Etching disc cleaning device

Abstract

The utility model relates to the technical field of etching disc cleaning, and discloses an etching disc cleaning device which comprises a machining table, the top of the machining table is rotationally connected with a rotating disc, the outer surface of the rotating disc is fixedly connected with a plurality of grid frames, and limiting grid plates are arranged in the grid frames. And the bottom of the limiting grid plate is fixedly connected with an annular grid plate. Through cooperative use of the machining table, the rotating disc, the limiting grid plate, the shifting plate, the arc-shaped extrusion plate, the fixing plate, the spray head and other structures, the clamping position of the etching disc can be automatically adjusted in the rotating process after the etching disc is preliminarily cleaned, comprehensive cleaning work is achieved when the etching disc is secondarily cleaned, and the problems that the clamped position of the etching disc is blocked, and the etching disc is damaged are solved. The problems that in the prior art, due to the fact that the clamping position needs to be cleaned independently in the follow-up process, the labor amount of workers is increased, and the cleaning efficiency of the etching disc is reduced are solved.

Description

Technical Field

[0001] This utility model relates to the field of etching disk cleaning technology, and in particular to an etching disk cleaning device. Background Technology

[0002] An etching disk is a device used to hold wafers during the etching process. Its main function is to place the wafers inside the etching chamber of the etching machine and etch them using etching gases. During the etching process, the etching disk serves to fix and protect the wafers.

[0003] In most existing etching disks, the etching disks are clamped and fixed before being placed inside the device for rinsing. Although this method can clean the etching disks, the clamped area is often blocked, resulting in poor cleaning. While the clamped area can be cleaned later, it increases the workload for workers and reduces the cleaning efficiency of the etching disks.

[0004] Therefore, it is necessary to provide an etching disk cleaning device to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing an etching disk cleaning device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an etching disc cleaning device, comprising a processing table, a turntable rotatably connected to the top of the processing table, a plurality of grid frames fixedly connected to the outer surface of the turntable, a limiting grid plate being provided inside the grid frame, an annular grid plate being fixedly connected to the bottom of the limiting grid plate, the bottom of the annular grid plate movably passing through the grid frame and extending to the outside, a plurality of actuating plates being fixedly connected to the outer surface of the annular grid plate, two clearance grooves being provided on the grid frame, a squeezing block being movably provided inside the clearance groove, one side of each of the two squeezing blocks being fixedly connected to the outer surface of the limiting grid plate, a clamping assembly being provided on the grid frame, a material ejection assembly, two cleaning assemblies and a plurality of shielding assemblies being provided on the processing table, two arc-shaped squeezing plates and two fixing plates being fixedly connected to the top of the processing table, the two fixing plates being located on the corresponding side of the corresponding arc-shaped squeezing plates, respectively driving the actuating plates and the annular grid plate and other structures to rotate forward and reverse.

[0007] As a further description of the above technical solution:

[0008] A stepper motor is fixedly installed at the bottom of the processing table. The output end of the stepper motor is fixedly connected to the bottom end of the turntable. When the stepper motor is started, it drives the grid frame at the push plate to rotate. The rotation direction is closer to the controller.

[0009] As a further description of the above technical solution:

[0010] The clamping assembly includes two rotating shafts, both of which are rotatably connected to the outer surface of the grid frame. Two torsion springs are provided on the outer surface of each of the two rotating shafts. A clamping block is fixedly connected to the outer surface of each of the two rotating shafts. A rubber block is fixedly connected to the bottom of the clamping block. One end of each torsion spring is fixedly connected to the rotating shaft, and the other end is connected to a block on the grid frame used for mounting the rotating shaft.

[0011] As a further description of the above technical solution:

[0012] The top material assembly includes several top material mesh plates and a push plate. The top material mesh plates are movably embedded in several limiting mesh plates. An extrusion rod is fixedly connected to the bottom of the top material mesh plate. The extrusion rod movably passes through the limiting mesh plate and extends to the outside. The push plate is rotatably connected to the top of the processing table.

[0013] As a further description of the above technical solution:

[0014] A spring is fixedly connected to the top of the processing table, and a wedge block is fixedly connected to the other end of the spring. The wedge block movably abuts against the push plate.

[0015] As a further description of the above technical solution:

[0016] The top of the processing table has two slots, and the bottom of the processing table is fixedly connected to two collection frames. The two slots are opposite each other, and a drain pipe is connected to one side of each collection frame to drain the water collected after use.

