Combined filling panel for silane filling

Abstract

The utility model belongs to the technical field of silane filling, and relates to a combined filling panel for silane filling, which comprises a filling panel base. A silane bottle is arranged on one side of the outer part of the filling panel base; a control panel and a silane filling assembly are arranged on one side of the exterior of the filling panel base, and the silane filling assembly is located on one side of the exterior of the filling panel base; the silane filling assembly comprises an inert gas pumping mechanism and an anti-backfire mechanism, and the silane filling assembly and the inert gas pumping mechanism are used, so that after silane filling is completed, a filling pipeline needs to be detached and then connected with a gas pipeline, and then the filling pipeline can be cleaned; the steps of cleaning the filling pipeline are simplified, the cleaning efficiency is improved, meanwhile, the situation that the physical health of workers is affected by silane leakage in the process of disassembling and assembling the filling pipeline is reduced, meanwhile, the disassembling and assembling frequency of the end of the filling pipeline is reduced, and the service life of the filling pipeline is prolonged.

Description

Technical Field

[0001] This utility model belongs to the field of silane filling technology and relates to a combined filling panel for silane filling. Background Technology

[0002] Silane is a colorless, flammable, and toxic inorganic compound with the chemical formula SiH4. It has high self-ignition, strong reducing properties, and thermal instability, making it a dangerous chemical gas with wide applications in the semiconductor, photovoltaic, and chemical industries.

[0003] The following technical problems were found in the existing technology: When filling silane, due to the chemical properties of silane, it may explode when mixed with oxygen to a certain extent. When purging oxygen with protective gas, the pipeline needs to be disassembled and then reconnected to the protective gas pipeline for purging. The process is cumbersome, and during the disassembly process, silane may escape and affect the health of the workers. Utility Model Content

[0004] The technical problem this invention aims to solve is that, during the filling of silane, due to the chemical properties of silane, an explosion may occur when it is mixed with oxygen to a certain extent. When purging oxygen with protective gas, the pipeline needs to be disassembled and then reconnected to the protective gas pipeline for purging. This process is cumbersome, and during the disassembly process, silane may escape and affect the health of the workers.

[0005] The present invention relates to a combined filling panel for silane filling, comprising a filling panel base; a silane bottle is provided on one side of the outer side of the filling panel base; and a control panel is provided on one side of the outer side of the filling panel base.

[0006] A silane filling assembly is located on one side outside the filling panel base; the silane filling assembly includes an inert gas pumping mechanism and a backfire prevention mechanism; the control panel is installed on one side of the silane filling assembly, and the inert gas pumping mechanism and the backfire prevention mechanism work together to make the filling of the silane bottle safer.

[0007] The silane filling assembly includes a silane injection pipe; the silane injection pipe is disposed on the outer side of the filling panel base; the filling panel base; a gas transfer control module is fixedly connected to the outer side of the filling panel base; the control panel is installed on the outer side of the gas transfer control module; the end of the silane injection pipe is interconnected with the gas transfer control module; a filling pipe is fixedly connected to the top outer side of the gas transfer control module; a sealing gasket is fixedly connected to the end of the filling pipe away from the gas transfer control module; a threaded fixing cylinder is rotatably connected to the end of the filling pipe near the sealing gasket; the threaded fixing cylinder is threadedly connected to the silane bottle.

[0008] The inert gas pumping mechanism includes an inert gas pumping device; a gas pipeline is fixedly connected to the output end of the inert gas pumping device; a bevel gear rotating shaft A is rotatably connected to the middle of the gas pipeline; a rotating ring is fixedly connected to one end of the outer side of the bevel gear rotating shaft A; the rotating ring is rotatably connected to the outer side of the gas pipeline; a bevel gear rotating shaft B is meshed at the end of the bevel gear rotating shaft A away from the rotating ring; a three-way round valve is rotatably connected inside the filling pipeline; the three-way round valve is fixedly connected to the bevel gear rotating shaft B; a one-way venting valve module is provided on the side of the bevel gear rotating shaft B near the one-way venting valve module.

[0009] The backfire prevention mechanism includes a flame arrester housing; the flame arrester housing is installed in the middle of the filling pipeline; a flame-retardant plate A is fixedly connected to the inner side of the flame arrester housing; and a flame-retardant plate B is fixedly connected to the inner side of the flame arrester housing.

