Vacuum plasma photoresist removing equipment

Abstract

The utility model relates to the technical field of plasma equipment, in particular to vacuum plasma degumming equipment which comprises a box cover, a box body, a conical surface, an electric push rod, a circular sealing ring, a mounting plate, an upper electrode plate, a handle, a vacuum pump, a lower electrode plate, a placing plate, an air suction assembly, an annular groove, a conical sealing ring, a plurality of supporting seats and an oxygen pipe, a C-shaped block is arranged on the supporting seat in a sliding mode, an L-shaped rod is arranged on the C-shaped block, a hydraulic rod is arranged on the L-shaped rod, a pressing pad is arranged at the output end of the hydraulic rod, the circular sealing ring abuts against the interior of the annular groove of the box body, the conical sealing ring abuts against the conical face of the box cover, and therefore the sealing performance is obviously enhanced; the hydraulic rod abuts against the outer edge of the box cover through the pressing pad, it is ensured that the box cover and the box body are tightly attached, leakage of gas in the cavity is effectively avoided, the stability of plasma is guaranteed, the photoresist removing efficiency is improved, and potential safety hazards caused to operators are reduced.

Description

Technical Field

[0001] This utility model relates to the field of plasma equipment technology, and in particular to a vacuum plasma adhesive removal device. Background Technology

[0002] Plasma, also known as electroplasma, is a special state of matter, considered the fourth state of matter. In addition to solid, liquid, and gas, it is an ionized gaseous substance composed of positive and negative ions produced by the ionization of atoms and atomic groups after some electrons have been stripped away. It is a macroscopic electrically neutral ionized gas with a scale larger than the Debye length. Its motion is mainly governed by electromagnetic force and exhibits significant collective behavior. Plasma is widely present in the universe, and in industrial production, plasma technology is widely used in degumming processes.

[0003] Existing patent CN217911944U discloses a plasma adhesive removal device, including a storage device and a suction device. The storage device includes a box body, a box cover, a vacuum pump, a stage, and a lower electrode plate. The box cover is embedded in the top of the box body. The vacuum pump is connected to the inner cavity of the box body through a conduit. The stage and the lower electrode plate are respectively fixed to the bottom of the inner cavity of the box body by mounting posts. The suction device is located at the bottom of the box body. This plasma adhesive removal device, by installing the suction device at the bottom of the box cover, allows the upper electrode plate in the suction device to move down and cooperate with the lower electrode plate to remove adhesive from the surface of the workpiece. During the adhesive removal process, volatile gases are generated. At this time, the volatile gases accumulate on the upper surface of the workpiece before they diffuse. At this time, the suction ring moves up with the electric push rod to absorb and discharge the volatile gases, thereby effectively reducing the amount of oxygen extracted.

[0004] However, in the aforementioned prior art, since the lid is only embedded in the top of the box body by a positioning pin, this structure is prone to unstable sealing between the lid and the box body, resulting in gas leakage from the chamber. This not only affects the stability of the plasma and reduces the adhesive removal efficiency, but may also pose potential safety hazards to the operators. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum plasma adhesive removal device, which aims to solve the technical problem in the prior art where the cover is only embedded in the top of the box body by a positioning pin. This structure easily leads to unstable sealing between the cover and the box body, resulting in gas leakage from the chamber. This not only affects the stability of the plasma and reduces the adhesive removal efficiency, but also poses potential safety hazards to the operators.

[0006] To achieve the above objectives, this utility model employs a vacuum plasma adhesive removal device, comprising a lid and a body. The inner edge of the lid has a conical surface. An electric push rod and a circular sealing ring are disposed at the inner top of the lid, with the circular sealing ring surrounding the outer side of the electric push rod. A mounting plate is disposed at the output end of the electric push rod, and an upper electrode plate is disposed below the mounting plate. A handle and a vacuum pump are disposed on the upper surface of the lid. A lower electrode plate, a placement plate, and a suction assembly are disposed at the inner bottom of the body. An annular groove is present at the outer edge of the body. The outer side of the box is provided with a conical sealing ring, multiple support seats and oxygen tubes, and the conical sealing ring is located above the multiple support seats. A C-shaped block is slidably arranged on the support seat, an L-shaped rod is arranged on the C-shaped block, a hydraulic rod is arranged on the L-shaped rod, and a pressure pad is arranged at the output end of the hydraulic rod. The box cover is slidably connected to the box body and covers the top of the box body. The circular sealing ring abuts against the annular groove, the conical sealing ring abuts against the conical surface, and the hydraulic rod abuts against the outer edge of the box cover through the pressure pad.

