Chip epitaxial coating device

Abstract

The utility model relates to the technical field of chip coating, and discloses a chip epitaxial coating device which comprises a supporting table, a lifting table and a coating roller, a coating mechanism is arranged on the supporting table, and a mounting mechanism is arranged between the coating mechanism and the coating roller. The pull handle is pulled outwards to enable the connecting rod to drive the fixing rod to be separated from the fixing hole, then the roller shaft of the coating roller is taken out of the containing groove, the coating roller can be rapidly disassembled, after the coating roller is maintained or replaced, the pull handle is pulled again to enable the fixing rod to retract and extrude the spring, and then the maintained or replaced roller shaft of the coating roller is placed in the containing groove. The fixing holes are aligned with the fixing rods, then the pull handles are loosened, the fixing rods are automatically inserted into the fixing holes under the rebound action of the springs to lock and fix the roller shafts, then the coating roller can be rapidly installed, operation is easy and convenient, the coating mechanism does not need to be disassembled, the disassembling and assembling efficiency of the coating roller is improved, and meanwhile the practicability of the coating device is improved.

Description

Technical Field

[0001] This utility model relates to the field of chip coating technology, specifically to a chip epitaxial coating device. Background Technology

[0002] With the rapid development of electronic technology, the requirements for the performance of semiconductor devices are becoming increasingly stringent, especially in the fields of microelectronics and optoelectronics. Epitaxial coating technology, as an advanced material growth technology, is widely used in the manufacturing process of semiconductor devices to improve their performance and reliability.

[0003] Chinese patent provides a coating fixture for semiconductor chips, publication number CN114639624A, which includes a support platform, two transmission mechanisms, and a coating roller. The two transmission mechanisms are detachably connected to the top of the support platform and are symmetrically arranged. The coating roller is rotatably connected to the two transmission mechanisms and is located between the two transmission mechanisms. Each transmission mechanism includes a support frame, a first motor, a lead screw, a slider, a second motor, a first gear, a second gear, and a connecting rod. The support frame is detachably connected to the support platform and is located on the top of the support platform. The side of the support frame near the coating roller has a receiving groove, and the first motor is fixedly connected to the inner wall of the receiving groove.

[0004] This device can coat chips without the need for manual pushing of the coating roller. However, when the coating roller needs maintenance or replacement, the entire transmission mechanism needs to be disassembled before the coating roller can be disassembled. This operation is time-consuming, labor-intensive, and costly, affecting the efficiency of disassembly and assembly of the coating roller and the use of the coating device. Therefore, it is necessary to provide a chip epitaxial coating device. Utility Model Content

[0005] The purpose of this invention is to provide a chip epitaxial coating apparatus to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a chip epitaxial coating apparatus, comprising a support platform, a lifting platform, and a coating roller. A coating mechanism is provided on the support platform, and an installation mechanism is provided between the coating mechanism and the coating roller. The installation mechanism includes an installation sleeve, on which a placement groove adapted to the roller shaft of the coating roller is opened. A fixing hole is opened on the roller shaft of the coating roller. Sleeves are fixedly provided on both sides of the installation sleeve. A slider is slidably provided inside the sleeve. A fixing rod adapted to the fixing hole is fixedly provided on one side of the slider. The end of the fixing rod away from the slider slides through the installation sleeve and is inserted into the fixing hole. A connecting rod is fixedly provided on the other side of the slider. A spring fixedly provided between the slider and the sleeve is sleeved on the connecting rod. The end of the connecting rod away from the slider slides through the sleeve and is fixedly connected to a limit block. A pull handle is fixedly provided on the limit block.

[0007] Preferably, the coating mechanism includes a first support frame and a second support frame symmetrically fixed on the support platform, and both the first support frame and the second support frame are provided with a moving groove.

[0008] Preferably, a screw is rotatably installed in the movable groove of the first support frame, a movable motor is fixedly installed at one end of the first support frame, the screw rotatably passes through the movable groove and is fixedly connected to the output shaft of the movable motor, a movable block is threadedly connected to the screw, a limit rod is fixedly installed in the movable groove of the first support frame, and the movable block is slidably connected to the limit rod.

[0009] Preferably, a slide rod is fixedly installed in the movable groove of the second support frame, a slide seat is slidably connected to the slide rod, a rotary motor is fixedly installed on the slide seat, and a gear is fixedly installed on the output shaft of the rotary motor.