[0010] A fixing plate is fixedly connected to one side of the outer side of the filling panel base; a clamping claw is hinged to the outer side of the fixing plate; a limit groove is formed at the bottom outer side of the filling panel base.

[0011] The bottom of the gas transfer control module is fixedly connected to an exhaust gas pipe; the exhaust gas pipe is connected to the filling pipeline; a purification module is installed at one end of the exhaust gas pipe.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: By using the silane filling assembly and the inert gas pump mechanism, the filling pipeline does not need to be disassembled and then reconnected to the gas pipeline after the silane filling is completed, so as to achieve the cleaning of the filling pipeline. This simplifies the cleaning steps of the filling pipeline, increases the cleaning efficiency, and reduces the possibility of silane leakage during the disassembly and assembly of the filling pipeline, which could affect the health of the workers. At the same time, it reduces the frequency of disassembly and assembly at the end of the filling pipeline and increases the service life of the filling pipeline.

[0013] The control panel controls the use of the gas and transfer control module, seals the connection between the filling pipeline and the silane injection pipeline, and connects the filling pipeline to the exhaust gas pipe to purify the exhaust gas into the purification module, thereby reducing the environmental impact of the emitted exhaust gas. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1This is a structural schematic diagram of the filling panel base of this utility model.

[0016] Figure 2 This is a schematic diagram of the filling pipe of this utility model.

[0017] Figure 3 This is a schematic diagram of the inert gas pump pressure device of this utility model.

[0018] Figure 4 This is a schematic diagram of the structure of the bevel gear rotating shaft B of this utility model.

[0019] Figure 5 yes Figure 3 Enlarged view of point A.

[0020] In the diagram: 101, filling panel base; 102, silane bottle; 103, control panel; 201, silane injection pipe; 202, gas transfer control module; 203, filling pipe; 204, sealing gasket; 205, threaded fixing cylinder; 301, inert gas pump; 302, gas pipe; 303, bevel gear rotating shaft A; 304, rotating ring; 305, bevel gear rotating shaft B; 306, one-way vent valve module; 307, three-way round valve; 401, flame arrester housing; 402, flame retardant plate A; 403, flame retardant plate B; 501, fixing plate; 502, clamping claw; 503, limiting groove; 601, exhaust pipe; 602, purification module. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0022] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0023] It should be noted that, unless otherwise specified, the embodiments and features and technical solutions in the present invention can be combined with each other.

[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0025] Example 1

[0026] like Figures 1-5As shown, a combined filling panel for silane filling includes a filling panel base 101; a silane bottle 102 is provided on the outer side of the filling panel base 101; and a control panel 103 is provided on the outer side of the filling panel base 101.

