area of ​​the opening 30. In other words, when the folding door assembly 20 is in the closed state, the first door panel 21 and the second door panel 22 can cover the opening 30, and the first door panel 21 and the second door panel 22 can abut against the first surrounding structure 16 to prevent light and electrical signals from the external environment from entering the receiving space through the opening 30 or the gap between the first door panel 21 and the second door panel 22 and the housing 10.

[0066] Furthermore, in this embodiment, the first slide rail 41 is disposed on the side of the top plate 11 facing the opening 30, and the top of the first edging structure 16 is disposed corresponding to the first slide rail 41. In other words, the first edging structure 16 can be used to cover the first slide rail 41, which can prevent staff from frequently touching the first slide rail 41 and affecting the normal sliding of the second door panel 22. It can also prevent the oil film on the surface of the first slide rail 41 from being damaged by frequent contact, resulting in rusting of the first slide rail 41, thereby improving the service life of the first slide rail 41.

[0067] Please refer to Figures 1 to 7 , Figure 7 This is a schematic diagram of the structure of a shielding cover exposing the first door panel, provided in an embodiment of this application.

[0068] In one embodiment, the first door panel 21 is provided with a first magnetic element 23 and a second magnetic element 24 on the side facing the second door panel 22. The first magnetic element 23 and the second magnetic element 24 are respectively provided at both ends of the first door panel 21 along the first direction. The first magnetic element 23 and the second magnetic element 24 are used to magnetically attract with the first edge structure 16 so that the first door panel 21 is tightly attached to the first edge structure 16.

[0069] Specifically, the first magnetic element 23 and the second magnetic element 24 are both used to magnetically attract the first edge structure 16, and the first magnetic element 23 and the second magnetic element 24 are respectively disposed at both ends of the first door panel 21, which helps to improve the magnetic attraction connection effect between the first door panel 21 and the first edge structure 16, and improves the stability of the folding door assembly 20 when it is in the closed state.

[0070] It should be noted that, optionally, in this embodiment, the material of the first edging structure 16 includes, but is not limited to, iron, iron alloy, stainless steel, and other materials that can be attracted by magnetic components.

[0071] Optionally, in one embodiment, the first perimeter structure 16 may also be provided with a first magnetic attractor and a second magnetic attractor, which are also respectively disposed at both ends of the first perimeter structure 16 along the first direction. The first magnetic attractor and the first magnetic element 23 are correspondingly disposed, with the first magnetic attractor used to attract the first magnetic element 23. The second magnetic attractor and the second magnetic element 24 are correspondingly disposed, with the second magnetic attractor used to attract the second magnetic element 24. The first magnetic attractor and the second magnetic attractor are respectively used to attract the first magnetic element 23 and the second magnetic element 24, so that the first door panel 21 and the first perimeter structure 16 are fixed to each other.

[0072] In one embodiment, the second door panel 22 is provided with a third magnetic element and a fourth magnetic element (not shown) on the side facing the first door panel 21. The third magnetic element and the fourth magnetic element are respectively provided at both ends of the second door panel 22 along the first direction. The third magnetic element and the fourth magnetic element are used to magnetically attract with the first edge structure 16 so that the second door panel 22 is tightly attached to the first edge structure 16.

[0073] Specifically, the third magnetic element and the fourth magnetic element are both used to magnetically attract the first edge structure 16, and the third magnetic element and the fourth magnetic element are respectively disposed at both ends of the second door panel 22, which helps to improve the magnetic attraction connection effect between the second door panel 22 and the first edge structure 16, and improve the stability of the folding door assembly 20 when it is in the closed state.

[0074] Optionally, in one embodiment, the first edging structure 16 may also be provided with a third magnetic member and a fourth magnetic member, which are also respectively disposed at both ends of the first edging structure 16 along the first direction. The third magnetic member and the third magnetic element are correspondingly disposed, with the third magnetic member used to attract the third magnetic element. The fourth magnetic member and the fourth magnetic element are correspondingly disposed, with the fourth magnetic member used to attract the fourth magnetic element. The third magnetic member and the fourth magnetic member are respectively used to attract the third magnetic element and the fourth magnetic element, so that the second door panel 22 and the first edging structure 16 are fixed to each other.

[0075] It should be noted that, in one embodiment, a first magnetic element 23 and a second magnetic element 24 may be provided on the side of the first door panel 21 facing the second door panel 22. In one embodiment, a third magnetic element and a fourth magnetic element may be provided on the side of the second door panel 22 facing the first door panel 21. In one embodiment, a first magnetic element 23 and a second magnetic element 24 may be provided on the side of the first door panel 21 facing the second door panel 22, and a third magnetic element and a fourth magnetic element may be provided on the side of the second door panel 22 facing the first door panel 21. All of the above are embodiments of this application, and this application does not limit them.