[0007] The placement plate is located directly above the lower electrode plate, the air intake assembly is arranged around the outside of the placement plate, and the air intake assembly also extends out of the outside of the box.

[0008] The air intake assembly includes multiple air intake pipes, an air intake ring, and multiple electric telescopic rods. The multiple air intake pipes are respectively connected to the air intake ring and located inside the air intake ring. The multiple air intake pipes are also respectively arranged around the outside of the placement plate. The air intake ring is fixedly connected to the corresponding electric telescopic rod and located at the output end of the multiple electric telescopic rods. The multiple electric telescopic rods are respectively fixedly connected to the box body and located at the inner bottom of the box body.

[0009] The outer side of the air intake ring is connected to a corrugated pipe, one end of which is provided with a flexible hose that extends to the outside of the housing.

[0010] The vacuum plasma adhesive removal equipment also includes multiple anti-deviation components, each including an anti-deviation rod and an anti-deviation cylinder. The anti-deviation rod is fixedly connected to the mounting plate and located above the mounting plate. The anti-deviation rod is also slidably connected to the anti-deviation cylinder and located inside the anti-deviation cylinder. The anti-deviation cylinder is fixedly connected to the box cover and located at the inner top of the box cover, and is also located between the circular sealing ring and the electric push rod.

[0011] This utility model discloses a vacuum plasma adhesive removal device, comprising a lid and a body. The inner edge of the lid has a conical surface. An electric push rod and a circular sealing ring are disposed on the inner top of the lid. A mounting plate is disposed at the output end of the electric push rod. An upper electrode plate is disposed below the mounting plate. A handle and a vacuum pump are disposed on the upper surface of the lid. A lower electrode plate, a placement plate, and an air intake assembly are disposed at the inner bottom of the body. An annular groove is disposed on the outer edge of the body. A conical sealing ring, multiple support seats, and an oxygen tube are disposed on the outer side of the body. A C-shaped block is slidably disposed on the support seat, and an L-shaped rod is disposed on the C-shaped block. A hydraulic rod is provided at the top, and a pressure pad is provided at the output end of the hydraulic rod. By using the circular sealing ring to abut against the annular groove of the box body and the conical sealing ring to abut against the conical surface of the box cover, a multi-layer sealing structure is achieved between the box cover and the box body, which significantly enhances the sealing performance. At the same time, the hydraulic rod abuts against the outer edge of the box cover through the pressure pad, further ensuring a tight fit between the box cover and the box body. With the combined effect of these designs, gas leakage in the chamber is effectively prevented, plasma stability is ensured, adhesive removal efficiency is improved, and potential safety hazards to operators are reduced. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a three-dimensional view of the present invention.

[0014] Figure 2 This is the front view of this utility model.

[0015] Figure 3 This is the utility model Figure 2 A cross-sectional view along line AA in the middle.

[0016] Figure 4 This is the utility model Figure 3 A magnified view of a section at point B in the middle.

[0017] Figure 5 This is a schematic diagram of the air intake component in this utility model.

[0018] 1-Box cover, 2-Box body, 3-Conical surface, 4-Electric push rod, 5-Circular sealing ring, 6-Mounting plate, 7-Upper electrode plate, 8-Handle, 9-Vacuum pump, 10-Lower electrode plate, 11-Placement plate, 12-Annular groove, 13-Conical sealing ring, 14-Support base, 15-Oxygen pipe, 16-C-shaped block, 17-L-shaped rod, 18-Hydraulic rod, 19-Pressure pad, 20-Suction pipe, 21-Suction ring, 22-Electric telescopic rod, 23-Corrugated pipe, 24-Hose, 25-Anti-deviation rod, 26-Anti-deviation cylinder. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0020] Please see Figures 1-5This utility model provides a vacuum plasma adhesive removal device, including a cover 1 and a body 2. The inner edge of the cover 1 has a conical surface 3. An electric push rod 4 and a circular sealing ring 5 are provided on the inner top of the cover 1, and the circular sealing ring 5 is arranged around the outer side of the electric push rod 4. A mounting plate 6 is provided at the output end of the electric push rod 4. An upper electrode plate 7 is provided below the mounting plate 6. A handle 8 and a vacuum pump 9 are provided on the upper surface of the cover 1. A lower electrode plate 10 and a placement plate 1 are provided on the inner bottom of the body 2. 1. An intake assembly is provided. The outer edge of the housing 2 has an annular groove 12. A conical sealing ring 13, multiple support seats 14, and an oxygen tube 15 are provided on the outer side of the housing 2. The conical sealing ring 13 is located above the multiple support seats 14. A C-shaped block 16 is slidably disposed on the support seat 14. An L-shaped rod 17 is disposed on the C-shaped block 16. A hydraulic rod 18 is disposed on the L-shaped rod 17. A pressure pad 19 is disposed at the output end of the hydraulic rod 18. The housing cover 1 is slidably connected to the housing 2 and covers the housing. Above the housing 2, the circular sealing ring 5 abuts against the annular groove 12, the conical sealing ring 13 abuts against the conical surface 3, and the hydraulic rod 18 abuts against the outer edge of the housing cover 1 via the pressing pad 19. Through the sliding connection design between the housing cover 1 and the housing 2, the housing cover 1 can be easily opened and closed, facilitating operation and maintenance. The conical surface 3 of the inner edge of the housing cover 1 matches the conical sealing ring 13 on the outer side of the housing 2, forming a preliminary sealing structure. Simultaneously, the inner top of the housing cover 1... The circular sealing ring 5 is arranged around the outside of the electric push rod 4. When the cover 1 is closed on top of the box body 2, the circular sealing ring 5 can tightly abut against the annular groove 12 on the edge of the box body 2, further enhancing the sealing effect. In addition, the hydraulic rod 18 abuts against the outer edge of the cover 1 through the pressing pad 19, providing additional pressing force, ensuring a stable connection and good seal between the cover 1 and the box body 2, effectively preventing the leakage of gas in the chamber, and ensuring the stability of the plasma and the adhesive removal efficiency.