[0010] Preferably, a first rotating rod is rotatably mounted on the movable block, and a second rotating rod is rotatably mounted on the sliding seat. A toothed ring that meshes with a gear is fixedly sleeved on the second rotating rod. Two mounting sleeves are provided in total, and the two mounting sleeves are respectively fixedly mounted on the first rotating rod and the second rotating rod.

[0011] Preferably, the support platform is provided with a lifting groove, the lifting platform is slidably connected to the lifting groove, an electric push rod is fixedly installed in the lifting groove, and the output rod of the electric push rod is fixedly connected to the lifting platform.

[0012] Preferably, a fixed bracket is fixedly installed on the support platform, a distance measuring sensor is fixedly installed at the bottom of the upper end of the fixed bracket, and a warning light connected to the distance measuring sensor signal is fixedly installed at the top of the fixed bracket.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1) This chip epitaxial coating device allows for quick disassembly of the coating roller by pulling the handle outward, causing the connecting rod to disengage from the fixing hole on the coating roller shaft via the slider. The coating roller shaft can then be removed from the mounting sleeve's placement slot. After maintenance or replacement of the coating roller, pulling the handle again retracts the fixing rod and compresses the spring. The maintained or replaced coating roller shaft is then placed in the placement slot, aligning the fixing hole with the fixing rod. Releasing the handle allows the fixing rod to automatically insert into the fixing hole under the spring's return force, locking the roller shaft in place. This completes the quick installation of the coating roller. The operation is simple and convenient, requiring no disassembly of the coating mechanism, thus improving the efficiency of coating roller assembly and disassembly while enhancing the practicality of the coating device.

[0015] 2) This chip epitaxial coating device rotates the coating roller by starting a rotary motor and simultaneously starts a moving motor to rotate a screw. This causes a moving block threaded to the screw to drive the coating roller to move. The coating roller moves and coats the chip under the guidance of the limiting rod and the limiting of the sliding seat and the sliding rod. There is no need to manually push the coating roller, which reduces the amount of labor and effectively improves the processing efficiency of chip coating. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a chip epitaxial coating device according to an embodiment of the present invention;

[0017] Figure 2 This is a cross-sectional view of the support platform in an embodiment of the present invention.

[0018] Figure 3 This is a three-dimensional structural diagram of the coating mechanism in an embodiment of the present utility model;

[0019] Figure 4 This is a three-dimensional structural diagram of the installation mechanism in an embodiment of the present utility model;

[0020] Figure 5 This is a cross-sectional view of the sleeve in an embodiment of the present invention.

[0021] In the diagram: 1. Support platform; 2. Lifting platform; 3. Coating roller; 4. Coating mechanism; 401. First support frame; 402. Second support frame; 403. Moving groove; 404. Screw; 405. Moving motor; 406. Moving block; 407. Limiting rod; 408. First rotating rod; 409. Slide rod; 410. Sliding seat; 411. Rotary motor; 412. Second rotating rod; 413. Gear; 414. Gear ring; 5. Installation mechanism; 501. Installation sleeve; 502. Placement groove; 503. Fixing hole; 504. Sleeve; 505. Slider; 506. Fixing rod; 507. Connecting rod; 508. Spring; 509. Limiting block; 510. Pull handle; 6. Lifting groove; 7. Electric push rod; 8. Fixed bracket; 9. Distance sensor; 10. Warning light. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example 1

[0024] Combination Figures 1-5 A chip epitaxial coating apparatus includes a support platform 1, a lifting platform 2, and a coating roller 3. The support platform 1 has a lifting groove 6, and the lifting platform 2 is slidably connected to the lifting groove 6. An electric push rod 7 is fixedly installed in the lifting groove 6, and the output rod of the electric push rod 7 is fixedly connected to the lifting platform 2. A fixed bracket 8 is fixedly installed on the support platform 1. A distance sensor 9 is fixedly installed at the bottom of the upper end of the fixed bracket 8, and an alarm light 10 connected to the distance sensor 9 is fixedly installed at the top of the fixed bracket 8. A coating mechanism 4 is installed on the support platform 1, and an installation mechanism 5 is provided between the coating mechanism 4 and the coating roller 3.