[0076] Please refer to Figures 1 to 8 , Figure 8 This is a schematic diagram of the structure of a shielding cover including a sensing element provided in an embodiment of this application.

[0077] In one embodiment, the shielding cover 100 further includes a sensor 61, which is disposed on the first edging structure 16 and on the side of the first edging structure 16 near the second side panel 13. The sensor 61 is used to sense whether the first door panel 21 and the second door panel 22 are closing or opening the opening 30.

[0078] Specifically, the sensor 61 can be used to sense the second door panel 22. When the folding door assembly 20 closes the opening 30, the second door panel 22 slides along the direction close to the second side panel 13 until the fourth end of the second door panel 22 approaches or is in close contact with the first edge structure 16. At this time, the sensor 61 senses the second door panel 22 and outputs a closed signal to the controller. The controller prompts the user through the display component 300 or other prompting structure that the folding door assembly 20 is in the closed state and the shielding cover 100 is in the closed state. When the folding door assembly 20 opens the opening 30, the second door panel 22 slides along the direction away from the second side panel 13 until the fourth end of the second door panel 22 is away from or spaced apart from the first edge structure 16. At this time, the sensor 61 does not sense the second door panel 22 and outputs an open signal to the controller. The controller prompts the user through the display component 300 or other prompting structure that the folding door assembly 20 is in the open state and the shielding cover 100 is in the open state.

[0079] In this embodiment, the sensing element 61 includes, but is not limited to, a photoelectric sensor or other sensing components, and this application does not impose any restrictions on it.

[0080] Furthermore, in one embodiment, the fourth end of the second door panel 22 is further provided with a mating member, which cooperates with the sensing element 61 to achieve more effective sensing of the second door panel 22. For example, the sensing element 61 can be a magnetic sensor, and the mating member can be a magnetic element. When the mating member approaches or moves away from the sensing element 61, the sensing element 61 will send a corresponding signal to the controller. The controller will output a corresponding prompt to the operator based on the received signal. This application does not impose any limitations on this.

[0081] Please refer to Figure 9 , Figure 9 This is a schematic diagram of the internal structure of a shielding cover provided in an embodiment of this application.

[0082] In one embodiment, the shielding cover 100 further includes an inner display screen 71 and a fixing member 72. The fixing member 72 is fixed to the top plate 11 and the fixing member 72 connects the top plate 11 and the inner display screen 71 respectively, so as to fix the inner display screen 71 in the receiving space.

[0083] It should be noted that the display component 300 also includes a display screen, and the display screen of the display component 300 is the main display screen, while the inner display screen 71 can be used as a secondary display screen. The inner display screen 71 can also be used to display the device information of the probe station 200, such as the voltage and temperature of the probe, so that the operator can debug or perform other operations on the probe station 200 based on the device information of the probe station 200.

[0084] Furthermore, the internal display screen 71 is located within the receiving space, allowing staff to view the information displayed on the internal display screen 71 while debugging the probe station 200, and to perform corresponding adjustments based on the information displayed on the internal display screen 71, thereby improving the work efficiency of the staff.

[0085] Specifically, the fixing component 72 includes a connecting plate 15, a connecting guide rod, and a mounting bracket. The connecting plate 15 is used to connect the top plate 11, and the connecting guide rod connects the connecting plate 15 and the mounting bracket respectively. The mounting bracket is used to install the inner display screen 71.

[0086] In one embodiment, the shielding cover 100 further includes a first lighting component 81 and a second lighting component 82, the first lighting component 81 and the second lighting component 82 being disposed on the top plate 11, and the first lighting component 81 and the second lighting component 82 being spaced apart at both ends of the top plate 11.

[0087] The first lighting component 81 and the second lighting component 82 can be used to emit visible light to provide sufficient light within the containment space, helping operators to clearly see the machine and working environment inside the shield 100, reducing the risk of accidents and injuries caused by insufficient light. In addition, good lighting can improve work efficiency, enabling operators to quickly find the operating position, object or material, reducing search time and improving work efficiency.

[0088] Furthermore, the first lighting component 81 and the second lighting component 82 are electrically connected to the controller, which can be used to control the operation of the first lighting component 81 and the second lighting component 82 according to the sensing signal of the sensor 61. Specifically, when the folding door assembly 20 is in the open state, the second door panel 22 is away from the second side panel 13, the sensor 61 outputs an open signal to the controller, and the controller controls the first lighting component 81 and the second lighting component 82 to emit visible light according to the open signal. When the folding door assembly 20 is in the closed state, the second door panel 22 is close to the second side panel 13, the sensor 61 outputs a closed signal to the controller, and the controller controls the first lighting component 81 and the second lighting component 82 to not emit light according to the closed signal. The controller controls the operation of the first lighting component 81 and the second lighting component 82 through the sensing signal of the sensor 61, so that when the folding door assembly 20 is opened, the first lighting component 81 and the second lighting component 82 can be automatically turned on, and when the folding door assembly 20 is closed, the first lighting component 81 and the second lighting component 82 can be automatically turned off, thereby improving the intelligence and practicality of the shielding cover 100 and helping to improve the work efficiency of the operator.