[0021] The placement plate 11 is located directly above the lower electrode plate 10. The suction assembly is arranged around the outside of the placement plate 11 and extends beyond the outside of the housing 2. By placing the placement plate 11 directly above the lower electrode plate 10, a stable support platform is provided for the workpiece to be processed. At the same time, the suction assembly is arranged around the outside of the placement plate 11 and extends beyond the outside of the housing 2, which realizes the effective extraction and discharge of gas in the chamber. This layout not only improves the efficiency of gas extraction, but also helps to keep the chamber clean and dry, providing a good environment for plasma generation and degumming process.

[0022] Secondly, the suction assembly includes multiple suction pipes 20, suction rings 21, and multiple electrically operated telescopic rods 22. The suction pipes 20 are respectively connected to the suction rings 21 and located inside the suction rings 21. The suction pipes 20 are also respectively arranged around the outer side of the placement plate 11. The suction rings 21 are fixedly connected to the corresponding electrically operated telescopic rods 22 and located at the output ends of the electric telescopic rods 22. The electric telescopic rods 22 are respectively fixedly connected to the housing 2 and located at the inner bottom of the housing 2. Through the connection design between the multiple suction pipes 20 and the suction rings 21, uniform extraction of gas from the chamber is achieved. The suction pipes 20 are arranged around the outer side of the placement plate 11, ensuring comprehensive and uniform gas extraction. Simultaneously, the electrically operated telescopic rods 22 allow the suction assembly to be adjusted in height and position as needed to accommodate workpieces of different sizes and shapes. This design improves the flexibility and applicability of the equipment.

[0023] Furthermore, a corrugated pipe 23 is connected to the outer side of the intake ring 21. A flexible hose 24 is provided at one end of the corrugated pipe 23, and the flexible hose 24 extends to the outer side of the housing 2. The corrugated pipe 23 has a certain degree of flexibility and elasticity, which can adapt to changes in the height and position of the intake ring 21, avoiding system damage or gas leakage caused by rigid connection. At the same time, the flexible hose 24 extends to the outer side of the housing 2, which facilitates gas discharge and treatment.

[0024] In addition, the vacuum plasma adhesive removal equipment also includes multiple anti-deviation components, including an anti-deviation rod 25 and an anti-deviation cylinder 26. The anti-deviation rod 25 is fixedly connected to the mounting plate 6 and is located above the mounting plate 6. The anti-deviation rod 25 is also slidably connected to the anti-deviation cylinder 26 and is located inside the anti-deviation cylinder 26. The anti-deviation cylinder 26 is fixedly connected to the box cover 1 and is located at the inner top of the box cover 1, and is also located between the circular sealing ring 5 and the electric push rod 4. By setting multiple anti-deviation components, the offset and shaking of the upper electrode plate 7 during the installation and use process are effectively prevented.