[0017] As a further description of the above technical solution:

[0018] The cleaning assembly includes a U-shaped tube, which is fixedly connected to one side of the inner wall of the groove. Several nozzles are provided on the U-shaped tube, and a water delivery hose is provided on one side of the U-shaped tube. The nozzles are arranged in a linear array.

[0019] As a further description of the above technical solution:

[0020] The shielding assembly includes two shielding frames, two shielding plates (first and second), two shielding frames (first and second), two shielding plates (first and second), and two shielding plates (second and third). The two shielding frames are fixedly connected to the top of the processing table, the two shielding plates (first and second) are fixedly connected to the outer surface of the turntable, and the shielding plates (second and third) are fixedly connected to the top of the turntable.

[0021] This utility model has the following beneficial effects:

[0022] 1. Compared with existing technologies, this etching disk cleaning device, through the coordinated use of a processing table, turntable, limiting grid plate, actuating plate, arc-shaped extrusion plate, fixing plate and nozzle, can automatically adjust the clamping position of the etching disk during its rotation after the initial cleaning, so that it can be thoroughly cleaned during the secondary cleaning. This solves the problem that the clamping area of ​​the etching disk is blocked, resulting in poor cleaning effect and requiring separate cleaning of the clamping area afterward, which not only increases the workload of workers but also reduces the cleaning efficiency of the etching disk.

[0023] 2. Compared with existing technologies, this etching disk cleaning device, through the coordinated use of a turntable, an arc-shaped extrusion plate, a top material mesh plate, a push plate, an extrusion rod, and springs, achieves simultaneous etching disk loading and cleaning, further improving the cleaning efficiency of the etching disk. Furthermore, after the etching disk is cleaned and released from clamping, it can be lifted from the limiting mesh plate for easy unloading, which is convenient and quick, improving the unloading efficiency of the cleaned etching disk and thus enhancing the practicality of the device. Attached Figure Description

[0024] Figure 1 This is a three-dimensional schematic diagram of the overall structure of an etching disk cleaning device proposed in this utility model;

[0025] Figure 2 This is a schematic diagram of the extrusion rod and clamping block of an etching disk cleaning device proposed in this utility model;

[0026] Figure 3 This is a schematic diagram of the structure of the etching disk cleaning device proposed in this utility model, including the fixing plate and the nozzle.

[0027] Figure 4 This is a schematic diagram of the grooving and rotating structure of an etching disk cleaning device proposed in this utility model;

[0028] Figure 5 This is a schematic diagram of the structure of the etching disk cleaning device proposed in this utility model, including the rotating shaft and wedge block.

[0029] Legend:

[0030] 1. Processing table; 2. Turntable; 3. Grid frame; 4. Limiting grid plate; 5. Annular grid plate; 6. Actuating plate; 7. Clearance groove; 8. Extrusion block; 9. Arc-shaped extrusion plate; 10. Fixing plate; 11. Stepper motor; 12. Rotating shaft; 13. Torsion spring; 14. Clamping block; 15. Rubber block; 16. Top material grid plate; 17. Push plate; 18. Extrusion rod; 19. Spring; 20. Wedge block; 21. Groove; 22. Collection frame; 23. U-shaped tube; 24. Nozzle; 25. Water supply hose; 26. Shielding frame; 27. Shielding plate one; 28. Shielding plate two. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Reference Figure 1-5 This utility model provides an etching disc cleaning device, comprising a processing table 1, with two slots 21 on the top of the processing table 1, two collection frames 22 fixedly connected to the bottom of the processing table 1, a turntable 2 rotatably connected to the top of the processing table 1, a plurality of grid frames 3 fixedly connected to the outer surface of the turntable 2, a limiting grid plate 4 provided inside the grid frame 3, an annular grid plate 5 fixedly connected to the bottom of the limiting grid plate 4, the bottom of the annular grid plate 5 movably passing through the grid frame 3 and extending to the outside, a plurality of toggle plates 6 fixedly connected to the outer surface of the annular grid plate 5, two clearance slots 7 provided on the grid frame 3, a squeezing block 8 movably provided inside the clearance slot 7, one side of each squeezing block 8 being fixedly connected to the outer surface of the limiting grid plate 4, a clamping assembly provided on the grid frame 3, and the bottom of the processing table 1... A stepper motor 11 is fixedly installed on the part, and the output end of the stepper motor 11 is fixedly connected to the bottom end of the turntable 2. The processing table 1 is equipped with a top material assembly, two cleaning assemblies and several shielding assemblies. Two arc-shaped extrusion plates 9 and two fixed plates 10 are fixedly connected to the top of the processing table 1. Through the coordinated use of the processing table 1, turntable 2, limiting grid plate 4, toggle plate 6, arc-shaped extrusion plate 9, fixed plate 10 and nozzle 24, the etching disk can be automatically adjusted to its clamping position during rotation after the initial cleaning, so that it can be thoroughly cleaned during the secondary cleaning. This solves the problem that the clamping part of the etching disk is blocked and cannot get a good cleaning effect, and it is necessary to clean the clamping part separately afterward, which not only increases the workload of workers, but also reduces the cleaning efficiency of the etching disk.