[0089] In one embodiment, the shielding cover 100 further includes an alarm element 91, which is disposed on the top plate 11.

[0090] The alarm element 91 can provide early warning of potential dangers or malfunctions, helping operators take appropriate preventative measures. For example, if an abnormality is detected during the operation of the probe station 200, such as excessively high temperature or abnormal pressure, the alarm element 91 can immediately illuminate, prompting operators to address the problem promptly and prevent accidents.

[0091] Optionally, in this embodiment, the alarm element 91 can be an alarm light. In other embodiments, the alarm element 91 can also be a sound or other structural component. This application does not limit this.

[0092] Please refer to Figure 10 , Figure 10This is an exploded structural diagram of a shield provided in an embodiment of this application.

[0093] In one embodiment, the first side plate 12 and the second side plate 13 are further provided with wire passage holes 92 and protective covers 93, the protective covers 93 covering the wire passage holes 92.

[0094] The cable passage 92 can be used to introduce connecting devices such as cables and wires from outside the housing 10 into the receiving space inside the housing 10, so that the power supply device, controller and other electronic devices under the shielding cover 100 can be electrically connected to the sensing element 61, the first lighting component 81, the second lighting component 82, the inner display screen 71 and other electronic devices inside the shielding cover 100. This can provide a safe, reliable and orderly cable management method and help reduce the risk of cable damage or failure.

[0095] Furthermore, the protective cover 93 covers the cable passage hole 92. The protective cover 93 can be used to protect the cable on the cable passage hole 92, and prevent operators or external objects from touching the cable on the cable passage hole 92, which could lead to damage to the cable or poor electrical connection of electronic components inside the shielding cover 100.

[0096] Please refer to Figure 10 In one embodiment, the first side plate 12 is provided with a first mounting port, the second side plate 13 is provided with a second mounting port, and the shielding cover 100 further includes a first quick-release door 94 and a second quick-release door 95, the first quick-release door 94 being provided on the first mounting port, and the second quick-release door 95 being provided on the second mounting port.

[0097] The first quick-release door 94 can be quickly removed from the first side panel 12, and the second quick-release door 95 can be quickly removed from the second side panel 13, making it convenient for operators to quickly operate the electronic components inside the shielding cover 100.

[0098] Specifically, the first side plate 12 is further provided with a second surrounding structure, which encloses and forms the first mounting opening. The second surrounding structure abuts against the first quick-release door 94 to block the gap between the first quick-release door 94 and the first side plate 12, preventing light and electrical signals from the external environment from entering the receiving space through the gap and affecting the wafer inspection effect. The area of ​​the first quick-release door 94 is larger than the area of ​​the first mounting opening. When the first quick-release door 94 is installed on the first mounting opening, it abuts against the second surrounding structure to prevent light and electrical signals from the external environment from entering the receiving space through the first mounting opening or the gap between the first quick-release door 94 and the first side plate 12.

[0099] Similarly, the second side plate 13 is also provided with a third surrounding structure, which encloses and forms the second mounting opening. The third surrounding structure abuts against the second quick-release door 95 to block the gap between the second quick-release door 95 and the second side plate 13, preventing light and electrical signals from the external environment from entering the receiving space through the gap and affecting the wafer inspection effect. The area of ​​the second quick-release door 95 is larger than the area of ​​the second mounting opening. When the second quick-release door 95 is installed on the second mounting opening, the second quick-release door 95 can abut against the third surrounding structure to prevent light and electrical signals from the external environment from entering the receiving space through the second mounting opening or the gap between the second quick-release door 95 and the second side plate 13.

[0100] Please refer to Figures 1 to 10 This application also provides a wafer inspection device 1000, which includes a probe station 200 and the shielding cover 100. The display component 300 is provided on the side of the probe station 200 away from the first door panel 21.

[0101] In the wafer inspection device 1000 provided in this application, the housing 10 encloses a receiving space. The housing 10 is provided with an opening 30 communicating with the receiving space. The two ends of the opening 30 along a first direction are respectively provided with a first slide rail 41 and a second slide rail 42. The first slide rail 41 and the second slide rail 42 extend along a second direction, which is perpendicular to the first direction. The folding door assembly 20 includes a first door panel 21 and a second door panel 22 that are rotatably connected. The end of the first door panel 21 away from the second door panel 22 is rotatably connected to the housing 10. The end of the second door panel 22 away from the first door panel 21 is slidably connected to the first slide rail 41 and the second slide rail 42. The second door panel 22 slides along the end away from the first door panel 21 to close the opening 30, and the second door panel 22 slides along the end close to the first door panel 21 to open the opening 30. When the staff opens the shielding cover 100, the end of the second door panel 22 away from the first door panel 21 slides toward the end of the first door panel 21 away from the second door panel 22. Neither the second door panel 22 nor the first door panel 21 will block the display components 300 on both sides of the shielding cover 100, allowing the staff to view the display components 300 while debugging the probe station 200, thus improving the staff's work efficiency.