[0025] See Figure 3 and Figure 4Furthermore, the coating mechanism 4 includes a first support frame 401 and a second support frame 402 symmetrically fixed on the support platform 1. Both the first support frame 401 and the second support frame 402 have a moving groove 403. A screw 404 is rotatably installed in the moving groove 403 of the first support frame 401. A moving motor 405 is fixedly installed at one end of the first support frame 401. The screw 404 rotatably passes through the moving groove 403 and is fixedly connected to the output shaft of the moving motor 405. A moving block 406 is threaded onto the screw 404. A limit rod 407 is fixedly installed in the moving groove 403 of the first support frame 401. The moving block 406 and... The limiting rod 407 is slidably connected. A slide rod 409 is fixedly installed in the moving groove 403 of the second support frame 402. A slide seat 410 is slidably connected to the slide rod 409. A rotary motor 411 is fixedly installed on the slide seat 410. A gear 413 is fixedly installed on the output shaft of the rotary motor 411. A first rotating rod 408 is rotatably installed on the moving block 406. A second rotating rod 412 is rotatably installed on the slide seat 410. A toothed ring 414 that meshes with the gear 413 is fixedly sleeved on the second rotating rod 412. Two mounting sleeves 501 are provided. The two mounting sleeves 501 are fixedly installed on the first rotating rod 408 and the second rotating rod 412 respectively.

[0026] Specifically, by starting the rotary motor 411 to rotate the coating roller 3, and simultaneously starting the moving motor 405 to rotate the screw 404, the moving block 406, which is threadedly connected to the screw 404, can drive the coating roller 3 to move. Under the guidance of the limiting rod 407 and the limiting of the sliding seat 410 and the sliding rod 409, the coating roller 3 moves and coats the chip. There is no need to manually push the coating roller 3, which reduces the amount of labor and effectively improves the processing efficiency of chip coating.

[0027] See Figure 4 and Figure 5 Furthermore, the installation mechanism 5 includes an installation sleeve 501, on which a placement groove 502 adapted to the roller shaft of the coating roller 3 is provided. A fixing hole 503 is provided on the roller shaft of the coating roller 3. Sleeves 504 are fixedly provided on both sides of the installation sleeve 501. A slider 505 is slidably provided inside the sleeve 504. A fixing rod 506 adapted to the fixing hole 503 is fixedly provided on one side of the slider 505. The end of the fixing rod 506 away from the slider 505 slides through the installation sleeve 501 and is inserted into the fixing hole 503. A connecting rod 507 is fixedly provided on the other side of the slider 505. A spring 508 is sleeved on the connecting rod 507 and fixedly provided between the slider 505 and the sleeve 504. The end of the connecting rod 507 away from the slider 505 slides through the sleeve 504 and is fixedly connected to a limit block 509. A pull handle 510 is fixedly provided on the limit block 509.

[0028] Specifically, by pulling the handle 510 outward, the connecting rod 507, through the slider 505, causes the fixing rod 506 to disengage from the fixing hole 503 on the coating roller 3 shaft. Then, the coating roller 3 shaft can be removed from the placement groove 502 of the mounting sleeve 501 to complete the quick disassembly of the coating roller 3. After maintaining or replacing the coating roller 3, pull the handle 510 again to retract the fixing rod 506 and compress the spring 508. Then, place the maintained or replaced coating roller 3 shaft into the placement groove 502 and align the fixing hole 503 with the fixing rod 506. Then, release the handle 510 so that the fixing rod 506 automatically inserts into the fixing hole 503 under the rebound of the spring 508 to lock and fix the roller shaft. This completes the quick installation of the coating roller 3. The operation is simple and convenient, without the need to disassemble the coating mechanism 4, which improves the disassembly and assembly efficiency of the coating roller 3 and enhances the practicality of the coating device.

[0029] In actual operation, the chip is placed on the lifting platform 2, and the height of the lifting platform 2 is adjusted by the electric push rod 7 in the lifting groove 6. This allows for adjustment according to the height required by different chips during coating, ensuring the coating effect. The distance sensor 9 is used to measure the distance from the highest point on the lifting platform 2 to the chip, so that the lifting height of the lifting platform 2 can be set according to this distance, making the lifting more precise. At the same time, a safe lifting height can be set according to the height of the coating roller 3 to avoid the chip being squeezed by the coating roller 3 due to accidental operation. When the lifting platform 2 exceeds the safe height, the warning light 10 lights up to remind the operator.

[0030] When coating the chip, the coating roller 3 is rotated by starting the rotary motor 411, and the screw 404 is rotated by starting the moving motor 405. This allows the moving block 406, which is threadedly connected to the screw 404, to drive the coating roller 3 to move. The coating roller 3 moves and coats the chip under the guidance of the limiting rod 407 and the limiting of the sliding seat 410 and the sliding rod 409.