[0027] A silane filling assembly is located on the outer side of the filling panel base 101. The silane filling assembly includes an inert gas pumping mechanism and a flashback prevention mechanism. A control panel 103 is installed on one side of the silane filling assembly. The inert gas pumping mechanism and the flashback prevention mechanism work together to enhance safety during filling of the silane bottle 102. The silane filling assembly includes a silane injection pipe 201, which is located on the outer side of the filling panel base 101. A gas transfer control module 202 is fixedly connected to the outer side of the filling panel base 101. The control panel 103 is installed on the gas transfer control module. On the outer side of 202; the end of the silane injection pipe 201 is connected to the gas transfer control module 202; a filling pipe 203 is fixedly connected to the top of the outer side of the gas transfer control module 202; a sealing gasket 204 is fixedly connected to the end of the filling pipe 203 away from the gas transfer control module 202; a threaded fixing cylinder 205 is rotatably connected to the end of the filling pipe 203 near the sealing gasket 204; the threaded fixing cylinder 205 is threadedly connected to the silane bottle 102; the inert gas pumping mechanism includes an inert gas pumping device 301; a gas pipe 302 is fixedly connected to the output end of the inert gas pumping device 301; a cone is rotatably connected to the middle of the gas pipe 302. A bevel gear rotating shaft A303; a rotating ring 304 is fixedly connected to one end of the outer side of the bevel gear rotating shaft A303; the rotating ring 304 is rotatably connected to the outer side of the gas pipeline 302; a bevel gear rotating shaft B305 is meshed at the end of the bevel gear rotating shaft A303 away from the rotating ring 304; a three-way round valve 307 is rotatably connected inside the filling pipeline 203; the three-way round valve 307 is fixedly connected to the bevel gear rotating shaft B305; a one-way vent valve module 306 is provided on the side of the bevel gear rotating shaft B305 near the one-way vent valve module 306; the backfire prevention mechanism includes a flame arrester housing 401; the flame arrester housing 401 is installed in the middle of the filling pipeline 203; the backfire prevention mechanism includes a flame arrester housing 401; the flame arrester housing 401 is installed in the middle of the filling pipeline 203; the backfire prevention mechanism includes a flame arrester housing 401; the flame arrester housing 401 is installed in the middle of the filling pipeline 203; the backfire prevention mechanism includes a flame arrester housing 401; the flame arrester housing 401 is rotatably connected to the outer side of the gas pipeline 202; the flame arrester housing 404 ... A flame-retardant plate A402 is fixedly connected to the inner side of the flame arrester housing 401; a flame-retardant plate B403 is also fixedly connected to the inner side of the flame arrester housing 401. Because silane is a flammable gas, if a safety accident occurs during filling and silane ignites, as the flame moves along the filling pipe 203 to the silane injection pipe 201, the flame-retardant plates A402 and B403 block the flame when it passes through the flame arrester housing 401. The specific principle is that through the slit quenching effect, the flame-retardant plates A402 and B403 divide the flame surface into countless small flames, greatly increasing the contact area with the metal wall. The metal material quickly absorbs heat, causing the flame temperature to drop below the ignition point, thereby reducing the risk of backfire.

[0028] During operation, the silane bottle 102 is first placed on the outside of the filling panel base 101 near the filling pipe 203. Then, the filling pipe 203 is pressed to allow it to enter the silane bottle 102. Because the diameter of the sealing gasket 204 on the outside of the filling pipe 203 is slightly larger than the bottle opening of the silane bottle 102, and the sealing gasket 204 is made of flexible rubber, a good sealing effect is achieved when the sealing gasket 204 and the filling pipe 203 are forcibly pressed against the bottle opening of the silane bottle 102. Then, the threaded fixing sleeve 205 is rotated, causing it to continuously rotate at the bottom of the filling pipe 203, and then the silane bottle 102... The filling pipe 203 is securely fixed to the end of the silane bottle 102 through the coordinated actions of the control panel 103. The gas pipe 302 is then controlled via the control panel 103 to allow silane to enter the filling pipe 203 through the silane injection pipe 201, thus completing the filling process. After filling, when inert gas purging is required, the rotating ring 304 inside the gas pipe 302 drives the bevel gear rotating shaft A303 to rotate. This, in turn, causes the bevel gear rotating shaft B305 to rotate, resulting in the three-way valve 307 rotating inside the filling pipe 203. At this point, the gas pipe 302... The inner wall of component 2 seals the through-hole inside the gas pipe 302, aligning the inert gas outlet with the inside of the filling pipe 203. Then, the inert gas pumping device 301 is activated, pumping the inert gas. The inert gas flows along the gas pipe 302 through the one-way venting valve module 306, cleaning the inside of the filling pipe 203. This reduces the possibility of silane residue remaining inside the pipe after silane filling. Simultaneously, by simply adjusting the orientation of the three-way valve 307 and using the one-way venting valve module 306, inert gas can flow from the gas pipe 302 to the filling pipe 203 while preventing silane backflow. The flow of gas affects the inert gas pumping device 301. By using the silane filling assembly and the inert gas pumping mechanism, after the silane filling is completed, the filling pipe 203 needs to be disassembled and then reconnected to the gas pipe 302 to clean the filling pipe 203. This simplifies the cleaning steps of the filling pipe 203, increases the cleaning efficiency, and reduces the risk of silane leakage affecting the health of workers during the disassembly and assembly of the filling pipe 203. It also reduces the frequency of disassembly and assembly at the end of the filling pipe 203 and increases the service life of the filling pipe 203.

[0029] Example 2

[0030] like Figures 1-2As shown, a fixing plate 501 is fixedly connected to one side of the outer side of the filling panel base 101; a clamping claw 502 is hinged to the outer side of the fixing plate 501; a limiting groove 503 is opened at the bottom of the outer side of the filling panel base 101; an exhaust pipe 601 is fixedly connected to the bottom of the gas transfer control module 202; the exhaust pipe 601 is connected to the filling pipe 203; and a purification module 602 is installed at one end of the exhaust pipe 601.