[0033] The clamping assembly includes two rotating shafts 12, both of which are rotatably connected to the outer surface of the grid frame 3. Two torsion springs 13 are provided on the outer surface of each of the two rotating shafts 12, and clamping blocks 14 are fixedly connected to the outer surface of each of the two rotating shafts 12. A rubber block 15 is fixedly connected to the bottom of the clamping block 14. By setting up the clamping assembly, the stability of the etching disk when it is driven to rotate by the turntable 2 can be improved, and its shaking can be reduced.

[0034] The top-feeding assembly includes several top-feeding mesh plates 16 and push plates 17. The top-feeding mesh plates 16 are movably embedded on several limiting mesh plates 4. A pressing rod 18 is fixedly connected to the bottom of the top-feeding mesh plate 16. The pressing rod 18 movably passes through the limiting mesh plate 4 and extends to the outside. The push plate 17 is rotatably connected to the top of the processing table 1. A spring 19 is fixedly connected to the top of the processing table 1. A wedge block 20 is fixedly connected to the other end of the spring 19. The wedge block 20 movably abuts against the push plate 17. Through the setting of the top-feeding assembly and other structures, the etched disk, after cleaning and being released from clamping, can be lifted from the limiting mesh plate 4, which is convenient and quick for unloading. This improves the unloading efficiency of the cleaned etched disk and thus improves the practicality of the device.

[0035] The cleaning assembly includes a U-shaped tube 23, which is fixedly connected to one side of the inner wall of the slot 21. Several nozzles 24 are provided on the U-shaped tube 23, and a water supply hose 25 is provided on one side of the U-shaped tube 23. With the arrangement of the cleaning assembly, in conjunction with the grid frame 3, the limiting grid plate 4, and the top material grid plate 16, both sides of the etching disk can be cleaned simultaneously.

[0036] The shielding assembly includes two shielding frames 26, two shielding plates 27 and two shielding plates 28. The two shielding frames 26 are fixedly connected to the top of the processing table 1, the two shielding plates 27 are fixedly connected to the outer surface of the turntable 2, and the shielding plate 28 is fixedly connected to the top of the turntable 2. By setting the shielding assembly, the etching disk during cleaning can be shielded to avoid a large amount of water splashing.

[0037] Working principle: During operation, one end of each of the two water supply hoses 25 is connected to the water supply end of an external water pump. Then, the etching disk to be cleaned is placed inside the grid frame 3 near the push plate 17, and the protrusion on the limiting grid plate 4 is positioned inside the recess on the etching disk. Then, the stepper motor 11 is started, which drives the turntable 2 to rotate. The turntable 2 drives several grid frames 3, the annular grid plate 5, and the baffle plate 27 to rotate synchronously. During the rotation of the grid frame 3 containing the etching disk, the corresponding fixed plate 10 abuts against the corresponding actuating plate 6 and continues to move, causing the actuating plate to... The actuating plate 6 drives the corresponding annular grid plate 5, the limiting grid plate 4, the two extrusion blocks 8 and the etching disk to rotate synchronously until the actuating plate 6 no longer abuts against the corresponding fixed plate 10. Then, under the action of gravity, the bottom of the corresponding annular grid plate 5 moves down along the corresponding arc-shaped extrusion plate 9, so that the corresponding limiting grid plate 4, the two extrusion blocks 8 and the top material grid plate 16 drive the etching disk to move down synchronously. After the extrusion block 8 moves down, it no longer extrudes the corresponding clamping block 14. Under the action of the corresponding torsion spring 13, the clamping block 14 rotates and cooperates with the rubber block 15 to clamp and fix the etching disk.