[0102] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0103] The above description represents some embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications are also considered to be within the scope of protection of this application.

Claims

1. A shield having a folding door assembly, characterized by The shell comprises a receiving space, and an opening is arranged on the shell and communicates with the receiving space. Two ends of the opening along a first direction are respectively provided with a first sliding rail and a second sliding rail. The first sliding rail and the second sliding rail extend along a second direction. The second direction is perpendicular to the first direction. The folding door assembly comprises a first door panel and a second door panel which are rotationally connected. One end of the first door panel away from the second door panel is rotationally connected to the shell. One end of the second door panel away from the first door panel is slidingly connected to the first sliding rail and the second sliding rail respectively. The second door panel slides along one end away from the first door panel to close the opening. The second door panel slides along one end close to the first door panel to open the opening. The shell comprises a top plate, a first side plate, a second side plate, a back plate and a connecting plate. The first side plate, the second side plate and the back plate are arranged on the top plate. The connecting plate is connected to the first side plate and the second side plate respectively and is spaced apart from the top plate. The connecting plate, the first side plate, the second side plate and the top plate form the opening. The first door panel is rotationally connected to the first side plate.

2. The shield of claim 1, wherein, The first sliding rail is arranged on one side of the top plate facing the opening. The second sliding rail is arranged on one side of the connecting plate away from the opening.

3. The shield of claim 2, wherein, The shielding cover further comprises a first connecting piece and a second connecting piece. The first connecting piece is slidingly connected to the first sliding rail. The first connecting piece is used to connect one end of the first sliding rail and the second door panel. The second connecting piece is slidingly connected to the second sliding rail. The second connecting piece is used to connect the other end of the second sliding rail and the second door panel. The shell is provided with a first surrounding edge structure. The first surrounding edge structure is arranged around the top plate, the first side plate, the connecting plate and the second side plate. The first surrounding edge structure is used to abut against the first door panel and the second door panel to block the gap between the first door panel, the second door panel and the shell.

4. The shield of claim 2, wherein, One side of the first door panel facing the second door panel is provided with a first magnetic piece and a second magnetic piece. The first magnetic piece and the second magnetic piece are arranged at two ends of the first door panel along the first direction respectively. The first magnetic piece and the second magnetic piece are used to be magnetically attracted to the first surrounding edge structure so that the first door panel is tightly attached to the first surrounding edge structure.

5. The shield of claim 4, wherein, One side of the second door panel facing the first door panel is provided with a third magnetic piece and a fourth magnetic piece. The third magnetic piece and the fourth magnetic piece are arranged at two ends of the second door panel along the first direction respectively. The third magnetic piece and the fourth magnetic piece are used to be magnetically attracted to the first surrounding edge structure so that the second door panel is tightly attached to the first surrounding edge structure. The shielding cover further comprises an inductive piece. The inductive piece is arranged on the first surrounding edge structure. The inductive piece is arranged on one side of the first surrounding edge structure close to the second side plate. The inductive piece is used to induct the first door panel and the second door panel to close or open the opening.

6. The shield of claim 4, wherein, ​ 7. The shield of any of claims 2-6, wherein, The shielding cover further comprises an inner display screen and a fixing member, the fixing member is fixed on the top plate, and the fixing member is connected with the top plate and the inner display screen respectively to fix the inner display screen in the accommodating space.

8. The shield of any of claims 2-6, wherein, The shielding cover further comprises a first lighting assembly and a second lighting assembly, the first lighting assembly and the second lighting assembly are arranged on the top plate, and the first lighting assembly and the second lighting assembly are arranged at two ends of the top plate.

9. The shield of any of claims 2-6, wherein, The shielding cover further comprises an alarm member, and the alarm member is arranged on the top plate. The first side plate and the second side plate are further provided with a wire hole and a protective cover, and the protective cover covers the wire hole. The first side plate is provided with a first mounting port, the second side plate is provided with a second mounting port, the shielding cover further comprises a first quick release door and a second quick release door, the first quick release door is arranged on the first mounting port, and the second quick release door is arranged on the second mounting port.

10. A wafer inspection apparatus characterized by comprising: The wafer detection device comprises a probe station and the shielding cover according to any one of claims 1-9, and the probe station is provided with a display assembly away from one side of the first door plate.

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