[0025] When using this utility model, the box cover 1 is opened via the handle 8, the workpiece to be degummed is placed on the placement plate 11, and then the box cover 1 is closed. The conical surface 3 of the inner edge of the box cover 1 is tightly fitted with the conical sealing ring 13 on the outer side of the box body 2. At the same time, the circular sealing ring 5 at the top of the inner edge of the box cover 1 abuts against the annular groove 12 at the edge of the box body 2, forming a double sealing structure. The hydraulic rod 18 abuts against the outer edge of the box cover 1 through the pressing pad 19, providing additional pressing force. The electric push rod 4 pushes the mounting plate 6 and the upper electrode plate 7 below it downwards until a discharge gap is formed with the lower electrode plate 10. At this time, the vacuum pump 9 starts to work, absorbing the gas in the inner cavity of the box body 2 to create a vacuum. Under vacuum, oxygen is introduced through the oxygen pipe 15, and the upper electrode plate 7 and the lower electrode plate 10 discharge the gas. When the lower electrode plate 10 is energized, it ionizes oxygen into plasma, which then bombards the surface of the workpiece, oxidizing the colloidal material into volatile gas. Subsequently, by controlling the electric telescopic rod 22 to move up and down, the suction ring 21 drives multiple suction pipes 20 to extract the gas from the chamber. The corrugated pipe 23 and the flexible hose 24 on the outside of the suction ring 21 discharge the gas to the outside of the box 2. After processing, the electric push rod 4 retracts, and the hydraulic rod 18 releases the box cover 1 through the clamping pad 19, allowing the workpiece to be removed. This method solves the technical problem that the box cover 1 is only embedded in the top of the box 2 by a positioning pin, which easily leads to unstable sealing between the box cover 1 and the box 2, causing gas leakage from the chamber. This not only affects the stability of the plasma and reduces the adhesive removal efficiency, but also poses a potential safety hazard to the operator.

[0026] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Those skilled in the art can understand that implementing all or part of the above-described embodiments and making equivalent changes in accordance with the claims of the present utility model are still within the scope of the utility model.

Claims

1. A vacuum plasma stripping apparatus, characterized in that, comprising a cover and a box, the inner edge of the cover is provided with a tapered surface, the inner top of the cover is provided with an electric push rod and a circular sealing ring, and the circular sealing ring is arranged around the outside of the electric push rod, the output end of the electric push rod is provided with a mounting plate, the lower side of the mounting plate is provided with an upper electrode plate, the upper end surface of the cover is provided with a handle and a vacuum pump, the inner bottom of the box is provided with a lower electrode plate, a placement plate and a suction assembly, the outer edge of the box is provided with an annular groove, the outer side of the box is provided with a tapered sealing ring, a plurality of support seats and an oxygen pipe, and the tapered sealing ring is located above the plurality of support seats, a C-shaped block is slidably arranged on the support seat, an L-shaped rod is arranged on the C-shaped block, a hydraulic rod is arranged on the L-shaped rod, and a compression pad is arranged on the output end of the hydraulic rod, the cover and the box are slidably connected and cover the upper side of the box, the circular sealing ring is abutted in the annular groove, the tapered sealing ring is abutted at the tapered surface, and the hydraulic rod is abutted at the outer edge of the cover through the compression pad.

2. The vacuum plasma stripping apparatus according to claim 1, characterized in that, the placement plate is located directly above the lower electrode plate, the suction assembly is arranged around the outside of the placement plate, and the suction assembly also extends outside the box.

3. The vacuum plasma stripping apparatus according to claim 2, characterized in that, the suction assembly comprises a plurality of suction pipes, a suction ring and a plurality of electric telescopic rods, the plurality of suction pipes are respectively communicated with the suction ring and located on the inner side of the suction ring, and the plurality of suction pipes are also respectively arranged around the outside of the placement plate, the suction ring is fixedly connected with the corresponding electric telescopic rod and located at the output end of the plurality of electric telescopic rods, and the plurality of electric telescopic rods are respectively fixedly connected with the box and located at the inner bottom of the box.

4. The vacuum plasma stripping apparatus according to claim 3, characterized in that, the outer side of the suction ring is communicated with a corrugated pipe, one end of the corrugated pipe is provided with a hose, and the hose extends to the outside of the box.

5. The vacuum plasma stripping apparatus according to claim 4, characterized in that, the vacuum plasma stripping apparatus further comprises a plurality of anti-deviation devices, the anti-deviation device comprises an anti-deviation rod and an anti-deviation cylinder, the anti-deviation rod is fixedly connected with the mounting plate and located above the mounting plate, the anti-deviation rod is also slidably connected with the anti-deviation cylinder and located in the anti-deviation cylinder, the anti-deviation cylinder is fixedly connected with the cover and located at the inner top of the cover, and also located between the circular sealing ring and the electric push rod.

Images