[0031] When maintenance or replacement of the coating roller 3 is required, pull the handle 510 outward to cause the connecting rod 507 to drive the fixing rod 506 out of the fixing hole 503 on the roller shaft of the coating roller 3 via the slider 505 and retract into the sleeve 504. Then, remove the roller shaft of the coating roller 3 from the placement groove 502 of the mounting sleeve 501 to complete the quick disassembly of the coating roller 3. After maintenance or replacement of the coating roller 3, pull the handle 510 again to retract the fixing rod 506 and squeeze the spring 508. Then, place the roller shaft of the maintained or replaced coating roller 3 in the placement groove 502 and align the fixing hole 503 with the fixing rod 506. Then, release the handle 510. The fixing rod 506 can automatically insert into the fixing hole 503 under the rebound action of the spring 508, thereby locking and fixing the roller shaft, thus completing the quick installation of the coating roller 3.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A chip epitaxial coating apparatus, comprising a support stage (1), a lifting stage (2), and a coating roller (3), characterized in that: A coating mechanism (4) is provided on the support platform (1), and an installation mechanism (5) is provided between the coating mechanism (4) and the coating roller (3); The installation mechanism (5) includes an installation sleeve (501), on which a placement groove (502) adapted to the roller shaft of the coating roller (3) is provided. A fixing hole (503) is provided on the roller shaft of the coating roller (3). Sleeves (504) are fixedly provided on both sides of the installation sleeve (501). A slider (505) is slidably provided in the sleeve (504). A fixing rod (506) adapted to the fixing hole (503) is fixedly provided on one side of the slider (505). The end of the fixing rod (506) away from the slider (505) slides through the installation sleeve (501) and is inserted into the fixing hole (503). A connecting rod (507) is fixedly provided on the other side of the slider (505). A spring (508) is sleeved on the connecting rod (507) and fixedly provided between the slider (505) and the sleeve (504). The end of the connecting rod (507) away from the slider (505) slides through the sleeve (504) and is fixedly connected to a limit block (509). A handle (510) is fixedly provided on the limit block (509).

2. The chip epitaxial coating apparatus according to claim 1, characterized in that: The coating mechanism (4) includes a first support frame (401) and a second support frame (402) symmetrically fixed on the support platform (1), and both the first support frame (401) and the second support frame (402) are provided with a moving groove (403).

3. The chip epitaxial coating apparatus according to claim 2, characterized in that: A screw (404) is rotatably installed in the moving groove (403) of the first support frame (401). A moving motor (405) is fixedly installed at one end of the first support frame (401). The screw (404) rotatably passes through the moving groove (403) and is fixedly connected to the output shaft of the moving motor (405). A moving block (406) is threadedly connected to the screw (404). A limit rod (407) is fixedly installed in the moving groove (403) of the first support frame (401). The moving block (406) is slidably connected to the limit rod (407).

4. The chip epitaxial coating apparatus according to claim 3, characterized in that: A slide rod (409) is fixedly installed in the moving groove (403) of the second support frame (402). A sliding seat (410) is slidably connected to the slide rod (409). A rotary motor (411) is fixedly installed on the sliding seat (410). A gear (413) is fixedly installed on the output shaft of the rotary motor (411).

5. The chip epitaxial coating apparatus according to claim 4, characterized in that: The moving block (406) is rotatably provided with a first rotating rod (408), and the sliding seat (410) is rotatably provided with a second rotating rod (412). The second rotating rod (412) is fixedly sleeved with a toothed ring (414) that meshes with the gear (413). There are two mounting sleeves (501), and the two mounting sleeves (501) are respectively fixedly installed on the first rotating rod (408) and the second rotating rod (412).

6. The chip epitaxial coating apparatus according to claim 1, characterized in that: The support platform (1) is provided with a lifting groove (6), the lifting platform (2) is slidably connected to the lifting groove (6), and an electric push rod (7) is fixedly installed in the lifting groove (6). The output rod of the electric push rod (7) is fixedly connected to the lifting platform (2).

7. The chip epitaxial coating apparatus according to claim 6, characterized in that: A fixed bracket (8) is fixedly installed on the support platform (1). A distance measuring sensor (9) is fixedly installed at the bottom of the upper end of the fixed bracket (8). A warning light (10) connected to the distance measuring sensor (9) is fixedly installed on the top of the fixed bracket (8).

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