[0031] During operation, when the silane bottle 102 needs to be filled, the silane bottle 102 is pushed and locked inside the limiting groove 503. Then, the clamping claw 502 on one side of the fixing plate 501 clamps the silane bottle 102, making the silane bottle 102 more stable during filling. When the exhaust gas inside the filling pipe 203 is purged, the gas transfer control module 202 is started to work through the control panel 103, sealing the connection between the filling pipe 203 and the silane injection pipe 201. At the same time, the filling pipe 203 is connected to the exhaust gas pipe 601, and the exhaust gas is introduced into the purification module 602 for purification, reducing the impact of the emitted exhaust gas on the environment.

[0032] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the present utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the present utility model, thereby enabling those skilled in the art to better understand and utilize it. The present utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A combined fill panel for silane charging, characterized by: Including the filling panel base (101), the filling panel base (101) outside one side is equipped with silane bottle (102), the filling panel base (101) outside one side is equipped with control panel (103); The silane filling assembly is located on the outside of the filling panel base (101), the inert gas pump pressure mechanism and the anti-backfire mechanism are included in the silane filling assembly, the control panel (103) is installed on one side of the silane filling assembly, the inert gas pump pressure mechanism is used in cooperation with the anti-backfire mechanism, so that it is safer to fill the inside of the silane bottle (102).

2. A combined fill panel for silane charging according to claim 1, characterized in that: The silane filling assembly includes a silane injection pipeline (201), the silane injection pipeline (201) is arranged on the outside of the filling panel base (101), the filling panel base (101), the gas transfer control module (202) is fixedly connected to the outside of the filling panel base (101), the control panel (103) is installed on the outside of the gas transfer control module (202), the end of the silane injection pipeline (201) is connected with the gas transfer control module (202), the filling pipeline (203) is fixedly connected to the top of the outside of the gas transfer control module (202), the end of the filling pipeline (203) away from the gas transfer control module (202) is fixedly connected with a sealing washer (204), the end of the filling pipeline (203) close to the sealing washer (204) is rotatably connected with a threaded fixing cylinder (205), and the threaded fixing cylinder (205) is threadedly connected with the silane bottle (102).

3. A combined fill panel for silane charging according to claim 2, characterized in that: The inert gas pump pressure mechanism includes an inert gas pump pressure device (301), the output end of the inert gas pump pressure device (301) is fixedly connected with a gas pipeline (302), the middle part of the gas pipeline (302) is rotatably connected with a bevel gear rotating shaft A (303), one end of the outside of the bevel gear rotating shaft A (303) is fixedly connected with a rotating ring (304), the rotating ring (304) is rotatably connected to the outside of the gas pipeline (302), the end of the bevel gear rotating shaft A (303) away from the rotating ring (304) is engaged with a bevel gear rotating shaft B (305), a three-way circular valve (307) is rotatably connected in the filling pipeline (203), the three-way circular valve (307) is fixedly connected with the bevel gear rotating shaft B (305), and the bevel gear rotating shaft B (305) is provided with a one-way air valve module (306) on the side close to the one-way air valve module (306).

4. A combined fill panel for silane charging according to claim 3, characterized in that: The anti-backfire mechanism includes a firestopper housing (401), the firestopper housing (401) is installed in the middle of the filling pipeline (203), the inside of the firestopper housing (401) is fixedly connected with a fireproof plate A (402), and the inside of the firestopper housing (401) is fixedly connected with a fireproof plate B (403).

5. A combined fill panel for silane charging according to claim 1, characterized in that: The outside of the filling panel base (101) is fixedly connected with a fixed plate (501), the outside of the fixed plate (501) is hingedly connected with a clamping claw (502), and the bottom of the outside of the filling panel base (101) is provided with a limiting groove (503).

6. A combined fill panel for silane charging according to claim 2, characterized in that: The gas transfer control module (202) is fixed with a waste gas pipe (601) at the bottom; the waste gas pipe (601) is communicated with the filling pipeline (203); and the waste gas pipe (601) is provided with a purification module (602) at one end.

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