[0038] After the etching disk is clamped and fixed, it continues to rotate into one of the shielding frames 26. Then, the corresponding external water pump is started to deliver water through the water supply hose 25 to the U-shaped pipe 23 and spray it out through the nozzle 24 to clean both sides of the etching disk at the same time. While the etching disk is being cleaned, the etching disk to be cleaned can be placed in other corresponding grid frames 3. After the etching disk is cleaned, it continues to rotate. Under the action of another arc-shaped extrusion plate 9, it is lifted by the corresponding limiting grid plate 4 and the corresponding clamping block 14 is released. During the continued movement, another fixing plate 10 pushes it to rotate in the opposite direction, thereby changing its clamping position. Then, it is clamped and moved into another shielding frame 26 for secondary cleaning.

[0039] After the etching disk is cleaned a second time, it is rotated to the first arc-shaped extrusion plate 9 and the clamping is released. Then, the push plate 17 is manually pressed. After the wedge block 20 moves down and the spring 19 is squeezed, the push plate 17 can rotate to squeeze the extrusion rod 18, which in turn causes the extrusion rod 18 to move the corresponding top material mesh plate 16 up, lifting the cleaned etching disk from the limiting mesh plate 4, making it easier to unload it.

[0040] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An etching disc cleaning device comprising a processing station (1), characterized in that: The top of the processing table (1) is rotationally connected with a rotating disc (2), the outer surface of the rotating disc (2) is fixedly connected with a plurality of grid frames (3), the inside of the grid frame (3) is provided with a limiting grid plate (4), the bottom of the limiting grid plate (4) is fixedly connected with an annular grid plate (5), the bottom of the annular grid plate (5) is movably penetrated through the grid frame (3) and extends to the outside, the outer surface of the annular grid plate (5) is fixedly connected with a plurality of push plates (6), two avoiding grooves (7) are formed in the grid frame (3), the inside of the avoiding groove (7) is movably provided with an extrusion block (8), the opposite side of the two extrusion blocks (8) is fixedly connected with the outer surface of the limiting grid plate (4), the grid frame (3) is provided with a clamping assembly, the processing table (1) is provided with a material ejecting assembly, two cleaning assemblies and a plurality of shielding assemblies, the top of the processing table (1) is fixedly connected with two arc-shaped extrusion plates (9) and two fixed plates (10).

2. The etch disc cleaning apparatus of claim 1, wherein: The bottom of the processing table (1) is fixedly installed with a stepping motor (11), the output end of the stepping motor (11) is fixedly connected with the bottom end of the rotating disc (2).

3. The etch disc cleaning apparatus of claim 1, wherein: The clamping assembly comprises two rotating shafts (12), the two rotating shafts (12) are rotationally connected with the outer surface of the grid frame (3), the outer surface of the two rotating shafts (12) is provided with two torsion springs (13), the outer surface of the two rotating shafts (12) is fixedly connected with clamping blocks (14), the bottom of the clamping block (14) is fixedly connected with a rubber block (15).

4. The etch disc cleaning apparatus of claim 1, wherein: The material ejecting assembly comprises a plurality of material ejecting net plates (16) and a push plate (17), the plurality of material ejecting net plates (16) are movably embedded on the plurality of limiting grid plates (4) respectively, the bottom of the material ejecting net plate (16) is fixedly connected with an extrusion rod (18), the extrusion rod (18) is movably penetrated through the limiting grid plate (4) and extends to the outside, the push plate (17) is rotationally connected with the top of the processing table (1).

5. The etch disc cleaning apparatus of claim 4, wherein: The top of the processing table (1) is fixedly connected with a spring (19), the other end of the spring (19) is fixedly connected with a wedge-shaped block (20), the wedge-shaped block (20) movably abuts against the push plate (17).

6. The etch disc cleaning apparatus of claim 1, wherein: The top of the processing table (1) is provided with two grooves (21), the bottom of the processing table (1) is fixedly connected with two collecting frames (22).

7. The etch disc cleaning apparatus of claim 6, wherein: The cleaning assembly comprises a U-shaped pipe (23), the U-shaped pipe (23) is fixedly connected with one side of the inner wall of the groove (21), the U-shaped pipe (23) is provided with a plurality of spray heads (24), one side of the U-shaped pipe (23) is provided with a water delivery hose (25).

8. The etch disc cleaning apparatus of claim 1, wherein: The shielding assembly comprises two shielding frames (26), two shielding plates (27) and a shielding plate (28), the two shielding frames (26) are fixedly connected with the top of the processing table (1), the two shielding plates (27) are fixedly connected with the outer surface of the rotating disc (2), the shielding plate (28) is fixedly connected with the top of the rotating disc (2).

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